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2023 IEEE International Reliability Physics Symposium (IRPS)最新文献

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Double-sided Row Hammer Effect in Sub-20 nm DRAM: Physical Mechanism, Key Features and Mitigation sub - 20nm DRAM中的双面排锤效应:物理机制、主要特征和缓解
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117677
Longda Zhou, Jie Li, Zheng Qiao, P. Ren, Zixuan Sun, Jianping Wang, Blacksmith Wu, Zhigang Ji, Runsheng Wang, Kanyu Cao, Ru Huang
The double-sided row hammer (rh) effect at the silicon level for sub-20 nm dynamic random access memory (DRAM) is systematically investigated for the first time. Based on 3D TCAD simulation, the impacts of capacitive crosstalk and electron migration are investigated. The latter with trap assistance is found the dominant mechanism behind the enhancement of 1 failure and the alleviation of 0 failure for double-sided rh. Moreover, rh dependences on data pattern, timing parameters and technology nodes are compared under different rh conditions. A trade-off of retention time (tret) between 1 failure and 0 failure should be considered when suppressing the double-sided rh effect. With the co-optimization of key process parameters, tret for double-sided rh-induced 1 failure can be improved by 220 times.
首次系统地研究了亚20nm动态随机存取存储器(DRAM)的硅级双面排锤(rh)效应。基于三维TCAD仿真,研究了电容串扰和电子迁移的影响。在陷阱的帮助下,后者是双面rh增强1失效和减轻0失效的主要机制。并比较了不同相对湿度条件下相对湿度对数据模式、时序参数和技术节点的依赖关系。在抑制双面rh效应时,应考虑在1次失效和0次失效之间权衡保留时间(tret)。通过对关键工艺参数的协同优化,可将双面rh致1失效的tret提高220倍。
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引用次数: 0
A Concise Electrothermal Model to Characterize the Thermal Safe-Operating Area of Power Transistor 描述功率晶体管热安全工作区域的简洁电热模型
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117633
Jian-Hsing Lee, Gong-Kai Lin, Chun-Chih Chen, Li-Fan Chen, Chien-Wei Wang, Shao-Chang Huang, Ching-Ho Li, Chih-Cherng Liao, Jung-Tsun Chuang, Ke-Horng Chen
A physical model is derived to characterize the thermal safe-operating area (T-SOA) of power transistor. This model provides a concise methodology to get the precise and instant solutions of the temperature, and time to failure corresponding to IV for power transistor during the T-SOA measurement.
推导了功率晶体管热安全工作区域(T-SOA)的物理模型。该模型提供了一种简洁的方法来获得T-SOA测量过程中功率晶体管对应的温度和故障时间的精确和即时解决方案。
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引用次数: 0
A Novel Methodology to Predict Process-Induced Warpage in Advanced BEOL Interconnects 先进BEOL互连中工艺致翘曲预测的新方法
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117795
Y. H. Lin, C. C. Lee, C. Liao, M. H. Lin, W. Tu, R. Chen, H. P. Chen, W. Shue, M. Cao
Process-induced warpage caused by high-density interconnects in the back-end of line (BEOL) structure, may affect the performance and the reliability of the product during the packaging process. In this paper, a BEOL structure is used to develop a process-oriented simulation methodology to optimize the design and predict warpage. To reduce simulation time and obtain accurate predictions, the equivalent material method and equivalent residual stress are used in our proposed method. The layer-by-layer warpage predictions matched the measurement data.
在封装过程中,高密度互连线(BEOL)结构引起的工艺翘曲可能会影响产品的性能和可靠性。本文利用BEOL结构开发了一种面向过程的仿真方法来优化设计和预测翘曲。为了减少模拟时间,得到准确的预测结果,本文提出的方法采用等效材料法和等效残余应力法。逐层翘曲预测与测量数据相符。
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引用次数: 0
Enhancing reliability of a strong physical unclonable function (PUF) solution based on virgin-state phase change memory (PCM) 基于纯态相变存储器(PCM)的强物理不可克隆函数(PUF)解决方案的可靠性提高
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117586
L. Cattaneo, M. Baldo, N. Lepri, Flavio Sancandi, M. Borghi, E. Petroni, A. Serafini, R. Annunziata, A. Redaelli, D. Ielmini
In the era of the internet of things (IoT), hardware physical unclonable functions (PUFs) have become an essential feature for authentication of any system on chip (SoC). Identifying physical entropy sources is essential for developing low-cost, low-power, highly reliable PUFs. This work presents a new PUF circuit based on embedded PCM, called MVPUF. The new PUF relies on the random virgin state of the PCM combined with a new selection technique of challenge-response pairs (CRPs), thus showing better reliability compared to PUFs based on resistive switching memory (RRAM).
