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Thermal resistance of the semiconductor structures for a photomixing device 光敏器件用半导体结构的热阻
J. Darmo, F. Schafer, A. Forster, P. Kordos, R. Gusten
The thermal resistance of layered semiconductor systems intended to be used for GaAs-based photomixing devices is studied. Layered systems with nonstoichiometric GaAs on the substrate exhibit an increase of thermal resistance of about 33%, while using a thin AlAs/GaAs multilayer structure leads to a thermal resistance only 10% larger than the thermal resistance of the GaAs substrate. The results are discussed with respect to the heat dissipation and implications for the photomixer device.
研究了用于gaas基光电混合器件的层状半导体系统的热阻。在衬底上使用非化学计量GaAs的层状体系的热阻增加了约33%,而使用薄的AlAs/GaAs多层结构的热阻仅比GaAs衬底的热阻大10%。讨论了研究结果的散热和对光电合成器件的影响。
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引用次数: 0
Superior-order curvature-correction CMOS smart temperature sensor 高阶曲率校正CMOS智能温度传感器
C. Popa
The circuit presented in this paper responds to both of the main requirements of a smart temperature sensor: high performance (that is a very good linearity with respect to temperature variations) and a small price per chip (realized by reducing the die area and the interconnection costs). The core of the proposed smart temperature sensor is represented by an exponential curvature-corrected CMOS bandgap reference, with a temperature coefficient of 7.5 ppm/K for an extended temperature range. The entire circuit was implemented in 0.35 /spl mu/m CMOS technology, the analog core occupying a die area of about 70 /spl mu/m /spl times/ 110 /spl mu/m. In order to reduce the interconnection costs and their delays and static errors, an I/sup 2/C interface was on-chip integrated.
本文中提出的电路满足智能温度传感器的两个主要要求:高性能(即对温度变化具有非常好的线性关系)和每个芯片的小价格(通过减少芯片面积和互连成本实现)。所提出的智能温度传感器的核心由指数曲率校正的CMOS带隙基准表示,温度系数为7.5 ppm/K,可扩展温度范围。整个电路采用0.35 /spl mu/m的CMOS技术实现,模拟核占据的芯片面积约为70 /spl mu/m /spl倍/ 110 /spl mu/m。为了降低互连成本、降低延迟和静态误差,在片上集成了I/sup 2/C接口。
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引用次数: 1
GMR signal of Co-Ag layered structures in dynamic conditions of measurement GMR信号对Co-Ag层状结构在动态条件下的测量
V. Áč, B. Anwarzai, S. Luby, E. Majková, R. Senderák
The signal response in layered giant magnetoresistance (GMR) structures is studied in an external ac magnetic field at 50 Hz with an increasing amplitude swing. Co-Ag multilayers (MLs) were evaporated onto Si substrates. The thickness of Co and Ag layers was 1.2 nm and 5.5 nm, respectively. MLs with only N=2, 3, 4 periods were fabricated to expose the relative higher influence of top and bottom ferromagnetic Co layers of ML having a higher density of magnetic flux than the central layers. Experimental results are explained in terms of simulations of inhomogeneous magnetic field distribution in ML. Simulations were performed by an appropriate software tool. The results are of some relevance for the design and applications of smart magnetic GMR sensors.
研究了层状巨磁电阻(GMR)结构在50hz外加交流磁场下的信号响应。将Co-Ag多层膜(MLs)蒸发到Si衬底上。Co和Ag层的厚度分别为1.2 nm和5.5 nm。制备了N=2、3、4周期的MLs,揭示了具有较高磁通量密度的ML的顶部和底部铁磁Co层对MLs的影响相对较大。实验结果用模拟ML中不均匀磁场分布的方法进行了解释,并用合适的软件工具进行了模拟。研究结果对GMR智能磁传感器的设计和应用具有一定的指导意义。
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引用次数: 0
High-performance AlGaN/GaN HEMTs on silicon substrates 硅衬底上的高性能AlGaN/GaN hemt
P. Javorka, A. Alam, A. Fox, M. Marso, M. Heuken, P. Kordos
In this work the performance of AlGaN/GaN HEMTs on silicon substrates is presented. Prepared devices exhibit a saturation current of 0.91 A/mm and sustain significantly higher DC power in comparison to devices on sapphire. Markedly lower reduction of I/sub DSs/ and g/sub m,ext/ with increased temperature due to better thermal conductivity of silicon is shown. A unity gain cutoff frequency f/sub T/ of 32 and 20 GHz and a maximum frequency of oscillation of 27 and 22 GHz are obtained for devices with gate lengths of 0.7 and 0.5 /spl mu/m, respectively. These are the highest values reported so far on AlGaN/GaN/Si HEMTs. Presented values are comparable to those known for devices on sapphire and SiC substrates.
