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Correlation Study On Voiding in Underfill of Large Quantity Ball Grid Array Chip Using Machine Learning 利用机器学习对大量球栅阵列芯片底部填充物空洞的相关性研究
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-03-16 DOI: 10.1115/1.4065077
Calvin Ling, Taufik Azahari, M. A. Abas, Fei Chong Ng
This paper investigates voiding issues in the underfilling process of ball grid array (BGA) chip packages under various parameter settings such as chip conveyor speed, valve pressure, temperature, and dispense pattern complicate. The study identifies valve pressure as the primary cause of voiding in large quantity BGA chips, achieving 88.9% in accuracy, supported with the deformation of the valve nozzle. Additionally, the findings reveal that racing effects occurs due to asymmetry of the solder ball array arrangement with percentage difference between the TSAM BGA chips experiments and its simulation counterparts in the range of 0.089% to 3.65%.
本文研究了球栅阵列(BGA)芯片封装在不同参数设置(如芯片传送速度、阀门压力、温度和点胶模式复杂化)下的欠注工艺中的空洞问题。研究发现,阀门压力是造成大量 BGA 芯片空洞的主要原因,在阀门喷嘴变形的支持下,精确度达到了 88.9%。此外,研究结果表明,焊球阵列排列的不对称会产生赛车效应,TSAM BGA 芯片实验与模拟之间的百分比差异在 0.089% 至 3.65% 之间。
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引用次数: 1
Hybrid Bonding for Ultra-High-Density Interconnect 用于超高密度互连的混合键合技术
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-12 DOI: 10.1115/1.4064750
Mei-Chien Lu
Hybrid bonding is the technology for interchip ultra-high density interconnect at pitch smaller than 10µm. The feasibility at wafer-to-wafer level bonding with bond pad pitch of sub 0.5µm has been demonstrated with scaling limitations under exploration beyond sub-0.4µm. The heterogeneous integration of chiplets often requires die-to-wafer hybrid bonding for diverse chip stacking architectures. This overview emphasis on some main issues associated with hybrid bonding extending to die-to-wafer level. The hybrid bond pad structure design is a critical factor affecting sensitivity to overlay accuracy, copper recess or protrusion requirements, and performances. Cases of hybrid bonding schemes and pad structure designs are summarized and analyzed. Performance assessment and characterization methods are briefly over-viewed. The scalability of pad pitch is addressed by analyzing the recent literature reports. Challenges of managing sigulated dies for die-to-wafer bonding with direct placement or collective die-to-wafer bonding schemes under exploration are addressed. Nonetheless, industry collaboration for manufacturing equipment development and industry standards on handling chiplets from different technology nodes and different factories are highlighted.
混合键合是间距小于 10 微米的芯片间超高密度互连技术。在晶圆到晶圆级键合技术中,键合垫间距小于 0.5 微米的可行性已得到证实,而小于 0.4 微米的扩展限制仍在探索之中。芯片的异质集成往往需要晶粒到晶圆的混合键合,以实现不同的芯片堆叠架构。本综述强调了与扩展到芯片到晶圆级的混合键合相关的一些主要问题。混合键合焊盘结构设计是影响叠层精度灵敏度、铜凹槽或突出要求以及性能的关键因素。本文总结并分析了混合键合方案和焊盘结构设计的案例。简要概述了性能评估和表征方法。通过分析最近的文献报告,探讨了焊盘间距的可扩展性。此外,还探讨了在采用直接贴片或集体晶粒到晶圆键合方案进行晶粒到晶圆键合时,如何管理已划分的晶粒所面临的挑战。此外,还强调了制造设备开发方面的行业合作,以及处理来自不同技术节点和不同工厂的芯片的行业标准。
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引用次数: 0
Constant Strain-Rate Garofalo Creep Behavior of Intermediate 83Pb/10Sb/5Sn2Ag and 91.5Sn/8.5Sb Solder Materials 83Pb/10Sb/5Sn2Ag 和 91.5Sn/8.5Sb 中间焊料的恒应变速率加罗法洛蠕变行为
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-12 DOI: 10.1115/1.4064751
Eric Stang, Cherish Lesko, Henry Young
Modern electronics reliability prediction models require materials-specific failure data across a range of conditions. For solder creep data, Garofalo models are preferred due to their ability to accurately predict performance over a wide temperature range. However, Garofalo data on intermediate solders is sparse, especially regarding performance at cold temperatures. Here, we report on creep phenomena of 83Pb/10Sb/5Sn2Ag (Indalloy 236) and 91.5Sn/8.5Sb (Indalloy 264). Indalloy 236 creep exhibits an activation energy of 83.6 kJ/mol, n=4.46 and a=0.0673, while Indalloy 264 exhibits an activation energy of 57.59 kJ/mol, n=5.89 and a=0.0306 from -20°C to 175°C. X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dispersive spectroscopy (EDS) were used to characterize the changes in the alloy phases as a result of the creep. Microstructural analysis indicates that Indalloy 236 experiences void coalescence with high diffusion rates while Indalloy 264 precipitates antimony-rich phases on the grain broundaries.
