首页 > 最新文献

2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

英文 中文
Micro-hyperboloid lensed optical fibers for laser chip coupling 用于激光芯片耦合的微双曲面透镜光纤
Szu-Chin Lei, Wen-Hsuan Hsieh, W. Cheng, Y. Tsai, Che-Hsin Lin
This study develops a novel approach for producing hyperboloid microlens structure directly on a single-mode optical fiber for high performance diode laser coupling. The hyperboloid shape lensed tip is for matching with the rectangular output of the semiconductor laser diode. The hyperboloid lensed fiber is produced a three-step process including a precision mechanical grinding, a spin-on-glass (SOG) coating and an electrostatic pulling process. A flat-end single mode fiber with the core diameter of 6.6 μm is aligned, fixed and grinded into trapezoid shape. Trace amount of spin-on-glass is applied on the grinded tip and then an electrostatic pulling is used to tune the radius of curvature of around 4.5 μm for the grinded tip. A high coupling efficiency around 80% is obtained while using the produced hyperboloid fibers, which is about double compared to the coupling efficiency of the flat end fiber. The measured coupling stability for 5 individual hyperboloid fibers is 0.116±0.044%, indicating the good coupling stability for the produced hyperboloid microlensed fibers. The developed hyperboloid microlensed fibers provides a solution for direct light coupling between the single mold fiber and the semiconductor diode laser.
本研究提出了一种在单模光纤上直接制备双曲面微透镜结构的新方法,用于高性能二极管激光耦合。该双曲面透镜尖端用于与半导体激光二极管的矩形输出相匹配。双曲面透镜光纤的生产分为三个步骤,包括精密机械研磨、玻璃自旋涂层和静电拉拔工艺。将芯径为6.6 μm的平头单模光纤对准、固定、研磨成梯形。在磨尖上施加微量的玻璃自旋,然后利用静电拉力将磨尖的曲率半径调整为4.5 μm左右。所制备的双曲面光纤的耦合效率约为80%,是平端光纤耦合效率的两倍。实测的5条双曲面微透镜光纤的耦合稳定性为0.116±0.044%,表明所制备的双曲面微透镜光纤具有良好的耦合稳定性。所开发的双曲面微透镜光纤为单模光纤与半导体二极管激光器之间的直接光耦合提供了一种解决方案。
{"title":"Micro-hyperboloid lensed optical fibers for laser chip coupling","authors":"Szu-Chin Lei, Wen-Hsuan Hsieh, W. Cheng, Y. Tsai, Che-Hsin Lin","doi":"10.1109/NEMS.2016.7758223","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758223","url":null,"abstract":"This study develops a novel approach for producing hyperboloid microlens structure directly on a single-mode optical fiber for high performance diode laser coupling. The hyperboloid shape lensed tip is for matching with the rectangular output of the semiconductor laser diode. The hyperboloid lensed fiber is produced a three-step process including a precision mechanical grinding, a spin-on-glass (SOG) coating and an electrostatic pulling process. A flat-end single mode fiber with the core diameter of 6.6 μm is aligned, fixed and grinded into trapezoid shape. Trace amount of spin-on-glass is applied on the grinded tip and then an electrostatic pulling is used to tune the radius of curvature of around 4.5 μm for the grinded tip. A high coupling efficiency around 80% is obtained while using the produced hyperboloid fibers, which is about double compared to the coupling efficiency of the flat end fiber. The measured coupling stability for 5 individual hyperboloid fibers is 0.116±0.044%, indicating the good coupling stability for the produced hyperboloid microlensed fibers. The developed hyperboloid microlensed fibers provides a solution for direct light coupling between the single mold fiber and the semiconductor diode laser.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126768001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Flow injection system for real-time monitoring of lactic acid at the outer surface of the skin 流动注射系统,用于实时监测皮肤外表面的乳酸
H. Kudo, Keigo Enomoto, Yota Jingushi
A flow injection system using electrochemical biosensor for in-time monitoring of lactic acid at the skin's surface was fabricated and tested. The system consists of a microfluidic `skin-patch' sampling device and an electrochemical biosensor using a carbon graphite electrode. In order to enhance the stability of monitoring, lactic acid excreted at the skin's surface was directly solved into the career flow (phosphate buffered saline) in the `skin-patch' sampling device. Therefore our system measures the amount of lactic acid secretion instead of concentrations of lactic acid in the sweat. The electrodes of the biosensor was modified using osmium wired horseradish peroxidase (Os-HRP) redox polymer. The detection limit of the biosensor for lactic acid was 1.0 μM and the sensitivity was 3.125 μA / mM at 1.0 mM. Real-time monitoring of excreted lactic acid during the stationary bike workout was carried out. The flow injection system was attached on the upper arm of the volunteer. Owing to the `skin-patch' flow-channel, transudation of lactic acid was successfully monitored continuously in real-time with sufficient stability. As a result, the lactic acid level increased during the exercise and decreased to the initial level after the exercise. From this result, the system is expected to be used in sports science field such as scientific sports training.