在物联网(IoT)时代,硬件物理不可克隆功能(puf)已成为任何片上系统(SoC)认证的基本特征。确定物理熵源对于开发低成本、低功耗、高可靠的puf至关重要。本文提出了一种基于嵌入式PCM的PUF电路,称为MVPUF。新的PUF依赖于PCM的随机初始状态,结合新的挑战响应对(CRPs)选择技术,因此与基于电阻开关存储器(RRAM)的PUF相比,具有更好的可靠性。
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引用次数: 0
Current Injection Effect on ESD Behaviors of the Parasitic Bipolar Transistors inside P+/N-well diode 电流注入对P+/ n阱二极管内寄生双极晶体管ESD行为的影响
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118073
Hui Wang, Pengyu Lai, Zhongren Chen
The utilization of parasitic bipolar structures inside a typical P+/N-well as an additional electrostatic discharge (ESD) path is explored. The optimization on the lateral PNP (LPNP) is discussed. Device transmission line pulse (TLP) characterizations and technology computer aided design (TCAD) simulations by Silvaco have been performed to investigate the stand-alone LPNP ESD performance and effects of the base current injection on ESD behaviors of parasitic bipolar transistors.
利用寄生双极结构在一个典型的P+/ n井作为一个额外的静电放电(ESD)路径进行了探索。讨论了横向PNP (LPNP)的优化问题。通过Silvaco进行器件传输线脉冲(TLP)表征和技术计算机辅助设计(TCAD)仿真,研究了lppp器件的独立ESD性能以及基极电流注入对寄生双极晶体管ESD行为的影响。
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引用次数: 0
Stress Migration of Aluminum Backside Interconnect in Xtacking® 铝背面互连在xtack®中的应力迁移
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117817
Kang Yang, Suhui Yang, Yan Ouyang, Sheng-Chieh Yang, Kun Han, Yi He
Backside (BS) interconnects has shown significant advantages in 3D integral circuits for tackling the technology scaling induced frontside (FS) back-end-of-line (BEOL) routing congestion and RC delay challenge. As a representative BS interconnects architecture, Xtacking ® 1.0 & 2.0 innovated by YMTC employs one Al metal layer at backside of memory cell wafer as BS interconnect routing for signal transfer. In this paper, we exploit the effect of silicon substrate to stress migration (SM) reliability of such Al BS interconnects, and offer several process approaches by film stack or film behavior optimization to improve SM performance of Al interconnects with the assistance of numerical simulation. An index of RSM is proposed to reveal the statistic SM performance. Combining experiments and simulation result, a positive relationship is found between hydrostatic stress in numerical simulation and RSM, and it brings a quantitative solution for SM in numerical simulation.
在解决技术缩放引起的前端(FS)后端(BEOL)路由拥塞和RC延迟挑战方面,后端(BS)互连在3D集成电路中显示出显着的优势。作为具有代表性的BS互连架构,YMTC创新的Xtacking®1.0和2.0采用存储单元晶圆背面的一层Al金属层作为BS互连路由,用于信号传输。本文研究了硅衬底对Al - BS互连材料应力迁移可靠性的影响,并结合数值模拟,提出了通过薄膜叠加或薄膜行为优化来提高Al - BS互连材料应力迁移性能的几种工艺方法。提出了一个RSM指标来反映统计SM的性能。结合实验和仿真结果,发现数值模拟中的静水应力与RSM呈正相关关系,并给出了数值模拟中smm的定量化解。
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引用次数: 2
Reliable FeFET-based Neuromorphic Computing through Joint Modeling of Cycle-to-Cycle Variability, Device-to-Device Variability, and Domain Stochasticity 可靠的基于场效应效应的神经形态计算,通过联合建模周期到周期的可变性,器件到器件的可变性,和领域的随机性
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117810
Simon Thomann, Albi Mema, Kai Ni, H. Amrouch
Inherent domain stochasticity induced by the random spatial distribution of domains inside the ferroelectric (FE) layer along with Cycle-to-Cycle (CTC) and Device-to-Device (DTD) variability seriously hamper our ability to tune the FeFET threshold voltage ($V_{TH}$) towards the desired analog states required to realize neuromorphic computing. In this work, we present an framework that enables the joint modeling of Domain Stochasticity (DS), CTC, and DTD variability, through coupling TCAD models (accurately capturing the distributed channel of the underlying FET) with a multi-domain model that accurately captures the switching dynamics of the individual domains in the above FE layer. Hence, the hidden interaction between the spatial polarization fluctuation in FE and the distributed channel is unveiled. As a result, accurate modeling of $V_{TH}$ distribution under various write scenarios is obtained. This, in turn, provides designers with guidelines on how analog states can be reliably programmed towards engineering reliable neuromorphic on unreliable FeFET.
