Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994281
T. Tsuchiya, K. Sugano, Hideki Takahashi, H. Seo, Y. Pihosh, Y. Kazoe, K. Mawatari, T. Kitamori, O. Tabata
We have developed dry etching process of lithium niobate (LN) wafer using neutral loop discharge reactive ion etching (NLD-RIE) to fabricate both micro- and nano-channels for investigating proton diffusion enhancement in ferroelectric nanochannels. We have also developed low-temperature direct bonding process between LN wafers. Two-hundred parallel nanochannel array of 200-nm deep and wide and 400-μm long connected to two microchannels (width: 500 μm, depth: 5.9 μm) at the both ends were fabricated. We have succeeded in measuring the proton diffusion coefficient as high as 1.2×10−8 m2/s.
{"title":"Dry etching and low-temperature direct bonding process of lithium niobate wafer for fabricating micro/nano channel device","authors":"T. Tsuchiya, K. Sugano, Hideki Takahashi, H. Seo, Y. Pihosh, Y. Kazoe, K. Mawatari, T. Kitamori, O. Tabata","doi":"10.1109/TRANSDUCERS.2017.7994281","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994281","url":null,"abstract":"We have developed dry etching process of lithium niobate (LN) wafer using neutral loop discharge reactive ion etching (NLD-RIE) to fabricate both micro- and nano-channels for investigating proton diffusion enhancement in ferroelectric nanochannels. We have also developed low-temperature direct bonding process between LN wafers. Two-hundred parallel nanochannel array of 200-nm deep and wide and 400-μm long connected to two microchannels (width: 500 μm, depth: 5.9 μm) at the both ends were fabricated. We have succeeded in measuring the proton diffusion coefficient as high as 1.2×10−8 m2/s.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115793900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994170
V. Maiwald, Y. Chen, M. Müller, I. Flader, C. Roman, D. Heinz, D. D. Shin, T. Kenny, C. Hierold
We present a tunable broadband shoaling mechanical amplifier and a method to extend its operation near the electrostatic pull-in instability. The model has been verified experimentally on a vacuum encapsulated silicon MEMS device. We show that by adding an appropriate mechanical compensation spring, the amplifier can be operated near the pull-in instability in a quasi-linear fashion. Furthermore, electrostatic band-pass region and amplification tuning is shown.
{"title":"Transfer function tuning of a broadband shoaling mechanical amplifier near the electrostatic instability","authors":"V. Maiwald, Y. Chen, M. Müller, I. Flader, C. Roman, D. Heinz, D. D. Shin, T. Kenny, C. Hierold","doi":"10.1109/TRANSDUCERS.2017.7994170","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994170","url":null,"abstract":"We present a tunable broadband shoaling mechanical amplifier and a method to extend its operation near the electrostatic pull-in instability. The model has been verified experimentally on a vacuum encapsulated silicon MEMS device. We show that by adding an appropriate mechanical compensation spring, the amplifier can be operated near the pull-in instability in a quasi-linear fashion. Furthermore, electrostatic band-pass region and amplification tuning is shown.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115234173","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This study presents a passive, self-driven microfluidic device which can rapidly identify influenza A (HlNl) virus by using reverse transcription loop-mediated isothermal amplification (RT-LAMP). H1N1-specific aptamer conjugated magnetic beads were used to capture virus and the RT-LAMP product could be detected by visual coloration. The entire diagnosis could be automatically performed by capillary forces through a new polydimethylsiloxane (PDMS) surface treatment in cooperation with hydrophobic micro valves. The entire assay and its feasibility was verified. This is the first time that a simple, self-driven passive microfluidic chip was demonstrated which could perform the entire process including sample pretreatment, RT-LAMP application and influenza A diagnosis.
{"title":"An integrated passive microfluidic device for rapid detection of influenza a (H1N1) virus by reverse transcription loop-mediated isothermal amplification (RT-LAMP)","authors":"Yu-Dong Ma, Wen-Hsin Chang, Chih-Hung Wang, Hsi-Pin Ma, Po-Chiun Huang, Gwo-Bin Lee","doi":"10.1109/TRANSDUCERS.2017.7994150","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994150","url":null,"abstract":"This study presents a passive, self-driven microfluidic device which can rapidly identify influenza A (HlNl) virus by using reverse transcription loop-mediated isothermal amplification (RT-LAMP). H1N1-specific aptamer conjugated magnetic beads were used to capture virus and the RT-LAMP product could be detected by visual coloration. The entire diagnosis could be automatically performed by capillary forces through a new polydimethylsiloxane (PDMS) surface treatment in cooperation with hydrophobic micro valves. The entire assay and its feasibility was verified. This is the first time that a simple, self-driven passive microfluidic chip was demonstrated which could perform the entire process including sample pretreatment, RT-LAMP application and influenza A diagnosis.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114257471","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994433
Xiang Ren, Parham Ghassemi, W. Yuan, Jack G. Zhou, P. Chong, M. Noh
We developed a cell-free artificial photosynthesis platform conducting both light and dark reactions for harvesting light energy and transforming the energy to organic compounds. To the best of our knowledge, such a device had not been reported so far. This system was able to harvest light energy and transform the energy to organic compounds, mimicking a plant leaf. We integrated the "artificial leaves" on a PCB demonstration board to create a compact energy harvesting system with a promising efficiency.
