Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994047
Minh-Dung Nguyen, Kiyoshi Matsumoto, I. Shimoyama
This paper reports an approach for gas sensing, using liquid-on-beam structure. The key here is a piezoresistive beam was designed at the (lower) interface of liquid and air. Consider gas molecules adhere to the upper surface of liquid, the liquid's surface tension changes, resulting in the deformation of the beam. Since a small amount of gas molecule adhesion to the liquid surface can change the surface tension, this sensing method is supposed to be fast and sensitive. The sensor chip in the experiments had the dimensions of 2.5mm × 2.5mm × 0.3mm. To confirm the measuring principle, the liquid in our proposed device were silicone oil (HIVAC-F4) for acetone vapor gas sensing, since the acetone's molecules can change the silicone oil's surface tension. In the demonstration of CO2 gas sensing, ionic liquid ([EMIM][BF4]) were used regarding the selective ability of CO2 gas absorption
{"title":"Liquid-on-beam structure for gas sensing","authors":"Minh-Dung Nguyen, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/TRANSDUCERS.2017.7994047","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994047","url":null,"abstract":"This paper reports an approach for gas sensing, using liquid-on-beam structure. The key here is a piezoresistive beam was designed at the (lower) interface of liquid and air. Consider gas molecules adhere to the upper surface of liquid, the liquid's surface tension changes, resulting in the deformation of the beam. Since a small amount of gas molecule adhesion to the liquid surface can change the surface tension, this sensing method is supposed to be fast and sensitive. The sensor chip in the experiments had the dimensions of 2.5mm × 2.5mm × 0.3mm. To confirm the measuring principle, the liquid in our proposed device were silicone oil (HIVAC-F4) for acetone vapor gas sensing, since the acetone's molecules can change the silicone oil's surface tension. In the demonstration of CO2 gas sensing, ionic liquid ([EMIM][BF4]) were used regarding the selective ability of CO2 gas absorption","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129318775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994237
Ferdous Shaun, E. Nefzaoui, Hugo Regina, W. Cesar, F. Marty, Martine Capochichi-Gnambodoe, P. Poulichet, P. Basset, Francesco Peressuti, Sreyash Sarkar, T. Bourouina
Motivated by the need for a multi-parameter sensing chip for water networks monitoring, we address here the specific case of a flow-rate sensor where the main challenge is the substrate material. Instead of using conventional low thermal conductivity materials such as glass, silicon has to be used. Indeed, a silicon substrate enables the co-integration of various kinds of sensors on the same chip as reported in this contribution. However, it increases the flow-rate sensor power consumption due to larger thermal leaks. We therefore design and study an optimized low power micro-machined thermal flow-rate sensor based on a silicon substrate and operating according to hot-wire anemometry. It can be considered as an alternative to other well established sensors for liquid flow-rate measurement when both the use of a silicon substrate and a low power consumption are needed.
{"title":"On the co-integration of a thermo-resistive flow-rate sensor in a multi-parameter sensing chip for water network monitoring","authors":"Ferdous Shaun, E. Nefzaoui, Hugo Regina, W. Cesar, F. Marty, Martine Capochichi-Gnambodoe, P. Poulichet, P. Basset, Francesco Peressuti, Sreyash Sarkar, T. Bourouina","doi":"10.1109/TRANSDUCERS.2017.7994237","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994237","url":null,"abstract":"Motivated by the need for a multi-parameter sensing chip for water networks monitoring, we address here the specific case of a flow-rate sensor where the main challenge is the substrate material. Instead of using conventional low thermal conductivity materials such as glass, silicon has to be used. Indeed, a silicon substrate enables the co-integration of various kinds of sensors on the same chip as reported in this contribution. However, it increases the flow-rate sensor power consumption due to larger thermal leaks. We therefore design and study an optimized low power micro-machined thermal flow-rate sensor based on a silicon substrate and operating according to hot-wire anemometry. It can be considered as an alternative to other well established sensors for liquid flow-rate measurement when both the use of a silicon substrate and a low power consumption are needed.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132365187","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994091
Loc Do Quang, T. Bui, T. V. Quoc, Luan Pham Thanh, Ha Tran Thi Thuy, V. Dau, C. Jen, T. C. Duc
This paper presents a dielectrophoresis (DEP) enrichment microfluidic platform with built-in antibody-based capacitive sensor for tumor rare cells detection. We take the advantages of the effective DEP actuation, the high selectivity property of antibody for rare cell immobilization, and the high sensitivity of differential capacitive sensing for quantitatively reading out, to produce advanced platform, toward single tumor cell detection for the rapid laboratory tests of cancers diagnoses and other metabolic diseases applications.
