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Effects of Thermal-Moisture Coupled Field On Delamination Behavior of Electronic Packaging 热湿耦合场对电子封装脱层行为的影响
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-12-21 DOI: 10.1115/1.4064355
Meng-Kai Shih, Guan-Sian Lin, Jonny Yang
Delamination failure is one of the most prevalent and serious reliability issues in microelectronic packaging. To understand this phenomenon further, this study constructs an experimental test system consisting of a double cantilever beam (DCB) fixture, an MTS-Acumen microforce tester, and a temperature and humidity controller. The system is employed to investigate the effects of coupled moisture-thermal loading on the critical strain energy release rate (SERR) at the EMC/Cu leadframe (LF) interface of a WQFN assembly. A three-dimensional (3D) computational model with hygro-thermal loading conditions is developed to evaluate the moisture diffusion, thermal stress, and integrated stress of a multi-chip WQFN package under typical processing conditions and precondition tests. The validated simulation model is then applied with the virtual crack closure technique (VCCT) to investigate the fracture behavior at the EMC/Cu LF interface in the WQFN package. The effects of three design parameters on the SERR performance of the package are identified through a parametric analysis. Finally, a Genetic Algorithm (GA) optimization method is employed to examine the effects of the main structural design parameters of the WQFN package on its delamination reliability. The results are used to determine the optimal packaging design that minimizes the SERR and hence enhances the package reliability.
分层故障是微电子封装中最普遍、最严重的可靠性问题之一。为了进一步了解这一现象,本研究构建了一个实验测试系统,该系统由双悬臂梁(DCB)夹具、MTS-Acumen 微力测试仪和温湿度控制器组成。该系统用于研究湿热耦合负载对 WQFN 组件 EMC/Cu 引线框架 (LF) 接口临界应变能量释放率 (SERR) 的影响。我们开发了一个具有湿热加载条件的三维(3D)计算模型,用于评估多芯片 WQFN 封装在典型加工条件和先决条件测试下的湿气扩散、热应力和综合应力。验证后的仿真模型与虚拟裂缝闭合技术(VCCT)一起用于研究 WQFN 封装中 EMC/Cu LF 接口的断裂行为。通过参数分析,确定了三个设计参数对封装 SERR 性能的影响。最后,采用遗传算法 (GA) 优化方法研究了 WQFN 封装的主要结构设计参数对其脱层可靠性的影响。结果用于确定最佳封装设计,使 SERR 最小化,从而提高封装可靠性。
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引用次数: 0
Simultaneous Characterization of Both Ctes and Thermal Warpages of Flip-Chip Packages with a Cap Using Strain Gauges 使用应变仪同时鉴定带盖倒装芯片封装的电容和热翘曲度
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-12-21 DOI: 10.1115/1.4064354
Yu Wen Wang, M. Tsai, Y. S. Chou
A relatively low-cost and easy-to-use strain gauge measurement is proposed here as an alternative method for simultaneously determining the thermally-induced warpages and the coefficients of thermal expansion (CTEs) of the flip-chip packages with a cap (or lid). The feasibility of the strain gauge method is evaluated by the shadow moiré experiment and the finite element analysis. The stiffness effect of the thermal interface materials (TIMs) in the flip-chip packages with a cap is also considered. The result suggests that the general back-to-back gauge measurement method on the top and bottom of the specimen would cause significant errors as the TIM is relatively compliant, but not for stiff TIMs. This study also proposes a modified gauge method with a few related strain equations for those cases with compliant TIMs to effectively determine their thermal warpages and CTEs by the gauge measurement. The finite element method (FEM) simulation, consistent with shadow moiré, has further validated the effectiveness of the modified gauge method. Therefore, the newly developed and modified method of strain gauges is found to be feasible and workable for simultaneously determining both thermal warpages and CTEs of the flip-chip packages with a cap, especially with a compliant TIM.