本文介绍了硅衬底上AlGaN/GaN hemt的性能。制备的器件显示出0.91 a /mm的饱和电流,并且与蓝宝石器件相比,可以维持更高的直流功率。由于硅的导热性较好,I/sub - ds /和g/sub - m,ext/随温度升高而明显降低。对于栅极长度为0.7和0.5 /spl mu/m的器件,单位增益截止频率f/sub /分别为32 GHz和20 GHz,最大振荡频率为27 GHz和22 GHz。这是迄今为止报道的AlGaN/GaN/Si hemt的最高值。所呈现的值可与蓝宝石和SiC衬底上的器件相媲美。
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引用次数: 1
A promising lead-free material for flip-chip bumps: Sn-Cu-RE 一种有前途的无铅倒装芯片碰撞材料:Sn-Cu-RE
C.M.L. Wu
In advanced electronic packaging, flip-chip (FC) bumps are required to be reliable and inexpensive. The Sn-0.7%Cu alloy has been considered as a lead-free material for FC bumps. Various small amounts of rare earth (RE) elements, which are mainly Ce and La, have been added to the Sn-0.7%Cu alloy to form new alloys. It was found that the new alloys exhibit mechanical properties superior to that of the Sn-0.7%Cu alloy. In particular, the addition of up to 0.5% of RE elements is found to refine the effective grain size and provide a fine and uniform distribution of Cu/sub 6/Sn/sub 5/ in the solidified microstructure. After aging at high temperature, the microstructure of Sn0.7%Cu-0.5%RE alloy is more stable than that of the Sn-0.7%Cu alloy. Tensile, creep and microhardness tests were, conducted on the solder alloys. It was found that significant improvements of the tensile strength and creep resistance were obtained with RE elements addition. These results have made the Sn-Cu-RE alloy to be very attractive as a suitable material for FC bumps.
在先进的电子封装中,倒装芯片(FC)凸点要求可靠且价格低廉。Sn-0.7%Cu合金被认为是一种无铅的FC凸点材料。在Sn-0.7%Cu合金中加入了以Ce和La为主的各种微量稀土元素,形成新的合金。结果表明,新合金的力学性能优于Sn-0.7%Cu合金。当稀土元素含量达到0.5%时,有效晶粒尺寸得到细化,Cu/sub - 6/Sn/sub - 5/晶粒在凝固组织中分布均匀。高温时效后,Sn0.7%Cu-0.5%RE合金的显微组织比Sn-0.7%Cu合金更稳定。对钎料合金进行了拉伸、蠕变和显微硬度试验。结果表明,稀土元素的加入显著提高了材料的抗拉强度和抗蠕变性能。这些结果使得Sn-Cu-RE合金作为FC凸点的合适材料非常有吸引力。
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引用次数: 2
Comparison of nonvolatile memory cells for molybdenum gate analog BeCMOS process 钼栅模拟BeCMOS工艺非易失性存储单元的比较
H. Ronkainen, K. Theqvist
Floating gate nonvolatile memory cells fabricated with a molybdenum gate triple well BeCMOS process are described. Programming, endurance and retention characteristics of two types of cells are compared. The first type is programmed through the gate oxide with Fowler-Nordheim tunnelling and the second through the control gate - floating gate silicon nitride dielectric with Frenkel-Poole emission. The measured endurance for both types was more than 10,000 cycles and the estimated retention more than 10 years.
