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2023 IEEE International Reliability Physics Symposium (IRPS)最新文献

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Insight Into HCI Reliability on I/O Nitrided Devices 洞察I/O氮化设备的HCI可靠性
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117681
C. Doyen, V. Yon, X. Garros, L. Basset, Tadeu Mota Frutuoso, C. Dagon, C. Diouf, X. Federspiel, V. Millon, F. Monsieur, C. Pribat, D. Roy
Hot carriers injection (HCI) degradation plays an important role in advanced technologies. We carried out an extensive analysis of this degradation mode on 55nm MOS transistors and showed that for large channel lengths, a stress at $V_{G}=V_{D}$ becomes more critical than at $V_{G}= V_{Gibmax}$ condition. This is imputable to an additional degradation mechanism distributed throughout the channel, which likely appears on nitrided samples.
热载流子注入(HCI)降解在先进技术中起着重要作用。我们在55nm MOS晶体管上对这种退化模式进行了广泛的分析,结果表明,对于大通道长度,$V_{G}=V_{D}$条件下的应力比$V_{G}=V_{Gibmax}$条件下的应力更为严重。这可归因于分布在整个通道中的额外降解机制,这可能出现在氮化样品上。
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引用次数: 0
GHz AC to DC TDDB Modeling with Defect Accumulation Efficiency Model 基于缺陷累积效率模型的GHz交直流TDDB建模
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117582
Xinwei Yu, Chu Yan, Yaru Ding, Y. Qu, Yi Zhao
In this work, AC time-dependent dielectric breakdown (TDDB) of SOI MOSFETs was systematically investigated with considerable experimental data using various stress patterns. It is confirmed that both the time to breakdown $(mathrm{T}_{text{BD}})$ and hardness of post-breakdown could be improved at GHz frequency. Based on frequency dependence of TDDB lifetime, we propose a comprehensive defect accumulation efficiency $(xi)$ model related to pulse width, helping to predict AC TDDB lifetime. In addition, new failure mechanisms for on-state TDDB are clarified by weakening HCI coupled effect. This study is significant for lifetime estimation of logic devices under dynamic circuit operations.
在这项工作中,系统地研究了SOI mosfet的交流时变介电击穿(TDDB),并使用各种应力模式进行了大量的实验数据。结果表明,在GHz频率下,击穿时间$( mathm {T}_{text{BD}})$和击穿后硬度均有提高。基于TDDB寿命的频率依赖性,我们提出了一个与脉冲宽度相关的综合缺陷积累效率$(xi)$模型,有助于预测交流TDDB寿命。此外,通过削弱HCI耦合效应,阐明了on-state TDDB的新失效机制。该研究对动态电路下逻辑器件的寿命估计具有重要意义。
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引用次数: 0
Lifetime Modeling of the 4H-SiC MOS Interface in the HTRB Condition Under the Influence of Screw Dislocations 螺位错影响下HTRB条件下4H-SiC MOS界面寿命建模
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117702
E. Brunt, D. Lichtenwalner, J. H. Park, S. Ganguly, J. McPherson
This work explores the lifetime model and failure modes of the 4H-SiC MOS interface in the depletion mode. Unlike accumulation mode TDDB, shorter lifetime and a strong defect dependence are observed in the depletion mode. The 1/E model is found to be a good fit for the observed TDDB lifetime data. Despite having a shorter lifetime than accumulation mode, the modeled lifetimes are sufficient for application deployment.
本工作探讨了4H-SiC MOS界面在耗尽模式下的寿命模型和失效模式。与积累模式的TDDB不同,损耗模式的TDDB寿命较短,缺陷依赖性强。1/E模型可以很好地拟合观测到的TDDB寿命数据。尽管建模的生命周期比积累模式短,但对于应用程序部署来说,建模的生命周期是足够的。
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引用次数: 0
Towards the understanding of ferroelectric-intrinsic variability and reliability issues on MCAM 对MCAM铁电本禀变异性和可靠性问题的认识
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118078
Yishan Wu, Puyang Cai, Zhiwei Liu, P. Ren, Zhigang Ji
The advent of hafnia-based ferroelectric field-effect transistors (FeFETs) prompted the evolution of data-intensive applications, such as multi-bit content addressable memories (MCAMs). Though the identification of FeFET variation sources and the understanding of FeFET retention problems have been discussed in existing literature, the impact of these issues on the FeFET -based MCAM is still not uncovered. Herein, we carried out the investigation on the variability and reliability issues of the FeFET -based MCAM. The threshold voltage ($V_{th}$) variation due to nonuniform ferro electricity results in the long-tailed distribution of delay, thereby limiting the expansion of the MCAM array. The $V_{th}$ shift during retention leads to the accuracy decline, which is more prominent after endurance cycling. Further optimization is required for the MCAM arrays to achieve more accurate and efficient search operation.
