首页 > 最新文献

Materials Science in Semiconductor Processing最新文献

英文 中文
Flexible multi-colour LEDs and junction-free emission 灵活的多色led和无结发射
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-30 DOI: 10.1016/j.mssp.2026.110481
Neetu Verma , Manisha , Garima Poply , Tanmoy Majumder , Jugal Bori , Deepak Kumar , Jehova Jire L. Hmar
The development of flexible light-emitting devices with reliable colour tunability, mechanical durability, and high-voltage stability remains a significant challenge due to complex fabrication routes, inefficient thermal management, and limited control over emission characteristics in existing device architectures. In this work, we address these limitations by fabricating the flexible colour-tunable LED devices on indium tin oxide (ITO)-coated polyethylene terephthalate (PET) substrates, namely Device D1 (ITO/ZnO NRs/Ag), Device D2 (ITO/ZnO NRs–CdS/Ag), Device D3 (ITO/ZnO NRs–CuO/Ag), and Device D4 (ITO/ZnO NRs–CdS–CuO/Ag). Vertically aligned ZnO NRs were synthesized using hydrothermal method, while CdS and CuO nanoparticles were prepared via sol–gel processes, enabling a simple, cost-effective, and scalable fabrication strategy. Structural and compositional investigations using FESEM, EDX, AFM, UV–Vis, XRD, FTIR, XPS, and PL techniques confirmed the formation of ZnO–CdS–CuO heterostructures, revealing their crystallinity, chemical structure and bonding, elemental composition, and the presence of various defect states. The current–voltage (I–V) characteristics were performed for different LED devices D1, D2, D3, and D4 and their corresponding turn-on voltages were found to be 3.11 V, 2.45 V, 2.19 V, and 1.87 V, respectively. Multicolour electroluminescence was obtained by selectively combining ZnO, CdS, and CuO semiconductors. Under a forward bias ranging from 4 V to 50 V, the EL spectra displayed distinct emission peaks at ∼381 nm (UV-violet), ∼523 nm (green), ∼613 nm (orange), and ∼671 nm (deep red) corresponding to devices D1, D2, D3, and D4, respectively, spanning a wide UV–visible spectral range. The maximum EL intensities recorded at 35 V were ∼2123 a.u., ∼4359 a.u., ∼6572 a.u., and ∼10900 a.u. for D1, D2, D3, and D4, respectively. Device D4 showed excellent mechanical flexibility and operational stability, retaining stable red emission at bending angles of 30°, 60°, 90°, 120°, and 180° (flat condition) and after 1000 repeated bending cycles at a fixed 30° angle, with no significant change in emission intensity or peak position, and also withstanding high operating voltages up to 35 V without failure. Overall, the demonstrated colour tunability, mechanical flexibility, and high-voltage stability suggest that Device D4 is highly competitive with existing flexible LED technologies and holds strong potential for industrial applications in flexible, colour-tunable LED devices.
由于复杂的制造路线、低效的热管理以及现有器件结构中对发射特性的有限控制,开发具有可靠的颜色可调性、机械耐久性和高压稳定性的柔性发光器件仍然是一个重大挑战。在这项工作中,我们通过在氧化铟锡(ITO)涂层的聚对苯二甲酸乙二醇酯(PET)衬底上制造柔性颜色可调LED器件来解决这些限制,即器件D1 (ITO/ZnO NRs/Ag),器件D2 (ITO/ZnO NRs - cds /Ag),器件D3 (ITO/ZnO NRs - cuo /Ag)和器件D4 (ITO/ZnO NRs - cds - cuo /Ag)。采用水热法合成了垂直排列的ZnO纳米粒子,而采用溶胶-凝胶法制备了CdS和CuO纳米粒子,实现了一种简单、经济、可扩展的制备策略。利用FESEM、EDX、AFM、UV-Vis、XRD、FTIR、XPS和PL等技术对ZnO-CdS-CuO异质结构进行了结构和成分研究,揭示了ZnO-CdS-CuO的结晶度、化学结构和键合、元素组成以及各种缺陷态的存在。对不同LED器件D1、D2、D3和D4进行了电流-电压(I-V)特性分析,得出其对应的导通电压分别为3.11 V、2.45 V、2.19 V和1.87 V。通过选择性地结合ZnO、CdS和CuO半导体,获得了多色电致发光。在4 V ~ 50 V的正向偏置下,EL光谱分别在器件D1、D2、D3和D4对应的~ 381 nm(紫外)、~ 523 nm(绿色)、~ 613 nm(橙色)和~ 671 nm(深红色)处显示出明显的发射峰,覆盖了较宽的紫外可见光谱范围。在35 V下,D1、D2、D3和D4的最大EL强度分别为~ 2123 a.u、~ 4359 a.u、~ 6572 a.u和~ 10900 a.u。器件D4表现出优异的机械灵活性和工作稳定性,在30°、60°、90°、120°和180°(平坦状态)弯曲和以固定30°角度重复弯曲1000次后,保持稳定的红色发射,发射强度和峰值位置没有明显变化,并且可以承受高达35 V的高工作电压而不会失效。总体而言,所展示的颜色可调性、机械灵活性和高压稳定性表明,Device D4与现有的柔性LED技术具有很强的竞争力,并且在柔性、颜色可调LED器件的工业应用中具有强大的潜力。