介绍了用钼栅三孔BeCMOS工艺制备浮栅非易失性存储单元。比较了两种细胞的编程、耐力和保留特性。第一种是通过具有Fowler-Nordheim隧道的栅极氧化物编程,第二种是通过具有Frenkel-Poole发射的控制栅极-浮栅氮化硅介电体编程。两种类型的测量续航时间都超过10,000次,估计保留时间超过10年。
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引用次数: 0
An analytical heterojunction diode model including the electron transport inside the depletion layer and the breakdown 一种分析异质结二极管模型,包括耗尽层内的电子输运和击穿
M. Horák
An analytical model that describes the Np/sup +/-heterojunction diode forward and reverse current is presented. The following physical processes at the heterojunction are considered: drift and diffusion with field dependent mobility, recombination, band-to-band tunneling, avalanche multiplication, thermionic-field emission. The resulting formula describes the diode current in the whole extent from forward bias through reverse bias up to breakdown.
提出了描述Np/sup +/-异质结二极管正反电流的解析模型。考虑了异质结的以下物理过程:具有场相关迁移率的漂移和扩散,复合,带对带隧道,雪崩倍增,热离子场发射。所得公式描述了二极管电流从正向偏置到反向偏置直至击穿的整个范围。
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引用次数: 0
Some possibilities for determining the depth of the p-n junction and profiles of semiconductor layers 确定p-n结深度和半导体层轮廓的一些可能性
L. Hulényi, R. Kinder
Electrochemical capacitance-voltage (ECV) techniques and the four-point probe method have been used to determine the carrier profile N(x) and the depth of the p/sup +/-n junction of a boron implanted silicon wafer. It was found that the p/sup +/-n junction depth can provide reliable information only if certain limitations are considered in detail. The results obtained by ECV were compared with those computed by SUPREM.
利用电化学电容电压(ECV)技术和四点探针法测定了硼注入硅片的载流子剖面N(x)和p/sup +/-n结的深度。研究发现,p/sup +/-n结深度只有在详细考虑某些限制的情况下才能提供可靠的信息。将ECV计算结果与SUPREM计算结果进行了比较。
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引用次数: 1
Analysis of I-V measurements on Pt/Au-GaN Schottky contacts in a wide temperature range 宽温度范围内Pt/Au-GaN肖特基触点I-V测量分析
D. Donoval, V. Kulikov, P. Beno, J. Racko
The formerly derived modified method of evaluation of the Schottky barrier height applied on Pt/Au-GaN Schottky structures is presented. It is based on the measurement of I-V characteristics in a wide temperature range. By subtraction of generation-recombination, tunnelling and leakage currents from the total current, the "pure" thermionic emission current I/sub te/ and subsequently Schottky barrier height /spl phi//sub b/ can be evaluated with higher physical relevance. The advantage of the mentioned method is that it allows evaluation of /spl phi//sub b/ from the measured I-V characteristics which significantly deviate from the ideal thermionic-emission characteristics represented in semi-logarithmic coordinates by a straight line. The determination of the Schottky barrier ob on GaN and related compound semiconductors with higher precision is important for further analysis of new combinations of metals and semiconductors and better understanding of the physical behaviour at the interface.
提出了先前导出的用于Pt/Au-GaN肖特基结构的肖特基势垒高度评价的改进方法。它基于在宽温度范围内测量I-V特性。通过从总电流中减去产生复合、隧穿和泄漏电流,“纯”热离子发射电流I/sub - te/和随后的肖特基势垒高度/spl phi//sub - b/可以获得更高的物理相关性。上述方法的优点是,它允许从测量的I-V特性中评估/spl phi//sub b/,这些特性明显偏离半对数坐标中用直线表示的理想热离子发射特性。高精度测定氮化镓和相关化合物半导体上的肖特基势垒对进一步分析金属和半导体的新组合以及更好地理解界面处的物理行为具有重要意义。
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引用次数: 0
Modeling of the inverse base width modulation effect in SiGe base HBT for circuit simulation SiGe基极HBT反基宽调制效应的电路仿真建模
T. Pesic, N. Jankovic, J. Karamarković
We describe the method of including the inverse base width modulation (IBWM) effect in the non-quasi static SiGe base HBT circuit model. Simulated results reveal that the IBWM effect has strong influence on the HBT electrical characteristics and must be taken into account for accurate modeling of SiGe HBTs.
本文描述了在非准静态SiGe基极HBT电路模型中加入逆基宽调制(IBWM)效应的方法。仿真结果表明,IBWM效应对HBT的电特性有很大影响,在SiGe HBT的精确建模中必须考虑IBWM效应。
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The Fourth International Conference on Advanced Semiconductor Devices and Microsystem
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