现代电子产品可靠性预测模型需要特定材料在各种条件下的失效数据。对于焊料蠕变数据,Garofalo 模型是首选,因为它能在很宽的温度范围内准确预测性能。然而,有关中间焊料的 Garofalo 数据很少,尤其是有关低温性能的数据。在此,我们报告了 83Pb/10Sb/5Sn2Ag (Indalloy 236)和 91.5Sn/8.5Sb (Indalloy 264)的蠕变现象。从-20°C到175°C,Indalloy 236的蠕变活化能为83.6 kJ/mol,n=4.46,a=0.0673;而Indalloy 264的蠕变活化能为57.59 kJ/mol,n=5.89,a=0.0306。X 射线衍射 (XRD)、扫描电子显微镜 (SEM) 和能量色散光谱 (EDS) 被用来描述蠕变引起的合金相变化。微观结构分析表明,Indalloy 236 在高扩散率下发生空洞凝聚,而 Indalloy 264 则在晶界上析出富锑相。
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引用次数: 0
Constant Strain-Rate Garofalo Creep Behavior of Intermediate 83Pb/10Sb/5Sn2Ag and 91.5Sn/8.5Sb Solder Materials 83Pb/10Sb/5Sn2Ag 和 91.5Sn/8.5Sb 中间焊料的恒应变速率加罗法洛蠕变行为
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-12 DOI: 10.1115/1.4064751
Eric Stang, Cherish Lesko, Henry Young
Modern electronics reliability prediction models require materials-specific failure data across a range of conditions. For solder creep data, Garofalo models are preferred due to their ability to accurately predict performance over a wide temperature range. However, Garofalo data on intermediate solders is sparse, especially regarding performance at cold temperatures. Here, we report on creep phenomena of 83Pb/10Sb/5Sn2Ag (Indalloy 236) and 91.5Sn/8.5Sb (Indalloy 264). Indalloy 236 creep exhibits an activation energy of 83.6 kJ/mol, n=4.46 and a=0.0673, while Indalloy 264 exhibits an activation energy of 57.59 kJ/mol, n=5.89 and a=0.0306 from -20°C to 175°C. X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dispersive spectroscopy (EDS) were used to characterize the changes in the alloy phases as a result of the creep. Microstructural analysis indicates that Indalloy 236 experiences void coalescence with high diffusion rates while Indalloy 264 precipitates antimony-rich phases on the grain broundaries.
现代电子产品可靠性预测模型需要特定材料在各种条件下的失效数据。对于焊料蠕变数据,Garofalo 模型是首选,因为它能在很宽的温度范围内准确预测性能。然而,有关中间焊料的 Garofalo 数据很少,尤其是有关低温性能的数据。在此,我们报告了 83Pb/10Sb/5Sn2Ag (Indalloy 236)和 91.5Sn/8.5Sb (Indalloy 264)的蠕变现象。从-20°C到175°C,Indalloy 236的蠕变活化能为83.6 kJ/mol,n=4.46,a=0.0673;而Indalloy 264的蠕变活化能为57.59 kJ/mol,n=5.89,a=0.0306。X 射线衍射 (XRD)、扫描电子显微镜 (SEM) 和能量色散光谱 (EDS) 被用来描述蠕变引起的合金相变化。微观结构分析表明,Indalloy 236 在高扩散率下发生空洞凝聚,而 Indalloy 264 则在晶界上析出富锑相。
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引用次数: 0
Hybrid Bonding for Ultra-High-Density Interconnect 用于超高密度互连的混合键合技术
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-12 DOI: 10.1115/1.4064750
Mei-Chien Lu
Hybrid bonding is the technology for interchip ultra-high density interconnect at pitch smaller than 10µm. The feasibility at wafer-to-wafer level bonding with bond pad pitch of sub 0.5µm has been demonstrated with scaling limitations under exploration beyond sub-0.4µm. The heterogeneous integration of chiplets often requires die-to-wafer hybrid bonding for diverse chip stacking architectures. This overview emphasis on some main issues associated with hybrid bonding extending to die-to-wafer level. The hybrid bond pad structure design is a critical factor affecting sensitivity to overlay accuracy, copper recess or protrusion requirements, and performances. Cases of hybrid bonding schemes and pad structure designs are summarized and analyzed. Performance assessment and characterization methods are briefly over-viewed. The scalability of pad pitch is addressed by analyzing the recent literature reports. Challenges of managing sigulated dies for die-to-wafer bonding with direct placement or collective die-to-wafer bonding schemes under exploration are addressed. Nonetheless, industry collaboration for manufacturing equipment development and industry standards on handling chiplets from different technology nodes and different factories are highlighted.
