Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758316
Chia-Liang Hsu, Kunal Kashyap, Amarendra Kumar, J. Yeh, M. T. Hou
Backside nanotexturing fabricated by electroless metal assisted wet chemical etching, protected with a deposited thin silicon layer, is a new approach to create high bending strength silicon samples. Bending strength for protected nanotextured samples followed by CMP process was enhanced by ~3.4 folds as compared to polished silicon samples, which emphasize the possibility of industrial implementation. The morphology of silicon deposition layer upon nanotexture influences the stress behavior, which need an adequate fabrication technique for uniform deposition at wafer scale. The thin protection layer upon nanotexture prevents the unwanted particle trapping, which affects the electrical performances of the device. Moreover, this technology provides a rupture resistive solution for IC, MEMS and photovoltaic devices for industrial implementation.
{"title":"Backside nanotexturing protected by thin silicon layer for high bending strength ICs","authors":"Chia-Liang Hsu, Kunal Kashyap, Amarendra Kumar, J. Yeh, M. T. Hou","doi":"10.1109/NEMS.2016.7758316","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758316","url":null,"abstract":"Backside nanotexturing fabricated by electroless metal assisted wet chemical etching, protected with a deposited thin silicon layer, is a new approach to create high bending strength silicon samples. Bending strength for protected nanotextured samples followed by CMP process was enhanced by ~3.4 folds as compared to polished silicon samples, which emphasize the possibility of industrial implementation. The morphology of silicon deposition layer upon nanotexture influences the stress behavior, which need an adequate fabrication technique for uniform deposition at wafer scale. The thin protection layer upon nanotexture prevents the unwanted particle trapping, which affects the electrical performances of the device. Moreover, this technology provides a rupture resistive solution for IC, MEMS and photovoltaic devices for industrial implementation.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117041601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In the field of the fabrication of micro- and nano-spheres, the phenomenon of Plateau-Rayleigh instability has drawn more and more attention. This surface tension-driven instability in two immiscible fluids can be used to generate uniformly size micro- and nano-spheres by imposing an external mechanical excitation. In this article, we mainly adopt numerical simulation method to study the effects of wavelength, viscosity and surface tension on Plateau-Rayleigh instability. In addition, a micro-spheres generation system based on controlling the breakup process of the co-flowing jet is studied. The numerical results show that the current method can efficiently control the size of the micro-spheres from a variety of fluids. Also, the effects of amplitude and frequency of the excitation during the fabrication process on the size of micro-spheres are investigated.
{"title":"Synthesis of scalable micro-spheres by Plateau-Rayleigh instability","authors":"G. Fan, Bingjian Zhang, Chuangui Liu, Shan Tang, Jian Yang, Zhi-jun Ma, Xianting Ding","doi":"10.1109/NEMS.2016.7758192","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758192","url":null,"abstract":"In the field of the fabrication of micro- and nano-spheres, the phenomenon of Plateau-Rayleigh instability has drawn more and more attention. This surface tension-driven instability in two immiscible fluids can be used to generate uniformly size micro- and nano-spheres by imposing an external mechanical excitation. In this article, we mainly adopt numerical simulation method to study the effects of wavelength, viscosity and surface tension on Plateau-Rayleigh instability. In addition, a micro-spheres generation system based on controlling the breakup process of the co-flowing jet is studied. The numerical results show that the current method can efficiently control the size of the micro-spheres from a variety of fluids. Also, the effects of amplitude and frequency of the excitation during the fabrication process on the size of micro-spheres are investigated.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"134 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122009168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758290
Yichuan Dai, L. Wen, Jie Liu, Hai Wang
A novel maskless nanoscale material etching method based on microcavities dielectric barrier discharge (DBD) array with advantages of high accuracy and high efficiency has been proposed in this paper. A two-dimensional simulation of pyramidal hollow cathode DBD microplasma operated in Ar has been studied using FEM method. Results indicated that high density microplasma with its magnitude of 1e18/m3 is obtained in microcavity. Total absorbed power enhance as relative permittivity of dielectric layer increased. A 3×3 50μm inverted pyramidal microplasma array without dielectric layer has been successfully fabricated by MEMS process and discharged stably in 10kPa Ar, which may lay a good foundation of ongoing DBD microplasma devices array and future maskless nanoscale etching.
