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2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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Aminosilane patterning on substrate surface by PDMS soft stamp for proteoglycan molecular immobilization PDMS软印在底物表面的氨基硅烷图案化用于蛋白聚糖分子固定化
Jinseo Hong, H. Sugo, T. Mineta, I. Kakizaki
This paper presents amino-terminated micro pattern transferring onto a mica substrate using polydimethylsiloxane (PDMS) soft stamp and proteoglycan (PG) molecular immobilization. PDMS bump-arrays with ultra-smooth surface were fabricated utilizing anisotropic etched silicon substrate as a mold. Coating and removal of releasing-agents were investigated to improve detachability of PDMS stamp from silicon substrate. Residual releasing-agents on the surface of the PDMS stamp were completely removed by repeated stamping on dummy mica substrates. After the PDMS stamp was immersed into aminopropyltriethoxysilane (APTES) solution, followed by drying with nitrogen gas blowing, APTES molecules on the PDMS stamp were transferred onto mica substrate. After PG solution was deposited onto the APTES transferred mica substrate, the PG molecules were immobilized both inside and outside the APTES transferred pattern. PG molecules with widely spread glycosaminoglycan (GAG) molecules were successfully immobilized inside the APTES pattern due to amino-termination effect whereas PG molecules with no GAG spreading were also adsorbed outside the pattern.
本文采用聚二甲基硅氧烷(PDMS)软印和蛋白聚糖(PG)分子固定化技术将氨基端微图案转移到云母衬底上。以各向异性蚀刻硅衬底为模具,制备了具有超光滑表面的PDMS凹凸阵列。研究了脱模剂的涂覆和去除,以提高PDMS印章与硅衬底的可脱性。通过在假云母衬底上重复冲压,完全去除PDMS印件表面残留的脱模剂。将PDMS图章浸入氨丙基三乙氧基硅烷(APTES)溶液中,然后用氮气吹干,将PDMS图章上的APTES分子转移到云母衬底上。将PG溶液沉积在APTES转移的云母基质上,将PG分子固定在APTES转移图案的内外。由于氨基终止效应,具有广泛分布的糖胺聚糖(GAG)分子的PG分子被成功地固定在APTES模式内,而没有GAG分布的PG分子也被吸附在模式外。
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引用次数: 0
Modeling of zero TCF and maximum bandwidth orientation for Lithium Tantalate RF MEMS resonators 钽酸锂射频MEMS谐振器的零TCF和最大带宽方向建模
Gayathri Pillai, W. Tan, Cheng-Chi Chen, Sheng-Shian Li
This work presents an elaborate analytical analysis and finite element geometry modeling to investigate the Temperature Coefficient of Frequency (TCF) and resonator bandwidth (BW) for different orientations and modes of operation in Lithium Tantalate (LT) MEMS resonators. Optimum cut algorithm is used to find the ideal wafer orientation and the proposed algorithm is cross-verified using Finite Element Method. Length extension mode resonators operating in the fundamental mode transcend the performance of contour mode resonators. LT resonators with a wafer orientation of (90°, 41°, 60°) operating in the fundamental length extension mode yield close to zero TCF and when oriented along (90°, 44°, 60°) it provides a maximum BW of 2.67%. Best values of both BW and TCF can be achieved simultaneously in a very close range of wafer orientation.
这项工作提出了一个详细的分析分析和有限元几何建模,以研究钽酸锂(LT) MEMS谐振器中不同方向和工作模式下的频率温度系数(TCF)和谐振器带宽(BW)。采用最优切割算法寻找理想的晶圆方向,并用有限元法对该算法进行了交叉验证。工作在基模下的长度扩展模谐振器超越了轮廓模谐振器的性能。当晶圆方向为(90°,41°,60°)时,在基长扩展模式下工作的低电压谐振器的TCF接近于零,当晶圆方向为(90°,44°,60°)时,其最大BW为2.67%。在非常接近晶圆方向的范围内,可以同时获得最佳的BW和TCF值。
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引用次数: 3
Carbon nanotubes based lubricating oils for engines 发动机用碳纳米管润滑油
Nguyen Manh Hong, B. Thang, P. N. Hong, N. T. Hong, P. H. Khoi, P. N. Minh
Carbon nanotubes (CNTs) are well-known nanomaterials with many excellent properties such as high hardness, high strength, and excellent thermal conductivity. Owing to their very high thermal conductivity (2000 W/m.K compared to thermal conductivity of Ag 419 W/m.K), CNTs become ones of the most suitable nano additives for fabricating the lubricating oils in order to increase the thermal conductivity of lubricating oils, to enhance the efficiency of heat dissipation for the engine, and to improve the performance efficiency of engine. In this work, we present the obtained results on application of the CNTs in lubricating oils for some engines. The results showed that with the addition of CNTs, the thermal conductivity of lubricating oils increase about 15%, this helps improve the efficiency of heat dissipation for the engine. Experimental results show that when using the lubricating oils containing carbon nanotubes, the temperature of engine dropped about 10°C, fuel saving was upto 15% and longevity of lubricating oil increased upto 20,000 km.
