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2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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Impedimetric quantification of the density of suspending Trichomonas vaginalis 阴道毛滴虫悬浮体密度的阻抗法测定
Ming-Jie Chen, Chia-Hao Huang, K. Lei, Wei-Hung Cheng, Petrus Tang
To investigate the chemosensitivity of T. vaginalis under tested drug, quantification of the density of T. vaginalis is necessary to study its viability. However, because T. vaginalis is suspended in the medium, microscopic quantification is not practical. In this work, impedimetric quantification of T. vaginalis was demonstrated using a biosensor. Investigations of impedance spectrum, sample loading volume, and correction between impedance magnitude and density of T. vaginalis were reported. Results showed the feasibility of the quantification of suspending cells based on impedance measurement technique. With the advantage of microfluidics technology, quantification of suspending cells can be completed in less sample volume (30 μl) and fast response (a few seconds). The present work has high potential to apply for the study of the development of therapeutic drug of T. vaginalis.
为了研究阴道绦虫在药物作用下的化学敏感性,有必要定量测定阴道绦虫的密度,以研究其生存能力。然而,由于阴道绦虫悬浮在培养基中,显微定量是不现实的。在这项工作中,利用生物传感器证明了阴道绦虫的阻抗定量。本文报道了阴道绦虫的阻抗谱、载样量以及阻抗大小与密度之间的校正。结果表明,基于阻抗测量技术的悬浮细胞定量是可行的。利用微流体技术的优势,可以在30 μl的样品体积内完成悬浮细胞的定量,反应速度快(几秒)。本研究为阴道绦虫治疗药物的开发研究提供了良好的应用前景。
{"title":"Impedimetric quantification of the density of suspending Trichomonas vaginalis","authors":"Ming-Jie Chen, Chia-Hao Huang, K. Lei, Wei-Hung Cheng, Petrus Tang","doi":"10.1109/NEMS.2016.7758297","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758297","url":null,"abstract":"To investigate the chemosensitivity of T. vaginalis under tested drug, quantification of the density of T. vaginalis is necessary to study its viability. However, because T. vaginalis is suspended in the medium, microscopic quantification is not practical. In this work, impedimetric quantification of T. vaginalis was demonstrated using a biosensor. Investigations of impedance spectrum, sample loading volume, and correction between impedance magnitude and density of T. vaginalis were reported. Results showed the feasibility of the quantification of suspending cells based on impedance measurement technique. With the advantage of microfluidics technology, quantification of suspending cells can be completed in less sample volume (30 μl) and fast response (a few seconds). The present work has high potential to apply for the study of the development of therapeutic drug of T. vaginalis.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116173936","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of a multilayer spiral coil by selective bonding, debonding and MEMS technologies 采用选择性键合、去键合和MEMS技术制备多层螺旋线圈
Tim Schroeder, J. Froemel, Shuji Tanaka, T. Gessner
For the further miniaturization of integrated circuits, the integration of passive components on the chip is one approach. In DC-DC converter applications, the integration of the inductor with high inductivity is one problem. This paper addresses this problem by proposing a new technique for fabricating a multilayer spiral coil that is also useful as part of electromagnetic MEMS (Micro-Electro-Mechanical Systems) actuators. The multilayer coil is made by stacking separately fabricated coil layers and joining them with a selective bonding and debonding technique.