研制了一种用于皮肤表面乳酸实时监测的电化学生物传感器流动注射系统。该系统由一个微流体“皮肤贴片”采样装置和一个使用碳石墨电极的电化学生物传感器组成。为了增强监测的稳定性,在“皮肤贴片”取样装置中,将皮肤表面排泄的乳酸直接溶解到职业流(磷酸盐缓冲盐水)中。因此,我们的系统测量的是乳酸分泌量,而不是汗液中乳酸的浓度。该生物传感器电极采用锇线辣根过氧化物酶(Os-HRP)氧化还原聚合物修饰。乳酸传感器的检出限为1.0 μM,灵敏度为3.125 μA / mM (1.0 mM),实时监测运动过程中乳酸的排泄量。流动注射系统安装在志愿者的上臂上。由于“皮肤贴片”流动通道,乳酸的转化成功地连续实时监测,具有足够的稳定性。因此,乳酸水平在运动过程中升高,运动后下降到初始水平。从实验结果来看,该系统有望应用于科学运动训练等体育科学领域。
{"title":"Flow injection system for real-time monitoring of lactic acid at the outer surface of the skin","authors":"H. Kudo, Keigo Enomoto, Yota Jingushi","doi":"10.1109/NEMS.2016.7758199","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758199","url":null,"abstract":"A flow injection system using electrochemical biosensor for in-time monitoring of lactic acid at the skin's surface was fabricated and tested. The system consists of a microfluidic `skin-patch' sampling device and an electrochemical biosensor using a carbon graphite electrode. In order to enhance the stability of monitoring, lactic acid excreted at the skin's surface was directly solved into the career flow (phosphate buffered saline) in the `skin-patch' sampling device. Therefore our system measures the amount of lactic acid secretion instead of concentrations of lactic acid in the sweat. The electrodes of the biosensor was modified using osmium wired horseradish peroxidase (Os-HRP) redox polymer. The detection limit of the biosensor for lactic acid was 1.0 μM and the sensitivity was 3.125 μA / mM at 1.0 mM. Real-time monitoring of excreted lactic acid during the stationary bike workout was carried out. The flow injection system was attached on the upper arm of the volunteer. Owing to the `skin-patch' flow-channel, transudation of lactic acid was successfully monitored continuously in real-time with sufficient stability. As a result, the lactic acid level increased during the exercise and decreased to the initial level after the exercise. From this result, the system is expected to be used in sports science field such as scientific sports training.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116656567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Reconfigurable liquid-metal antenna with integrated surface-tension actuation 集成表面张力驱动的可重构液态金属天线
R. C. Gough, Richard C. Ordonez, M. R. Moorefield, K. J. Cho, W. Shiroma, A. Ohta
A new design for a reconfigurable antenna using electrically actuated liquid-metal tuning elements is presented. Liquid-metal slugs vary the electrical length of a resonant slot aperture, changing the operational frequency of the antenna across a 36% tunable bandwidth. The fluidic channels are fabricated with polydimethylsiloxane and are fully sealed with integrated DC actuation pads, providing enhanced versatility over previous designs and enabling future miniaturization.