混合键合是间距小于 10 微米的芯片间超高密度互连技术。在晶圆到晶圆级键合技术中,键合垫间距小于 0.5 微米的可行性已得到证实,而小于 0.4 微米的扩展限制仍在探索之中。芯片的异质集成往往需要晶粒到晶圆的混合键合,以实现不同的芯片堆叠架构。本综述强调了与扩展到芯片到晶圆级的混合键合相关的一些主要问题。混合键合焊盘结构设计是影响叠层精度灵敏度、铜凹槽或突出要求以及性能的关键因素。本文总结并分析了混合键合方案和焊盘结构设计的案例。简要概述了性能评估和表征方法。通过分析最近的文献报告,探讨了焊盘间距的可扩展性。此外,还探讨了在采用直接贴片或集体晶粒到晶圆键合方案进行晶粒到晶圆键合时,如何管理已划分的晶粒所面临的挑战。此外,还强调了制造设备开发方面的行业合作,以及处理来自不同技术节点和不同工厂的芯片的行业标准。
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引用次数: 0
Forward Kinematics Analysis of High-Precision Optoelectronic Packaging Platform 高精度光电封装平台的正向运动学分析
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-09 DOI: 10.1115/1.4064704
Ziyang Wang, Haibo Zhou, Linjiao Xiao, Lian Duan
To meet the requirements of high-precision motion control for optoelectronic packaging platforms, we propose an improved particle swarm optimization and backpropagation (IPSO-BP) neural network for solving the forward kinematics problem (FKP) of platforms. The focus of this paper is the 6-pss flexible parallel platform commonly used in optoelectronic packaging. First, a platform inverse kinematics problem (IKP) based on a flexibility matrix is solved using geometric and vector analysis. The conventional PSO-BP network is then optimized utilizing uniform design (UD), a random learning strategy, and space reduction techniques in FKP. Finally, simulations and experiments demonstrate that the proposed IPSO-BP network for solving the FKP on high-precision optoelectronic packaging platforms is feasible. Compared to BP and PSO-BP, this network has a higher resolution, faster convergence speed, and error control at the submicron level, which satisfies the motion control requirements of the platform at the micron level. This study lays a solid foundation for the production of high-quality devices in optoelectronic packaging.
为了满足光电封装平台高精度运动控制的要求,我们提出了一种改进的粒子群优化和反向传播(IPSO-BP)神经网络,用于解决平台的正向运动学问题(FKP)。本文的重点是光电封装中常用的 6-pss 柔性并联平台。首先,利用几何和矢量分析解决了基于柔性矩阵的平台逆运动学问题(IKP)。然后,利用统一设计(UD)、随机学习策略和 FKP 中的空间缩小技术对传统 PSO-BP 网络进行优化。最后,模拟和实验证明,在高精度光电封装平台上求解 FKP 的 IPSO-BP 网络是可行的。与 BP 和 PSO-BP 相比,该网络具有更高的分辨率、更快的收敛速度以及亚微米级的误差控制,满足了平台在微米级的 运动控制要求。这项研究为生产高质量的光电封装器件奠定了坚实的基础。
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引用次数: 0
Modeling the Thermal-Compression Flip-Chip Process by Finite Element Analysis 通过有限元分析建立热压倒装芯片工艺模型
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-09 DOI: 10.1115/1.4064703
Yue Huang, Shangshu Li, Yanpei Gao, Haibin Zhu, Gaoyin He, Xiaohui Xie, Chun Lin
For the first time, finite element analysis (FEA) is applied to the thermal-compression flip-chip process in microelectronics. By adding the bump height non-uniformity and the morphology variance, a common basal line is established. Although the experiment confirms the rate-dependence of indium, an approximation is made to derive the material properties in FEA. The relative standard deviation (RSD) of deformation between the FEA model and the reality is around 1% when predicting the misaligned flip-chip specimen. Besides, the modeled bump characteristic with misalignment coincides with the cross-sectional scanning electron microscope (SEM) picture. The model could be served as a powerful tool to guide the manufacturing process.
