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2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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Atomistic Design of Quantum Biomimetic Electronic Nose 量子仿生电子鼻的原子设计
Swetapadma Sahoo, N. Pandey, D. Saha, S. Ganguly
Understanding the enigmatic mechanism of olfaction from a biomimetic technology perspective would be very useful for electronic nose applications. The inelastic tunneling spectroscopy (IETS) of various odorant-receptor systems are simulated for this purpose. An atomistic simulation framework is presented for the same. Analysis of the results offer an insight into how an actual biomimetic sensor system can be made to detect incoming odorant molecules.
从仿生技术的角度理解嗅觉的神秘机制将对电子鼻的应用非常有用。为此,模拟了各种气味受体系统的非弹性隧道光谱。为此,提出了一个原子模拟框架。分析结果提供了一个深入了解如何一个实际的仿生传感器系统可以检测传入的气味分子。
{"title":"Atomistic Design of Quantum Biomimetic Electronic Nose","authors":"Swetapadma Sahoo, N. Pandey, D. Saha, S. Ganguly","doi":"10.1109/SISPAD.2018.8551661","DOIUrl":"https://doi.org/10.1109/SISPAD.2018.8551661","url":null,"abstract":"Understanding the enigmatic mechanism of olfaction from a biomimetic technology perspective would be very useful for electronic nose applications. The inelastic tunneling spectroscopy (IETS) of various odorant-receptor systems are simulated for this purpose. An atomistic simulation framework is presented for the same. Analysis of the results offer an insight into how an actual biomimetic sensor system can be made to detect incoming odorant molecules.","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122419269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Simulations of Self-Heating Effects in SiGe pFinFETs Based on Self-Consistent Solution of Carrier/Phonon BTE Coupled System 基于载流子/声子BTE耦合系统自一致解的SiGe pfinet自热效应模拟
A. Pham, Seonghoon Jin, Yang Lu, Hong-hyun Park, W. Choi, M. A. Pourghaderi, Jongchol Kim, U. Kwon, D. Kim
Using the in-house simulation tool, self-heating (SH) effects on transport of holes in SiGe pFinFETs are simulated. The coupled system of Boltzmann Transport Equation (BTE) for holes and phonons is solved self-consistently. For transport of holes, the multi subband BTE (MSBTE) is solved for 1D hole gas system, where the subband structure is computed from the 2D $vec{k} cdot vec{p}$ Schrodinger Equation (SE)/3D Poisson equation (PE) solution. For transport of phonons, the BTE for 4 phonon modes (LA, TA, LO, TO) in 3D $vec{k}$–space is solved based on first order spherical harmonic expansion (SHE) method. This study demonstrates the strong dependence of pMOS SH on Ge content. As Ge mole fraction increases above 0.2, alloy scattering hampers the thermal conductivity by more than one order of magnitude. Combined with boundary scattering and smaller band-gap of SiGe, this effect may pose some alarms on next generation pMOS devices.
利用内部仿真工具,模拟了自热(SH)对SiGe pfinfet中空穴输运的影响。空穴和声子的玻尔兹曼输运方程(BTE)耦合系统是自洽求解的。对于空穴输运,求解一维空穴气体体系的多子带BTE (MSBTE),其中子带结构由二维$vec{k} cdot vec{p}$薛定谔方程(SE)/三维泊松方程(PE)解计算。对于声子的输运,基于一阶球谐展开(SHE)方法求解了三维$vec{k}$ -空间中4种声子模式(LA、TA、LO、TO)的BTE。该研究表明pMOS SH对Ge含量有很强的依赖性。当Ge摩尔分数大于0.2时,合金散射对导热性能的影响大于一个数量级。结合SiGe的边界散射和更小的带隙,这种效应可能会给下一代pMOS器件带来一些警告。
{"title":"Simulations of Self-Heating Effects in SiGe pFinFETs Based on Self-Consistent Solution of Carrier/Phonon BTE Coupled System","authors":"A. Pham, Seonghoon Jin, Yang Lu, Hong-hyun Park, W. Choi, M. A. Pourghaderi, Jongchol Kim, U. Kwon, D. Kim","doi":"10.1109/SISPAD.2018.8551670","DOIUrl":"https://doi.org/10.1109/SISPAD.2018.8551670","url":null,"abstract":"Using the in-house simulation tool, self-heating (SH) effects on transport of holes in SiGe pFinFETs are simulated. The coupled system of Boltzmann Transport Equation (BTE) for holes and phonons is solved self-consistently. For transport of holes, the multi subband BTE (MSBTE) is solved for 1D hole gas system, where the subband structure is computed from the 2D $vec{k} cdot vec{p}$ Schrodinger Equation (SE)/3D Poisson equation (PE) solution. For transport of phonons, the BTE for 4 phonon modes (LA, TA, LO, TO) in 3D $vec{k}$–space is solved based on first order spherical harmonic expansion (SHE) method. This study demonstrates the strong dependence of pMOS SH on Ge content. As Ge mole fraction increases above 0.2, alloy scattering hampers the thermal conductivity by more than one order of magnitude. Combined with boundary scattering and smaller band-gap of SiGe, this effect may pose some alarms on next generation pMOS devices.","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124460763","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An Improved Random Path Length Algorithm for p-i-n and Staircase Avalanche Photodiodes 一种改进的p-i-n和阶梯雪崩光电二极管随机路径长度算法
A. Pilotto, P. Palestri, L. Selmi, M. Antonelli, F. Arfelli, G. Biasiol, G. Cautero, F. Driussi, R. Menk, C. Nichetti, T. Steinhartova
We present an improved Random Path Length algorithm to accurately and efficiently estimate the design space of heterostructure avalanche photodiodes (APDs) in terms of gain, noise and bandwidth without any need of full Monte Carlo transport simulations. The underlying nonlocal model for impact ionization goes beyond the Dead Space concept and it is suited to handle staircase structures composed by a superlattice of III-V compounds as well as thick and thin p-i-n APDs. The model parameters have been calibrated on GaAs and $Al_{x}Ga_{1-x}As$ p-i-n APDs in a previous work. In this work GaAs p-i-n APDs are compared to staircase structures in terms of noise and bandwidth.
本文提出了一种改进的随机路径长度算法,可以在不需要完全蒙特卡罗传输模拟的情况下,准确有效地估计异质结构雪崩光电二极管(apd)在增益、噪声和带宽方面的设计空间。撞击电离的潜在非局部模型超越了死亡空间的概念,它适用于处理由III-V化合物的超晶格组成的阶梯结构以及厚和薄的p-i-n apd。在先前的工作中,模型参数已经在GaAs和$Al_{x}Ga_{1-x}As$ p-i-n apd上进行了校准。在这项工作中,GaAs p-i-n apd在噪声和带宽方面与阶梯结构进行了比较。
{"title":"An Improved Random Path Length Algorithm for p-i-n and Staircase Avalanche Photodiodes","authors":"A. Pilotto, P. Palestri, L. Selmi, M. Antonelli, F. Arfelli, G. Biasiol, G. Cautero, F. Driussi, R. Menk, C. Nichetti, T. Steinhartova","doi":"10.1109/SISPAD.2018.8551751","DOIUrl":"https://doi.org/10.1109/SISPAD.2018.8551751","url":null,"abstract":"We present an improved Random Path Length algorithm to accurately and efficiently estimate the design space of heterostructure avalanche photodiodes (APDs) in terms of gain, noise and bandwidth without any need of full Monte Carlo transport simulations. The underlying nonlocal model for impact ionization goes beyond the Dead Space concept and it is suited to handle staircase structures composed by a superlattice of III-V compounds as well as thick and thin p-i-n APDs. The model parameters have been calibrated on GaAs and $Al_{x}Ga_{1-x}As$ p-i-n APDs in a previous work. In this work GaAs p-i-n APDs are compared to staircase structures in terms of noise and bandwidth.","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121156262","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Efficient Two-Band based Non-Equilibrium Green's Function Scheme for Modeling Tunneling Nano-Devices 基于双波段非平衡格林函数的隧道纳米器件建模方法
H. Carrillo-Nuñez, Jaehyun Lee, S. Berrada, C. Medina-Bailón, M. Luisier, A. Asenov, V. Georgiev
In this work, we introduce a novel procedure to compute the direct band-to-band tunneling in semiconductor nano-devices by combining the effective mass approximation, the non-equilibrium Greens function technique, and the two-band Flietner model of the imaginary dispersion. The model is first tested on a Si-InAs nanowire p-type tunnel field-effect transistor (p-TFET), showing great accuracy at much less computational cost when compared with atomistic simulations. Secondly, we report a preliminary quantum transport simulation study of the impact of random discrete dopants on Si-InAs nanowire p-TFETs. An ensemble of 63 InAs-Si nanowire TFETs has been simulated, revealing a strong dopant-induced variability.