为了使集成电路进一步小型化,在芯片上集成无源元件是一种途径。在DC-DC变换器的应用中,高电感的集成是一个难题。本文通过提出一种制造多层螺旋线圈的新技术来解决这一问题,多层螺旋线圈也可作为电磁微机电系统(MEMS)执行器的一部分。多层线圈是由单独制造的线圈层堆叠并通过选择性键合和脱键技术将它们连接起来制成的。
{"title":"Fabrication of a multilayer spiral coil by selective bonding, debonding and MEMS technologies","authors":"Tim Schroeder, J. Froemel, Shuji Tanaka, T. Gessner","doi":"10.1109/NEMS.2016.7758277","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758277","url":null,"abstract":"For the further miniaturization of integrated circuits, the integration of passive components on the chip is one approach. In DC-DC converter applications, the integration of the inductor with high inductivity is one problem. This paper addresses this problem by proposing a new technique for fabricating a multilayer spiral coil that is also useful as part of electromagnetic MEMS (Micro-Electro-Mechanical Systems) actuators. The multilayer coil is made by stacking separately fabricated coil layers and joining them with a selective bonding and debonding technique.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"151 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127288580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
CMOS MEMS infrared source based on black silicon 基于黑硅的CMOS MEMS红外源
Weibing Liu, A. Ming, Yaohui Ren, Qiu-lin Tan, W. Ou, Xilong Sun, Weibing Wang, Dapeng Chen, J. Xiong
In this work, a MEMS infrared source applied to compact Non-Dispersive Infrared (NDIR) gas sensor is reported. Compared to other related things, the source coats integrated nanostructure black silicon compatible with CMOS technique on the poly-silicon. Hence the emissivity is as high as 98% at 3~5μm wave range; relatively the radiation efficiency is increased by 40% through calculation. Suspension structure and DRIE release process of the back side are used in the design to reduce the heat conduction losses, and the source is only sized 3×3mm2 suitable for mass production. After being packed, the source can rapidly heat in 20 ms, besides the modulation depth can reach 30% below 50Hz, which all meet the requirements of the NDIR gas sensor.
本文报道了一种用于紧凑型非色散红外(NDIR)气体传感器的MEMS红外源。与其他相关材料相比,该材料在多晶硅上涂覆了与CMOS技术兼容的集成纳米结构黑硅。在3~5μm波段,发射率高达98%;通过计算,辐射效率相对提高了40%。设计中采用了悬挂结构和背面DRIE释放工艺,减少了热传导损失,且源尺寸仅为3×3mm2,适合量产。封装后的光源可在20ms内快速升温,且在50Hz以下调制深度可达30%,均满足NDIR气体传感器的要求。
{"title":"CMOS MEMS infrared source based on black silicon","authors":"Weibing Liu, A. Ming, Yaohui Ren, Qiu-lin Tan, W. Ou, Xilong Sun, Weibing Wang, Dapeng Chen, J. Xiong","doi":"10.1109/NEMS.2016.7758232","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758232","url":null,"abstract":"In this work, a MEMS infrared source applied to compact Non-Dispersive Infrared (NDIR) gas sensor is reported. Compared to other related things, the source coats integrated nanostructure black silicon compatible with CMOS technique on the poly-silicon. Hence the emissivity is as high as 98% at 3~5μm wave range; relatively the radiation efficiency is increased by 40% through calculation. Suspension structure and DRIE release process of the back side are used in the design to reduce the heat conduction losses, and the source is only sized 3×3mm2 suitable for mass production. After being packed, the source can rapidly heat in 20 ms, besides the modulation depth can reach 30% below 50Hz, which all meet the requirements of the NDIR gas sensor.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"93 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124170239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
An experimental and analytical method to observe the polysilicon Nanowire mosfet threshold voltage 一种观察多晶硅纳米线mosfet阈值电压的实验与分析方法
G. Sheu, Shao-Ming Yang, Aanand, Syed Sarwar Imam, Ming-Jen Fan, S. Lu
A new double integration-based method to extract model parameters is applied to experimental polysilicon nanowire MOSFETs. It was experimentally found that the saturation current shows the sensitivity of the Nano-wire MOSFETs if the conventional method fails to show the sensitivity depending upon the threshold voltage of Nano-wire MOSFET. It shows that the present method offers advantage over previous extraction procedure which use trans-conductance curve in the saturation mode, and the threshold voltage is determined by the intercept of curve. In addition to show how compact model for the Id-Vg characteristics are numerically evaluated and examined. The drain and gate bias dependencies of device current are shown. Also the model we proposed fits to the silicon data. Our experimental results support the model which we proposed in this paper. The drain current measured in saturation region can easily show the change in current level at different conditions but the convention theory for the linear region is difficult to do for sensitivity test of Nano-wire.
