{"title":"“Review on New Developments of Ultrahigh Vacuum Technology” by Nagamitsu Yoshimura","authors":"K. Nakayama","doi":"10.3131/JVSJ2.60.412","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.412","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76858954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"International Vacuum Congress (IVC-20)の会議報告 真空科学技術(VST)/Pohang Accelerator Laboratory 見学","authors":"将博 山本","doi":"10.3131/JVSJ2.60.27","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.27","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77234025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Spinpolarized STM (SPSTM) is a powerful tool to visualize sample spinpolarization vectors at an atomic scale. A di‹culty of SPSTM measurement is how to fabricate a tip with a stable spinpolarization vector. In 1990's, ˆrst, many eŠorts were payed for a GaAs tip with optically pumping, but ˆnally the GaAs tip did not detect sample spin polarization due to quenching of the spinpolarization at the GaAs tip apex. However, in 2000, a W tip coated by a magnetic thin ˆlm detected the spinpolarized tunneling current, and spin polarization images of magnetic atoms were successfully obtained. In 2016, more than 15 groups in the world can perform SP STM measurements. History and issues for further development of SPSTM measurements are discussed.
{"title":"Spin-Polarized STM Overview and Issues for Next Developments","authors":"T. Yamada","doi":"10.3131/jvsj2.60.159","DOIUrl":"https://doi.org/10.3131/jvsj2.60.159","url":null,"abstract":"Spinpolarized STM (SPSTM) is a powerful tool to visualize sample spinpolarization vectors at an atomic scale. A di‹culty of SPSTM measurement is how to fabricate a tip with a stable spinpolarization vector. In 1990's, ˆrst, many eŠorts were payed for a GaAs tip with optically pumping, but ˆnally the GaAs tip did not detect sample spin polarization due to quenching of the spinpolarization at the GaAs tip apex. However, in 2000, a W tip coated by a magnetic thin ˆlm detected the spinpolarized tunneling current, and spin polarization images of magnetic atoms were successfully obtained. In 2016, more than 15 groups in the world can perform SP STM measurements. History and issues for further development of SPSTM measurements are discussed.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79295359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Correlation between Constant Temperature at the Preamp for a Quartz Oscillator and Stability of Pressure Sensor Output Using a Quartz Oscillator Atsushi SUZUKI1 1Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology AIST, Tsukuba Central 2, 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan
{"title":"水晶振動子プリアンプの恒温化と圧力センサ出力の安定性との相関;水晶振動子プリアンプの恒温化と圧力センサ出力の安定性との相関;Correlation between Constant Temperature at the Preamp for a Quartz Oscillator and Stability of Pressure Sensor Output Using a Quartz Oscillator","authors":"Atsushi Suzuki","doi":"10.3131/JVSJ2.60.499","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.499","url":null,"abstract":"Correlation between Constant Temperature at the Preamp for a Quartz Oscillator and Stability of Pressure Sensor Output Using a Quartz Oscillator Atsushi SUZUKI1 1Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology AIST, Tsukuba Central 2, 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80506295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Atmosphere control during low-pressure carburizing is important from a quality assurance viewpoint. We have developed a lowpressure carburizing furnace that can be used for mass production, which has an atmosphere control system comprising a thermal conductivity hydrogen sensor and an oxygen sensor. The hydrogen sensor is used for providing an atmosphere control necessary for carrying out both low-pressure carburizing and carbonitriding processes. The oxygen sensor detects air leaks and sooting in the furnace. In this paper, we demonstrate that when the atmosphere during the low-pressure carburizing and carbonitriding processes is controlled using the hydrogen sensor, the amount of carbon and nitrogen inˆltrated into the steel parts can be controlled, even if the parameters such as the ‰ow rate of gases, temperature, and the surface area of the parts change.