在这项工作中,我们引入了一种新的方法来计算半导体纳米器件中的直接带到带隧道,该方法结合了有效质量近似、非平衡格林函数技术和双波段虚色散的Flietner模型。该模型首先在Si-InAs纳米线p型隧道场效应晶体管(p-TFET)上进行了测试,与原子模拟相比,显示出更高的精度和更少的计算成本。其次,我们报告了随机离散掺杂剂对Si-InAs纳米线p- tfet影响的初步量子输运模拟研究。模拟了63个InAs-Si纳米线tfet,揭示了掺杂物诱导的强变异性。
{"title":"Efficient Two-Band based Non-Equilibrium Green's Function Scheme for Modeling Tunneling Nano-Devices","authors":"H. Carrillo-Nuñez, Jaehyun Lee, S. Berrada, C. Medina-Bailón, M. Luisier, A. Asenov, V. Georgiev","doi":"10.1109/SISPAD.2018.8551629","DOIUrl":"https://doi.org/10.1109/SISPAD.2018.8551629","url":null,"abstract":"In this work, we introduce a novel procedure to compute the direct band-to-band tunneling in semiconductor nano-devices by combining the effective mass approximation, the non-equilibrium Greens function technique, and the two-band Flietner model of the imaginary dispersion. The model is first tested on a Si-InAs nanowire p-type tunnel field-effect transistor (p-TFET), showing great accuracy at much less computational cost when compared with atomistic simulations. Secondly, we report a preliminary quantum transport simulation study of the impact of random discrete dopants on Si-InAs nanowire p-TFETs. An ensemble of 63 InAs-Si nanowire TFETs has been simulated, revealing a strong dopant-induced variability.","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121193953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
SISPAD 2018 Preface
{"title":"SISPAD 2018 Preface","authors":"","doi":"10.1109/sispad.2018.8551741","DOIUrl":"https://doi.org/10.1109/sispad.2018.8551741","url":null,"abstract":"","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127486154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Modeling the Influence of Grains and Material Interfaces on Electromigration 晶粒和材料界面对电迁移影响的建模
L. Filipovic, R. L. de Orio
We present an efficient approach to properly treat grain boundaries and material interfaces when modeling electromigration in copper nano-interconnects. Our approach uses several spatial material parameters to identify the locations of the grain boundaries and material interfaces during simulation, thereby not requiring the definition of multiple materials or complex meshes and geometrical interfaces. Using this method even very coarse meshes, with a grid spacing twice the size of the thinnest element (the grain boundary thickness), were able to reasonably reproduce the vacancy concentration of thin copper interconnects, including the microstructure. However, using a grid spacing greater than one half the grain boundary thickness resulted in underestimates of the induced stress.
在模拟铜纳米互连中的电迁移时,我们提出了一种有效的方法来处理晶界和材料界面。我们的方法在模拟过程中使用多个空间材料参数来识别晶界和材料界面的位置,从而不需要定义多种材料或复杂的网格和几何界面。使用这种方法,即使是非常粗糙的网格,其网格间距是最薄单元(晶界厚度)的两倍,也能够合理地再现薄铜互连的空位浓度,包括微观结构。然而,使用大于晶界厚度一半的网格间距会导致诱导应力的低估。
{"title":"Modeling the Influence of Grains and Material Interfaces on Electromigration","authors":"L. Filipovic, R. L. de Orio","doi":"10.1109/SISPAD.2018.8551746","DOIUrl":"https://doi.org/10.1109/SISPAD.2018.8551746","url":null,"abstract":"We present an efficient approach to properly treat grain boundaries and material interfaces when modeling electromigration in copper nano-interconnects. Our approach uses several spatial material parameters to identify the locations of the grain boundaries and material interfaces during simulation, thereby not requiring the definition of multiple materials or complex meshes and geometrical interfaces. Using this method even very coarse meshes, with a grid spacing twice the size of the thinnest element (the grain boundary thickness), were able to reasonably reproduce the vacancy concentration of thin copper interconnects, including the microstructure. However, using a grid spacing greater than one half the grain boundary thickness resulted in underestimates of the induced stress.","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123774009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
SISPAD 2018 Sponsors Page SISPAD 2018赞助商页面
{"title":"SISPAD 2018 Sponsors Page","authors":"","doi":"10.1109/sispad.2018.8551668","DOIUrl":"https://doi.org/10.1109/sispad.2018.8551668","url":null,"abstract":"","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131570610","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Integrated Framework of DFT, Empirical potentials and Full Lattice Atomistic Kinetic Monte-Carlo to Determine Vacancy Diffusion in SiGe 用DFT、经验势和全晶格原子动力学蒙特卡罗综合框架确定SiGe中的空位扩散
Y. Oh, Yumi Park, C. Zechner, I. Martín-Bragado
To simulate the point-defect diffusion in atomic scale, the software platform with a full lattice atomistic kinetic Monte-Carlo (AKMC) capability was developed. In this platform, the theoretical values of migration frequencies and barriers depending on the configuration of the nearest neighbors were automatically calculated by linking the simulator with the density functional theory (DFT) and classical molecular dynamics (CMD) tools. Ge mole fraction dependent diffusivity of a vacancy in SiGe was extracted in this work.