本文提出了一种成本相对较低且易于使用的应变片测量方法,作为同时测定带盖倒装芯片封装的热致翘曲和热膨胀系数(CTE)的替代方法。通过阴影摩尔纹实验和有限元分析评估了应变计方法的可行性。此外,还考虑了带盖倒装芯片封装中热界面材料(TIM)的刚度效应。结果表明,在试样顶部和底部采用一般的背靠背量规测量方法会因 TIM 的相对顺从性而导致重大误差,但对于刚性 TIM 则不会。本研究还针对具有顺应性 TIM 的情况,提出了一种改进的量规测量方法,其中包含一些相关的应变方程,可通过量规测量有效确定其热翘曲和 CTE。与阴影摩尔相一致的有限元法(FEM)模拟进一步验证了修正量规法的有效性。因此,新开发和改进的应变片方法对于同时确定带盖倒装芯片封装(尤其是兼容 TIM)的热翘曲和 CTE 是可行的。
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引用次数: 0
Research Status and Progress On Non-Destructive Testing Methods for Defect Inspection of Microelectronic Packaging 用于微电子封装缺陷检测的无损检测方法的研究现状与进展
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-12-21 DOI: 10.1115/1.4064361
Yuan Chen, Zhongyang Wang, Yuhui Fan, Ming Dong, Dengxue Liu
In a highly competitive and demanding microelectronics market, non-destructive testing (NDT) technology has been widely applied to defect detection and evaluation of microelectronic packaging. However, the trend of microelectronic packaging toward miniaturization, high-density, ultra-thin, ultra-light and with small chip footprint, poses an urgent demand for novel NDT methods with high-resolution and large penetration depth, which is utilized for internal defect detection and identification of advanced complicated packages. The conventional NDT methods for microelectronic packaging mainly include optical visual inspection, X-ray inspection, active infrared thermography, scanning acoustic microscopy (SAM), atomic force microscopy (AFM), laser Doppler vibration measuring technique, scanning SQUID microscopy (SSM), electrical impedance spectroscopy (EIS), scanning electron microscope (SEM), and so on. This paper aims to provide a review of addressing their basic principles, advantages, limitations and application researches in the field of defect inspection of microelectronic packaging. Moreover, in order to overcome the shortcomings of the existing NDT methods, this paper emphasizes a novel NDT approach, called hybrid ultrasonic-laser digital holographic microscopy (DHM) imaging inspection method, and discusses its basic principle, merits, key techniques, system construction and experimental results in detail. When some key technical problems can be solved in further research, this method will become a potentially promising technique for defect detection and evaluation of advanced complicated packages.
在竞争激烈、要求苛刻的微电子市场,无损检测(NDT)技术已被广泛应用于微电子封装的缺陷检测和评估。然而,微电子封装向微型化、高密度、超薄、超轻和芯片尺寸小的方向发展的趋势,对具有高分辨率和大穿透深度的新型无损检测方法提出了迫切需求,这种方法可用于先进复杂封装的内部缺陷检测和识别。传统的微电子封装无损检测方法主要包括光学目视检测、X 射线检测、主动红外热成像、扫描声学显微镜(SAM)、原子力显微镜(AFM)、激光多普勒振动测量技术、扫描 SQUID 显微镜(SSM)、电阻抗光谱(EIS)、扫描电子显微镜(SEM)等。本文旨在综述这些技术的基本原理、优势、局限性以及在微电子封装缺陷检测领域的应用研究。此外,为了克服现有无损检测方法的不足,本文着重介绍了一种新型的无损检测方法,即混合超声-激光数字全息显微镜(DHM)成像检测方法,并详细论述了其基本原理、优点、关键技术、系统构建和实验结果。该方法的基本原理、优点、关键技术、系统构建和实验结果等方面进行了详细论述。如果在进一步的研究中能够解决一些关键技术问题,该方法将成为先进复杂封装缺陷检测和评估的一种有潜力的技术。
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引用次数: 0
Heat Dissipation Design Based On Topology Optimization And Auxiliary Materials 基于拓扑优化和辅助材料的散热设计
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-11-20 DOI: 10.1115/1.4064099
Jiawei Chen, Zhongming Yan, Yang Qiao, Feihong Lin, Yu Wang, Hongcheng Zhou
In this paper, a variable density topology optimization method is used to design a high thermal conductivity path structure for efficient heat dissipation. The temperature and stiffness in the module volume are taken as the objective function. Simulations are carried out to compare with a high-power electronics device heat dissipation. The heat dissipation performance (HDP) of structures optimized topologically is further enhanced through the use of auxiliary materials, including highly thermally conductive coating material and phase change material (PCM). The efficient heat dissipation of the constructed topology optimization model and the effectiveness of the proposed method are verified.
