Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758226
R. Yatskiv, J. Grym
We report on the hydrothermal growth of ZnO nanorods directly on GaN templates with a different density of dislocations. The influence of the quality of the GaN substrate on morphological and optical properties of ZnO nanorods is presented. The morphology of the ZnO nanorods was investigated by scanning electron microscopy while the optical properties were studied by low temperature photoluminescence spectroscopy. To control the position and size of the ZnO nanorods, the GaN templates were patterned by e-beam lithography.
{"title":"Well-aligned ZnO nanorods grown directly on GaN substrates for optoelectronic applications","authors":"R. Yatskiv, J. Grym","doi":"10.1109/NEMS.2016.7758226","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758226","url":null,"abstract":"We report on the hydrothermal growth of ZnO nanorods directly on GaN templates with a different density of dislocations. The influence of the quality of the GaN substrate on morphological and optical properties of ZnO nanorods is presented. The morphology of the ZnO nanorods was investigated by scanning electron microscopy while the optical properties were studied by low temperature photoluminescence spectroscopy. To control the position and size of the ZnO nanorods, the GaN templates were patterned by e-beam lithography.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114583347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758285
Weiguan Zhang, Wenshu Sui, Yi-Kuen Lee
Residual stress during the micro-fabrication process has been one of the main issues in many MEMS/NEMS sensors and actuators, especially acoustic sensing. We conduct theoretical, numerical and experimental study on the residual stress effect on the frequency responses of two types of polysilicon micro circular resonators: clamped and residual stress (RS) free design which can release the process-induced stress and is of easy fabrication. The measured natural frequency of the fabricated device is 39.8 kHz, in good agreement with both theoretical and FEM simulation results. We also determined the natural frequencies of these two designs as a function of residual stress. Under the same experimental RS condition of 50 MPa, the normalized changes of natural frequencies of these two designs are 159.7% versus 0.8%, respectively.
{"title":"Theoretical, numerical and experimental study of residual stress effect on two microresonators for acoustic sensing","authors":"Weiguan Zhang, Wenshu Sui, Yi-Kuen Lee","doi":"10.1109/NEMS.2016.7758285","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758285","url":null,"abstract":"Residual stress during the micro-fabrication process has been one of the main issues in many MEMS/NEMS sensors and actuators, especially acoustic sensing. We conduct theoretical, numerical and experimental study on the residual stress effect on the frequency responses of two types of polysilicon micro circular resonators: clamped and residual stress (RS) free design which can release the process-induced stress and is of easy fabrication. The measured natural frequency of the fabricated device is 39.8 kHz, in good agreement with both theoretical and FEM simulation results. We also determined the natural frequencies of these two designs as a function of residual stress. Under the same experimental RS condition of 50 MPa, the normalized changes of natural frequencies of these two designs are 159.7% versus 0.8%, respectively.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129715827","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758312
T. Nishino, Kazuki Baba, Yuri Nakai, H. Tanigawa, Kenichiro Suzuki
Two kinds of new silicon actuators, cantilever and twisted-beam, based on pn diode actuation principle are presented. The space gap that is absolutely needed in conventional electrostatic MEMS actuators is replaced by a depletion layer in reversely-biased pn diode. The strong electric field generated in the depletion layer forces a silicon microstructure to vibrate. The microstructure causes a large deflection at resonance. This actuator eliminates a narrow gap between driving electrodes. Consequently, the silicon actuators maintain to be of high reliability for a long period.
