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2023 IEEE International Reliability Physics Symposium (IRPS)最新文献

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MTJ degradation in multi-pillar SOT-MRAM with selective writing 选择性写入的多柱SOT-MRAM的MTJ退化
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117917
S. V. Beek, K. Cai, Kaiquan Fan, G. Talmelli, Anna Trovato, N. Jossart, S. Rao, A. Chasin, S. Couet
In SOT-MRAM, the writing path is decoupled from the reading path and therefore considered robust against MgO breakdown in the MTJ. At operation, high current densities flow through the thin metallic SOT track underneath the MTJ, causing significant heating of both the track and MTJ. At these elevated temperatures, diffusion mechanisms can cause failure of the MTJ. We find that longer tracks heat up more and can sustain less SOT current. Moreover, applying a voltage $(V_{G})$ on the MTJ during SOT stress can cause MgO breakdown before failure by diffusion occurs. With a failure model, we can predict that breakdown event. This is particularly important in multi-pillar concepts that consist of longer tracks and use $V_{G}$ for selectivity.
在SOT-MRAM中,写入路径与读取路径解耦,因此被认为对MTJ中的MgO击穿具有鲁棒性。在运行时,高电流密度流过MTJ下面的薄金属SOT轨道,导致轨道和MTJ都显着加热。在这样的高温下,扩散机制会导致MTJ失效。我们发现,更长的履带升温更多,可以维持更少的SOT电流。此外,在SOT应力过程中,在MTJ上施加电压$(V_{G})$可以使MgO在扩散失效之前击穿。有了故障模型,我们就可以预测故障事件。这在由较长的轨道组成并使用$V_{G}$进行选择性的多支柱概念中尤其重要。
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引用次数: 0
A 13-bit Radiation-Hardened SAR-ADC with Error Correction by Adaptive Topology Transformation 基于自适应拓扑变换纠错的13位抗辐射SAR-ADC
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118123
Yuya Aoki, Tatsuya Iwata, Takuji Miki, Kazutoshi Kobayashi, Takefumi Yoshikawa
A 13-bit radiation-hardened-by-design (RHBD) successive approximation register ADC (SAR-ADC) has been proposed with almost no area overhead. The RHBD SAR-ADC has a differential topology with a couple of radiation detectors, and these radiation detectors are assigned, one for each of the differential data paths. The ADC transforms the topology adaptively from differential to single based on the result of radiation detection for error correction or reduction. Thanks to the error correction or reduction by the Adaptive Topology Transformation (ATT), measurement results show an order of magnitude improvement in cross-section and more than 10 dB SNDR enhancement under over 106 count/cm2 irradiation condition.
提出了一种几乎没有面积开销的13位辐射强化设计(RHBD)逐次逼近寄存器ADC (SAR-ADC)。RHBD SAR-ADC具有具有一对辐射探测器的差分拓扑,并且这些辐射探测器是分配的,每个差分数据路径一个。ADC根据辐射检测的结果自适应地将拓扑从微分变换为单,以校正或减小误差。由于自适应拓扑变换(ATT)的误差校正或减小,测量结果显示,在超过106个计数/cm2的辐照条件下,截面改善了一个数量级,SNDR增强了10 dB以上。
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引用次数: 0
Demonstration on Warpage Estimation Approach Utilized in Fan-Out Panel-Level Packaging Enabled by Multi-Scale Process-Oriented Simulation 基于多尺度工艺模拟的扇形面板级封装翘曲估计方法演示
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118246
Chi-Wei Wang, Chet Chang, Chang-Chun Lee
Despite of the enlarged area of the fan-out panel-level packaging (FO-PLP), the process-induced warpage may cause a serious yielding problem in the subsequent process and assembly for the package. The finite element analysis (FEA) is proposed in many researches to overcome the problem of time cost. The important issue is the discontinuous model and warpage after the sawing process from panel to strip, and strip to unit package for FEA. In this research, a redistribution layer (RDL) first FO-PLP is presented with integrated multiple scale of package model in FEA analysis. The equivalent materials method and the equivalent stress-free temperature in the process-orientation simulation is applied on RDL. The chemical shrinkage of molding underfill is also concerned. The multipoint constraint method is applied on the boundary of multiple scale model to solve the multiple scale problem with panel and strip. The warpage error between the simulation and experiment are below 10 %.
