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2023 IEEE International Reliability Physics Symposium (IRPS)最新文献

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GHz Cycle-to-Cycle Variation in Ultra-scaled FinFETs: From the Time-Zero to the Aging States 超尺度finfet的GHz周期变化:从时间零到老化状态
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118068
Y. Qu, Chu Yan, Xinwei Yu, Yaru Ding, Yi Zhao
Through tremendous experimental data, this study focuses on the cycle-to-cycle variation (CCV) in ultra-scaled FinFETs at the GHz circuit speed, which is an urgent demand for the reliability community but has seldom been reported so far. The random occupancy of traps and interface states behind CCV was investigated with the different switching speeds and full ${V_{G}, V_{D}}$ bias space. Moreover, we observed the CCV degradation during hot carrier degradation (HCD) and further explored its mechanism based on statistical datasets. This CCV study during HCD is helpful for the reliability variability-aware device/circuit co-design in advanced technology nodes.
通过大量的实验数据,本研究重点研究了GHz电路速度下超尺度finfet的周间变化(CCV),这是可靠性界的迫切需求,但迄今为止很少有报道。研究了不同开关速度和满${V_{G}, V_{D}}$偏置空间下CCV后阱和界面态的随机占用。此外,我们观察了热载流子降解(HCD)过程中CCV的降解,并基于统计数据进一步探讨了其机理。本研究对于高阶技术节点的可靠性可变感知器件/电路协同设计具有一定的指导意义。
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引用次数: 0
A Physics-based Model for Long Term Data Retention Characteristics in 3D NAND Flash Memory 三维NAND闪存长期数据保留特性的物理模型
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118096
Rashmi Saikia, Aseer Ansari, Souvik Mahapatra
Charge loss mechanisms during Data retention (DR) in GAA 3D NAND devices, Inter-cell charge loss of electrons in the Charge Trap Layer (CTL), and In-cell charge loss of electrons from tunnel oxide are modeled and analyzed using a physics-based Activated Barrier Double Well Thermionic Emission (ABDWT) model. The measured data retention characteristics for Solid Pattern (SP), of various distribution, sigma $(sigma)$ of the lower tail of the Cell Voltage Distribution (CVD) has been studied and modeled for various temperatures and programming levels (PL). Checkered pattern (CP) measured long-term data retention characteristics at various temperatures and program levels are modeled for both the loss components. 10 years projection is extrapolated across temperature and programing levels.
利用基于物理的激活势垒双阱热离子发射(ABDWT)模型,对GAA 3D NAND器件中数据保留(DR)过程中的电荷损失机制、电荷阱层(CTL)中电子的胞间电荷损失以及隧道氧化物中电子的胞内电荷损失进行了建模和分析。在不同温度和编程水平(PL)下,研究了不同分布的固态模式(SP)、电池电压分布(CVD)下尾的sigma $(sigma)$的测量数据保留特性,并建立了模型。方格模式(CP)测量的长期数据保留特性在不同的温度和程序水平的损失组件建模。10年的预测是根据温度和编程水平推断出来的。
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引用次数: 0
ESD Avalanche Diodes Degradation in EOS Regime ESD雪崩二极管在EOS环境下的退化
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118321
H. Sarbishaei, V. Vashchenko
Degradation of ESD avalanche diodes breakdown voltage (BV) characteristics in electrical overstress (EOS) regimes is observed and studied in BCD process technology. Both walk-in and walk-out effects are studied as a function of device structure parameters. It was shown that, in constant current avalanche stress regime, the level and direction of BV degradation can be controlled by changing the RESURF poly plate. High current breakdown TLP characteristics have been analyzed for the same phenomena
研究了静电放电雪崩二极管在超应力条件下击穿电压(BV)特性的退化。研究了随器件结构参数变化的进、出效应。结果表明,在恒流雪崩应力条件下,通过改变多聚板的形貌可以控制BV降解的程度和方向。对相同现象的大电流击穿TLP特性进行了分析
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引用次数: 0
Unique Lattice Temperature Dependent Evolution of Hot Electron Distribution in GaN HEMTs on C-doped GaN Buffer and its Reliability Consequences c掺杂GaN缓冲液中GaN hemt中热电子分布的独特晶格温度依赖演化及其可靠性后果
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118255
R. R. Chaudhuri, Vipin Joshi, Amratansh Gupta, Tanmay Joshi, R. Malik, Mehak Ashraf Mir, Sayak Dutta Gupta, M. Shrivastava
Through this work, a unique substrate temperature dependent evolution of hot electron distribution is reported in GaN HEMTs on C-doped GaN buffer, and its reliability consequences are discussed. With rise in substrate temperature, significant rise in hot electron concentration, its energy, and interaction with buffer traps is observed at the drain edge, in contrast to an expected reduction in hot electron population. A mechanism based on carrier de-trapping and transport to drain is proposed and experimentally validated.