本文采用可变密度拓扑优化方法设计了一种高效散热的高导热路径结构。模块体积内的温度和刚度是目标函数。仿真结果与大功率电子设备的散热情况进行了比较。通过使用辅助材料,包括高导热涂层材料和相变材料(PCM),拓扑优化结构的散热性能(HDP)得到了进一步提高。构建的拓扑优化模型的高效散热和所提方法的有效性得到了验证。
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引用次数: 0
Optimal Design of Thermal Cycling Reliability For PBGA Assembly via FEM and Taguchi Method 通过有限元和田口方法优化 PBGA 组件的热循环可靠性设计
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-11-20 DOI: 10.1115/1.4064097
Chao Gao, Chunyue Huang, Ying Liang
A finite element simulation analysis model was developed for a PBGA assembly to analyze its behavior under thermal cyclic loading conditions. The stress distribution in the SAC305 solder joints at different locations within the array was investigated by using ANAND constitutive equations. Subsequently, the thermal fatigue life of the key solder joints was quantified. The study also examined the influence of the solder joint diameter, substrate thickness, solder joint height, PCB thickness, and mold compound height on solder joint stress. Optimization of assembly parameters was achieved through the application of the Taguchi method. An extensive analysis was conducted using different assembly parameter combinations, employing the L9(34) orthogonal array design to explore the thermal cycling effects. The computed average Von Mises stress Δσ for the critical thin-layer elements of solder joints located in hazardous positions within the assembly was notably affected by variations in the solder joint height, substrate thickness, solder joint diameter, and mold compound height. This impact ranked in descending order of significance as solder joint height, substrate thickness, solder joint diameter, and mold compound height. The optimal parameter combination determined was a solder joint height of 0.70 mm, a solder joint diameter of 0.85 mm, a substrate thickness of 0.51 mm, and a mold compound height of 1.12 mm. Implementing this optimized configuration led to a significant 4.07% reduction in average stress ?? for the critical thin-layer elements within hazardous solder joints. Moreover, the extension of the thermal fatigue life was notably improved, achieving an impressive 51.72% increase.
针对 PBGA 组件开发了一个有限元模拟分析模型,以分析其在热循环加载条件下的行为。利用 ANAND 构成方程研究了阵列内不同位置 SAC305 焊点的应力分布。随后,对关键焊点的热疲劳寿命进行了量化。研究还考察了焊点直径、基板厚度、焊点高度、印刷电路板厚度和模具化合物高度对焊点应力的影响。通过应用田口方法实现了装配参数的优化。采用 L9(34) 正交阵列设计,利用不同的装配参数组合进行了广泛的分析,以探索热循环效应。计算得出的位于组件内危险位置的焊点关键薄层元件的平均 Von Mises 应力 Δσ 明显受到焊点高度、基板厚度、焊点直径和模具化合物高度变化的影响。影响程度从大到小依次为焊点高度、基板厚度、焊点直径和模具化合物高度。确定的最佳参数组合为焊点高度 0.70 毫米、焊点直径 0.85 毫米、基板厚度 0.51 毫米和模具化合物高度 1.12 毫米。采用这种优化配置后,危险焊点内关键薄层元件的平均应力显著降低了 4.07%。此外,热疲劳寿命的延长也得到了显著改善,达到了令人印象深刻的 51.72%。
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引用次数: 0
PCB Defect Image Recognition Based On The Multi-Model Fusion Algorithm 基于多模型融合算法的 PCB 缺陷图像识别
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-11-20 DOI: 10.1115/1.4064098
Jiantao Zhang, Zhengfang Chang, Haida Xu, Dong Qu, Xinyu Shi
Printed Circuit Board (PCB) is one of the most important components of electronic products. But the traditional defect detection methods are gradually difficult to meet the requirements of PCB defect detection. The research on PCB defect recognition method based on convolutional neural network is the current trend. The PCB defect image recognition based on DenseNet169 network model is studied in this paper. In order to reduce the omission of PCB defects in actual detection, it is necessary to further improve the sensitivity of the model. Therefore, a classification model based on the multi-model fusion of the DenseNet169 model and the ResNet50 model is proposed. At the same time, the network structure after multi-model fusion is improved. The improved multi-model fusion model Mix-Fusion enables the network to not only retain the recognition accuracy of the ResNet50 model for NG defects and small defect images, but also improve the overall recognition accuracy through the feature reuse and bypass settings of the DenseNet169 model. The experimental results show that when the threshold is 0.5, the sensitivity of the improved multi-model fusion network can reach 99.2%, and the specificity is 99.5%. The sensitivity of Mix-Fusion is 1.2% higher than that of DenseNet169. High sensitivity means fewer missed NG images, and high specificity means less workload for employees. The improved model improves sensitivity and maintains high specificity.