尽管扇形面板级封装(FO-PLP)的面积扩大,但工艺引起的翘曲可能会在后续的工艺和封装中引起严重的屈服问题。为了克服时间成本问题,许多研究都提出了有限元分析方法。在有限元分析中,重要的问题是从板料到带材、带材到单元包装的锯切过程中的不连续模型和翘曲。在有限元分析中,提出了一种集成多尺度封装模型的再分配层(RDL)优先FO-PLP。将等效材料法和等效无应力温度法应用于RDL的工艺取向模拟。还讨论了模压下填料的化学收缩问题。将多点约束方法应用于多尺度模型的边界,解决了带板条的多尺度问题。仿真与实验的翘曲误差在10%以下。
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引用次数: 0
Decomposition of Vertical and Lateral Charge Loss in Long-term Retention of 3-D NAND Flash Memory 三维NAND闪存长期保留中垂直和横向电荷损失的分解
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117868
Joung-June Park, G. Yoon, Donghyun Go, Donghwi Kim, Ukju An, Jongwoo Kim, Jungsik Kim, Jeong-Soo Lee
For long-term retention characteristics of 3-D NAND flash memory, a method is proposed to decompose the measured $boldsymbol{V_{T}}$ shift into several charge loss mechanisms, including lateral migration (LM), band-to-trap tunneling (BT), trap-to-band tunneling (TB), and thermal emission (TE). Based on the $Delta boldsymbol{V_{T}}$ of the E-E-E pattern (EEE) at room temperature, the LM mechanisms of the P-E-P pattern (PEP) at high temperature (120 °C) are separated into the LM caused by hole (LMH) and electron (LME), respectively. Finally, the E-P-E pattern (EPE) and PEP are successfully decomposed into LMH, LME, TE, BT, and TB of trapped charges in the nitride layer. The proposed methodology is promising to quantitatively evaluate the charge loss mechanism in 3-D NAND flash memory.
针对三维NAND闪存的长期保持特性,提出了一种方法,将测量到的$boldsymbol{V_{T}}$位移分解为几种电荷损失机制,包括横向迁移(LM)、带到阱隧道(BT)、阱到带隧道(TB)和热发射(TE)。基于E-E-E模式(EEE)在室温下的$Delta boldsymbol{V_{T}}$,将P-E-P模式(PEP)在高温(120℃)下的LM机制分别划分为空穴(LMH)和电子(LME)引起的LM。最后,将E-P-E模式(EPE)和PEP成功分解为氮化物层中捕获电荷的LMH、LME、TE、BT和TB。该方法有望定量评价三维NAND闪存中的电荷损耗机制。
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引用次数: 0
Current Scalability Issues in Multi-Bank 5V PMOS ESD structures: Root cause and Design Guideline 当前多银行5V PMOS ESD结构的可扩展性问题:根本原因和设计指南
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117950
N. K. Kranthi, Yang Xiu, Yang Xiao, R. Sankaralingam
In this work, a unique Human Body Model (HBM) failure is presented in 5V-PMOS multi-finger structures. The failure is sensitive to the multi-bank layout, generally used to achieve higher holding voltage. Missing Transmission Line Pulse (TLP) failure current (It2) scalability is detected with pulse width, in multi-bank structures and a correlation is established with lower HBM failure. A detailed 3D- TCAD analysis approach is used to understand the PMOS turn-on in the single-bank and multi-bank structures, in turn, the It2 scalability for longer pulse width. The obtained insights are used to provide design guidelines for developing robust PMOS devices.
在这项工作中,在5V-PMOS多指结构中提出了一种独特的人体模型(HBM)失效。该故障对多组布局比较敏感,一般用于实现较高的保持电压。失踪的传输线脉冲(TLP)故障电流(It2)可伸缩性与脉宽检测,在multi-bank较低的结构和建立相关HBM失败。详细的3D- TCAD分析方法用于了解PMOS在单组和多组结构中的导通,进而了解It2在更长的脉冲宽度下的可扩展性。所获得的见解用于为开发健壮的PMOS器件提供设计指南。
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引用次数: 0
Reliability issues of gate oxides and $p-n$ junctions for vertical GaN metal–oxide–semiconductor field-effect transistors (Invited) 垂直GaN金属氧化物半导体场效应晶体管栅极氧化物和p-n结的可靠性问题(特邀)
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118047
T. Narita, D. Kikuta, K. Ito, T. Shoji, Tomohiko Mori, S. Yamaguchi, Y. Kimoto, K. Tomita, M. Kanechika, T. Kondo, T. Uesugi, Jun Kojima, J. Suda, Yoshitaka Nagasato, S. Ikeda, Hiroki Watanabe, M. Kosaki, T. Oka
We focus on reliability issues of gate oxides and $p-n$ junctions to realize vertical GaN metal-oxide-semiconductor field-effect transistors (MOSFETs). An annealed AlSiO gate oxide on GaN displayed a lifetime of over 20 years at 150 °C and suppressed positive bias instability in MOSFETs. The key to high channel mobility and stability under positive gate bias is the interface structure designed to minimize oxide border traps. We also evaluated the reliability of GaN p-n diodes (PNDs) on freestanding GaN substrates with different threading dislocation densities. The reverse leakage for PNDs involving threading dislocations was explained by variable-range hopping, while the reverse leakage for dislocation-free PNDs was dominated by band-to-band tunneling. The fabricated PNDs demonstrated excellent robustness under high-temperature reverse bias. However, after continuous forward current stress, reverse leakage pathways were formed at threading screw dislocations, which should be minimized in future GaN substrates.