提出了一种采用电驱动液态金属调谐元件的可重构天线设计方案。液态金属段塞改变谐振槽孔径的电长度,在36%的可调带宽内改变天线的工作频率。流体通道由聚二甲基硅氧烷制成,并与集成的直流驱动垫完全密封,比以前的设计提供了更强的多功能性,并使未来的小型化成为可能。
{"title":"Reconfigurable liquid-metal antenna with integrated surface-tension actuation","authors":"R. C. Gough, Richard C. Ordonez, M. R. Moorefield, K. J. Cho, W. Shiroma, A. Ohta","doi":"10.1109/NEMS.2016.7758202","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758202","url":null,"abstract":"A new design for a reconfigurable antenna using electrically actuated liquid-metal tuning elements is presented. Liquid-metal slugs vary the electrical length of a resonant slot aperture, changing the operational frequency of the antenna across a 36% tunable bandwidth. The fluidic channels are fabricated with polydimethylsiloxane and are fully sealed with integrated DC actuation pads, providing enhanced versatility over previous designs and enabling future miniaturization.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123547207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Carbon nanostructures synthesized via self-assembly (LLIP) and its application in FET 自组装法合成碳纳米结构及其在场效应管中的应用
P. Karthik, Yuma Shimo, Zaw Lin, R. Venkata Krishna Rao, X. Gong, Mitsunobu Yoshida, M. Hada, T. Nishikawa, Y. Hayashi, S. Singh
Here in, we report carbon nanostructures (nanorods) synthesized via liquid-liquid interface precipitation method (LLIP) with its application in field effect transistor as gate terminal. The carbon nanorods were synthesized by supersaturating and shape shifting Bucky ball fullerene into nanorods. The nanoparticles synthesis process is fast, efficient and the reaction is carried out in 24hrs. The obtained nanorods were found to have semiconducting property which was confirmed by analyzing TEM, SEM and RAMAN, FET analysis by IV measurements. Hence the nanorods where fabricated as gate terminal in field effect transistor.
本文报道了采用液-液界面沉淀法(LLIP)合成碳纳米结构(纳米棒),并将其应用于场效应晶体管作为栅极端子。通过对巴基球富勒烯进行过饱和和变形制备碳纳米棒。纳米颗粒的合成过程快速、高效,反应在24h内完成。通过TEM、SEM和RAMAN、FET等分析证实了纳米棒具有半导体性质。因此,纳米棒在场效应晶体管中用作栅极端子。
{"title":"Carbon nanostructures synthesized via self-assembly (LLIP) and its application in FET","authors":"P. Karthik, Yuma Shimo, Zaw Lin, R. Venkata Krishna Rao, X. Gong, Mitsunobu Yoshida, M. Hada, T. Nishikawa, Y. Hayashi, S. Singh","doi":"10.1109/NEMS.2016.7758292","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758292","url":null,"abstract":"Here in, we report carbon nanostructures (nanorods) synthesized via liquid-liquid interface precipitation method (LLIP) with its application in field effect transistor as gate terminal. The carbon nanorods were synthesized by supersaturating and shape shifting Bucky ball fullerene into nanorods. The nanoparticles synthesis process is fast, efficient and the reaction is carried out in 24hrs. The obtained nanorods were found to have semiconducting property which was confirmed by analyzing TEM, SEM and RAMAN, FET analysis by IV measurements. Hence the nanorods where fabricated as gate terminal in field effect transistor.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124402266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Inverse eigenvalue analysis techniques for coupled M/NEMS resonators 耦合M/NEMS谐振器的反特征值分析技术
Guowei Tao, B. Choubey
M/NEMS resonators are widely used as mass sensors. Coupled resonators have emerged as a promising candidate for multifunction sensing while reducing the number of interconnections and pads. Coupling between these sensors enables control and characterization of the entire array by driving/reading from only one element. Inverse eigenvalue analysis utilizes the eigenvalues recorded from the response of one single resonator to inversely reconstruct the system matrix of all resonators. We compare two inverse eigenvalue analysis techniques to characterize coupled M/NEMS resonators. The first technique perturbs the spring constant of one element, while the second couples an additional resonator to the array. Both techniques showed high accuracy in extracting the actual characteristics of a simulated array of resonators. However, when studied for performance in noisy situation, the second technique shows better accuracy. Furthermore, the second technique is easier to implement by using a simple electrical resonator. Inverse eigenvalue analysis can be used to actuate single input single output multifunction sensors and monitor micro/nano fabrication variabilities.