将一种新的基于双积分的模型参数提取方法应用于实验多晶硅纳米线mosfet。实验发现,如果传统方法不能显示纳米线MOSFET的灵敏度取决于阈值电压,则饱和电流可以显示纳米线MOSFET的灵敏度。结果表明,该方法优于以往在饱和模式下利用跨导曲线提取阈值电压的方法。此外,还展示了如何对紧凑模型的Id-Vg特性进行数值评估和检查。显示了器件电流的漏极和栅极偏置依赖关系。我们所提出的模型也适合于硅的数据。实验结果支持本文提出的模型。在饱和区测量漏极电流可以很容易地反映出不同条件下电流水平的变化,但传统的线性区理论很难用于纳米线的灵敏度测试。
{"title":"An experimental and analytical method to observe the polysilicon Nanowire mosfet threshold voltage","authors":"G. Sheu, Shao-Ming Yang, Aanand, Syed Sarwar Imam, Ming-Jen Fan, S. Lu","doi":"10.1109/NEMS.2016.7758213","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758213","url":null,"abstract":"A new double integration-based method to extract model parameters is applied to experimental polysilicon nanowire MOSFETs. It was experimentally found that the saturation current shows the sensitivity of the Nano-wire MOSFETs if the conventional method fails to show the sensitivity depending upon the threshold voltage of Nano-wire MOSFET. It shows that the present method offers advantage over previous extraction procedure which use trans-conductance curve in the saturation mode, and the threshold voltage is determined by the intercept of curve. In addition to show how compact model for the Id-Vg characteristics are numerically evaluated and examined. The drain and gate bias dependencies of device current are shown. Also the model we proposed fits to the silicon data. Our experimental results support the model which we proposed in this paper. The drain current measured in saturation region can easily show the change in current level at different conditions but the convention theory for the linear region is difficult to do for sensitivity test of Nano-wire.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121993077","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
CNT handling with van der Waals force inside a SEM for FET application 碳纳米管处理与范德华力在SEM中的FET应用
Yaqiong Wang, Zhan Yang, Tao Chen, Li-jun Yang, Lining Sun, T. Fukuda
This paper presented a method of picking up carbon nanotubes (CNTs) from nanotube bulk by van der Waals force between the carbon nanotubes and AFM cantilever under scanning electron microscopy (SEM). A manipulation strategy was established based on SEM by analyzing the van der Waals force of three different types of contacting model. Three groups of experiments were designed and carried out to investigate the effects of different factors which conclude pickup angle, pickup contact area between the carbon nanotube and the cantilever and pickup speed of the end-effector. The results shown that a pickup angle at 90.1° and a pickup speed at 10nm/step with a pickup contact length more than 1.5μm would increasing the probability of picking up CNT successfully.
本文提出了一种在扫描电子显微镜下利用碳纳米管与原子力显微镜悬臂梁之间的范德华力从纳米管体中拾取碳纳米管的方法。通过分析三种不同接触模型的范德华力,建立了基于扫描电镜的操作策略。设计并开展了三组实验,考察了拾取角度、拾取碳纳米管与悬臂梁的接触面积以及末端执行器拾取速度等因素对拾取效果的影响。结果表明,当拾取角为90.1°,拾取速度为10nm/步长,拾取接触长度大于1.5μm时,可以提高成功拾取碳纳米管的概率。
{"title":"CNT handling with van der Waals force inside a SEM for FET application","authors":"Yaqiong Wang, Zhan Yang, Tao Chen, Li-jun Yang, Lining Sun, T. Fukuda","doi":"10.1109/NEMS.2016.7758211","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758211","url":null,"abstract":"This paper presented a method of picking up carbon nanotubes (CNTs) from nanotube bulk by van der Waals force between the carbon nanotubes and AFM cantilever under scanning electron microscopy (SEM). A manipulation strategy was established based on SEM by analyzing the van der Waals force of three different types of contacting model. Three groups of experiments were designed and carried out to investigate the effects of different factors which conclude pickup angle, pickup contact area between the carbon nanotube and the cantilever and pickup speed of the end-effector. The results shown that a pickup angle at 90.1° and a pickup speed at 10nm/step with a pickup contact length more than 1.5μm would increasing the probability of picking up CNT successfully.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124964810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Design and simulation of a thermal flow sensor for gravity-driven microfluidic applications 重力驱动微流体热流传感器的设计与仿真
Antti-Juhana Maki, A. Kontunen, Tomi Ryynänen, J. Verho, J. Kreutzer, J. Lekkala, P. Kallio
Gravity-driven flow is an attractive approach to develop simpler microfluidic systems. Because clogged microchannels could easily lead to fatal operational failures, it is crucial to monitor flow rate in these systems. Therefore, we propose here for the first time a numerical model that combines a calorimetric flow sensor and a gravity-driven system. With the validated model, we studied the flow behavior in a gravity-driven system. Furthermore, we were able to improve the sensitivity of the measurement based on simulation results. This demonstrates, how the model could be used as an effective optimization tool in the gravity-driven system including calorimetric flow measurement.