碳纳米管(Carbon nanotubes, CNTs)是一种众所周知的纳米材料,具有高硬度、高强度和优异的导热性。由于其非常高的导热系数(2000 W/m)。(与导热系数Ag 419 W/m.K相比),CNTs可以增加润滑油的导热系数,提高发动机的散热效率,提高发动机的性能效率,是最适合用于制造润滑油的纳米添加剂之一。在这项工作中,我们介绍了碳纳米管在某些发动机润滑油中的应用所获得的结果。结果表明,添加CNTs后,润滑油的导热系数提高了约15%,有助于提高发动机的散热效率。实验结果表明,使用含碳纳米管的润滑油时,发动机温度下降约10℃,节油达15%,润滑油寿命提高至2万公里。
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引用次数: 0
An integrated array-based emulsion droplet microfluidic device for digital loop-mediated isothermal amplification (LAMP) analysis 用于数字环介导等温扩增(LAMP)分析的集成阵列乳状液滴微流控装置
K. Luo, Yu-Dong Ma, Wen-Hsin Chang, Gwo-Bin Lee
Loop-mediated isothermal amplification (LAMP) is a nucleic acid amplification technique which amplifies DNA with high specificity, efficiency and rapidity under isothermal conditions. In this study, a microfluidic droplet-array chip is presented to implement array-based digital LAMP analysis. The proposed microfluidic system can perform the basic operation of droplets including droplet formation, droplet immobilization, LAMP and detection. This is the first time that an emulsion-droplet microfluidic device was used for array-based digital LAMP analysis. When compared to micro-well digital PCR assays, this droplet array-based digital LAMP assay eliminates the constraint on the size of the digitized target, which was determined by the dimension of the micro-wells. Moreover, the employment of hydrodynamic trapping allows for one-droplet-to-one-trap operation. This microfluidic chip may become a promising device for digital LAMP based diagnosis.
环介导等温扩增(LAMP)是一种在等温条件下对DNA进行特异性、高效化和快速扩增的核酸扩增技术。在本研究中,提出了一种微流控液滴阵列芯片来实现基于阵列的数字LAMP分析。所提出的微流体系统可以完成液滴的基本操作,包括液滴形成、液滴固定、LAMP和检测。这是首次将乳剂液滴微流控装置用于基于阵列的数字LAMP分析。与微孔数字PCR分析相比,这种基于液滴阵列的数字LAMP分析消除了由微孔尺寸决定的数字化目标尺寸的限制。此外,采用水动力捕集可以实现一个液滴对一个捕集器的操作。该微流控芯片有望成为基于数字LAMP的诊断设备。
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引用次数: 2
Fabrication and characterization of fine pitch TSV integration with self-aligned backside insulation layer opening 具有自对准后绝缘层开口的小间距TSV集成电路的制造与表征
Y. Guan, Qinghua Zeng, J. Chen, Shengli Ma, Yufeng Jin
Through silicon via (TSV) technology is moving in the direction of miniaturization and multi-functional development, and is considered to be the main way beyond Moore's Law. This paper presents a fine-pitch TSV manufacturing method with self-aligned backside insulation layer opening for three-dimensional (3D) integration. It is characterized by the use of chemical-mechanical polished (CMP) process and deep reactive ion etching (DRIE) process instead of the traditional lithographic process. Through this method, we can guarantee the integrity of the TSV sidewall insulation and eliminate the photolithography process. Low-frequency and high-frequency electrical performance test is conducted in order to characterize its electrical properties and insulation properties.