{"title":"Silicon MEMS actuator with no space gap between driving electrodes","authors":"T. Nishino, Kazuki Baba, Yuri Nakai, H. Tanigawa, Kenichiro Suzuki","doi":"10.1109/NEMS.2016.7758312","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758312","url":null,"abstract":"Two kinds of new silicon actuators, cantilever and twisted-beam, based on pn diode actuation principle are presented. The space gap that is absolutely needed in conventional electrostatic MEMS actuators is replaced by a depletion layer in reversely-biased pn diode. The strong electric field generated in the depletion layer forces a silicon microstructure to vibrate. The microstructure causes a large deflection at resonance. This actuator eliminates a narrow gap between driving electrodes. Consequently, the silicon actuators maintain to be of high reliability for a long period.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"147 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131508098","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758243
C. Shao, T. Nakayama, Y. Hata, T. Bartley, Y. Nonomura, Shuji Tanaka, M. Muroyama
In recent years, there has been an increasing interest in robots' tactile sense, which enables safer, more reliable and accurate human-robot communication for the future society. So far, we have developed a capacitive type tactile sensor network system for implementing a large number of sensors with MEMS-CMOS integration technologies [1-3, 9]. Considering practical use for the robot, multiple kind sensors in addition to numerous sensor distributions are necessary in terms of accurate object recognition and wide coverage of sensor requirements such as high-sensitivity, large dynamic range, high-reliability and low-cost. Thus, we proposed a sensor platform with dedicated CMOS-LSIs [6], which can utilize three types of sensors: on-chip temperature, off-chip capacitive and resistive tactile sensors. The CMOS-LSI is well designed for integration with MEMS. This paper describes the first implementation results of the multiple kind sensors with the CMOS-LSIs. We successfully constructed the multi sensor system, which has the temperature sensor, capacitive and resistive type force sensors.
{"title":"A multiple sensor platform with dedicated CMOS-LSIs for robot applications","authors":"C. Shao, T. Nakayama, Y. Hata, T. Bartley, Y. Nonomura, Shuji Tanaka, M. Muroyama","doi":"10.1109/NEMS.2016.7758243","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758243","url":null,"abstract":"In recent years, there has been an increasing interest in robots' tactile sense, which enables safer, more reliable and accurate human-robot communication for the future society. So far, we have developed a capacitive type tactile sensor network system for implementing a large number of sensors with MEMS-CMOS integration technologies [1-3, 9]. Considering practical use for the robot, multiple kind sensors in addition to numerous sensor distributions are necessary in terms of accurate object recognition and wide coverage of sensor requirements such as high-sensitivity, large dynamic range, high-reliability and low-cost. Thus, we proposed a sensor platform with dedicated CMOS-LSIs [6], which can utilize three types of sensors: on-chip temperature, off-chip capacitive and resistive tactile sensors. The CMOS-LSI is well designed for integration with MEMS. This paper describes the first implementation results of the multiple kind sensors with the CMOS-LSIs. We successfully constructed the multi sensor system, which has the temperature sensor, capacitive and resistive type force sensors.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"238 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121629855","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758258
Hsiao-Ting Hsueh, Po-Han Chen, Chih-Ting Lin
Nanostructure has been envisioned as a novel factor to enhance biomolecular sensing characteristics. In this work, we propose a novel biosensor by using a nano gap formed between two electrodes for biomolecular detections. The nano-gap electrode increases sensitivity of near-surface electrochemical conductances. To examine the proposed sensing characteristics of the nano-gap electrode, different conductive linkers (CB2C and PABA were immobilized to form a conductive layer on the nano-gap surface between the electrodes. The conductance increment of CB2C and PABA linker was about 56% and 396% respectively. This conductance improvement provides nano-gap electrodes ability for cTnT detection, also, the dynamic detection range of CB2C and PABA is from 1ng/ml to 100ng/ml and from 10pg/ml to 100ng/ml respectively. The results also proved that the thickness of conductive layer is a critical factor in conductance and detection limit.
{"title":"A nano-gap biosensor using nano-patterned conductive molecule for cTnT detection","authors":"Hsiao-Ting Hsueh, Po-Han Chen, Chih-Ting Lin","doi":"10.1109/NEMS.2016.7758258","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758258","url":null,"abstract":"Nanostructure has been envisioned as a novel factor to enhance biomolecular sensing characteristics. In this work, we propose a novel biosensor by using a nano gap formed between two electrodes for biomolecular detections. The nano-gap electrode increases sensitivity of near-surface electrochemical conductances. To examine the proposed sensing characteristics of the nano-gap electrode, different conductive linkers (CB2C and PABA were immobilized to form a conductive layer on the nano-gap surface between the electrodes. The conductance increment of CB2C and PABA linker was about 56% and 396% respectively. This conductance improvement provides nano-gap electrodes ability for cTnT detection, also, the dynamic detection range of CB2C and PABA is from 1ng/ml to 100ng/ml and from 10pg/ml to 100ng/ml respectively. The results also proved that the thickness of conductive layer is a critical factor in conductance and detection limit.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122049606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758266
D. Castro, D. Conchouso, A. Arevalo, I. Foulds
This work reports on a quantitative study of the incubation of a microbead-based agglutination assay inside a microfluidic system. In this system, a droplet (1.25μL) consisting of a mixture of functionalized microbeads and analyte is flowed through a 0.51mm internal diameter silicone tube. Hydrodynamic forces alone produce a very efficient mixing of the beads within the droplet. We tested the agglutination at different speeds and show a robust response at the higher range of speeds (150 - 200μL/min), while also reaching a completion in the agglutination process. At these velocities, a length of 180cm is shown to be sufficient to confidently measure the agglutination assay, which takes between 2.5 - 3 minutes. This high throughput quantification method has the potential of accelerating the measurements of various types of biomarkers, which can greatly benefit the fields of biology and medicine.