重力驱动流是一种有吸引力的方法来开发更简单的微流体系统。由于堵塞的微通道很容易导致致命的操作故障,因此监测这些系统的流量至关重要。因此,我们在这里首次提出了一个结合了量热流量传感器和重力驱动系统的数值模型。利用验证的模型,研究了重力驱动系统中的流动特性。此外,基于仿真结果,我们能够提高测量的灵敏度。这表明,该模型可以作为一个有效的优化工具,在重力驱动系统,包括热流量测量。
{"title":"Design and simulation of a thermal flow sensor for gravity-driven microfluidic applications","authors":"Antti-Juhana Maki, A. Kontunen, Tomi Ryynänen, J. Verho, J. Kreutzer, J. Lekkala, P. Kallio","doi":"10.1109/NEMS.2016.7758214","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758214","url":null,"abstract":"Gravity-driven flow is an attractive approach to develop simpler microfluidic systems. Because clogged microchannels could easily lead to fatal operational failures, it is crucial to monitor flow rate in these systems. Therefore, we propose here for the first time a numerical model that combines a calorimetric flow sensor and a gravity-driven system. With the validated model, we studied the flow behavior in a gravity-driven system. Furthermore, we were able to improve the sensitivity of the measurement based on simulation results. This demonstrates, how the model could be used as an effective optimization tool in the gravity-driven system including calorimetric flow measurement.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"374 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116626606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of CMOS-MEMS infrared emitter arrays CMOS-MEMS红外发射阵列的设计
Zhengxi Cheng, H. Toshiyoshi
This paper presents a new design of complementary metal-oxide-semiconductor-microelectromechanical systems (CMOS-MEMS) infrared emitter arrays integrated with metamaterial absorbers (MA). The infrared emitter array is a key IR thermal radiation source for gas sensors. The IR emitter arrays are implemented using the standard CSMC 0.5 μm 2P3M CMOS process. Three different shape of micro emitters are designed with 2 different thin film layers stacks, without and with metamaterial absorbers, for each shape. Micro structures are released from Si substrate through the post-CMOS dielectric dry etching and bulk silicon wet etching. Read-in circuit is also integrated with each 8×8 scale emitter array. Steady state thermal responses and dynamic thermal responses are simulated through multi-physics coupling finite element method (FEM), then radiation responses are calculated with a Matlab program based on thermal responses. Emissivity of emitters are also calculated through FEM simulation, which shows that the integration of metamaterial absorbers is an effective way to increases emissivity in both short and long infrared wavebands.
本文提出了一种集成超材料吸收器的互补金属氧化物-半导体-微机电系统(CMOS-MEMS)红外发射阵列的新设计。红外发射阵列是气体传感器红外热辐射源的重要组成部分。红外发射器阵列采用标准CSMC 0.5 μm 2P3M CMOS工艺实现。设计了三种不同形状的微型发射器,每种形状都有2种不同的薄膜层堆叠,不带和带超材料吸收器。通过后cmos介质干刻蚀和体硅湿刻蚀,从硅衬底上释放出微观结构。读入电路也集成在每个8×8刻度发射极阵列上。采用多物理场耦合有限元法模拟了稳态热响应和动态热响应,并利用Matlab程序计算了基于热响应的辐射响应。通过有限元模拟计算了发射体的发射率,结果表明,超材料吸收体的集成是提高红外短波和长波发射率的有效途径。
{"title":"Design of CMOS-MEMS infrared emitter arrays","authors":"Zhengxi Cheng, H. Toshiyoshi","doi":"10.1109/NEMS.2016.7758284","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758284","url":null,"abstract":"This paper presents a new design of complementary metal-oxide-semiconductor-microelectromechanical systems (CMOS-MEMS) infrared emitter arrays integrated with metamaterial absorbers (MA). The infrared emitter array is a key IR thermal radiation source for gas sensors. The IR emitter arrays are implemented using the standard CSMC 0.5 μm 2P3M CMOS process. Three different shape of micro emitters are designed with 2 different thin film layers stacks, without and with metamaterial absorbers, for each shape. Micro structures are released from Si substrate through the post-CMOS dielectric dry etching and bulk silicon wet etching. Read-in circuit is also integrated with each 8×8 scale emitter array. Steady state thermal responses and dynamic thermal responses are simulated through multi-physics coupling finite element method (FEM), then radiation responses are calculated with a Matlab program based on thermal responses. Emissivity of emitters are also calculated through FEM simulation, which shows that the integration of metamaterial absorbers is an effective way to increases emissivity in both short and long infrared wavebands.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131158933","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Continuous Wave Terahertz Signal Generator based on Difference Frequency Generation in Gallium Phosphide crystal and its applications for spectroscopy 基于磷化镓晶体差频产生的连续波太赫兹信号发生器及其光谱学应用