{"title":"Dielectrophoresis enrichment with built-in capacitive sensor microfluidic platform for tumor rare cell detection","authors":"Loc Do Quang, T. Bui, T. V. Quoc, Luan Pham Thanh, Ha Tran Thi Thuy, V. Dau, C. Jen, T. C. Duc","doi":"10.1109/TRANSDUCERS.2017.7994091","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994091","url":null,"abstract":"This paper presents a dielectrophoresis (DEP) enrichment microfluidic platform with built-in antibody-based capacitive sensor for tumor rare cells detection. We take the advantages of the effective DEP actuation, the high selectivity property of antibody for rare cell immobilization, and the high sensitivity of differential capacitive sensing for quantitatively reading out, to produce advanced platform, toward single tumor cell detection for the rapid laboratory tests of cancers diagnoses and other metabolic diseases applications.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132179056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993982
G. Feng, Liang-Chao Wang, I-Hao Yeh
This paper presents a novel ellipsoid-shaped soft and biocompatible device which can be integrated with a percutaneous transluminal angioplasty (PTA) balloon catheter for biomedical application. The device contains a 3-dimentional electroactive polymer core element and is packaged by PDMS with villi structure around the center region of the device (Fig. 1). The core element is made of ionic polymer metal composite (IPMC) with a unique hollow design to allow the catheter passing through and can be anchored at an arbitrary position of the catheter. The core element possesses radial directional displacement and force sensing functions without using external electricity and can actuate the villi made on the PDMS housing of the device to generate forced perturbation. The ellipsoidal PDMS housing reduces flow resistance during operation and extends the device lifetime. The developed device detecting the fat accumulation around a blood vessel phantom is successfully demonstrated.
{"title":"PTA balloon catheter integrated electroactive polymer transducer for sensing vascular blockage and disturbing vessel plaques","authors":"G. Feng, Liang-Chao Wang, I-Hao Yeh","doi":"10.1109/TRANSDUCERS.2017.7993982","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993982","url":null,"abstract":"This paper presents a novel ellipsoid-shaped soft and biocompatible device which can be integrated with a percutaneous transluminal angioplasty (PTA) balloon catheter for biomedical application. The device contains a 3-dimentional electroactive polymer core element and is packaged by PDMS with villi structure around the center region of the device (Fig. 1). The core element is made of ionic polymer metal composite (IPMC) with a unique hollow design to allow the catheter passing through and can be anchored at an arbitrary position of the catheter. The core element possesses radial directional displacement and force sensing functions without using external electricity and can actuate the villi made on the PDMS housing of the device to generate forced perturbation. The ellipsoidal PDMS housing reduces flow resistance during operation and extends the device lifetime. The developed device detecting the fat accumulation around a blood vessel phantom is successfully demonstrated.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126641465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993984
Jongsung Park, Ji-Kwan Kim, Su A. Park, D. Sim, M. Jeong, Dong-weon Lee
We proposed a novel fabrication method for a biodegradable polymeric smart stent using the 3D printing technology. The battery-less pressure sensor based on an LC circuit was integrated onto the 3D-printed polymeric stent for the purpose of wireless monitoring of pressure in a blood vessel. In general, bare-metal stents have been widely employed in medical applications. However, radio frequency (RF) wave generated through an external coil tends to disturb on the surface of metallic stents. This influences to the sensitivity and reliability of the wireless pressure sensor. To solve the drawback, we employed the polymeric stent based on a polycaprolactone material. The 3D printing-based manufacturing process for the biodegradable polymer stent is relatively easy in comparing with a conventional laser method. Furthermore, sensor signal doesn't influence by the stent material and structure. Animal tests were also conducted using the fabricated battery-less pressure sensor. Biocompatibility of the smart stent was experimentally confirmed through a long-term evaluation over 5 months.