铁电(FE)层内畴的随机空间分布以及周期到周期(CTC)和器件到器件(DTD)的可变性引起的固有域随机性严重阻碍了我们将FeFET阈值电压($V_{TH}$)调整到实现神经形态计算所需的理想模拟状态的能力。在这项工作中,我们提出了一个框架,通过耦合TCAD模型(准确捕获底层场效应管的分布式通道)和多域模型(准确捕获上述FE层中各个域的切换动态),该框架能够联合建模域随机性(DS)、CTC和DTD可变性。从而揭示了FE空间极化波动与分布式信道之间隐藏的相互作用。从而得到了各种写场景下$V_{TH}$分布的精确建模。这反过来又为设计人员提供了指导方针,指导他们如何将模拟状态可靠地编程为在不可靠的ffet上实现工程可靠的神经形态。
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引用次数: 0
RF long term aging behavior and reliability in 22FDX WiFi Power Amplifier designs for 5G applications 5G应用22FDX WiFi功率放大器设计的RF长期老化行为和可靠性
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118043
P. Srinivasan, J. Lestage, S. Syed, X. Hui, S. Moss, O. D. Restrepo, Oscar H. Gonzalez, Y. Chen, T. Mckay, A. Bandyopadhyay, N. Cahoon, F. Guarín, B. Min, M. Gall, S. Ludvik
RF long term aging and large signal reliability in 22FDX Wi-Fi Power Amplifier (P A) designs is investigated. Packaged PA operating at 5.4GHz., 3.3V VDD with LDMOS as Common Gate and SLVT as Common Source is stressed under accelerated DC and RF power conditions for +1.5kPOH at TA=25 C. A custom built Power Amplifier Test System (PATS) tool capable of large signal on packaged samples is used for long term stress. Initial RF performance of ~26 dBm., with gain 14~15 is seen before stress. Power sweeps at regular stress intervals were performed to validate PA degradation. Self-heating effect is studied by correlating TA to junction temp TJ using thermal models. Thermal images confirm that higher Pdiss leads to higher TJ. Output power degradation of < 0.5dB is seen at accelerated voltage of 4.2V after + 1.5kPOH which is correlated to voltage swings. Key limiting mechanism for common gate and source devices are identified, demonstrating the viability of CMOS FDSOI technology for 5G applications.
研究了22FDX Wi-Fi功率放大器设计中的射频长期老化和大信号可靠性问题。工作在5.4GHz的封装PA。在TA=25 c时,在+1.5kPOH的加速直流和射频功率条件下,以LDMOS作为共门和SLVT作为共源的3.3V VDD进行应力测试。一个定制的功率放大器测试系统(PATS)工具能够在封装样品上产生大信号,用于长期应力测试。初始射频性能为~26 dBm。,以增益14~15为见应力前。在固定的应力间隔内进行功率扫描以验证PA的降解。利用热模型将TA与结温TJ联系起来,研究了自热效应。热图像证实,更高的Pdiss导致更高的TJ。在+ 1.5kPOH后,在4.2V加速电压下,输出功率衰减< 0.5dB,这与电压波动有关。确定了通用栅极和源器件的关键限制机制,证明了CMOS FDSOI技术在5G应用中的可行性。
{"title":"RF long term aging behavior and reliability in 22FDX WiFi Power Amplifier designs for 5G applications","authors":"P. Srinivasan, J. Lestage, S. Syed, X. Hui, S. Moss, O. D. Restrepo, Oscar H. Gonzalez, Y. Chen, T. Mckay, A. Bandyopadhyay, N. Cahoon, F. Guarín, B. Min, M. Gall, S. Ludvik","doi":"10.1109/IRPS48203.2023.10118043","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10118043","url":null,"abstract":"RF long term aging and large signal reliability in 22FDX Wi-Fi Power Amplifier (P A) designs is investigated. Packaged PA operating at 5.4GHz., 3.3V VDD with LDMOS as Common Gate and SLVT as Common Source is stressed under accelerated DC and RF power conditions for +1.5kPOH at TA=25 C. A custom built Power Amplifier Test System (PATS) tool capable of large signal on packaged samples is used for long term stress. Initial RF performance of ~26 dBm., with gain 14~15 is seen before stress. Power sweeps at regular stress intervals were performed to validate PA degradation. Self-heating effect is studied by correlating TA to junction temp TJ using thermal models. Thermal images confirm that higher Pdiss leads to higher TJ. Output power degradation of < 0.5dB is seen at accelerated voltage of 4.2V after + 1.5kPOH which is correlated to voltage swings. Key limiting mechanism for common gate and source devices are identified, demonstrating the viability of CMOS FDSOI technology for 5G applications.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127445108","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability Improvement with Optimized BEOL Process in Advanced DRAM 先进DRAM中优化BEOL工艺的可靠性改进
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118168
J. H. Lee, B. Woo, Y. M. Lee, N. Lee, S. Lee, Y. S. Lee, H. S. Kim, S. Pae
Advanced DRAM with the reduced dangling bonds defects for the transistors could be manufactured by temperature control of passivation and optimizing BEOL process application. The decrease in passivation temperature increased hydrogen ion diffusion from the passivation layer. Passivation of the dangling bonds resulted in the increase of the retention time. Negative bias temperature instability (NBTI) of periphery device was relatively constant due to the pre-existing Si-H bonds. However, back end of line (BEOL) reliability showed drastic deterioration in time dependent dielectric breakdown (TDDB) and electro-migration (EM). Deterioration of Cu adhesion by water molecules and void formation was the main factor of drastic exacerbation of TDDB and EM lifetime. In order to strengthen the Cu adhesion, the optimized BEOL process was applied and the BEOL reliability was improved. As a result, the DRAM cell characteristic has been improved.