印刷电路板(PCB)是电子产品中最重要的部件之一。但传统的缺陷检测方法逐渐难以满足 PCB 缺陷检测的要求。基于卷积神经网络的 PCB 缺陷识别方法研究是当前的发展趋势。本文研究了基于 DenseNet169 网络模型的 PCB 缺陷图像识别。为了减少实际检测中对 PCB 缺陷的遗漏,有必要进一步提高模型的灵敏度。因此,本文提出了基于 DenseNet169 模型和 ResNet50 模型的多模型融合分类模型。同时,改进了多模型融合后的网络结构。改进后的多模型融合模型 Mix-Fusion,使网络不仅保留了 ResNet50 模型对 NG 缺陷和小缺陷图像的识别精度,还通过 DenseNet169 模型的特征重用和旁路设置提高了整体识别精度。实验结果表明,当阈值为 0.5 时,改进后的多模型融合网络的灵敏度可达 99.2%,特异度为 99.5%。Mix-Fusion 的灵敏度比 DenseNet169 高 1.2%。灵敏度高意味着遗漏的 NG 图像更少,特异性高意味着员工的工作量更少。改进后的模型提高了灵敏度,并保持了高特异性。
{"title":"PCB Defect Image Recognition Based On The Multi-Model Fusion Algorithm","authors":"Jiantao Zhang, Zhengfang Chang, Haida Xu, Dong Qu, Xinyu Shi","doi":"10.1115/1.4064098","DOIUrl":"https://doi.org/10.1115/1.4064098","url":null,"abstract":"Printed Circuit Board (PCB) is one of the most important components of electronic products. But the traditional defect detection methods are gradually difficult to meet the requirements of PCB defect detection. The research on PCB defect recognition method based on convolutional neural network is the current trend. The PCB defect image recognition based on DenseNet169 network model is studied in this paper. In order to reduce the omission of PCB defects in actual detection, it is necessary to further improve the sensitivity of the model. Therefore, a classification model based on the multi-model fusion of the DenseNet169 model and the ResNet50 model is proposed. At the same time, the network structure after multi-model fusion is improved. The improved multi-model fusion model Mix-Fusion enables the network to not only retain the recognition accuracy of the ResNet50 model for NG defects and small defect images, but also improve the overall recognition accuracy through the feature reuse and bypass settings of the DenseNet169 model. The experimental results show that when the threshold is 0.5, the sensitivity of the improved multi-model fusion network can reach 99.2%, and the specificity is 99.5%. The sensitivity of Mix-Fusion is 1.2% higher than that of DenseNet169. High sensitivity means fewer missed NG images, and high specificity means less workload for employees. The improved model improves sensitivity and maintains high specificity.","PeriodicalId":15663,"journal":{"name":"Journal of Electronic Packaging","volume":"16 4","pages":""},"PeriodicalIF":1.6,"publicationDate":"2023-11-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139259368","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Validation and Application of a Finned Tube Heat Exchanger Model for Rack-Level Cooling 机架级冷却翅片管换热器模型的验证与应用
4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-11-10 DOI: 10.1115/1.4063252
R. Khalid, E. Youssef, R. L. Amalfi, A. Ortega, A. P. Wemhoff
Abstract A thermosyphon-based modular cooling approach offers an energy efficient cooling solution with an increased potential for waste heat recovery. Central to the cooling system is an air-refrigerant finned tube heat exchanger (HX), where air is cooled by evaporating refrigerant. This work builds on a previously published two-dimensional (2D) model for the finned-tube HX by updating and validating the model using in-house experimental data collected from the proposed system using R1233zd(E) as the working fluid. The results show that key system variables such as refrigerant outlet quality, air and refrigerant outlet temperatures, and exchanger duty agree within 20% of their experimental counterparts. The validated model is then used to predict the mean heat transfer coefficient on the refrigerant side for each tube in the direction of airflow, indicating a maximum heat transfer coefficient of nearly 1200 W/(m2 K) for a HX duty of 5.3 kW among the tested cases. The validated model therefore enables accurate predictions of HX performance and provides insights into improving the heat exchange efficiency and the corresponding system performance.