Tetsuo Sasaki, T. Tanabe, T. Sakamoto, J. Nishizawa
We have developed a wide frequency tunable Continuous Wave (CW) Terahertz (THz) Signal Generator (SG) on the principle of Difference Frequency Generation (DFG) in a Gallium Phosphide (GaP) crystal. The CW THz SG has the merits of high resolution, high accuracy, wide dynamic range, high stability, high durability, easy operation/maintenance, and low cost. Combining the CW THz SG as a light source with a superconducting Transition Edge Sensor (TES) bolometer cooled by a pulse tube refrigerator, the spectrometer working as a non-stop system could be realized. As we could have increased the THz output power up to 0.1 μW at the sacrifice of lack of frequency resolution, it is now possible to apply a pyroelectric detector or a bolometer camera at room temperature operation for spectrometer or monochromatic imaging. Accurate THz spectrometer could be used for evaluation of organic crystals like as pharmaceuticals. One of the reasons for underutilization of THz spectroscopy is that most of the absorptions observed in THz range are not assigned to vibrational modes. We have developed a technique to clarify them by comparing polarization dependent spectra with Density Function Theory (DFT) calculation results for pharmaceutical single crystals.
我们利用磷化镓(GaP)晶体中的差频产生(DFG)原理,研制了一种宽频可调连续波太赫兹(THz)信号发生器(SG)。连续波太赫兹SG具有高分辨率、高精度、宽动态范围、高稳定性、高耐用性、易操作/维护和低成本等优点。将连续波太赫兹SG作为光源与脉冲管制冷机冷却的超导跃迁边缘传感器(TES)热热计相结合,可以实现光谱仪的不间断系统工作。由于我们可以在牺牲频率分辨率的情况下将太赫兹输出功率提高到0.1 μW,现在可以在室温下应用热释电探测器或热热计相机进行光谱仪或单色成像。精确的太赫兹谱仪可用于药物等有机晶体的评价。太赫兹光谱学未得到充分利用的原因之一是,在太赫兹范围内观测到的大多数吸收都没有分配到振动模式。我们开发了一种技术,通过比较偏振依赖光谱和密度泛函理论(DFT)计算结果来澄清它们。
{"title":"Continuous Wave Terahertz Signal Generator based on Difference Frequency Generation in Gallium Phosphide crystal and its applications for spectroscopy","authors":"Tetsuo Sasaki, T. Tanabe, T. Sakamoto, J. Nishizawa","doi":"10.1109/NEMS.2016.7758323","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758323","url":null,"abstract":"We have developed a wide frequency tunable Continuous Wave (CW) Terahertz (THz) Signal Generator (SG) on the principle of Difference Frequency Generation (DFG) in a Gallium Phosphide (GaP) crystal. The CW THz SG has the merits of high resolution, high accuracy, wide dynamic range, high stability, high durability, easy operation/maintenance, and low cost. Combining the CW THz SG as a light source with a superconducting Transition Edge Sensor (TES) bolometer cooled by a pulse tube refrigerator, the spectrometer working as a non-stop system could be realized. As we could have increased the THz output power up to 0.1 μW at the sacrifice of lack of frequency resolution, it is now possible to apply a pyroelectric detector or a bolometer camera at room temperature operation for spectrometer or monochromatic imaging. Accurate THz spectrometer could be used for evaluation of organic crystals like as pharmaceuticals. One of the reasons for underutilization of THz spectroscopy is that most of the absorptions observed in THz range are not assigned to vibrational modes. We have developed a technique to clarify them by comparing polarization dependent spectra with Density Function Theory (DFT) calculation results for pharmaceutical single crystals.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114302061","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems
J. Bonitz, Simon Böttger, S. Hermann, S. Schulz, T. Gessner, S. Hartmann, B. Wunderle
In this paper we present a holistic wafer-level manufacturing process for nanoscopic sensor devices based on individualized single-wall carbon nanotubes (SWCNTs) integrated in MEMS. The fabrication technology is demonstrated in detail. Moreover, a first application in form of a MEMS test stage for SWCNT strain and reliability experiments is shown.