{"title":"Simulation and experiment of inverted pyramid DBD micro-plasma devices array for maskless nanoscale etching","authors":"Yichuan Dai, L. Wen, Jie Liu, Hai Wang","doi":"10.1109/NEMS.2016.7758290","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758290","url":null,"abstract":"A novel maskless nanoscale material etching method based on microcavities dielectric barrier discharge (DBD) array with advantages of high accuracy and high efficiency has been proposed in this paper. A two-dimensional simulation of pyramidal hollow cathode DBD microplasma operated in Ar has been studied using FEM method. Results indicated that high density microplasma with its magnitude of 1e18/m3 is obtained in microcavity. Total absorbed power enhance as relative permittivity of dielectric layer increased. A 3×3 50μm inverted pyramidal microplasma array without dielectric layer has been successfully fabricated by MEMS process and discharged stably in 10kPa Ar, which may lay a good foundation of ongoing DBD microplasma devices array and future maskless nanoscale etching.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125028481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758254
K. Yamashita, Taiki Nishiumi, Hikaru Tanaka, M. Noda
Diaphragm structures of piezoelectric ultrasonic microsensors were fabricated and their vibration modes responding to an ultrasound pulse were investigated. A vibrating piezoelectric diaphragm has an inhomogeneous polarization distribution and its electrode is designed to avoid cancellation of positive and negative polarizations in the fundamental vibration mode. However, a short ultrasound pulse used for ultrasonic measurement has components of higher frequencies than the fundamental one and might cause higher order vibration modes according to the diaphragm shape. Square and circular diaphragms with flat or buckled profiles were fabricated in this work and evaluated with a scanning laser Doppler vibrometer. The circular buckled diaphragm shape was the most suitable among them on centrosymmetric vibration modes which influence to piezoelectric output and sensitivity.
{"title":"Vibration modes in impulse response of piezoelectric diaphragms for ultrasonic microsensors","authors":"K. Yamashita, Taiki Nishiumi, Hikaru Tanaka, M. Noda","doi":"10.1109/NEMS.2016.7758254","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758254","url":null,"abstract":"Diaphragm structures of piezoelectric ultrasonic microsensors were fabricated and their vibration modes responding to an ultrasound pulse were investigated. A vibrating piezoelectric diaphragm has an inhomogeneous polarization distribution and its electrode is designed to avoid cancellation of positive and negative polarizations in the fundamental vibration mode. However, a short ultrasound pulse used for ultrasonic measurement has components of higher frequencies than the fundamental one and might cause higher order vibration modes according to the diaphragm shape. Square and circular diaphragms with flat or buckled profiles were fabricated in this work and evaluated with a scanning laser Doppler vibrometer. The circular buckled diaphragm shape was the most suitable among them on centrosymmetric vibration modes which influence to piezoelectric output and sensitivity.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129718403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758301
Tomokazu Takahashi, Masato Suzuki, S. Aoyagi
This paper describes an octopus bioinspired vacuum gripper for transportation or assembly of industrial parts. The previous gripper can grasp the object with flat, curvature, uneven, and grooved surface. However, octopus has the microstructure on suction cup, for example, cylindrical and radial grooves and micro bump. These structure is expected to improved flexibility and adhesive force of suction cup. Therefore, we evaluated the performance of octopus bioinspired gripper with micro bump of 2 micrometer in diameter and 4 micrometer in pitch. Using micro bump, The adhesive force is increased. Moreover, adhesive area is kept circle shape, since the friction force is increased by the micro bumps.
{"title":"Octopus bioinspired vacuum gripper with micro bumps","authors":"Tomokazu Takahashi, Masato Suzuki, S. Aoyagi","doi":"10.1109/NEMS.2016.7758301","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758301","url":null,"abstract":"This paper describes an octopus bioinspired vacuum gripper for transportation or assembly of industrial parts. The previous gripper can grasp the object with flat, curvature, uneven, and grooved surface. However, octopus has the microstructure on suction cup, for example, cylindrical and radial grooves and micro bump. These structure is expected to improved flexibility and adhesive force of suction cup. Therefore, we evaluated the performance of octopus bioinspired gripper with micro bump of 2 micrometer in diameter and 4 micrometer in pitch. Using micro bump, The adhesive force is increased. Moreover, adhesive area is kept circle shape, since the friction force is increased by the micro bumps.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128214462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758291
H. Yagyu, Do-Nyun Kim, O. Tabata
New coarse-grained molecular dynamics model of double stranded DNA (nCG-dsDNA model) was reported. The nCG-dsDNA model was made by newly developed simple bead-spring model for realizing a helix structure. The phosphate group, sugar group, and base group in an actual double stranded DNA chain were represented by a single bead. The nCG-dsDNA model with 202 base pair was utilized to tune the bond potential between connected two beads of a chain, the nonbond potential between stack sites and the angle bending potential between three beads. The twisted angle of each chains in the model was calculated as 35.3 degree. From this result, it was confirmed that the actual double stranded DNA structure was well realized by the proposed model. Moreover, it was confirmed that a persistence length of the nCG-dsDNA model was in good agreement with the results of conventional DNA model (oxDNA model) and experiments.