首次将有限元分析(FEA)应用于微电子学中的热压倒装芯片工艺。通过加入凸点高度不均匀性和形态差异,建立了一条共同的基线。尽管实验证实了铟的速率依赖性,但在有限元分析中,还是对材料特性进行了近似推导。在预测错位倒装芯片试样时,有限元分析模型与实际情况之间的变形相对标准偏差 (RSD) 约为 1%。此外,模型中错位的凸起特征与横截面扫描电子显微镜(SEM)图片相吻合。该模型可作为指导制造过程的有力工具。
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引用次数: 0
Modeling the Thermal-Compression Flip-Chip Process by Finite Element Analysis 通过有限元分析建立热压倒装芯片工艺模型
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-09 DOI: 10.1115/1.4064703
Yue Huang, Shangshu Li, Yanpei Gao, Haibin Zhu, Gaoyin He, Xiaohui Xie, Chun Lin
For the first time, finite element analysis (FEA) is applied to the thermal-compression flip-chip process in microelectronics. By adding the bump height non-uniformity and the morphology variance, a common basal line is established. Although the experiment confirms the rate-dependence of indium, an approximation is made to derive the material properties in FEA. The relative standard deviation (RSD) of deformation between the FEA model and the reality is around 1% when predicting the misaligned flip-chip specimen. Besides, the modeled bump characteristic with misalignment coincides with the cross-sectional scanning electron microscope (SEM) picture. The model could be served as a powerful tool to guide the manufacturing process.
首次将有限元分析(FEA)应用于微电子学中的热压倒装芯片工艺。通过加入凸点高度不均匀性和形态差异,建立了一条共同的基线。尽管实验证实了铟的速率依赖性,但在有限元分析中,还是对材料特性进行了近似推导。在预测错位倒装芯片试样时,有限元分析模型与实际情况之间的变形相对标准偏差 (RSD) 约为 1%。此外,模型中错位的凸起特征与横截面扫描电子显微镜(SEM)图片相吻合。该模型可作为指导制造过程的有力工具。
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引用次数: 0
Forward Kinematics Analysis of High-Precision Optoelectronic Packaging Platform 高精度光电封装平台的正向运动学分析
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-09 DOI: 10.1115/1.4064704
Ziyang Wang, Haibo Zhou, Linjiao Xiao, Lian Duan
To meet the requirements of high-precision motion control for optoelectronic packaging platforms, we propose an improved particle swarm optimization and backpropagation (IPSO-BP) neural network for solving the forward kinematics problem (FKP) of platforms. The focus of this paper is the 6-pss flexible parallel platform commonly used in optoelectronic packaging. First, a platform inverse kinematics problem (IKP) based on a flexibility matrix is solved using geometric and vector analysis. The conventional PSO-BP network is then optimized utilizing uniform design (UD), a random learning strategy, and space reduction techniques in FKP. Finally, simulations and experiments demonstrate that the proposed IPSO-BP network for solving the FKP on high-precision optoelectronic packaging platforms is feasible. Compared to BP and PSO-BP, this network has a higher resolution, faster convergence speed, and error control at the submicron level, which satisfies the motion control requirements of the platform at the micron level. This study lays a solid foundation for the production of high-quality devices in optoelectronic packaging.
为了满足光电封装平台高精度运动控制的要求,我们提出了一种改进的粒子群优化和反向传播(IPSO-BP)神经网络,用于解决平台的正向运动学问题(FKP)。本文的重点是光电封装中常用的 6-pss 柔性并联平台。首先,利用几何和矢量分析解决了基于柔性矩阵的平台逆运动学问题(IKP)。然后,利用统一设计(UD)、随机学习策略和 FKP 中的空间缩小技术对传统 PSO-BP 网络进行优化。最后,模拟和实验证明,在高精度光电封装平台上求解 FKP 的 IPSO-BP 网络是可行的。与 BP 和 PSO-BP 相比,该网络具有更高的分辨率、更快的收敛速度以及亚微米级的误差控制,满足了平台在微米级的 运动控制要求。这项研究为生产高质量的光电封装器件奠定了坚实的基础。
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引用次数: 0
Epoxy-PCB Interfacial Fracture Reliability under Three-Point and Four-Point Bend Loading After Sustained Elevated Temperature Exposure 环氧树脂-PCB 在持续高温暴露后的三点和四点弯曲负载下的界面断裂可靠性
IF 1.6 4区 工程技术 Q2 Engineering Pub Date : 2024-02-01 DOI: 10.1115/1.4064604
P. Lall, A. Pandurangan, K. Blecker