我们重点研究栅极氧化物和p-n结的可靠性问题,以实现垂直GaN金属氧化物半导体场效应晶体管(mosfet)。GaN上退火的AlSiO栅极氧化物在150°C下显示出超过20年的寿命,并且抑制了mosfet中的正偏置不稳定性。在正栅极偏压下,高通道迁移率和稳定性的关键是设计最小化氧化物边界陷阱的界面结构。我们还评估了GaN p-n二极管(PNDs)在不同螺纹位错密度的独立GaN衬底上的可靠性。包含螺纹位错的pnd的反向泄漏以变程跳变解释,而无位错的pnd的反向泄漏以带间隧穿为主。制备的pnd在高温反向偏置下具有良好的鲁棒性。然而,在持续的正向电流应力后,螺纹螺纹位错处形成了反向泄漏通道,这在未来的GaN衬底中应该最小化。
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引用次数: 0
Development and Product Reliability Characterization of Advanced High Speed 14nm DDR5 DRAM with On-die ECC 带有片上 ECC 的先进高速 14 纳米 DDR5 DRAM 的开发和产品可靠性鉴定
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117889
S. Lee, Nam-Hee Lee, K. W. Lee, J. H. Kim, J. Jin, Y. S. Lee, Y. Hwang, H. S. Kim, S. Pae
The reliability characterization of fabricated 14nm DDR5 DRAMs with On-die Error Correction Code (ECC) and EUV process is presented for the first time. Intrinsic reliability of FEOL and BEOL WLR showed well above 10yrs of lifetime, 125°C. The products demonstrated no fails in high temperature operating lifetime (HTOL) of 1000hrs. The On-Die ECC design improved the single bit error rate by $boldsymbol{10^{-6}}$ times (refresh time $boldsymbol{ > 4mathrm{x}}$). The failure rate, ppm of manufacturing burn-in process confirmed the healthiness of the baseline material and also effectively screen out and monitor any random defects. The presented 14nm DDR5 DRAMs are well in production for the PC segments and have been shipping and qualified for the Server segments.
首次介绍了采用片上纠错码 (ECC) 和 EUV 工艺制造的 14 纳米 DDR5 DRAM 的可靠性特性。在 125°C 温度条件下,FEOL 和 BEOL WLR 的内在可靠性远高于 10 年寿命。产品在 1000 小时的高温工作寿命(HTOL)中未出现故障。片上 ECC 设计将单比特错误率提高了 $boldsymbol{10^{-6}}$ 倍(刷新时间 $boldsymbol{ > 4mathrm{x}}$ )。故障率、生产烧制过程的 ppm 值证实了基线材料的健康状况,同时也有效地筛查和监控了任何随机缺陷。所展示的 14nm DDR5 DRAM 在个人电脑领域已投入生产,在服务器领域也已出货并通过了认证。
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引用次数: 0
Consideration on the extrapolation of the low insulator field TDDB in 4H-SiC power MOSFETs 4H-SiC功率mosfet低绝缘子场TDDB外推的思考
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118116
P. Fiorenza, F. Cordiano, M. Alessandrino, A. Russo, E. Zanetti, M. Saggio, C. Bongiorno, F. Giannazzo, F. Roccaforte
The gate oxide lifetime in 4H-SiC power MOSFETs is typically assessed at fixed and constant gate bias stress, monitoring the time-dependent dielectric breakdown (TDDB). In this work, the TDDB results obtained at three different insulator fields - either for positive and negative values - have been compared at wafer level. The TDDB was measured at 200°C under the following conditions: (i) 3 (positive or negative) gate bias values; (ii) 3 (positive or negative) gate current values; (iii) 3 different insulator fields varying the gate bias stress voltage in each device after propaedeutic capacitance measurements to determine the gate insulator thickness. The three methods gave three lifetime prediction at low oxide field (under standard device operation). The physical explanation of these findings can be found, taking into account the device design across the source-body-JFET junction and the transient trapping phenomena at the SiO2 interface.
