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2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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Surface and Grain-boundary Effects in Copper interconnects Thin Films Modeling with an Atomistic Basis 基于原子基的铜互连薄膜模型中的表面和晶界效应
Daniel Valencia, Kuang-Chung Wang, Yuanchen Chu, Gerhard Klimeck, M. Povolotskyi
As interconnects become smaller, their conductivity increases along with the parasitic effects in MOSFET technologies [1] Therefore, investigating how to model the scattering effects on the nanoscale is important to determine how to engineer interconnects toreduce those parasitic effects. In this work, a fully atomistic method is studied to model the electronic transport properties of copper thin films. For this purpose, a tight binding basis previously benchmarked against first principles calculations [2] is used todescribe surface roughness and grain boundary effects on comparablepper thin films with a thickness comparable to the values suggested by ITRS roadmap [3]. In contrast with traditional models, the results show that the tight binding method can quantify those scattering effects at low temperature without fitting any experimental parameters [4], [5].
随着互连变得越来越小,它们的电导率随着MOSFET技术中的寄生效应而增加[1],因此,研究如何在纳米尺度上模拟散射效应对于确定如何设计互连以减少这些寄生效应非常重要。本文研究了铜薄膜电子输运性质的全原子化建模方法。为此,使用先前以第一性原理计算为基准的紧密结合基础[2]来描述厚度与ITRS路线图[3]建议的值相当的可比较薄膜的表面粗糙度和晶界效应。与传统模型相比,结果表明,紧密结合方法可以量化低温下的散射效应,而无需拟合任何实验参数[4],[5]。
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引用次数: 0
Investigation of the Electrode Materials in Conductive Bridging RAM from First-Principle 从第一性原理研究导电桥接存储器中电极材料
F. Ducry, K. Portner, S. Andermatt, M. Luisier
Conductive bridging random access memories (CBRAM) are emerging non-volatile data storage devices whose switching mechanisms are not fully understood. Here, we present a modelling framework based on ab-initio simulations to investigate CBRAM cells. It combines density-functional theory and the Non-equilibrium Greens Function formalism. Realistic metallic filaments connecting two electrodes are constructed and their ballistic transport characteristics studied. For a given filament the type of counter electrode material has little influence on the magnitude of the ON-state current, but affects its spatial distribution. The conductance mainly depends on the material of the active electrode and the shape of the thinnest part of the filament.
导电桥接随机存取存储器(CBRAM)是新兴的非易失性数据存储器件,其开关机制尚未完全了解。在这里,我们提出了一个基于ab-initio模拟的建模框架来研究CBRAM细胞。它结合了密度泛函理论和非平衡格林函数形式主义。构造了连接两个电极的真实金属丝,并研究了其弹道输运特性。对于给定的灯丝,对电极材料的类型对导通电流的大小影响不大,但会影响其空间分布。电导主要取决于活性电极的材料和灯丝最薄部分的形状。
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引用次数: 0
Analysis of the Effect of Field Enhancement at Fin Corners on Program Characteristics of FinFET Split-Gate MONOS 鳍角场增强对分闸单频单管晶体管程序特性的影响分析
K. Sonoda, E. Tsukuda, S. Tsuda, Tomohiro Hayashi, Y. Akiyama, Y. Yamaguchi, T. Yamashita
The effect of field enhancement at Fin corners on program characteristics of FinFET Split-gate metal oxide nitride oxide silicon (SG-MONOS) is analyzed. The program characteristics using source-side injection (SSI) are found to be insensitive to the variation of the curvature radius at Fin corners, which shows the robustness of FinFET SG-MONOS to Fin shape variation inthe fabrication process.
分析了翅角场增强对分栅金属氧化物氮化硅(SG-MONOS)分栅场效应管程序特性的影响。采用源侧注入(SSI)的程序特性对翅片转角曲率半径的变化不敏感,显示了SG-MONOS FinFET在制造过程中对翅片形状变化的鲁棒性。
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引用次数: 1
Modelling on Aging Induced Time Dependent Variability of Z2FET for Memory Applications 记忆用Z2FET老化诱导时间相关变异性的建模
M. Duan, B. Cheng, C. Bailón, F. Adamu-Lema, P. Asenov, C. Millar, P. Pfaeffli, A. Asenov
Z2FET is a promising integrated DRAM device to replace the traditional 1 transistor 1 capacitor DRAM [1–4]. Memory products always require minimum cell size, high density and large volume memory arrays in the limited chip real estate. However, the downscaling of Z2FET dimensions leads to severe variability issues. A novel simulation methodology has been already proposed [5] to investigate the initial Z2FET Statistical Variability (SV), but the aging induced Time Dependent Variability (TDV) has never been considered.