通过对钝化温度的控制和优化BEOL工艺的应用,可以制备出减少晶体管悬空键缺陷的先进DRAM。钝化温度的降低增加了氢离子从钝化层向外扩散。悬空键钝化后,保留时间延长。由于硅氢键的存在,外围器件的负偏置温度不稳定性(NBTI)相对稳定。然而,后端线路(BEOL)可靠性在时间相关介质击穿(TDDB)和电迁移(EM)中表现出急剧下降。水分子对Cu的附着力恶化和空穴形成是导致TDDB和EM寿命急剧恶化的主要因素。为了增强铜的附着力,采用优化后的BEOL工艺,提高了BEOL的可靠性。因此,DRAM单元的特性得到了改善。
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引用次数: 1
Extended Analysis of Power Cycling Behavior of TO-Packaged SiC Power MOSFETs to封装SiC功率mosfet功率循环特性扩展分析
Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117650
Ivana Kovacevic-Badstuebner, S. Race, U. Grossner, E. Mengotti, C. Kenel, E. Bianda, J. Jormanainen
This paper presents an extended analysis of TO-packaged SiC power MOSFETs after power cycling (PC) tests. Namely, it is shown that initially present voids in soft lead-based solder die attach disappear not only after certain number of active PC tests, but also after thermal shock tests. Hereby, the conclusion that solder die attach is not the weak spot of SiC power MOSFET packages with an epoxy mold compound (EMC) encapsulation is further supported. Furthermore, an electro-thermo-mechanical (ETM) model developed in-house is used to correlate the dominant wear-out failure of bond wires to the PC test parameters such as heating current, temperature amplitude, and heating on-time, as well as to the thickness of top source die metallization.
本文对功率循环(PC)测试后的to封装SiC功率mosfet进行了扩展分析。也就是说,软铅基焊料贴片中最初存在的空洞不仅在一定次数的主动PC试验后消失,而且在热冲击试验后消失。由此,进一步支持了采用环氧模化合物(EMC)封装的SiC功率MOSFET封装的焊片附着不是弱点的结论。此外,使用内部开发的电热机械(ETM)模型将键合线的主要磨损失效与PC测试参数(如加热电流,温度振幅和加热接通时间)以及上源模具金属化厚度相关联。
{"title":"Extended Analysis of Power Cycling Behavior of TO-Packaged SiC Power MOSFETs","authors":"Ivana Kovacevic-Badstuebner, S. Race, U. Grossner, E. Mengotti, C. Kenel, E. Bianda, J. Jormanainen","doi":"10.1109/IRPS48203.2023.10117650","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10117650","url":null,"abstract":"This paper presents an extended analysis of TO-packaged SiC power MOSFETs after power cycling (PC) tests. Namely, it is shown that initially present voids in soft lead-based solder die attach disappear not only after certain number of active PC tests, but also after thermal shock tests. Hereby, the conclusion that solder die attach is not the weak spot of SiC power MOSFET packages with an epoxy mold compound (EMC) encapsulation is further supported. Furthermore, an electro-thermo-mechanical (ETM) model developed in-house is used to correlate the dominant wear-out failure of bond wires to the PC test parameters such as heating current, temperature amplitude, and heating on-time, as well as to the thickness of top source die metallization.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"301 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133466297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2023 IEEE International Reliability Physics Symposium (IRPS)
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