基于热虹吸的模块化冷却方法提供了一种节能的冷却解决方案,增加了废热回收的潜力。冷却系统的中心是空气制冷剂翅片管热交换器(HX),其中空气通过蒸发制冷剂冷却。这项工作建立在之前发表的翅片管HX的二维(2D)模型的基础上,通过使用从R1233zd(E)作为工作流体的拟议系统收集的内部实验数据来更新和验证模型。结果表明,制冷剂出口质量、空气和制冷剂出口温度、换热器负荷等关键系统变量与实验值的一致性在20%以内。然后利用验证的模型预测了气流方向上各管制冷剂侧的平均换热系数,结果表明,在HX占空率为5.3 kW的测试用例中,最大换热系数接近1200 W/(m2 K)。因此,经过验证的模型能够准确预测HX性能,并为提高热交换效率和相应的系统性能提供见解。
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引用次数: 0
Temperature-Humidity-Bias Testing and Life Prediction Modeling for Electrochemical Migration in Aerosol-Jet Printed Circuits 气溶胶-喷射印刷电路中电化学迁移的温度-湿度偏差测试和寿命预测模型
4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-11-01 DOI: 10.1115/1.4063541
Beihan Zhao, Aniket Bharamgonda, Edwin Quinn, George Stackhouse, Jason Fleischer, Michael Osterman, Michael Azarian, Daniel Hines, Siddhartha Das, Abhijit Dasgupta
Abstract Aerosol-Jet Printing (AJP) technology, applied to the manufacturing of printed hybrid electronics (PHE) devices, has the capability to fabricate highly complex structures with resolution in the tens-of-microns scale, creating new possibilities for the fabrication of electronic devices and assemblies. The widespread use of AJP in fabricating PHE and package-level electronics necessitates a thorough assessment of not only the performance of AJP printed electronics but also their reliability under different kinds of life-cycle operational and environmental stresses. One important hindrance to the reliability and long-term performance of such AJP electronics is electrochemical migration (ECM). ECM is an important failure mechanism in electronics under temperature and humidity conditions because it can lead to conductive dendritic growth, which can cause dielectric breakdown, leakage current, and unexpected short circuits. In this paper, the ECM propensity in conductive traces printed with AJP process, using silver-nanoparticle (AgNP) based inks, was experimentally studied using temperature-humidity-bias (THB) testing of printed test coupons. Conductive dendritic growth with complex morphologies was observed under different levels of temperature, humidity, and electric bias in the THB experiments. Weibull statistics are used to quantify the failure data, along with the corresponding confidence bounds to capture the uncertainty of the Weibull distribution. A nonmonotonic relationship between time-to-failure and electric field strength was noticed. An empirical acceleration model for ECM is proposed, by combining the classical Peck's model with a quadratic polynomial dependence on electric field strength. This model provides good estimate of acceleration factors for use conditions where the temperature, humidity, and electrical field are within the tested range, but should be extrapolated with care beyond the tested range.