Z2FET是一种很有前途的集成DRAM器件,可以取代传统的1晶体管1电容DRAM[1 - 4]。存储产品总是要求在有限的芯片空间内实现最小的单元尺寸、高密度和大容量存储阵列。然而,减小Z2FET尺寸会导致严重的可变性问题。人们已经提出了一种新的模拟方法来研究Z2FET的初始统计变异性(SV),但从未考虑老化引起的时间相关变异性(TDV)。
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引用次数: 0
Efficient Modeling of Electron Transport with Plane Waves 平面波电子输运的有效模拟
M. L. Van de Put, A. Laturia, M. Fischetti, W. Vandenberghe
We present a method to simulate ballistic quantum transport in one-dimensional nanostructures, such as extremely scaled transistors, with a channel of nanowires or nanoribbons. In contrast to most popular approaches, we develop our method employing an accurate plane-wave basis at the atomic scale while retaining the numerical efficiency of a localized (tight-binding) basis at larger scales. At the core of our method is a finite-element expansion, where the finite element basis is enriched by a set of Bloch waves at high-symmetry points in the Brillouin zone of the crystal. We demonstrate the accuracy and efficiency of our method with the self-consistent simulation of ballistic transport in graphene nanoribbon FETs.
我们提出了一种方法来模拟一维纳米结构中的弹道量子输运,例如用纳米线或纳米带通道的极尺度晶体管。与大多数流行的方法相比,我们开发的方法在原子尺度上使用精确的平面波基,同时在更大尺度上保留局部(紧密结合)基的数值效率。我们的方法的核心是一个有限元展开,其中在晶体布里渊区高对称点的一组布洛赫波丰富了有限元基。我们通过石墨烯纳米带场效应管的弹道输运自一致模拟证明了我们方法的准确性和效率。
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引用次数: 1
Advanced Algorithms for Ab-initio Device Simulations Ab-initio设备模拟的高级算法
M. Luisier, F. Ducry, M. Hossein, Bani-Hashemian, S. Brück, M. Calderara, O. Schenk
Numerical algorithms dedicated to large-scale quantum transport problems from first-principles are presented in this paper. They can be decomposed into three main categories: (i) the calculation of the open boundary conditions that connect the simulation domain and its environment, (ii) the solution of the resulting Schrödinger equation in the ballistic limit of transport, and (iii) the extension of this case to situations involving scattering, e.g. electron-phonon interactions. It will be shown that ab-initio device simulations require algorithms specifically developed for that purpose and that graphics processing units (GPUs) can bring significant speed ups as compared to solvers based on CPUs only. As an illustration, the computational times coming from the investigation of a realistic conductive bridging random access memory cell will be reported.
本文从第一性原理出发,提出了求解大规模量子输运问题的数值算法。它们可以分解为三个主要类别:(i)连接模拟域及其环境的开放边界条件的计算,(ii)在弹道输运极限下得到Schrödinger方程的解,以及(iii)将这种情况扩展到涉及散射的情况,例如电子-声子相互作用。它将表明,ab-initio设备模拟需要为此目的专门开发的算法,并且与仅基于cpu的求解器相比,图形处理单元(gpu)可以带来显着的速度提升。作为一个例子,计算时间来自一个现实的导电桥接随机存取存储单元的研究将被报道。
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引用次数: 0
Nonequilibrium Green’s function method: Büttiker probes for carrier generation and recombination 非平衡格林函数法:用于载流子生成和重组的<s:1> ttiker探针
Kuang-Chung Wang, Yuanchen Chu, Daniel Valencia, J. Geng, J. Charles, Prasad Sarangapani, T. Kubis
The non-equilibrium Green function (NEGF) method is capable of nanodevice performance predictions including coherent and incoherent effects. To treat incoherent scattering, carrier generation and recombination is computationally very expensive. In this work, the numerically efficient Buttiker-probe model is expanded to cover recombination and generation effects in addition to various incoherent scattering processes. The capability of the new method to predict nanodevices is exemplified with quantum well III-N light-emitting diodes and anti-ambipolar 2D material hetero junctions.