M/NEMS谐振器被广泛用于质量传感器。耦合谐振器已成为多功能传感的一个有前途的候选者,同时减少了互连和焊盘的数量。这些传感器之间的耦合可以通过驱动/读取一个元件来控制和表征整个阵列。逆特征值分析利用单谐振器响应记录的特征值对所有谐振器的系统矩阵进行逆重构。我们比较了两种反特征值分析技术来表征耦合M/NEMS谐振器。第一种技术是扰动一个元件的弹簧常数,而第二种技术是在阵列上附加一个谐振器。这两种方法在提取模拟谐振器阵列的实际特性时都显示出较高的准确性。然而,当研究在噪声情况下的性能时,第二种方法显示出更好的准确性。此外,第二种技术通过使用简单的电谐振器更容易实现。反特征值分析可用于驱动单输入单输出多功能传感器和监测微纳制造变化。
{"title":"Inverse eigenvalue analysis techniques for coupled M/NEMS resonators","authors":"Guowei Tao, B. Choubey","doi":"10.1109/NEMS.2016.7758236","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758236","url":null,"abstract":"M/NEMS resonators are widely used as mass sensors. Coupled resonators have emerged as a promising candidate for multifunction sensing while reducing the number of interconnections and pads. Coupling between these sensors enables control and characterization of the entire array by driving/reading from only one element. Inverse eigenvalue analysis utilizes the eigenvalues recorded from the response of one single resonator to inversely reconstruct the system matrix of all resonators. We compare two inverse eigenvalue analysis techniques to characterize coupled M/NEMS resonators. The first technique perturbs the spring constant of one element, while the second couples an additional resonator to the array. Both techniques showed high accuracy in extracting the actual characteristics of a simulated array of resonators. However, when studied for performance in noisy situation, the second technique shows better accuracy. Furthermore, the second technique is easier to implement by using a simple electrical resonator. Inverse eigenvalue analysis can be used to actuate single input single output multifunction sensors and monitor micro/nano fabrication variabilities.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132367738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Transparent metal mesh based on roll to sheet UV imprinting using a PDMS soft mold 透明金属网基于卷到片UV压印,采用PDMS软模
C. Chuang, B. Chang, Jian-Ming Chen
Transparent conductive electrodes (TCE) possessing a combination of high optical transmission and good electrical conductivity find applications in numerous optoelectronic devices. In this study, we propose the low cost fabrication of a fine metal mesh structure on rigid (glass) and flexible (PET) substrates as a promising and feasible approach for fulfilling large size TCE requirements. We have utilized a roll-to-sheet assisted ultraviolet imprinting protocol to transfer micro trench structures using a flexible PDMS stamp. The conductive silver ink is filled into the micro trench structures by controlling the processing parameters which include pressure, scraping angle and speed. The metal mesh based glass and PET substrates show a transmission of about 90% while the electrical resistance is as low as 6 Ω/□. Thus, we believe that this method can be utilized as an economically viable alternative to ITO in TCE applications.