通过这项工作,报道了c掺杂GaN缓冲液上GaN hemt中热电子分布的独特衬底温度依赖演化,并讨论了其可靠性后果。随着衬底温度的升高,在漏极边缘观察到热电子浓度、能量和与缓冲陷阱的相互作用显著上升,与预期的热电子数量减少相反。提出了一种基于载流子脱捕和输运的机制,并进行了实验验证。
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引用次数: 0
Current Injection Effect on ESD Behaviors of the Parasitic Bipolar Transistors inside P+/N-well diode 电流注入对P+/ n阱二极管内寄生双极晶体管ESD行为的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118073
Hui Wang, Pengyu Lai, Zhongren Chen
The utilization of parasitic bipolar structures inside a typical P+/N-well as an additional electrostatic discharge (ESD) path is explored. The optimization on the lateral PNP (LPNP) is discussed. Device transmission line pulse (TLP) characterizations and technology computer aided design (TCAD) simulations by Silvaco have been performed to investigate the stand-alone LPNP ESD performance and effects of the base current injection on ESD behaviors of parasitic bipolar transistors.
利用寄生双极结构在一个典型的P+/ n井作为一个额外的静电放电(ESD)路径进行了探索。讨论了横向PNP (LPNP)的优化问题。通过Silvaco进行器件传输线脉冲(TLP)表征和技术计算机辅助设计(TCAD)仿真,研究了lppp器件的独立ESD性能以及基极电流注入对寄生双极晶体管ESD行为的影响。
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引用次数: 0
Stress Migration of Aluminum Backside Interconnect in Xtacking® 铝背面互连在xtack®中的应力迁移
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117817
Kang Yang, Suhui Yang, Yan Ouyang, Sheng-Chieh Yang, Kun Han, Yi He
Backside (BS) interconnects has shown significant advantages in 3D integral circuits for tackling the technology scaling induced frontside (FS) back-end-of-line (BEOL) routing congestion and RC delay challenge. As a representative BS interconnects architecture, Xtacking ® 1.0 & 2.0 innovated by YMTC employs one Al metal layer at backside of memory cell wafer as BS interconnect routing for signal transfer. In this paper, we exploit the effect of silicon substrate to stress migration (SM) reliability of such Al BS interconnects, and offer several process approaches by film stack or film behavior optimization to improve SM performance of Al interconnects with the assistance of numerical simulation. An index of RSM is proposed to reveal the statistic SM performance. Combining experiments and simulation result, a positive relationship is found between hydrostatic stress in numerical simulation and RSM, and it brings a quantitative solution for SM in numerical simulation.