{"title":"A study of the incubation of microbead agglutination assays in a microfluidic system","authors":"D. Castro, D. Conchouso, A. Arevalo, I. Foulds","doi":"10.1109/NEMS.2016.7758266","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758266","url":null,"abstract":"This work reports on a quantitative study of the incubation of a microbead-based agglutination assay inside a microfluidic system. In this system, a droplet (1.25μL) consisting of a mixture of functionalized microbeads and analyte is flowed through a 0.51mm internal diameter silicone tube. Hydrodynamic forces alone produce a very efficient mixing of the beads within the droplet. We tested the agglutination at different speeds and show a robust response at the higher range of speeds (150 - 200μL/min), while also reaching a completion in the agglutination process. At these velocities, a length of 180cm is shown to be sufficient to confidently measure the agglutination assay, which takes between 2.5 - 3 minutes. This high throughput quantification method has the potential of accelerating the measurements of various types of biomarkers, which can greatly benefit the fields of biology and medicine.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"34 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125719133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758320
Nan Wang, M. Kitajima, Kalaivani Mani, E. Kanhere, A. Whittle, M. Triantafyllou, J. Miao
This paper presents a miniaturized MEMS (microelectromechanical systems)-based electrochemical aptasensor, which utilizes aptamer as the recognition element for simple, sensitive and rapid detection of norovirus. The novelty of this work is integration of micro fabrication technology with aptamers to develop a miniaturized and portable electrochemical sensor for environmental pathogen monitoring. The binding capability between aptamers and on-chip sensing electrodes was investigated and the performance of the proposed MEMS electrochemical aptasensor was evaluated with respect to sensor response to different titers of murine norovirus, a model of human norovirus. This research forms initial basis for the development of an electrochemical MEMS-aptasensor platform and its application for virus detection.
{"title":"Miniaturized electrochemical sensor modified with aptamers for rapid norovirus detection","authors":"Nan Wang, M. Kitajima, Kalaivani Mani, E. Kanhere, A. Whittle, M. Triantafyllou, J. Miao","doi":"10.1109/NEMS.2016.7758320","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758320","url":null,"abstract":"This paper presents a miniaturized MEMS (microelectromechanical systems)-based electrochemical aptasensor, which utilizes aptamer as the recognition element for simple, sensitive and rapid detection of norovirus. The novelty of this work is integration of micro fabrication technology with aptamers to develop a miniaturized and portable electrochemical sensor for environmental pathogen monitoring. The binding capability between aptamers and on-chip sensing electrodes was investigated and the performance of the proposed MEMS electrochemical aptasensor was evaluated with respect to sensor response to different titers of murine norovirus, a model of human norovirus. This research forms initial basis for the development of an electrochemical MEMS-aptasensor platform and its application for virus detection.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131617592","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758253
Tao Wang, Takeshi Kobayashi, Bin Yang, Hao Wang, Chengkuo Lee
Piezoelectric micromachined ultrasonic transducer (pMUT) gains increasing interests from researchers. It overcomes the inherent shortcomings of conventional bulk ultrasonic transducers such as acoustic impedance mismatching. In addition, pMUT does not require the extremely large input voltage as capacitive micromachined ultrasonic transducer (cMUT), which is potential to be integrated into portable electronics. The lead zirconate titanate (PZT) based pMUT has the best performance. Leveraging on our newly developed pulse poling process, the morphotropic phase boundary composition PZT (MPB-PZT) thin film is of high piezoelectric constant (d31=105pm/V) and low dielectric loss (~0.06). Benefited from such high performance PZT thin film and optimized design, the fabricated pMUT (500×300μm) achieves a displacement sensitivity of 807nm/V at its resonant frequency (482kHz) without DC offset. Compared to previously reported PZT pMUTs, even the dimension is much smaller; the sensitivity is still superior to them. The in-air transmitting performance is evaluated as well. A single pMUT element is able to generate 63.7dB sound pressure level (SPL) at 10 mm in air with only 2V input. The low input voltage not only provides low power consumption, but also prevents the unwanted PZT repolarization. The proposed highly sensitive pMUT shows its promise for integration with portable electronics.