透明导电电极(TCE)具有高透光性和良好的导电性,在许多光电器件中得到了应用。在这项研究中,我们提出在刚性(玻璃)和柔性(PET)基板上低成本制造精细金属网结构,作为满足大尺寸TCE要求的一种有前途和可行的方法。我们利用了一种卷到片辅助紫外印迹协议来转移使用柔性PDMS印章的微沟槽结构。通过控制压力、刮削角度和速度等加工参数,将导电银墨水填充到微沟槽结构中。金属网基玻璃和PET基板显示约90%的透射率,而电阻低至6 Ω/□。因此,我们相信这种方法可以作为一种经济可行的替代ITO在TCE应用。
{"title":"Transparent metal mesh based on roll to sheet UV imprinting using a PDMS soft mold","authors":"C. Chuang, B. Chang, Jian-Ming Chen","doi":"10.1109/NEMS.2016.7758247","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758247","url":null,"abstract":"Transparent conductive electrodes (TCE) possessing a combination of high optical transmission and good electrical conductivity find applications in numerous optoelectronic devices. In this study, we propose the low cost fabrication of a fine metal mesh structure on rigid (glass) and flexible (PET) substrates as a promising and feasible approach for fulfilling large size TCE requirements. We have utilized a roll-to-sheet assisted ultraviolet imprinting protocol to transfer micro trench structures using a flexible PDMS stamp. The conductive silver ink is filled into the micro trench structures by controlling the processing parameters which include pressure, scraping angle and speed. The metal mesh based glass and PET substrates show a transmission of about 90% while the electrical resistance is as low as 6 Ω/□. Thus, we believe that this method can be utilized as an economically viable alternative to ITO in TCE applications.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123855874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of ZnO thin film sensor for MIS flexible force feedback device MIS柔性力反馈装置用ZnO薄膜传感器的研制
Shih-Chi Chan, D. T. Lin, Kai-Che Liu, Jing-Jim Ou, Ashwin Verma
A flexible MIS(Minimally Invasive Surgery) force feedback sensor is a prospective technology for the extensive application of a Piezoelectric device. The purpose of this study was to know the crystallization of ZnO film for MIS force feedback sensor by sol-gel technology and spin coating. The center of operating frequency of this MIS force feedback sensor was measured by a vector network analyzer. The results showed a significant deviation of frequency resulted from the performance of AlN Doped ZnO. Characteristics of the piezoelectric MIS force feedback sensor are thin, portable and flexible. The improvement of fabricated parameters may enhance the effect of sensing of this MIS force feedback sensor.
柔性微创手术力反馈传感器是一种具有广泛应用前景的压电器件技术。本研究的目的是了解溶胶-凝胶技术和旋涂法制备MIS力反馈传感器用ZnO薄膜的结晶过程。用矢量网络分析仪测量了MIS力反馈传感器的工作频率中心。结果表明,AlN掺杂ZnO的性能导致了频率的显著偏差。压电式MIS力反馈传感器具有轻薄、便携、灵活等特点。改进制作参数可以提高MIS力反馈传感器的传感效果。
{"title":"Fabrication of ZnO thin film sensor for MIS flexible force feedback device","authors":"Shih-Chi Chan, D. T. Lin, Kai-Che Liu, Jing-Jim Ou, Ashwin Verma","doi":"10.1109/NEMS.2016.7758305","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758305","url":null,"abstract":"A flexible MIS(Minimally Invasive Surgery) force feedback sensor is a prospective technology for the extensive application of a Piezoelectric device. The purpose of this study was to know the crystallization of ZnO film for MIS force feedback sensor by sol-gel technology and spin coating. The center of operating frequency of this MIS force feedback sensor was measured by a vector network analyzer. The results showed a significant deviation of frequency resulted from the performance of AlN Doped ZnO. Characteristics of the piezoelectric MIS force feedback sensor are thin, portable and flexible. The improvement of fabricated parameters may enhance the effect of sensing of this MIS force feedback sensor.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116921624","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Parametrically tunable coupling factor for the weakly coupled resonators 弱耦合谐振器的参数可调耦合系数
Hemin Zhang, W. Yuan, Jiming Zhong, Honglong Chang
In this paper, we presented the electrostatic tuning functions of the coupling factor for the weakly coupled resonators (WCRs) for the first time. A WCRs system with two mechanical coupled double-ended-tuning-fork (DETF) resonators is designed, fabricated and tested to verify the tuning theory. In consistency with the theoretical expectations, the experimental results show that the coupling factor is in a quadratic function with the bias voltage, and the coupling factor exponentially decays with the relevant geometry parameters. A large tunable range of the coupling factor with the minimum value of ~0.000917 and the maximum value of ~0.00196 is obtained by tuning the bias voltage applied on the WCRs. It lays the foundation for controlling the sensitivity and resolution of the WCRs based sensors.