The survivability and reliability of commercial electronic components under very high thermo-mechanical loads are improved using underfilling and potting methods. Potting protects from operating conditions such as moisture, water, or corrosive agents. Furthermore, potting offers damping against shock and vibrations, heat dissipation, and structural support. Being one of the most cost-efficient methods, potting greatly increases reliability and therefore reduces costs for replacements and repairs. It also addresses trapped hot air issues better than other restraint technologies. In potted electronic assemblies, interfacial delamination at the epoxy and PCB interface has been one of the major failure modes. Interfacial delamination happens at the epoxy/PCB interface under dynamic shock loads, which leads to failures at the solder interconnects of the electronic components. Sustained operation and storage at elevated temperatures change the interfacial characteristics at the epoxy/PCB interface. This research is focused on interfacial failure mechanics at epoxy/PCB interfaces with high-temperature isothermal aging. In the selection of epoxy potting material and the reliability assessments of the supplemental restraint systems, fracture parameters such as steady-state strain energy release rate stress and fracture toughness are critical. Rectangular beam specimens of the epoxy/PCB interface are fabricated for different potting compounds and the fracture behavior is studied under quasi-static monotonic three-point and four-point bend loads. One of the main differences between three-point and four-point bend loading is that the maximum bending stress occurs at the midpoint under the point of loading of the specimen in three-point bending, whereas the peak stress is distributed over the section of the specimen between the loading points in four-point bending. Four different potting compounds with diverse properties have been studied. The recommended curing schedule from the manufacturer has been chosen and followed for all the potting compounds. The epoxy/PCB interfacial samples are aged at a high temperature of 100°C for 30 to 180 days. Damage has been assumed to happen at the epoxy/PCB interface under dynamic loads. The critical load of crack initiation for the epoxy/PCB interface has been determined from the experimental findings, and it is used in the computation of fracture toughness values. The fracture toughness values are compared for the various epoxy/PCB systems based on the number of days of thermal aging and the method of flexure testing. A cohesive zone model has been constructed for predominantly mode-I delamination with four-point bend stress to predict the interfacial delamination behavior at the epoxy/PCB interfaces. It has been assumed that the bulk material is linear elastic during the bending load. The cohesive zone has been modeled at the interface, where the interfacial fracture has been assumed to occur. The fracture behavior in
使用底部填充和浇注方法,可提高商用电子元件在极高热机械负荷下的存活率和可靠性。灌封可保护元件免受潮湿、水或腐蚀剂等工作条件的影响。此外,灌封还能减震、散热和提供结构支撑。作为最具成本效益的方法之一,灌封可大大提高可靠性,从而降低更换和维修成本。与其他限制技术相比,它还能更好地解决热空气滞留问题。在灌封电子组件中,环氧树脂和印刷电路板界面的界面分层一直是主要的失效模式之一。在动态冲击载荷作用下,环氧树脂/PCB 接口会发生界面脱层,从而导致电子元件的焊接互连处出现故障。在高温下持续运行和储存会改变环氧树脂/PCB 界面的界面特性。这项研究的重点是高温等温老化环氧树脂/PCB 界面的界面失效力学。在环氧树脂灌封材料的选择和补充约束系统的可靠性评估中,稳态应变能量释放率应力和断裂韧性等断裂参数至关重要。针对不同的灌封材料,我们制作了环氧树脂/PCB 界面的矩形梁试样,并研究了在准静态单调三点和四点弯曲载荷下的断裂行为。三点弯曲和四点弯曲加载的主要区别之一是,三点弯曲的最大弯曲应力发生在试样加载点下方的中点,而四点弯曲的峰值应力分布在加载点之间的试样截面上。研究了四种不同特性的浇注化合物。所有灌封胶都选择并遵循了制造商推荐的固化时间表。环氧树脂/PCB 界面样品在 100°C 高温下老化 30 到 180 天。假定环氧树脂/PCB 界面在动态载荷作用下发生损坏。根据实验结果确定了环氧树脂/PCB 界面裂纹萌发的临界载荷,并将其用于计算断裂韧性值。根据热老化天数和挠曲测试方法,比较了各种环氧树脂/PCB 系统的断裂韧性值。针对四点弯曲应力的主要模式 I 分层构建了一个内聚区模型,以预测环氧树脂/PCB 接口的界面分层行为。假定在弯曲载荷作用下,块体材料具有线性弹性。在界面处建立了内聚区模型,假定界面断裂发生在该处。模拟中的断裂行为是根据实验确定的断裂参数预测的。计算出的内聚区参数是界面所独有的,可用于具有相同环氧树脂/PCB 界面的各种应用,以预测界面分层并选择更合适的灌封材料。
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引用次数: 0
期刊
Journal of Electronic Packaging
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