{"title":"New coarse-grained molecular dynamics model of double stranded DNA chain for DNA origami","authors":"H. Yagyu, Do-Nyun Kim, O. Tabata","doi":"10.1109/NEMS.2016.7758291","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758291","url":null,"abstract":"New coarse-grained molecular dynamics model of double stranded DNA (nCG-dsDNA model) was reported. The nCG-dsDNA model was made by newly developed simple bead-spring model for realizing a helix structure. The phosphate group, sugar group, and base group in an actual double stranded DNA chain were represented by a single bead. The nCG-dsDNA model with 202 base pair was utilized to tune the bond potential between connected two beads of a chain, the nonbond potential between stack sites and the angle bending potential between three beads. The twisted angle of each chains in the model was calculated as 35.3 degree. From this result, it was confirmed that the actual double stranded DNA structure was well realized by the proposed model. Moreover, it was confirmed that a persistence length of the nCG-dsDNA model was in good agreement with the results of conventional DNA model (oxDNA model) and experiments.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132953125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758283
F. Selbmann, M. Baum, M. Wiemer, T. Gessner
Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.
{"title":"Deposition of Parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices","authors":"F. Selbmann, M. Baum, M. Wiemer, T. Gessner","doi":"10.1109/NEMS.2016.7758283","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758283","url":null,"abstract":"Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"386 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123198294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758227
A. Arevalo, D. Conchouso, D. Castro, J. Kosel, I. Foulds
In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50' μm made of polyimide. The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with different voltages obtaining good sound output levels by using only 3 V.
{"title":"Piezoelectric transducer array microspeaker","authors":"A. Arevalo, D. Conchouso, D. Castro, J. Kosel, I. Foulds","doi":"10.1109/NEMS.2016.7758227","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758227","url":null,"abstract":"In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50' μm made of polyimide. The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with different voltages obtaining good sound output levels by using only 3 V.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121726725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758311
Yu Xin, G. Pandraud, L. Pakula, B. Morana, P. French
As a promising material in MEMS field, SiC is widely used to fabricate sensors in many applications. Considering its fabrication potential and optical properties, SiC was chosen as the core material of evanescent waveguide sensor in this paper. LPCVD and PECVD deposition were combined in fabricating the waveguide. To reduce the coupling loss and misalignment effect, 3D tapered couplers were designed to be added to the input and output of the waveguide and a novel slope transfer method was investigated to fabricate the taper slope. In initial experiments we have achieved a slope of 16.7°.
{"title":"Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides","authors":"Yu Xin, G. Pandraud, L. Pakula, B. Morana, P. French","doi":"10.1109/NEMS.2016.7758311","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758311","url":null,"abstract":"As a promising material in MEMS field, SiC is widely used to fabricate sensors in many applications. Considering its fabrication potential and optical properties, SiC was chosen as the core material of evanescent waveguide sensor in this paper. LPCVD and PECVD deposition were combined in fabricating the waveguide. To reduce the coupling loss and misalignment effect, 3D tapered couplers were designed to be added to the input and output of the waveguide and a novel slope transfer method was investigated to fabricate the taper slope. In initial experiments we have achieved a slope of 16.7°.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122890047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-01DOI: 10.1109/NEMS.2016.7758276
P. Chiu, D. Chiang, C. Lee, C. Hsiao, Zheng-Han Wu, Chien-Yue Chen
UV light source and high-pressure mercury lamps are usually used as a projecting light source of foreign exposure light source recently, including a spherical mirror ellipse, an optical integrator, and a parallel lens. The light source system is the most crucial technology to achieve better image quality and better uniformity of light field. High-stability, high-uniformity, and high-parallelism light source should be created to ensure the stability of all processes. In this research, two sets of Fly's eye lens are used as an optical integrator for combining with the redesigned parallel lens, which are evaporated AR coating to increase the transmittance of overall optical system up to 80% and the uniformity of light field. Equivalent doublets are also proposed to improve the original design of single parallel lenses for reducing the thickness, curvature, and divergent angle of a single lens so as to enhance the efficiency of light irradiation.
{"title":"Development of high-performance parallel exposure I-line UV light source","authors":"P. Chiu, D. Chiang, C. Lee, C. Hsiao, Zheng-Han Wu, Chien-Yue Chen","doi":"10.1109/NEMS.2016.7758276","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758276","url":null,"abstract":"UV light source and high-pressure mercury lamps are usually used as a projecting light source of foreign exposure light source recently, including a spherical mirror ellipse, an optical integrator, and a parallel lens. The light source system is the most crucial technology to achieve better image quality and better uniformity of light field. High-stability, high-uniformity, and high-parallelism light source should be created to ensure the stability of all processes. In this research, two sets of Fly's eye lens are used as an optical integrator for combining with the redesigned parallel lens, which are evaporated AR coating to increase the transmittance of overall optical system up to 80% and the uniformity of light field. Equivalent doublets are also proposed to improve the original design of single parallel lenses for reducing the thickness, curvature, and divergent angle of a single lens so as to enhance the efficiency of light irradiation.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131448233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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