基于铪的铁电场效应晶体管(fefet)的出现促进了数据密集型应用的发展,例如多比特内容可寻址存储器(MCAMs)。虽然现有文献已经讨论了ffet变化源的识别和对ffet保留问题的理解,但这些问题对基于ffet的MCAM的影响仍然没有揭示。在此,我们对基于ffet的MCAM的可变性和可靠性问题进行了研究。由于铁电不均匀,阈值电压($V_{th}$)的变化导致延迟的长尾分布,从而限制了MCAM阵列的扩展。保持时的$V_{th}$移位导致精度下降,在耐力循环后更为突出。为了实现更准确、更高效的搜索操作,需要对MCAM阵列进行进一步优化。
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引用次数: 0
Polarity Dependency and 1/E Model of Gate Oxide TDDB Degradation in 3D NAND 3D NAND中栅极氧化物TDDB降解的极性依赖性和1/E模型
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117688
Lina Qu, Shengwei Yang, Ming-Hui He, Rui Fang, Xiaojuan Zhu, Kun Han, Yi He
1/E model is found more appropriate for gate oxide time dependence dielectric breakdown (TDDB) lifetime prediction in CMOS with 6.7 nm SiO2 and poly electrode of 3D NAND technology, instead of widely used E model. It is believed that back-end-of-line process is the key factor contributing to the 1/E model, where hydrogen diffusion is originated from thick SiN and driven by final alloy. And anode hole injection (AHI) may be the dominant physic mechanism of this oxide degradation model. In addition, polarity dependency may be induced by decoupled plasma nitrogen (DPN) process and has no relation to 1/E model.
1/E模型比广泛使用的E模型更适合于预测6.7 nm SiO2和3D NAND技术聚电极的CMOS栅极氧化物时间相关介质击穿(TDDB)寿命。认为后端过程是形成1/E模型的关键因素,该模型中氢的扩散源自厚SiN,并由最终合金驱动。阳极空穴注入(AHI)可能是该氧化降解模型的主要物理机制。此外,极性依赖可能由解耦等离子体氮(DPN)过程引起,与1/E模型无关。
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引用次数: 0
Impact of Design and Process on Alpha-Induced SER in 4 nm Bulk-FinFET SRAM 设计和工艺对4nm块体finfet SRAM α诱导SER的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117908
T. Uemura, Byungjin Chung, Shin-Young Chung, Seungbae Lee, Yuchul Hwang, S. Pae
This paper evaluates alpha-induced soft error rate $boldsymbol{(alpha text{SER})}$ by alpha irradiation test in four different SRAMs and simulation. The test result shows the impact of three factors on $boldsymbol{alpha text{SER}}$: process technology, the number of fins, and fin-pitch. The process technology advancing from 7 nm to 4 nm increases the $boldsymbol{alpha text{SER}}$ by 33%, the #fin change (2-fin to 1-fin) decreases the $boldsymbol{alpha text{SER}}$ by 54%, and the fin-pitch shrinking increases the $boldsymbol{alpha text{SER}}$ by 17%. The simulation results show that the process variation does not contribute to the $boldsymbol{alpha text{SER}}$. The BEOL thickness change can increase the $boldsymbol{alpha text{SER}}$ by 1.24X. This paper also discusses the $boldsymbol{alpha text{SER}}$ trend in SRAM from 130 nm to 4 nm technologies. Overall, the study aims to investigate the impact of process technology and design parameters on $boldsymbol{alpha text{SER}}$ in SRAMs.