本文首次给出了弱耦合谐振器耦合因子的静电调谐函数。设计、制作并测试了具有两个机械耦合双端音叉谐振器的WCRs系统,以验证调谐理论。实验结果表明,耦合系数与偏置电压呈二次函数关系,且耦合系数随相关几何参数呈指数衰减。通过调节施加在wcr上的偏置电压,可获得耦合系数的较大可调范围,最小值为~0.000917,最大值为~0.00196。为控制WCRs传感器的灵敏度和分辨率奠定了基础。
{"title":"Parametrically tunable coupling factor for the weakly coupled resonators","authors":"Hemin Zhang, W. Yuan, Jiming Zhong, Honglong Chang","doi":"10.1109/NEMS.2016.7758203","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758203","url":null,"abstract":"In this paper, we presented the electrostatic tuning functions of the coupling factor for the weakly coupled resonators (WCRs) for the first time. A WCRs system with two mechanical coupled double-ended-tuning-fork (DETF) resonators is designed, fabricated and tested to verify the tuning theory. In consistency with the theoretical expectations, the experimental results show that the coupling factor is in a quadratic function with the bias voltage, and the coupling factor exponentially decays with the relevant geometry parameters. A large tunable range of the coupling factor with the minimum value of ~0.000917 and the maximum value of ~0.00196 is obtained by tuning the bias voltage applied on the WCRs. It lays the foundation for controlling the sensitivity and resolution of the WCRs based sensors.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129288131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Out-of-plane cup shaped stainless steel microneedle array for drug delivery 用于给药的面外杯形不锈钢微针阵列
K. B. Vinayakumar, K. Rajanna, N. S. Dinesh, M. Nayak
To improve the transdermal delivery of drug, there are many techniques have been reported (Chemical, Iontophoresis, Sonophoresis and Microneedle). Among these techniques, the microneedle technology gained the more attention in recent years. Mainly, there are two types (Solid and Hollow) of microneedles have been reported for the successful drug delivery application. In this paper, we report on the fabrication of out-of-plane solid Stainless Steel (SS) microneedles and formation of microcup structure within them suitable for drug delivery application. Array of out-of-plane solid SS microneedles were fabricated using Electric Discharge Machining (EDM) method. Subsequently, the microcup structures on the solid SS microneedles were formed using Focused Ion Beam (FIB) technique. The microcup structure on the microneedles acts as a dedicated region to fill the drug, so that the possible drug leakage while inserting the microneedles into the skin can be avoided. The drug filling into the microcup structures was performed using drop coating method. This coating method in combination with cup shaped microneedle array enables to deliver multiple drugs simultaneously in desired proportion.