在解决技术缩放引起的前端(FS)后端(BEOL)路由拥塞和RC延迟挑战方面,后端(BS)互连在3D集成电路中显示出显着的优势。作为具有代表性的BS互连架构,YMTC创新的Xtacking®1.0和2.0采用存储单元晶圆背面的一层Al金属层作为BS互连路由,用于信号传输。本文研究了硅衬底对Al - BS互连材料应力迁移可靠性的影响,并结合数值模拟,提出了通过薄膜叠加或薄膜行为优化来提高Al - BS互连材料应力迁移性能的几种工艺方法。提出了一个RSM指标来反映统计SM的性能。结合实验和仿真结果,发现数值模拟中的静水应力与RSM呈正相关关系,并给出了数值模拟中smm的定量化解。
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引用次数: 2
Impact of gate stack processing on the hysteresis of 300 mm integrated WS2 FETs 栅极堆叠处理对300mm集成WS2场效应管迟滞的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117803
L. Panarella, B. Kaczer, Q. Smets, D. Verreck, T. Schram, D. Cott, D. Lin, S. Tyaginov, I. Asselberghs, C. J. L. Rosa, G. Kar, V. Afanas’ev
The low quality of gate dielectrics deposited on 2D channels and the resulting poor reliability of 2D FETs are major issues that need to be addressed as a high priority. In this work, we compare 300 mm integrated dual-gate WS2 FETs with two different interlayers (SiOx and AlOx) in the top HfO2 -based gate stack by means of hysteresis measurements. The collected data enable the extraction of essential properties of defects in the gate oxide, which are commonly recognized as the main cause of instability of 2D FETs. In particular, the hysteresis width is evaluated as a function of the measurement sweep rate in order to investigate the time constants of the dominant defects in both interlayers. Finally, a new measurement-simulation scheme to extract the energy distribution of defects causing hysteresis is proposed. We observe that defects in AlOx-capped devices have slower capture/emission time constants and much lower energy density approaching the conduction band minimum of the channel than those in SiOx. Therefore, A1Ox reduces hysteresis and improves reliability compared to SiOx.
沉积在2D通道上的栅极介电体质量低以及由此导致的2D场效应管可靠性差是需要优先解决的主要问题。在这项工作中,我们通过迟滞测量比较了300 mm集成双栅极WS2 fet在顶部HfO2栅极堆栈中具有两种不同的中间层(SiOx和AlOx)。收集到的数据可以提取栅极氧化物中缺陷的基本特性,这些缺陷通常被认为是导致二维场效应管不稳定的主要原因。特别地,迟滞宽度被评估为测量扫描速率的函数,以便研究两个夹层中主要缺陷的时间常数。最后,提出了一种新的测量模拟方案,用于提取引起迟滞的缺陷的能量分布。我们观察到alox封装器件中的缺陷具有较慢的捕获/发射时间常数和较低的能量密度,接近通道的导带最小值。因此,与SiOx相比,A1Ox减少了迟滞,提高了可靠性。
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引用次数: 0
Reliability of Memristive Devices for High-Performance Neuromorphic Computing: (Invited Paper) 用于高性能神经形态计算的记忆器件的可靠性:(特邀论文)
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118214
Yue Xi, Xinyi Li, Junhao Chen, Ruofei Hu, Qingtian Zhang, Zhi-Nian Jiang, Feng Xu, Jianshi Tang
With the rich internal ion dynamics, memristor-based neuromorphic computing emerges as a non-von Neumann computing paradigm to mimic biological neural networks and achieve high energy efficiency. However, to implement large-scale memristive neural networks, the reliability issue of memristive devices, including artificial synapse, dendrite, and soma, should be properly addressed. In this paper, recent works investigating the physical mechanisms and optimizations of memristive device reliability are presented. In particular, the relaxation effect of $boldsymbol{text{HfO}_{mathrm{x}}}$ -based artificial synapse is alleviated by using a ternary oxide as the thermal enhance layer, the device yield of $boldsymbol{text{TiO}_{mathrm{x}^{-}}}$ based artificial dendrite is improved by proper material selection and interface engineering, and the device variability of $boldsymbol{text{NbO}_{mathrm{x}}}$ -based artificial soma is reduced by nitrogen doping. Furthermore, a bio-inspired dendritic neural network with these three fundamental memristive devices is constructed and simulated to analyze the influence of device reliability. Using these optimized devices, the classification accuracy of the street-view house number dataset can be improved by up to $sim$ 60%. The quantitative requirements of device reliability metrics are also provided as a guideline for future neuromorphic system design and implementation.