{"title":"Flexible multi-colour LEDs and junction-free emission","authors":"Neetu Verma ,&nbsp;Manisha ,&nbsp;Garima Poply ,&nbsp;Tanmoy Majumder ,&nbsp;Jugal Bori ,&nbsp;Deepak Kumar ,&nbsp;Jehova Jire L. Hmar","doi":"10.1016/j.mssp.2026.110481","DOIUrl":"10.1016/j.mssp.2026.110481","url":null,"abstract":"<div><div>The development of flexible light-emitting devices with reliable colour tunability, mechanical durability, and high-voltage stability remains a significant challenge due to complex fabrication routes, inefficient thermal management, and limited control over emission characteristics in existing device architectures. In this work, we address these limitations by fabricating the flexible colour-tunable LED devices on indium tin oxide (ITO)-coated polyethylene terephthalate (PET) substrates, namely Device D1 (ITO/ZnO NRs/Ag), Device D2 (ITO/ZnO NRs–CdS/Ag), Device D3 (ITO/ZnO NRs–CuO/Ag), and Device D4 (ITO/ZnO NRs–CdS–CuO/Ag). Vertically aligned ZnO NRs were synthesized using hydrothermal method, while CdS and CuO nanoparticles were prepared via sol–gel processes, enabling a simple, cost-effective, and scalable fabrication strategy. Structural and compositional investigations using FESEM, EDX, AFM, UV–Vis, XRD, FTIR, XPS, and PL techniques confirmed the formation of ZnO–CdS–CuO heterostructures, revealing their crystallinity, chemical structure and bonding, elemental composition, and the presence of various defect states. The current–voltage (I–V) characteristics were performed for different LED devices D1, D2, D3, and D4 and their corresponding turn-on voltages were found to be 3.11 V, 2.45 V, 2.19 V, and 1.87 V, respectively. Multicolour electroluminescence was obtained by selectively combining ZnO, CdS, and CuO semiconductors. Under a forward bias ranging from 4 V to 50 V, the EL spectra displayed distinct emission peaks at ∼381 nm (UV-violet), ∼523 nm (green), ∼613 nm (orange), and ∼671 nm (deep red) corresponding to devices D1, D2, D3, and D4, respectively, spanning a wide UV–visible spectral range. The maximum EL intensities recorded at 35 V were ∼2123 a.u., ∼4359 a.u., ∼6572 a.u., and ∼10900 a.u. for D1, D2, D3, and D4, respectively. Device D4 showed excellent mechanical flexibility and operational stability, retaining stable red emission at bending angles of 30°, 60°, 90°, 120°, and 180° (flat condition) and after 1000 repeated bending cycles at a fixed 30° angle, with no significant change in emission intensity or peak position, and also withstanding high operating voltages up to 35 V without failure. Overall, the demonstrated colour tunability, mechanical flexibility, and high-voltage stability suggest that Device D4 is highly competitive with existing flexible LED technologies and holds strong potential for industrial applications in flexible, colour-tunable LED devices.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110481"},"PeriodicalIF":4.6,"publicationDate":"2026-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081128","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhanced energy storage properties achieved in (1-x)(0.6Na0.5Bi0.5TiO3-0.4Sr0.7Bi0.2TiO3)-xBa0.6Ag0.4Mg0.2Nb0.8O3 ceramics at moderate electric field 在中等电场下,(1-x)(0.6Na0.5Bi0.5TiO3-0.4Sr0.7Bi0.2TiO3)-xBa0.6Ag0.4Mg0.2Nb0.8O3陶瓷的储能性能得到了增强
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-30 DOI: 10.1016/j.mssp.2026.110471
Nianshun Zhao , Sha Lu , Juan Hu , Qin Gao , Li Wang , Taiming Sun , Jie Bao , Xiaofan Zheng , Zheng li
Dielectric ceramics have advantages such as high power density and fast charge-discharge speed, but their limited energy storage performance (ESP) under moderate electric fields limits their applications. In this study, Ba0.6Ag0.4Mg0.2Nb0.8O3 (BAMN) was introduced into 0.6Na0.5Bi0.5TiO3-0.4Sr0.7Bi0.2TiO3 (NBT-SBT) matrix. A systematic investigation was conducted into how BAMN affected the crystal structure, micromorphology, and electrical properties. Results indicate that BAMN addition decreases grain dimensions and enhances the development of polar nanodomains (PNRs). The sample with x = 0.09 demonstrates a recoverable energy storage density (Wrec) of 3.25 J/cm3 and an efficiency (η) of 82.15 % under an electric field of 230 kV/cm, along with outstanding thermal stability across the temperature range of 20–160 °C, stable performance over frequencies from 1 to 500 Hz, and robust fatigue resistance up to 105 cycles. Additionally, the ceramic with x = 0.09 exhibits short discharge time (t0.9 = 49.2 ns), large current density (CD = 1078.6 A/cm2), and power density (PD = 86.3 MW/cm3) at 160 kV/cm. The findings open up new avenues for innovating novel lead-free ceramics with superior ESP.