在4H-SiC功率mosfet中,栅极氧化物寿命通常在固定和恒定栅极偏置应力下进行评估,监测随时间变化的介电击穿(TDDB)。在本工作中,在三种不同的绝缘体场中获得的TDDB结果-无论是正值还是负值-已经在晶圆水平上进行了比较。在200°C下,在以下条件下测量TDDB:(i) 3个(正或负)栅极偏置值;(ii) 3个(正或负)栅极电流值;(iii) 3个不同的绝缘子场改变每个器件的栅极偏置应力电压,通过预传电容测量来确定栅极绝缘子厚度。三种方法在低氧化场下(在标准装置操作下)给出了三种寿命预测。考虑到源-体- jfet结的器件设计和SiO2界面上的瞬态捕获现象,可以找到这些发现的物理解释。
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引用次数: 0
Towards Chip-Package-System Co-optimization of Thermally-limited System-On-Chips (SOCs) 热限制片上系统(soc)的芯片-封装-系统协同优化
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117979
Subrat Mishra, S. Venkateswarlu, B. Vermeersch, Moritz Brunion, M. Lofrano, D. Abdi, H. Oprins, D. Biswas, O. Zografos, G. Hiblot, G. V. D. Plas, P. Weckx, G. Hellings, J. Myers, F. Catthoor, J. Ryckaert
Surge in compute-demand in consumer products, mobile phones, auto mobiles, datacenters for high performance computing (HPC) applications brings in major thermal challenges. This stems from growth in transistor density over the years and the associated power density increase. Advanced packaging techniques like 2.5D and 3D integration have a compounding effect. Hitting the thermal limits, not only affects the raw performance, power but also limits reliability of the product. Therefore, it has become necessary to foresee appropriate thermal solutions for target applications early in product development phase during thermal/power planning to assess viability of technology choices. In this paper, we assess the temperature distribution & anticipate cooling needs for future thermally-limited SOCs in advanced Angstrom nodes (A14 & A5). Thermal resistance breakdown from multiple sources is carried out to decouple contributions so as to explore possibility of a co-optimization of chip-package-cooling system. Some of the insights from our analysis could aid system software to do thermal aware job scheduling.
消费类产品、移动电话、汽车、高性能计算(HPC)应用的数据中心的计算需求激增带来了重大的热挑战。这源于多年来晶体管密度的增长和相关功率密度的增加。先进的包装技术,如2.5D和3D集成具有复合效应。达到热极限,不仅会影响原始性能,功率,还会限制产品的可靠性。因此,在热/功率规划的产品开发阶段早期,就有必要为目标应用预见合适的热解决方案,以评估技术选择的可行性。在本文中,我们评估了先进埃斯特罗姆节点(A14和A5)中未来热限制soc的温度分布并预测了冷却需求。通过多源热阻击穿来解耦贡献,从而探索芯片封装冷却系统协同优化的可能性。从我们的分析中获得的一些见解可以帮助系统软件进行热感知作业调度。
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引用次数: 0
Reliability of GaN MOSc-HEMTs: From TDDB to Threshold Voltage Instabilities (Invited) GaN mosc - hemt的可靠性:从TDDB到阈值电压不稳定性(特邀)
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118180
W. Vandendaele, C. Leurquin, R. Lavieville, M. Jaud, A. Viey, R. Gwoziecki, B. Mohamad, E. Nowak, A. Constant, F. Iucolano
In this paper, we review the gate reliability of the GaN MOSc-HEMT as well as the specific method to address the peculiarities of these transistors. The long term forward gate TDDB will be explored showing the impact of the gate recession and gate material on the expected maximum gate oxide field $(mathbf{E_{OX, MAX}})$ at 10 years. The gate related threshold voltage instabilities (pBTI and nBTI) are reviewed showing the interplay between epitaxy material and gate oxide process. Finally, the high drain voltage influence on Vth (HVBTI) is studied through the development of specific and dedicated setup allowing a deeper understanding of the device instabilities during operation.
在本文中,我们回顾了GaN MOSc-HEMT的栅极可靠性以及解决这些晶体管特性的具体方法。将探索长期正向栅TDDB,显示栅衰退和栅材料对10年最大栅氧化场$(mathbf{E_{OX, MAX}})$的影响。综述了与栅极相关的阈值电压不稳定性(pBTI和nBTI),揭示了外延材料与栅极氧化工艺之间的相互作用。最后,高漏极电压对Vth (HVBTI)的影响通过开发特定和专用的设置来研究,从而更深入地了解器件在运行期间的不稳定性。
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引用次数: 0
期刊
2023 IEEE International Reliability Physics Symposium (IRPS)
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