在本文中,我们提出了一种基于集成在MEMS中的个性化单壁碳纳米管(SWCNTs)的纳米级传感器器件的整体晶圆级制造工艺。详细介绍了其制作工艺。此外,还展示了以MEMS测试平台形式进行swcnts应变和可靠性实验的首次应用。
{"title":"Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems","authors":"J. Bonitz, Simon Böttger, S. Hermann, S. Schulz, T. Gessner, S. Hartmann, B. Wunderle","doi":"10.1109/NEMS.2016.7758322","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758322","url":null,"abstract":"In this paper we present a holistic wafer-level manufacturing process for nanoscopic sensor devices based on individualized single-wall carbon nanotubes (SWCNTs) integrated in MEMS. The fabrication technology is demonstrated in detail. Moreover, a first application in form of a MEMS test stage for SWCNT strain and reliability experiments is shown.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128583641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Characterization of solid UV curable 3D printer resins for biological applications 生物用途固体UV固化3D打印机树脂的表征
S. Sivashankar, Sumeyra Agambayev, U. Buttner, K. Salama
In this paper, we report a simple method to evaluate biocompatibility of solid UV cross-linked resin as a material for microfluidic devices that can be used for biological applications. We evaluated the biocompatibility of the material in two different ways (1) determining if the UV cured resin inhibits the polymerase chain reaction (PCR) and (2) observing agglutination complex formed on the surface of the UV cured resin when anti-CRP antibodies and C- reactive protein (CRP) proteins were allowed to agglutinate. Six different types of 3D printer resins were compared to test the biocompatibility. The study showed that only few among them could be used for fabrication of micro channels and that had least effect on biological molecules that could be used for PCR and protein interactions. Through these studies it is possible to estimate the curing time of various resin and their type of interaction with biomolecules. This study finds importance in on-chip tissue engineering and organ-on-chip applications.
在本文中,我们报告了一种简单的方法来评估固体UV交联树脂作为可用于生物应用的微流体器件材料的生物相容性。我们通过两种不同的方式来评估材料的生物相容性(1)确定UV固化树脂是否抑制聚合酶链反应(PCR),(2)观察抗CRP抗体和C反应蛋白(CRP)蛋白允许凝集时在UV固化树脂表面形成的凝集复合物。比较了六种不同类型的3D打印树脂,以测试其生物相容性。研究表明,其中只有少数可以用于制备微通道,并且对可用于PCR和蛋白质相互作用的生物分子影响最小。通过这些研究,可以估计各种树脂的固化时间及其与生物分子相互作用的类型。本研究在片上组织工程和器官片上应用中具有重要意义。
{"title":"Characterization of solid UV curable 3D printer resins for biological applications","authors":"S. Sivashankar, Sumeyra Agambayev, U. Buttner, K. Salama","doi":"10.1109/NEMS.2016.7758255","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758255","url":null,"abstract":"In this paper, we report a simple method to evaluate biocompatibility of solid UV cross-linked resin as a material for microfluidic devices that can be used for biological applications. We evaluated the biocompatibility of the material in two different ways (1) determining if the UV cured resin inhibits the polymerase chain reaction (PCR) and (2) observing agglutination complex formed on the surface of the UV cured resin when anti-CRP antibodies and C- reactive protein (CRP) proteins were allowed to agglutinate. Six different types of 3D printer resins were compared to test the biocompatibility. The study showed that only few among them could be used for fabrication of micro channels and that had least effect on biological molecules that could be used for PCR and protein interactions. Through these studies it is possible to estimate the curing time of various resin and their type of interaction with biomolecules. This study finds importance in on-chip tissue engineering and organ-on-chip applications.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"286 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134267982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
期刊
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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