基于忆阻器的神经形态计算具有丰富的内部离子动力学特性,是一种模拟生物神经网络并实现高能效的非冯·诺伊曼计算范式。然而,要实现大规模记忆记忆神经网络,必须妥善解决记忆记忆装置的可靠性问题,包括人工突触、树突和体。本文介绍了近年来研究忆阻器件可靠性的物理机制和优化的工作。特别是,采用三元氧化物作为热增强层,减轻了$boldsymbol{text{HfO}_{mathrm{x}}}$人工突触的弛豫效应;通过适当的材料选择和界面工程,提高了$boldsymbol{text{TiO}_{mathrm{x}}^{-}}}$人工树突的器件产率;通过氮掺杂,降低了$boldsymbol{text{NbO}_{mathrm{x}}}$人工突触的器件可变性。在此基础上,构建了基于这三种基本忆阻器件的仿生树突神经网络,并进行了仿真,分析了器件可靠性的影响。使用这些优化的设备,街景房号数据集的分类精度可以提高高达60%。设备可靠性指标的定量要求也为未来神经形态系统的设计和实现提供了指导。
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引用次数: 0
Double-sided Row Hammer Effect in Sub-20 nm DRAM: Physical Mechanism, Key Features and Mitigation sub - 20nm DRAM中的双面排锤效应:物理机制、主要特征和缓解
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117677
Longda Zhou, Jie Li, Zheng Qiao, P. Ren, Zixuan Sun, Jianping Wang, Blacksmith Wu, Zhigang Ji, Runsheng Wang, Kanyu Cao, Ru Huang
The double-sided row hammer (rh) effect at the silicon level for sub-20 nm dynamic random access memory (DRAM) is systematically investigated for the first time. Based on 3D TCAD simulation, the impacts of capacitive crosstalk and electron migration are investigated. The latter with trap assistance is found the dominant mechanism behind the enhancement of 1 failure and the alleviation of 0 failure for double-sided rh. Moreover, rh dependences on data pattern, timing parameters and technology nodes are compared under different rh conditions. A trade-off of retention time (tret) between 1 failure and 0 failure should be considered when suppressing the double-sided rh effect. With the co-optimization of key process parameters, tret for double-sided rh-induced 1 failure can be improved by 220 times.
首次系统地研究了亚20nm动态随机存取存储器(DRAM)的硅级双面排锤(rh)效应。基于三维TCAD仿真,研究了电容串扰和电子迁移的影响。在陷阱的帮助下,后者是双面rh增强1失效和减轻0失效的主要机制。并比较了不同相对湿度条件下相对湿度对数据模式、时序参数和技术节点的依赖关系。在抑制双面rh效应时,应考虑在1次失效和0次失效之间权衡保留时间(tret)。通过对关键工艺参数的协同优化,可将双面rh致1失效的tret提高220倍。
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引用次数: 0
Write-error-rate of Spin-Transfer-Torque MRAM (Invited) 自旋-传递-扭矩MRAM的写错误率(应邀)
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117666
D. Worledge
Embedded Spin-Transfer Torque Magnetoresistive Random Access Memory (STT-MRAM) is now a standard foundry offering for embedded non-volatile memory applications at the 28 nm node and below, where it replaces embedded Flash, due to lower development costs. The switch from in-plane to perpendicularly magnetized magnetic materials enabled reliable operation and a scaling path. Write-error-rate is the key reliability challenge for STT-MRAM. While due to fundamental physics, write-error-rate of STT-MRAM can be engineered to meet even aggressive product specifications.
嵌入式自旋转移扭矩磁阻随机存取存储器(STT-MRAM)现在是28纳米及以下节点嵌入式非易失性存储器应用的标准代工厂产品,由于开发成本较低,它取代了嵌入式闪存。从平面内磁化到垂直磁化的磁性材料的切换使可靠的操作和缩放路径成为可能。写错误率是STT-MRAM可靠性面临的关键挑战。而由于基础物理,STT-MRAM的写错误率可以设计为满足甚至激进的产品规格。
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引用次数: 0
期刊
2023 IEEE International Reliability Physics Symposium (IRPS)
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