透硅通孔(TSV)技术正朝着小型化和多功能化方向发展,被认为是超越摩尔定律的主要途径。提出了一种具有自对准背面绝缘层开口的小间距TSV制造方法,用于三维集成。其特点是采用化学-机械抛光(CMP)工艺和深度反应离子蚀刻(DRIE)工艺代替传统的光刻工艺。通过这种方法,可以保证TSV侧壁绝缘的完整性,并消除光刻工艺。对其进行了低频和高频电性能试验,以表征其电性能和绝缘性能。
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引用次数: 1
Photoresponse measurement of carbon nanotube based infrared photodetector using digital microscope 利用数码显微镜测量碳纳米管红外探测器的光响应
Liangliang Chen, N. Xi, Bo Song, Yongliang Yang, Zhiyong Sun, Zhanxin Zhou, Yu Cheng, Yirui Wu
The conventional infrared sensors suffer from trade off between sensitivity and cost. The bolometer infrared camera is low resolution and slow speed while the quantum photodetectors are bulky and expensive. In this paper, the novel low dimensional materials carbon nanotube based Schottky barrier structure non cryogenic IR detector was proposed to detect IR irradiance. In order to characterize the photodetector, a testing bench using digital microscope and precise linear stage was used to measure detector performance. The experimental results show the photodetector has negative direction response and positive direction response on right and left side respectively and the maximum photocurrent output depends on the IR irradiance gradient. The proposed measurement method will be applicable for 1D/2D nanoscale material based photodetector characterization.
传统的红外传感器需要在灵敏度和成本之间进行权衡。红外测热仪分辨率低、速度慢,量子光电探测器体积大、价格昂贵。本文提出了一种新型的低维材料碳纳米管肖特基势垒结构非低温红外探测器,用于红外辐射检测。为了对光电探测器进行表征,利用数码显微镜和精密线性平台组成的测试平台对探测器的性能进行了测试。实验结果表明,光电探测器的左右两侧分别具有负方向响应和正方向响应,最大光电流输出取决于红外辐照度梯度。所提出的测量方法将适用于基于一维/二维纳米材料的光电探测器表征。
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引用次数: 0
Using a master and slave approach for GPGPU computing to achieve optimal scaling in a 3D real-time simulation 在三维实时仿真中,采用主从方式实现GPGPU计算的最优缩放
G. Gutmann, Daisuke Inoue, A. Kakugo, A. Konagaya
With the ever increasing computational demand of scientific research and data analysis, there has been a migration towards GPU computing. GPU are now the primary source of compute power in most top supercomputers. But in order to make use of the power programs must utilize more than a single GPU. Within this paper we will explain various approaches we have taken to utilize multiple GPU, and attempt to reach close to perfect scaling on a multi-step simulation. The result of this is having developed our simulation to be computed on a master and slave setup of GPU. Our simulation mentioned is being developed for the purpose of simulating microtubule dynamics on a gliding assay.
随着科学研究和数据分析的计算需求不断增加,GPU计算已经成为一种趋势。GPU现在是大多数顶级超级计算机计算能力的主要来源。但是为了充分利用这些能量,程序必须使用不止一个GPU。在本文中,我们将解释我们利用多个GPU所采取的各种方法,并尝试在多步模拟中达到接近完美的缩放。这样做的结果是开发了我们的模拟,可以在GPU的主从设置上进行计算。我们提到的模拟是为了在滑行实验中模拟微管动力学而开发的。
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引用次数: 2
CMUT arrays incorporating anodically bondable LTCC for small diameter ultrasonic endoscope 用于小直径超声内窥镜的含阳极可粘合LTCC的CMUT阵列
Fikret Yildiz, T. Matsunaga, Y. Haga
This paper reports fabrication of CMUT (Capacitive Micromachined Ultrasonic Transducer) based forward looking ultrasonic endoscope using custom designed LTCC (Low Temperature Co-fired Ceramic). Bottom electrodes and cavities are separately patterned on LTCC and SOI wafers, respectively. LTCC wafer is used as bottom substrate (prime wafer) for anodic bonding and ring array and linear array CMUTs transducers are fabricated. To drive transducer arrays electrical connections between transducer arrays and IC (Integrated Circuits) are achieved by LTCC side via accomplished hexagonal shape dicing of CMUT after fabrication. Design, fabrication process and first fabrication results are presented. The advantages of CMUT packaging using LTCC side via compared to previously announced CMUT probe packaging such as TSV (Through Silicon Via) scheme are discussed.