{"title":"Highly sensitive piezoelectric micromachined ultrasonic transducer (pMUT) operated in air","authors":"Tao Wang, Takeshi Kobayashi, Bin Yang, Hao Wang, Chengkuo Lee","doi":"10.1109/NEMS.2016.7758253","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758253","url":null,"abstract":"Piezoelectric micromachined ultrasonic transducer (pMUT) gains increasing interests from researchers. It overcomes the inherent shortcomings of conventional bulk ultrasonic transducers such as acoustic impedance mismatching. In addition, pMUT does not require the extremely large input voltage as capacitive micromachined ultrasonic transducer (cMUT), which is potential to be integrated into portable electronics. The lead zirconate titanate (PZT) based pMUT has the best performance. Leveraging on our newly developed pulse poling process, the morphotropic phase boundary composition PZT (MPB-PZT) thin film is of high piezoelectric constant (d31=105pm/V) and low dielectric loss (~0.06). Benefited from such high performance PZT thin film and optimized design, the fabricated pMUT (500×300μm) achieves a displacement sensitivity of 807nm/V at its resonant frequency (482kHz) without DC offset. Compared to previously reported PZT pMUTs, even the dimension is much smaller; the sensitivity is still superior to them. The in-air transmitting performance is evaluated as well. A single pMUT element is able to generate 63.7dB sound pressure level (SPL) at 10 mm in air with only 2V input. The low input voltage not only provides low power consumption, but also prevents the unwanted PZT repolarization. The proposed highly sensitive pMUT shows its promise for integration with portable electronics.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133364038","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758287
Xinyi Li, J. Bao, Feihong Bao
A novel kind of RF MEMS lateral extensional thin-film piezoelectric-on-silicon(TPoS) resonator with narrow tethers is proposed. The conventional three-layers supporting beams could be simplified to single material by utilizing different kinds of doping on the bulk structural silicon layer. Within the scope of the fabrication process allowed, the width of tethers could be decreased from 10μm to 2μm, which would greatly reduce the dissipation of the energy from anchors. The finite element analysis simulation results show that the quality factor of the resonator is raised from 13800 to 207300. One feasible way to fabricate this novel resonator is demonstrated. To overcome the disadvantage of power capacity limited by the P-N junction, one associative operating circuit is also introduced.
{"title":"A design of TPoS resonator with narrow tether","authors":"Xinyi Li, J. Bao, Feihong Bao","doi":"10.1109/NEMS.2016.7758287","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758287","url":null,"abstract":"A novel kind of RF MEMS lateral extensional thin-film piezoelectric-on-silicon(TPoS) resonator with narrow tethers is proposed. The conventional three-layers supporting beams could be simplified to single material by utilizing different kinds of doping on the bulk structural silicon layer. Within the scope of the fabrication process allowed, the width of tethers could be decreased from 10μm to 2μm, which would greatly reduce the dissipation of the energy from anchors. The finite element analysis simulation results show that the quality factor of the resonator is raised from 13800 to 207300. One feasible way to fabricate this novel resonator is demonstrated. To overcome the disadvantage of power capacity limited by the P-N junction, one associative operating circuit is also introduced.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122366516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758246
N. Toan, S. Sangu, T. Ono
This work presents the glass reflow process for microsystems. In this process, glass compounded silicon structures are achieved with the help of vacuum cavities under a high temperature. Three applications employing the glass reflow process, through-wafer interconnects, thermal isolation, and optical window, have been proposed and investigated.
{"title":"Glass reflow process and its applications","authors":"N. Toan, S. Sangu, T. Ono","doi":"10.1109/NEMS.2016.7758246","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758246","url":null,"abstract":"This work presents the glass reflow process for microsystems. In this process, glass compounded silicon structures are achieved with the help of vacuum cavities under a high temperature. Three applications employing the glass reflow process, through-wafer interconnects, thermal isolation, and optical window, have been proposed and investigated.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115151721","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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