为了在原子尺度上模拟点缺陷扩散,开发了具有全晶格原子动力学蒙特卡罗(AKMC)能力的软件平台。在该平台上,通过将模拟器与密度泛函理论(DFT)和经典分子动力学(CMD)工具相结合,自动计算出迁移频率和势垒随最近邻构型的理论值。本文提取了锗锗中空位的锗摩尔分数与扩散率的关系。
{"title":"Integrated Framework of DFT, Empirical potentials and Full Lattice Atomistic Kinetic Monte-Carlo to Determine Vacancy Diffusion in SiGe","authors":"Y. Oh, Yumi Park, C. Zechner, I. Martín-Bragado","doi":"10.1109/SISPAD.2018.8551657","DOIUrl":"https://doi.org/10.1109/SISPAD.2018.8551657","url":null,"abstract":"To simulate the point-defect diffusion in atomic scale, the software platform with a full lattice atomistic kinetic Monte-Carlo (AKMC) capability was developed. In this platform, the theoretical values of migration frequencies and barriers depending on the configuration of the nearest neighbors were automatically calculated by linking the simulator with the density functional theory (DFT) and classical molecular dynamics (CMD) tools. Ge mole fraction dependent diffusivity of a vacancy in SiGe was extracted in this work.","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120935262","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
SISPAD 2018 Index
{"title":"SISPAD 2018 Index","authors":"","doi":"10.1109/sispad.2018.8551732","DOIUrl":"https://doi.org/10.1109/sispad.2018.8551732","url":null,"abstract":"","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123129169","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of Electron-Electron Scattering on the Carrier Distribution in Semiconductor Devices 电子-电子散射对半导体器件中载流子分布的影响
H. Kosina, M. Kampl
It is commonly accepted that electron-electron scattering (EES) alters the high-energy tail of the energy distribution function [1] [2], and thus plays an important role in the physically-based modeling of hot carrier degradation [3]. One can distinguish between selfconsistent models which assume the actual or an approximate non-equilibrium distribution for the partner electrons, and non-selfconsistent models which assume an equilibrium distribution for the partner electrons. The latter approach is suitable to describe the interaction of channel hot electrons with a reservoir of cold electrons in the drain region. This case is studied in the present work. We briefly discuss the details about the derivation of the single-particle scattering rate and the implementation in a Monte Carlo simulator for both parabolic bands and full-band structures.
人们普遍认为电子-电子散射(electron-electron scattering, EES)改变了能量分布函数的高能尾部[1][2],因此在热载子降解的物理建模中起着重要作用[3]。人们可以区分自洽模型和非自洽模型。自洽模型假设配对电子的实际或近似非平衡分布,而非自洽模型假设配对电子的平衡分布。后一种方法适用于描述通道热电子与漏极区冷电子库的相互作用。本文对该案例进行了研究。我们简要地讨论了单粒子散射率的推导和在蒙特卡罗模拟器中对抛物线带和全带结构的实现的细节。
{"title":"Effect of Electron-Electron Scattering on the Carrier Distribution in Semiconductor Devices","authors":"H. Kosina, M. Kampl","doi":"10.1109/SISPAD.2018.8551734","DOIUrl":"https://doi.org/10.1109/SISPAD.2018.8551734","url":null,"abstract":"It is commonly accepted that electron-electron scattering (EES) alters the high-energy tail of the energy distribution function [1] [2], and thus plays an important role in the physically-based modeling of hot carrier degradation [3]. One can distinguish between selfconsistent models which assume the actual or an approximate non-equilibrium distribution for the partner electrons, and non-selfconsistent models which assume an equilibrium distribution for the partner electrons. The latter approach is suitable to describe the interaction of channel hot electrons with a reservoir of cold electrons in the drain region. This case is studied in the present work. We briefly discuss the details about the derivation of the single-particle scattering rate and the implementation in a Monte Carlo simulator for both parabolic bands and full-band structures.","PeriodicalId":170070,"journal":{"name":"2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134376322","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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