为了改善药物的透皮给药,有许多技术被报道(化学、离子透入、声透入和微针)。在这些技术中,微针技术近年来受到越来越多的关注。目前已成功应用于给药领域的微针主要有实心型和空心型两种。在本文中,我们报道了面外固体不锈钢(SS)微针的制备及其内部微杯结构的形成。采用电火花加工(EDM)方法制备了非平面固体SS微针阵列。随后,利用聚焦离子束(FIB)技术在固体SS微针上形成了微杯结构。微针上的微杯结构作为药物填充的专用区域,避免了微针插入皮肤时可能出现的药物泄漏。采用滴涂法将药物填充到微杯结构中。该包覆方法与杯状微针阵列相结合,可使多种药物按所需比例同时递送。
{"title":"Out-of-plane cup shaped stainless steel microneedle array for drug delivery","authors":"K. B. Vinayakumar, K. Rajanna, N. S. Dinesh, M. Nayak","doi":"10.1109/NEMS.2016.7758225","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758225","url":null,"abstract":"To improve the transdermal delivery of drug, there are many techniques have been reported (Chemical, Iontophoresis, Sonophoresis and Microneedle). Among these techniques, the microneedle technology gained the more attention in recent years. Mainly, there are two types (Solid and Hollow) of microneedles have been reported for the successful drug delivery application. In this paper, we report on the fabrication of out-of-plane solid Stainless Steel (SS) microneedles and formation of microcup structure within them suitable for drug delivery application. Array of out-of-plane solid SS microneedles were fabricated using Electric Discharge Machining (EDM) method. Subsequently, the microcup structures on the solid SS microneedles were formed using Focused Ion Beam (FIB) technique. The microcup structure on the microneedles acts as a dedicated region to fill the drug, so that the possible drug leakage while inserting the microneedles into the skin can be avoided. The drug filling into the microcup structures was performed using drop coating method. This coating method in combination with cup shaped microneedle array enables to deliver multiple drugs simultaneously in desired proportion.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129357543","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Highly selective and sensitive gas sensors for exhaled breath analysis using CuBr thin film 高选择性和敏感的气体传感器,用于呼气分析,使用cur薄膜
S. Momose, Kazuaki Karasawa, M. Ushigome, R. Takasu, O. Tsuboi
We have examined a p-type semi-conductor CuBr thin film used for sensor devices that indicates the order of sensitivity to ammonia in parts per billion (ppb). The CuBr thin film also indicates excellent selectivity to ammonia among reductive gases, which additionally suggests its capacity for fast quantification of the order of seconds. Moreover, CuBr thin film can be adapted to a high-sensitivity aldehyde sensor by a surface modification. Since the fabrication process of CuBr thin film is compatible with an ordinal CMOS process, there is a potential for development into highly integrated and low power consumption sensor devices. These properties make CuBr thin film a promising candidate as a gas sensing material for human-breath analysis.
我们已经检查了用于传感器设备的p型半导体cur薄膜,该薄膜表明对氨的灵敏度以十亿分之一(ppb)为单位。在还原性气体中,cur薄膜对氨具有很好的选择性,这也表明它具有秒级的快速定量能力。此外,通过表面改性,cur薄膜可以适应高灵敏度的醛传感器。由于cur薄膜的制造工艺与有序CMOS工艺兼容,因此具有向高集成度和低功耗传感器器件发展的潜力。这些特性使cur薄膜成为一种很有前途的候选气体传感材料,用于人体呼吸分析。
{"title":"Highly selective and sensitive gas sensors for exhaled breath analysis using CuBr thin film","authors":"S. Momose, Kazuaki Karasawa, M. Ushigome, R. Takasu, O. Tsuboi","doi":"10.1109/NEMS.2016.7758262","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758262","url":null,"abstract":"We have examined a p-type semi-conductor CuBr thin film used for sensor devices that indicates the order of sensitivity to ammonia in parts per billion (ppb). The CuBr thin film also indicates excellent selectivity to ammonia among reductive gases, which additionally suggests its capacity for fast quantification of the order of seconds. Moreover, CuBr thin film can be adapted to a high-sensitivity aldehyde sensor by a surface modification. Since the fabrication process of CuBr thin film is compatible with an ordinal CMOS process, there is a potential for development into highly integrated and low power consumption sensor devices. These properties make CuBr thin film a promising candidate as a gas sensing material for human-breath analysis.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116782864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
期刊
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1