非平衡格林函数(NEGF)方法能够预测纳米器件的相干和非相干效应。为了处理非相干散射,载流子产生和重组在计算上是非常昂贵的。在这项工作中,扩展了数值上有效的Buttiker-probe模型,以涵盖复合和生成效应以及各种非相干散射过程。以量子阱III-N发光二极管和反双极性二维材料异质结为例,证明了新方法预测纳米器件的能力。
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引用次数: 1
Simulation of Hot-Electron Effects with Multi-band Semiconductor Devices 多波段半导体器件热电子效应的模拟
L. P. Tatum, Madeline Sciullo, M. Law
In this work, we present a 2-Valley energy band model of electron transport that delivers more accurate solutions compared with the Farahmand model but with improved convergence and a faster solution time for very high electric fields. This was achieved by implementing the Fermi-Dirac integral distribution as a substitution for the Boltzmann exponential, electron carrier temperature due to heat generation and conduction in the semiconductor lattice, and additional electron concentration modeling for a second conduction energy band minima. The model was primarily tuned by varying the electron temperature relaxation time constant. It was tested using a GaN-based High Electron Mobility Transistor using the Finite-Element Quasi Fermi method.
在这项工作中,我们提出了一个电子传递的2谷能带模型,与Farahmand模型相比,它提供了更准确的解,但在非常高的电场下,收敛性得到了改善,求解时间也更快。这是通过实现费米-狄拉克积分分布作为玻尔兹曼指数的替代,半导体晶格中产生热量和传导的电子载流子温度,以及第二个传导能带最小值的附加电子浓度建模来实现的。该模型主要通过改变电子温度弛豫时间常数来调谐。利用基于氮化镓的高电子迁移率晶体管,采用有限元准费米方法对其进行了测试。
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引用次数: 3
Enhancement of Resonance by the Use of Multiple Tunnel Barriers in Bilayer Graphene-Based Interlayer Tunnel Field Effect Transistors 利用多层石墨烯层间隧道场效应晶体管中的多个隧道势垒增强共振
N. Prasad, S. Banerjee, L. Register
Interlayer tunnel field effect transistors (ITFETs) make use of resonant tunneling between two layers of two-dimensional semiconductors to create a negative differential resistance. A narrow resonance allows for lowering the operating voltages in potential circuit applications. The use of multiple tunnel barriers is investigated as a means to obtain a narrow resonance, as the device dimensions are scaled down. For specificity, we analyze a bilayer graphene-based ITFET system.
层间隧道场效应晶体管(itfet)利用两层二维半导体之间的共振隧道来产生负差分电阻。窄谐振允许在潜在的电路应用中降低工作电压。当器件尺寸缩小时,研究了使用多个隧道势垒作为获得窄共振的手段。具体来说,我们分析了一个基于石墨烯的双层ITFET系统。
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引用次数: 1
Dynamical space partitioning for acceleration of parallelized lattice kinetic Monte Carlo simulations 并行点阵动力学蒙特卡罗模拟加速的动态空间划分
T. Nishimatsu, A. Payet, Byounghak Lee, Yasuyuki Kayama, Kiyoshi Ishikawa, Alexander Schmidt, I. Jang, Dae Sin Kim
A new dynamical space partitioning method is presented in a parallelized lattice kinetic Monte Carlo (kMC) simulator to overcome the loss of parallel efficiency found in other parallelized kMC simulators. The dynamical partitioning of the simulation cell allows better load balancing through all threads hence reducing time consuming events during the simulation. The new method is evaluated against both hypothetical and real cases. In both cases, minimal differences between serial and parallelized simulations are found. In real cases, other code optimizations may be needed to further improve the parallel efficiency.
针对并行化晶格动力学蒙特卡罗(kMC)模拟器存在的并行效率损失问题,提出了一种新的并行化晶格动力学蒙特卡罗(kMC)模拟器的动态空间划分方法。模拟单元的动态分区允许通过所有线程实现更好的负载平衡,从而减少模拟期间的耗时事件。根据假设和实际情况对新方法进行了评估。在这两种情况下,发现串行和并行模拟之间的差异很小。在实际情况下,可能需要其他代码优化来进一步提高并行效率。
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2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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