{"title":"真空浸炭における雰囲気制御の実際;真空浸炭における雰囲気制御の実際;Atmosphere Control during Low-Pressure Carburizing","authors":"K. Kawata","doi":"10.3131/jvsj2.60.96","DOIUrl":"https://doi.org/10.3131/jvsj2.60.96","url":null,"abstract":"Atmosphere control during low-pressure carburizing is important from a quality assurance viewpoint. We have developed a lowpressure carburizing furnace that can be used for mass production, which has an atmosphere control system comprising a thermal conductivity hydrogen sensor and an oxygen sensor. The hydrogen sensor is used for providing an atmosphere control necessary for carrying out both low-pressure carburizing and carbonitriding processes. The oxygen sensor detects air leaks and sooting in the furnace. In this paper, we demonstrate that when the atmosphere during the low-pressure carburizing and carbonitriding processes is controlled using the hydrogen sensor, the amount of carbon and nitrogen inˆltrated into the steel parts can be controlled, even if the parameters such as the ‰ow rate of gases, temperature, and the surface area of the parts change.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80920835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Reduction of In‰uence of Temperature on a Preamp to Improve Stability of Output from a Pressure Sensor Using a Temperature-Stable Quartz Oscillator Atsushi SUZUKI1 1Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology AIST, Tsukuba Central 2, 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan
{"title":"水晶振動子圧力センサ出力の安定性改善のためのプリアンプへの温度の影響低減;水晶振動子圧力センサ出力の安定性改善のためのプリアンプへの温度の影響低減;Reduction of Influence of Temperature on a Preamp to Improve Stability of Output from a Pressure Sensor Using a Temperature-Stable Quartz Oscillator","authors":"Atsushi Suzuki","doi":"10.3131/JVSJ2.60.131","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.131","url":null,"abstract":"Reduction of In‰uence of Temperature on a Preamp to Improve Stability of Output from a Pressure Sensor Using a Temperature-Stable Quartz Oscillator Atsushi SUZUKI1 1Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology AIST, Tsukuba Central 2, 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74333718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.
{"title":"Atmospheric Pressure Linear Microwave Plasma for Surface Treatment of Materials","authors":"H. Shindo, H. Kuwahata, M. Isomura","doi":"10.3131/JVSJ2.60.105","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.105","url":null,"abstract":"Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87820536","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Shuichi Tajiri, T. Onishi, Yukiko Okano, S. Ogawa, H. Mima
Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process Shuichi TAJIRI1, Takanori ONISHI1, Yukiko OKANO1, Soichi OGAWA2 and Hiroshi MIMA3 1Okano Works, Ltd., Micro sensor Division, 6229 Izuo, Taisyo-ku, Osaka-shi, Osaka 5510031, Japan 2Ogawa Creation Research Laboratory, 7187 Karigutidai, Tarumi-ku, Kobe-shi, Hyogo 6550049, Japan 3Osaka City University, 33138 Sugimoto, Sumiyoshi-ku, Osaka-shi, Osaka 5588585, Japan
{"title":"Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process","authors":"Shuichi Tajiri, T. Onishi, Yukiko Okano, S. Ogawa, H. Mima","doi":"10.3131/JVSJ2.60.220","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.220","url":null,"abstract":"Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process Shuichi TAJIRI1, Takanori ONISHI1, Yukiko OKANO1, Soichi OGAWA2 and Hiroshi MIMA3 1Okano Works, Ltd., Micro sensor Division, 6229 Izuo, Taisyo-ku, Osaka-shi, Osaka 5510031, Japan 2Ogawa Creation Research Laboratory, 7187 Karigutidai, Tarumi-ku, Kobe-shi, Hyogo 6550049, Japan 3Osaka City University, 33138 Sugimoto, Sumiyoshi-ku, Osaka-shi, Osaka 5588585, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89561218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"SAGA-LSにおける軟X線吸収分光 (小特集 シンクロトロン放射光によるX線吸収分光法の新展開(2))","authors":"Eiichi Kobayashi, Daisuke Yoshimura, Hiroyuki Setoyama, Toshihiro Okajima","doi":"10.3131/JVSJ2.59.341","DOIUrl":"https://doi.org/10.3131/JVSJ2.59.341","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2016-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83346123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Gas cluster ion beam (GCIB) exhibit unique irradiation eŠects such as dense energy deposition, low-damage irradiation, and surface smoothing eŠects. Especially, low-damage sputtering of organic materials is one of the hot applications of GCIB. However, it is still necessary to improve beam properties of GCIB. In this paper, we will review characterization of GCIB regarding formation of multiply charged GCIB and eŠects of collisions with residual gas. As recent applications of GCIB, etching enhancement by introduction of reactive background gas, and a nano-fabrication of magnetic recording device by GCIB are explained.
{"title":"Recent Developments in Gas Cluster Ion Beam Technology","authors":"N. Toyoda","doi":"10.3131/JVSJ2.59.121","DOIUrl":"https://doi.org/10.3131/JVSJ2.59.121","url":null,"abstract":"Gas cluster ion beam (GCIB) exhibit unique irradiation eŠects such as dense energy deposition, low-damage irradiation, and surface smoothing eŠects. Especially, low-damage sputtering of organic materials is one of the hot applications of GCIB. However, it is still necessary to improve beam properties of GCIB. In this paper, we will review characterization of GCIB regarding formation of multiply charged GCIB and eŠects of collisions with residual gas. As recent applications of GCIB, etching enhancement by introduction of reactive background gas, and a nano-fabrication of magnetic recording device by GCIB are explained.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2016-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77175263","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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