本文通过在4种不同的sram上进行α辐照试验和模拟,评估α诱导的软错误率$boldsymbol{(alpha text{SER})}$。试验结果表明,工艺工艺、鳍片数量、鳍片间距三个因素对$boldsymbol{alpha text{SER}}$的影响。从7纳米到4纳米的工艺技术进步使$boldsymbol{alpha text{SER}}$提高了33%,#fin变化(2-fin到1-fin)使$boldsymbol{alpha text{SER}}$降低了54%,鳍间距缩小使$boldsymbol{alpha text{SER}}$提高了17%。仿真结果表明,过程变化对$boldsymbol{alpha text{SER}}$没有影响。BEOL的厚度变化可以使$boldsymbol{alpha text{SER}}$增加1.24倍。本文还讨论了SRAM从130纳米到4纳米技术的趋势。总体而言,本研究旨在探讨工艺技术和设计参数对sram中$boldsymbol{alpha text{SER}}$的影响。
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引用次数: 0
Scaling Trends and the Effect of Process Variations on the Soft Error Rate of advanced FinFET SRAMs 高级FinFET sram的标度趋势及工艺变化对软错误率的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118025
B. Narasimham, H. Luk, C. Paone, A-R. Montoya, T. Riehle, M. Smith, L. Tsau
Scaling trends in the alpha-particle and neutron induced SRAM SER shows an increase in the per-bit SER and percent multi-cell upsets at the 5-nm FinFET process compared to the 7-nm process. Neutron SER tests across process corners show that the faster process corner SER is up to $2times$ higher than the slower process corner SER in 7-nm and 5-nm FinFETs. The process corner dependence of SER is attributed to differences in propagation delay and single-event transient pulse-widths.
α粒子和中子诱导的SRAM SER的缩放趋势表明,与7纳米工艺相比,5nm FinFET工艺的每比特SER和多单元扰动百分比有所增加。跨工艺角的中子SER测试表明,在7纳米和5纳米finfet中,较快的工艺角SER比较慢的工艺角SER高出2倍。SER的过程角依赖性归因于传播延迟和单事件瞬态脉冲宽度的差异。
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引用次数: 0
A Unified Framework to Explain Random Telegraph Noise Complexity in MOSFETs and RRAMs 一个解释mosfet和rram随机电报噪声复杂性的统一框架
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117832
Sara Vecchi, P. Pavan, F. Puglisi
As well known, the implementation of $text{high}-kappa$ dielectrics (e.g., $text{HfO}_{2})$ in nanoscale devices is unavoidable to cope with the device scaling required by the market. Nevertheless, due to the higher defect density compared to $text{SiO}_{2}$, hafnium oxide exhibits stronger and more complex Random Telegraph Noise (RTN), namely one of the most relevant defect-related reliability issues in ultra-thin oxides. However, depending on the device type, $text{HfO}_{2}$ can be characterized by different defect density and therefore leading to a different RTN signals. In particular, in Resistive Random Access Memory (RRAM) devices RTN arises very often but shows a high degree of complexity (e.g., multilevel, anomalous, temporary RTN) and instabilities [3], [4] which hinders its characterization. Conversely, in MOSFETs RTN has a small occurrence and it typically exhibits a simple behavior (i.e., 2-level signal) if detected. In this work, we fully analyze such phenomena in different devices providing a unified and physics-based framework which is also confirmed by experiments. The results of this study will be crucial for the design of new devices and circuits for emerging RTN-based applications, such as True Random Number Generators (TRNGs).