本文报道了一种基于前视超声内窥镜的电容式微机械超声换能器(CMUT)的制备方法。底部电极和空腔分别在LTCC和SOI晶圆上进行图案设计。采用LTCC晶圆作为阳极键合的底衬底(主晶圆),制备了环形阵列和线性阵列CMUTs换能器。为了驱动传感器阵列,传感器阵列和集成电路之间的电气连接是在LTCC侧通过完成CMUT的六角形切割来实现的。介绍了设计、制造过程和首次制造结果。讨论了使用LTCC侧通孔的CMUT封装与先前宣布的CMUT探针封装(如TSV (Through Silicon via)方案)相比的优点。
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引用次数: 5
Flexible organic light emitting diode ribbons using three liquid organic semiconductors 柔性有机发光二极管带采用三种液态有机半导体
A. Nobori, Naofumi Kobayashi, H. Kuwae, T. Kasahara, J. Oshima, C. Adachi, S. Shoji, J. Mizuno
We propose ribbon type flexible organic light emitting diodes (OLEDs), which can be integrated into textiles, using liquid organic semiconductors (LOSs). A linear flexible microchannel, which consists of a liquid light-emitting layer with LOS sandwiched between two indium tin oxide (ITO) electrodes, was fabricated with photolithography and heterogeneous bonding. LOSs were injected into the SU-8-based linear microchannels of 70 mm in length. Three different colors of photoluminescence (PL) emission were observed from flexible linear microchannels. Liner electroluminescence (EL) emission was successfully obtained in a bending state as well as straight state. We expect that the proposed microfluidic OLED ribbons will have high potential for future free-formable wearable devices such as electronic textiles.
我们提出了带状柔性有机发光二极管(oled),它可以集成到纺织品中,使用液体有机半导体(LOSs)。采用光刻和非均相键合的方法制备了一种线性柔性微通道,该微通道由两个氧化铟锡(ITO)电极之间夹有LOS的液态发光层组成。将LOSs注入到长度为70 mm的su -8基线性微通道中。在柔性线性微通道上观察到三种不同颜色的光致发光(PL)。在弯曲状态和直线状态下均成功地获得了线型电致发光(EL)。我们期望所提出的微流控OLED带在未来可自由成形的可穿戴设备(如电子纺织品)中具有很高的潜力。
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引用次数: 1
Self-powered liquid volume sensor aiming at lab-on-chip applications 面向芯片上实验室应用的自供电液体体积传感器
Hao Wang, Tao Wang, Chengkuo Lee
Technology for enabling drug delivery with precise control is strongly demanded by patients with diabetes or other chronic diseases. More intelligent functions such as drug loading and delivery in controllable manner without requiring electrical power will make low-cost drug delivery patches come true. One of the promising candidates is triboelectric technology which has been deployed as nanogenerators and self-powered glucose sensors recently. In this paper, the drug delivery is triggered by finger-pressing on a polymer based micropump. Considering that the finger-pressing should be an action of very low frequency, e.g., 1 to 2 Hz, triboelectric energy harvester (TEH) based on contact-separation mode between patterned biocompatible polymer layer and Aluminum (Al) film is integrated with microneedles on a flexible skin patch. Leveraging triboelectric materials and compatible fabrication technology, we successfully develop a self-powered flexible skin patch for transdermal insulin delivery with novel liquid volume sensor to monitor delivered drug volume.
糖尿病或其他慢性疾病患者迫切需要精确控制给药的技术。更多的智能功能,如不需要电力的可控方式的药物装载和递送,将使低成本的药物递送贴片成为现实。摩擦电技术是一个很有前途的候选技术,它最近被应用于纳米发电机和自供电葡萄糖传感器。在本文中,通过手指按压基于聚合物的微泵来触发药物输送。考虑到手指按压应该是一个非常低频率的动作,例如1到2hz,基于图案化生物相容性聚合物层和铝(Al)膜之间的接触分离模式的摩擦电能量收集器(TEH)与微针集成在柔性皮肤贴片上。利用摩擦电材料和兼容的制造技术,我们成功地开发了一种自供电的柔性皮肤贴片,用于经皮胰岛素输送,该贴片具有新颖的液体体积传感器,可以监测输送的药物体积。
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引用次数: 0
期刊
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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