{"title":"3D-printed biodegradable polymeric stent integrated with a battery-less pressure sensor for biomedical applications","authors":"Jongsung Park, Ji-Kwan Kim, Su A. Park, D. Sim, M. Jeong, Dong-weon Lee","doi":"10.1109/TRANSDUCERS.2017.7993984","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993984","url":null,"abstract":"We proposed a novel fabrication method for a biodegradable polymeric smart stent using the 3D printing technology. The battery-less pressure sensor based on an LC circuit was integrated onto the 3D-printed polymeric stent for the purpose of wireless monitoring of pressure in a blood vessel. In general, bare-metal stents have been widely employed in medical applications. However, radio frequency (RF) wave generated through an external coil tends to disturb on the surface of metallic stents. This influences to the sensitivity and reliability of the wireless pressure sensor. To solve the drawback, we employed the polymeric stent based on a polycaprolactone material. The 3D printing-based manufacturing process for the biodegradable polymer stent is relatively easy in comparing with a conventional laser method. Furthermore, sensor signal doesn't influence by the stent material and structure. Animal tests were also conducted using the fabricated battery-less pressure sensor. Biocompatibility of the smart stent was experimentally confirmed through a long-term evaluation over 5 months.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115365132","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993995
Chin-Yu Chou, Ming-Huang Li, Chao-Yu Chen, Chun-You Liu, Sheng-Shian Li
A 3-D mechanically-coupled resonator array has been demonstrated for the first time using CMOS-MEMS technology. A high-performance vertically-coupled (VC) CMOS-MEMS resonator pair was utilized to extend the array topology into 3-D configuration with an on-chip interfaced circuit through a TSMC 0.35 μm 2P4M CMOS-MEMS platform. An array design of 9 VC pairs (N = 18 where N is the number of constituent resonators of an array) was fabricated and characterized with resonance frequency of 5.64 MHz and 0-factor of 1,092. As compared to a single VC pair (N = 2), the Saddle (SA) mode (undesired mode) was eliminated in the array design by the use of electrode phasing at the cost of weak spurious modes around the desired resonance. The 3-D array oscillator was also realized by using an instrumental Lock-in + PLL system. Under same dc biasing, the proposed 3-D array achieves better power handling and phase noise performance over the single VC pair. This technology is expected to bring more functionalities towards medium-scale integrated (MSI) micromechanical circuits.
{"title":"An innovative 3-D mechanically-coupled array design for MEMS resonator and oscillators","authors":"Chin-Yu Chou, Ming-Huang Li, Chao-Yu Chen, Chun-You Liu, Sheng-Shian Li","doi":"10.1109/TRANSDUCERS.2017.7993995","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993995","url":null,"abstract":"A 3-D mechanically-coupled resonator array has been demonstrated for the first time using CMOS-MEMS technology. A high-performance vertically-coupled (VC) CMOS-MEMS resonator pair was utilized to extend the array topology into 3-D configuration with an on-chip interfaced circuit through a TSMC 0.35 μm 2P4M CMOS-MEMS platform. An array design of 9 VC pairs (N = 18 where N is the number of constituent resonators of an array) was fabricated and characterized with resonance frequency of 5.64 MHz and 0-factor of 1,092. As compared to a single VC pair (N = 2), the Saddle (SA) mode (undesired mode) was eliminated in the array design by the use of electrode phasing at the cost of weak spurious modes around the desired resonance. The 3-D array oscillator was also realized by using an instrumental Lock-in + PLL system. Under same dc biasing, the proposed 3-D array achieves better power handling and phase noise performance over the single VC pair. This technology is expected to bring more functionalities towards medium-scale integrated (MSI) micromechanical circuits.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129373772","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994400
M. Leber, R. Bhandari, F. Solzbacher, S. Negi
Neural microelectrodes can record from and stimulate neurons in the central and peripheral nervous systems. They play a critical role for the development of neural prostheses to restore lost motor or sensory functions of the body. Existing commercial devices (such as the Utah array) exhibit a lifetime of few months to several years. For clinical applications, it is desirable for these microelectrodes to last multiple decades. One of the primary reasons for the short lifetime of these devices is the micromotion of the brain with respect to the electrode array, causing severe foreign body response. To address this friction between the brain and electrode array, we present a self-dissolvable microelectrode array, whose electrodes can freely float in the brain independent to each other. During insertion, the base of the array is still held together by the biocompatible and dissolvable material polyethylene glycol (PEG). Once implanted, the PEG dissolves in the biological fluid resulting in all electrodes freely floating in the neural tissue.
{"title":"Novel method of fabricating self-dissolvable and freely floating neural array","authors":"M. Leber, R. Bhandari, F. Solzbacher, S. Negi","doi":"10.1109/TRANSDUCERS.2017.7994400","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994400","url":null,"abstract":"Neural microelectrodes can record from and stimulate neurons in the central and peripheral nervous systems. They play a critical role for the development of neural prostheses to restore lost motor or sensory functions of the body. Existing commercial devices (such as the Utah array) exhibit a lifetime of few months to several years. For clinical applications, it is desirable for these microelectrodes to last multiple decades. One of the primary reasons for the short lifetime of these devices is the micromotion of the brain with respect to the electrode array, causing severe foreign body response. To address this friction between the brain and electrode array, we present a self-dissolvable microelectrode array, whose electrodes can freely float in the brain independent to each other. During insertion, the base of the array is still held together by the biocompatible and dissolvable material polyethylene glycol (PEG). Once implanted, the PEG dissolves in the biological fluid resulting in all electrodes freely floating in the neural tissue.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121527742","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994021
Fan Liu, K. Pawan, Ge Zhang, J. Zhe
We present a microfluidic sensor for single cell detection based on Coulter counting technology and magnetic bead assay. This device can identify single cells in terms of the transit time difference of the cell through the two micro Coulter counters. Each single target cell can be differentiated from non-target cells even if they have similar sizes. Additionally, we demonstrated that HUVECs can be detected in situ from the cell mixture, and the corresponding HUVECs ratios can be accurately measured. With the simple device structure and easy sample preparation, this method could be applied to facilitate general cell detection applications.