众所周知,在纳米级器件中实施$text{high}-kappa$电介质(例如$text{HfO}_{2})$是不可避免的,以应对市场所需的器件缩放。然而,由于与$text{SiO}_{2}$相比缺陷密度更高,氧化铪表现出更强和更复杂的随机电报噪声(RTN),即超薄氧化物中最相关的缺陷相关可靠性问题之一。但是,根据器件类型的不同,$text{HfO}_{2}$可以具有不同的缺陷密度,从而导致不同的RTN信号。特别是,在电阻随机存取存储器(RRAM)器件中,RTN经常出现,但表现出高度的复杂性(例如,多电平,异常,临时RTN)和不稳定性[3],[4]阻碍了其表征。相反,在mosfet中,RTN的发生率很小,如果检测到,它通常表现出简单的行为(即2电平信号)。在这项工作中,我们充分分析了不同设备中的这种现象,提供了一个统一的基于物理的框架,这也得到了实验的证实。这项研究的结果对于新兴的基于rtn的应用(如真随机数发生器(trng))的新器件和电路的设计至关重要。
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引用次数: 0
Dielectric Thickness and Fin Width Dependent OFF-State Degradation in AlGaN/GaN SLCFETs AlGaN/GaN slcfet中介电厚度和翅片宽度相关的OFF-State退化
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118346
Akhil S. Kumar, M. Uren, Matthew D. Smith, Martin Kuball, J. Parke, H. G. Henry, R. Howell
Accelerated OFF -State stressing of multichannel AlGaN/GaN Superlattice Castellated Field Effect Transistors (SLCFET) with varying dielectric thickness $(d_{i})$ and fin-width $(W_{fi n})$ was studied using noise measurements. As $d_{i}$ increased, the failure mechanism changed from an abrupt breakdown to gradual time dependent dielectric breakdown (TDDB). Smaller $W_{fi n}$ is found to extend lifetime compared to wider $W_{fi n}$ under such stressing condition. Percolation theory and associated trap generation during stressing can explain the observed behavior.
采用噪声测量方法研究了不同介电厚度$(d_{i})$和翅片宽度$(W_{fi n})$的多通道AlGaN/GaN超晶格场效应晶体管(SLCFET)的加速关闭状态应力。随着$d_{i}$的增大,介质击穿由突然击穿转变为逐渐的随时间变化的介质击穿(TDDB)。在此应力条件下,较小的$W_{fi n}$比较宽的$W_{fi n}$寿命更长。渗流理论和应力作用下圈闭的产生可以解释所观察到的现象。
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引用次数: 2
Industrial approach to the chip and package reliability of SiC MOSFETs (Invited) SiC mosfet芯片和封装可靠性的工业方法(特邀)
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118084
E. Mengotti, E. Bianda, D. Baumann, G. Schlottig, F. Canales
SiC-based power MOSFETs have become the major challengers for state-of-the-art Si technology in numerous power electronics applications. In ABB's portfolio, the list of examples includes motor drives, renewable energy conversion, battery energy storage systems and uninterruptable power supplies. The performance advantages of the wide-band-gap semiconductor are multiple and allow a clear size-to-cost benefit at the system level, making the introduction of SiC into selected products meaningful. To fully profit from the technology, the reliability level needs to be at least equivalent to the legacy Si-based solutions. However, the new technology requires new tests that address the relevant and novel failure mechanisms. The approach used by ABB is discussed in this paper. As part of the approach, various tests and exemplary results are presented, such as high voltage, high temperature tests, high dV / dt tests, avalanche ruggedness, repetitive surge current operation and dedicated gate oxide tests, as well as packaging related tests such as power cycling. The results show that manufacturers have gained control over some of the earlier limitations in first generation SiC devices, and that the available standards must evolve to reflect the SiC specific requirements compared to the previous semiconductor technology.
基于sic的功率mosfet已成为众多电力电子应用中最先进的Si技术的主要挑战者。在ABB的产品组合中,示例列表包括电机驱动,可再生能源转换,电池储能系统和不间断电源。宽带隙半导体的性能优势是多方面的,并且在系统层面上具有明显的尺寸成本效益,这使得将SiC引入选定的产品具有意义。为了充分利用该技术,可靠性水平需要至少与传统的基于si的解决方案相当。然而,新技术需要新的测试来解决相关的和新的失效机制。本文讨论了ABB采用的方法。作为该方法的一部分,介绍了各种测试和示例性结果,如高压、高温测试、高dV / dt测试、雪崩坚固性、重复浪涌电流操作和专用栅极氧化物测试,以及与封装相关的测试,如电源循环。结果表明,制造商已经控制了第一代SiC器件的一些早期限制,并且与以前的半导体技术相比,现有的标准必须发展以反映SiC的特定要求。
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引用次数: 0
期刊
2023 IEEE International Reliability Physics Symposium (IRPS)
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