{"title":"Cell-free artificial photosynthesis system","authors":"Xiang Ren, Parham Ghassemi, W. Yuan, Jack G. Zhou, P. Chong, M. Noh","doi":"10.1109/TRANSDUCERS.2017.7994433","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994433","url":null,"abstract":"We developed a cell-free artificial photosynthesis platform conducting both light and dark reactions for harvesting light energy and transforming the energy to organic compounds. To the best of our knowledge, such a device had not been reported so far. This system was able to harvest light energy and transform the energy to organic compounds, mimicking a plant leaf. We integrated the \"artificial leaves\" on a PCB demonstration board to create a compact energy harvesting system with a promising efficiency.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130089397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994054
N. Besse, J. Zárate, S. Rosset, H. Shea
We report the first high-resolution flexible haptic display with 768 (32×24) individually addressable taxels (tactile pixels) designed for wearables and virtual reality (VR) applications. The device integrates a thin Shape Memory Polymer (SMP) membrane with a matrix of compliant carbon-silicone composite heaters, a 4-layer flexible PCB and a flexible fluidic chamber. The actuator yield is 99 %, the taxel pitch is 4 mm and the average displacement is 275 μm with a 225 mN holding force, allowing easy discrimination using the sense of fine touch. One line can be reconfigured and latched in 2.5 s; the entire array can be refreshed in under 1 min 30 s with our current drive circuit. The bistable nature of SMPs enables selective and independent actuator motion by judiciously synchronizing their local Joule heating with a global external pressure supply.
{"title":"Flexible haptic display with 768 independently controllable shape memory polymers taxels","authors":"N. Besse, J. Zárate, S. Rosset, H. Shea","doi":"10.1109/TRANSDUCERS.2017.7994054","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994054","url":null,"abstract":"We report the first high-resolution flexible haptic display with 768 (32×24) individually addressable taxels (tactile pixels) designed for wearables and virtual reality (VR) applications. The device integrates a thin Shape Memory Polymer (SMP) membrane with a matrix of compliant carbon-silicone composite heaters, a 4-layer flexible PCB and a flexible fluidic chamber. The actuator yield is 99 %, the taxel pitch is 4 mm and the average displacement is 275 μm with a 225 mN holding force, allowing easy discrimination using the sense of fine touch. One line can be reconfigured and latched in 2.5 s; the entire array can be refreshed in under 1 min 30 s with our current drive circuit. The bistable nature of SMPs enables selective and independent actuator motion by judiciously synchronizing their local Joule heating with a global external pressure supply.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131954154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994516
A. De Luca, C. Falco, Ethan L. W. Gardner, J. Coull, F. Udrea
This paper reports on the intrinsic advantages of thermoelectronic flow sensors in comparison to their thermoresistive and thermoelectric counterparts. Hereafter, we will numerically and experimentally show that thermoelectronic flow sensors (i.e. thermal flow sensors employing p-n junction based devices as temperature sensors) benefit from the possibility of having the temperature sensor located in the hottest area of the heating element for enhanced convective effects and thus improved sensor sensitivity (Average Sensitivity +42%). Further improvements can be achieved by putting more diodes in series (Average Sensitivity +380%). A multidirectional thermoelectronic flow sensor is also reported.
{"title":"Diode-based CMOS MEMS thermal flow sensors","authors":"A. De Luca, C. Falco, Ethan L. W. Gardner, J. Coull, F. Udrea","doi":"10.1109/TRANSDUCERS.2017.7994516","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994516","url":null,"abstract":"This paper reports on the intrinsic advantages of thermoelectronic flow sensors in comparison to their thermoresistive and thermoelectric counterparts. Hereafter, we will numerically and experimentally show that thermoelectronic flow sensors (i.e. thermal flow sensors employing p-n junction based devices as temperature sensors) benefit from the possibility of having the temperature sensor located in the hottest area of the heating element for enhanced convective effects and thus improved sensor sensitivity (Average Sensitivity +42%). Further improvements can be achieved by putting more diodes in series (Average Sensitivity +380%). A multidirectional thermoelectronic flow sensor is also reported.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131050802","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994161
S. Yamada, Takaaki Sato, H. Toshiyoshi
Ionic gel is used for the first time on a ZnO field effect transistor (FET) to enhance the gate capacitance due to the electrical double layer, thereby developing an extremely sensitive tactile pressure sensor of 2,200 kPa−1, which is at least 10 times greater than the conventional reports.