{"title":"A microfluidic sensor for single cell detection in a continuous flow","authors":"Fan Liu, K. Pawan, Ge Zhang, J. Zhe","doi":"10.1109/TRANSDUCERS.2017.7994021","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994021","url":null,"abstract":"We present a microfluidic sensor for single cell detection based on Coulter counting technology and magnetic bead assay. This device can identify single cells in terms of the transit time difference of the cell through the two micro Coulter counters. Each single target cell can be differentiated from non-target cells even if they have similar sizes. Additionally, we demonstrated that HUVECs can be detected in situ from the cell mixture, and the corresponding HUVECs ratios can be accurately measured. With the simple device structure and easy sample preparation, this method could be applied to facilitate general cell detection applications.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124378868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994139
M. Mastrangeli
Steady progress in understanding and implementation are establishing self-assembly as a versatile, parallel and scalable approach to the fabrication of transducers. In this contribution, I illustrate the principles and reach of self-assembly with three applications at different scales — namely, the capillary self-alignment of millimetric components, the sealing of liquid-filled polymeric microcapsules, and the accurate capillary assembly of single nanoparticles — and propose foreseeable directions for further developments.
{"title":"Self-assembly of micro/nanosystems across scales and interfaces","authors":"M. Mastrangeli","doi":"10.1109/TRANSDUCERS.2017.7994139","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994139","url":null,"abstract":"Steady progress in understanding and implementation are establishing self-assembly as a versatile, parallel and scalable approach to the fabrication of transducers. In this contribution, I illustrate the principles and reach of self-assembly with three applications at different scales — namely, the capillary self-alignment of millimetric components, the sealing of liquid-filled polymeric microcapsules, and the accurate capillary assembly of single nanoparticles — and propose foreseeable directions for further developments.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124245536","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994294
María D. Manrique-Juárez, S. Rat, L. Mazenq, F. Mathieu, I. Séguy, T. Leïchlé, L. Nicu, L. Salmon, G. Molnár, A. Bousseksou
This work describes the integration of molecular spin crossover (SCO) compound [Fe(H2B(pz)2)2(phen)] 1 (H2B(pz)2 = dihydrobis(pyrazolyl)borate, phen = 1,10-phenantroline) into silicon MEMS with the aim to determine the mechanical properties of the SCO thin film. Analytical methods using the experimental resonance frequency before and after deposition of 1 are used to extract the elastic modulus (E) and residual stress (σ) induced by the film deposition, leading to values of E = 6.9 ± 0.1 GPa and σ = 74.8 MPa respectively. Additional mechanical parameters as a consequence of the expected spin transition were also predicted. These results provide a step towards the integration of SCO materials for future applications as actuators in MEMS/NEMS devices.
{"title":"Spin crossover materials for MEMS actuation: Film integration and characterization","authors":"María D. Manrique-Juárez, S. Rat, L. Mazenq, F. Mathieu, I. Séguy, T. Leïchlé, L. Nicu, L. Salmon, G. Molnár, A. Bousseksou","doi":"10.1109/TRANSDUCERS.2017.7994294","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994294","url":null,"abstract":"This work describes the integration of molecular spin crossover (SCO) compound [Fe(H<inf>2</inf>B(pz)<inf>2</inf>)<inf>2</inf>(phen)] 1 (H2B(pz)<inf>2</inf> = dihydrobis(pyrazolyl)borate, phen = 1,10-phenantroline) into silicon MEMS with the aim to determine the mechanical properties of the SCO thin film. Analytical methods using the experimental resonance frequency before and after deposition of 1 are used to extract the elastic modulus (E) and residual stress (σ) induced by the film deposition, leading to values of E = 6.9 ± 0.1 GPa and σ = 74.8 MPa respectively. Additional mechanical parameters as a consequence of the expected spin transition were also predicted. These results provide a step towards the integration of SCO materials for future applications as actuators in MEMS/NEMS devices.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121019755","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：