气溶胶喷射打印(AJP)技术应用于印刷混合电子(PHE)器件的制造,具有制造分辨率在几十微米级的高度复杂结构的能力,为电子器件和组件的制造创造了新的可能性。AJP在制造PHE和封装级电子产品中的广泛应用,不仅需要对AJP印刷电子产品的性能进行全面评估,还需要对其在不同生命周期操作和环境应力下的可靠性进行全面评估。影响此类AJP电子器件可靠性和长期性能的一个重要障碍是电化学迁移(ECM)。ECM是温度和湿度条件下电子器件的重要失效机制,因为它会导致导电枝晶生长,从而导致介电击穿、泄漏电流和意外短路。本文采用基于银纳米颗粒(AgNP)的油墨,通过温度-湿度偏置(THB)测试,实验研究了AJP工艺印刷的导电痕迹中的ECM倾向。在不同的温度、湿度和电偏置条件下,观察到导电枝晶生长具有复杂的形貌。采用威布尔统计量对失效数据进行量化,并给出相应的置信区间来捕捉威布尔分布的不确定性。失效时间与电场强度之间存在非单调关系。将经典的Peck模型与电场强度的二次多项式依赖关系相结合,提出了一种经验加速度模型。该模型为温度、湿度和电场在测试范围内的使用条件提供了很好的加速因子估计,但在超出测试范围时应小心外推。
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引用次数: 0
The Research For Quickly Measuring The Diameter And Roundness Of Solder Balls Based On Machine Vision Technology 基于机器视觉技术快速测量焊锡球直径和圆度的研究
4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-10-30 DOI: 10.1115/1.4063918
Tongju Wang, Yahao Liu, Wenqian Zhang, Yongping Lei, Jian Lin, Hanguang Fu, Zipeng Lin
Abstract Solder balls used in electronic packaging should have high dimensional and shape accuracy requirements to ensure the connection quality of solder balls during soldering. However, the existing solder ball detection methods were hard to measure the diameter and roundness in an integrated and fast manner. Therefore, a new method and device for measuring the diameter and roundness of solder balls was proposed based on machine vision technology, including detection device and software design. The experimental device could detect the parameters of at least 40 solder balls at a time. The solder ball image was preprocessed in the software system to improve the quality of the solder ball image, and then the Harris operator successfully detected the concave point on the bonded solder ball image and realized the solder ball separation based on the shortest path matching criterion. Compared with the SEM measurement value, the diameter and roundness of solder balls measured by the detection system were smaller than 3%.
摘要电子封装用的焊锡球对尺寸和形状精度要求较高,以保证焊锡球在焊接过程中的连接质量。然而,现有的焊球检测方法难以综合快速地测量焊球的直径和圆度。为此,提出了一种基于机器视觉技术的焊锡球直径和圆度测量的新方法和新装置,包括检测装置和软件设计。该实验装置可同时检测至少40个焊锡球的参数。在软件系统中对焊锡球图像进行预处理,提高焊锡球图像的质量,然后利用Harris算子成功检测出粘结焊锡球图像上的凹点,并基于最短路径匹配准则实现焊锡球分离。与SEM测量值相比,检测系统测得的焊锡球直径和圆度均小于3%。
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引用次数: 0
A Comprehensive Study On Characterization Of Residual Stress Of Build-Up Layer And Prediction Of Chip Warpage 堆焊层残余应力表征及芯片翘曲预测的综合研究
4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2023-10-30 DOI: 10.1115/1.4063919
Chongyang Cai, Huayan Wang, Junbo Yang, Pengcheng Yin, Seungbae Park
Abstract Better understanding and control of residual stress in the chip build-up layer is becoming more and more important for the assembly process. To estimate the chip warpage and characterize the residual stress, different methods are proposed. However, most of them have high cost or some limitations for the upper build-up material. In this study, an innovative method is proposed to characterize the residual stress and predict the chip warpage behavior of different size chips at different temperatures. The method combines experimental inspection of chip warpage and finite element analysis. By reducing the silicon die thickness, the influence of residual stress in the build-up layer can be amplified. The residual stress can be obtained by inspecting the increased warpage when the silicon dies are reduced to different thicknesses. Correlating the thermal increase warpages of thinner chips can help characterize the effective modulus and CTE of the build-up layer. This study can help better understand the commonly classified build-up layer information. The results show good agreements between two types of samples under the same upstream process flow.
更好地了解和控制芯片堆积层中的残余应力对组装过程变得越来越重要。为了估计切屑翘曲和表征残余应力,提出了不同的方法。然而,它们大多成本高,或对上层堆积材料有一定的限制。在本研究中,提出了一种创新的方法来表征不同尺寸的切屑在不同温度下的残余应力和预测切屑翘曲行为。该方法将切屑翘曲试验检测与有限元分析相结合。通过减小硅模厚度,可以放大堆积层中残余应力的影响。通过对硅模减薄到不同厚度时翘曲量的增加情况进行检测,得到了硅模的残余应力。将较薄芯片的热增翘曲进行关联可以帮助表征堆积层的有效模量和CTE。该研究有助于更好地理解通常分类的堆积层信息。结果表明,在相同的上游工艺流程下,两种类型的样品具有较好的一致性。
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引用次数: 0
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Journal of Electronic Packaging
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