{"title":"Pressure sensitive ionic gel-fets of extremely high sensitivity over 2,200 kPa−1 operated under 2 V","authors":"S. Yamada, Takaaki Sato, H. Toshiyoshi","doi":"10.1109/TRANSDUCERS.2017.7994161","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994161","url":null,"abstract":"Ionic gel is used for the first time on a ZnO field effect transistor (FET) to enhance the gate capacitance due to the electrical double layer, thereby developing an extremely sensitive tactile pressure sensor of 2,200 kPa−1, which is at least 10 times greater than the conventional reports.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123036547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994035
N. Sarkar, B. O'Hanlon, G. Lee, D. Strathearn, M. Olfat, A. Rohani, R. Mansour
We report the first optical microsystem that captures index finger microgestures with the precision, bandwidth, power consumption and form-factor required for close-range handwriting and gesture keyboarding (e.g. Swipe) on smart watches and mobile handsets. Finger position is measured with 30μm resolution (at a 5cm distance) at a bandwidth of up to 550Hz while consuming less than 15mW with the reported prototype system. A VCSEL, scanning diffractive optic element (DOE), and photodiode may be packaged in a 2×2×1mm package to fit unobtrusively in a wearable device. This component may enable the first information-rich touch-less gesture inputs to wearables.
{"title":"Optical MEMS index finger microgesture input sensor for mobile and wearable devices","authors":"N. Sarkar, B. O'Hanlon, G. Lee, D. Strathearn, M. Olfat, A. Rohani, R. Mansour","doi":"10.1109/TRANSDUCERS.2017.7994035","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994035","url":null,"abstract":"We report the first optical microsystem that captures index finger microgestures with the precision, bandwidth, power consumption and form-factor required for close-range handwriting and gesture keyboarding (e.g. Swipe) on smart watches and mobile handsets. Finger position is measured with 30μm resolution (at a 5cm distance) at a bandwidth of up to 550Hz while consuming less than 15mW with the reported prototype system. A VCSEL, scanning diffractive optic element (DOE), and photodiode may be packaged in a 2×2×1mm package to fit unobtrusively in a wearable device. This component may enable the first information-rich touch-less gesture inputs to wearables.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121996160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7994478
M. Thielen, Emir Sanusoglu, Florian Fürer, Nicolas Ehrenberg, C. Hierold
Ultra-low power devices including circuits, sensors and analytical microfluidics rely on an optimized thermal operation point. This paper reports on a bioinspired and zero-power approach to adjust the heat flux through a heatsink using temperature sensitive microactuators. We replicate the mammal piloerection mechanism for thermoregulation with bimorph microhairs fabricated from polyimide and PVDF-TRFE copolymer. The actuators feature a very high temperature sensitivity (SD = 0.053 1/K) that enables a number of other actuator applications such as switches, fluidics and optics.
{"title":"Bioinspired microactuators for zero-power heat flux regulation","authors":"M. Thielen, Emir Sanusoglu, Florian Fürer, Nicolas Ehrenberg, C. Hierold","doi":"10.1109/TRANSDUCERS.2017.7994478","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7994478","url":null,"abstract":"Ultra-low power devices including circuits, sensors and analytical microfluidics rely on an optimized thermal operation point. This paper reports on a bioinspired and zero-power approach to adjust the heat flux through a heatsink using temperature sensitive microactuators. We replicate the mammal piloerection mechanism for thermoregulation with bimorph microhairs fabricated from polyimide and PVDF-TRFE copolymer. The actuators feature a very high temperature sensitivity (SD = 0.053 1/K) that enables a number of other actuator applications such as switches, fluidics and optics.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131592098","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-06-18DOI: 10.1109/TRANSDUCERS.2017.7993976
Chumin Zhao, K. Knisely, K. Grosh
An implantable acoustic transducer is crucial for a completely implantable cochlear implant (CICI). This paper presents a miniaturized multichannel aluminum nitride (AlN) transducer designed to fit inside a guinea pig cochlea and act as a front end of a CICI. The transducer, fabricated using microelectromechanical systems techniques, has four piezoelectric bimorphs to produce broadband enhanced sensitivity. Transducer functionality is demonstrated via in-air and underwater actuation and acoustic sensing. A finite element analysis model is developed to design the transducer and understand its frequency behavior. The modeled results provide a good match with the experimental results.
{"title":"Modeling, fabrication, and testing of a MEMS multichannel aln transducer for a completely implantable cochelar implant","authors":"Chumin Zhao, K. Knisely, K. Grosh","doi":"10.1109/TRANSDUCERS.2017.7993976","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2017.7993976","url":null,"abstract":"An implantable acoustic transducer is crucial for a completely implantable cochlear implant (CICI). This paper presents a miniaturized multichannel aluminum nitride (AlN) transducer designed to fit inside a guinea pig cochlea and act as a front end of a CICI. The transducer, fabricated using microelectromechanical systems techniques, has four piezoelectric bimorphs to produce broadband enhanced sensitivity. Transducer functionality is demonstrated via in-air and underwater actuation and acoustic sensing. A finite element analysis model is developed to design the transducer and understand its frequency behavior. The modeled results provide a good match with the experimental results.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132227946","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：