介质陶瓷具有功率密度高、充放电速度快等优点,但在中等电场条件下有限的储能性能限制了其应用。本研究将Ba0.6Ag0.4Mg0.2Nb0.8O3 (BAMN)引入到0.6Na0.5Bi0.5TiO3-0.4Sr0.7Bi0.2TiO3 (NBT-SBT)基体中。系统地研究了BAMN对晶体结构、微观形貌和电学性能的影响。结果表明,BAMN的加入降低了晶粒尺寸,促进了极性纳米畴(pnr)的形成。当x = 0.09时,样品在230 kV/cm电场下的可回收储能密度(Wrec)为3.25 J/cm3,效率(η)为82.15%,在20-160°C的温度范围内具有出色的热稳定性,在1至500 Hz的频率范围内具有稳定的性能,抗疲劳性能可达105次循环。此外,当x = 0.09时,陶瓷在160 kV/cm下的放电时间短(t0.9 = 49.2 ns),电流密度大(CD = 1078.6 A/cm2),功率密度大(PD = 86.3 MW/cm3)。这一发现为创新具有卓越ESP的新型无铅陶瓷开辟了新的途径。
{"title":"Enhanced energy storage properties achieved in (1-x)(0.6Na0.5Bi0.5TiO3-0.4Sr0.7Bi0.2TiO3)-xBa0.6Ag0.4Mg0.2Nb0.8O3 ceramics at moderate electric field","authors":"Nianshun Zhao ,&nbsp;Sha Lu ,&nbsp;Juan Hu ,&nbsp;Qin Gao ,&nbsp;Li Wang ,&nbsp;Taiming Sun ,&nbsp;Jie Bao ,&nbsp;Xiaofan Zheng ,&nbsp;Zheng li","doi":"10.1016/j.mssp.2026.110471","DOIUrl":"10.1016/j.mssp.2026.110471","url":null,"abstract":"<div><div>Dielectric ceramics have advantages such as high power density and fast charge-discharge speed, but their limited energy storage performance (ESP) under moderate electric fields limits their applications. In this study, Ba<sub>0.6</sub>Ag<sub>0.4</sub>Mg<sub>0.2</sub>Nb<sub>0.8</sub>O<sub>3</sub> (BAMN) was introduced into 0.6Na<sub>0.5</sub>Bi<sub>0.5</sub>TiO<sub>3</sub>-0.4Sr<sub>0.7</sub>Bi<sub>0.2</sub>TiO<sub>3</sub> (NBT-SBT) matrix. A systematic investigation was conducted into how BAMN affected the crystal structure, micromorphology, and electrical properties. Results indicate that BAMN addition decreases grain dimensions and enhances the development of polar nanodomains (PNRs). The sample with <em>x</em> = 0.09 demonstrates a recoverable energy storage density (<em>W</em><sub>rec</sub>) of 3.25 J/cm<sup>3</sup> and an efficiency (<em>η</em>) of 82.15 % under an electric field of 230 kV/cm, along with outstanding thermal stability across the temperature range of 20–160 °C, stable performance over frequencies from 1 to 500 Hz, and robust fatigue resistance up to 10<sup>5</sup> cycles. Additionally, the ceramic with <em>x</em> = 0.09 exhibits short discharge time (<em>t</em><sub>0.9</sub> = 49.2 ns), large current density (<em>C</em><sub>D</sub> = 1078.6 A/cm<sup>2</sup>), and power density (<em>P</em><sub>D</sub> = 86.3 MW/cm<sup>3</sup>) at 160 kV/cm. The findings open up new avenues for innovating novel lead-free ceramics with superior ESP.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110471"},"PeriodicalIF":4.6,"publicationDate":"2026-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081132","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Self-powered broadband photodetector based on vacuum-evaporated PbSe/SnSe2 heterostructure for encrypted optical communication 基于真空蒸发PbSe/SnSe2异质结构的自供电宽带光电探测器用于加密光通信
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-29 DOI: 10.1016/j.mssp.2026.110469
Wenjin Zhang , Quanjiang Lv , Siwei Liu , Mingyang Yu , Xuejun Zhao , Yifei Wang , Guiwu Liu , Guanjun Qiao , Junlin Liu
Lead selenide (PbSe) infrared photodetectors hold promise for uncooled operation but remain limited by high power consumption, suboptimal detection performance, and the scalability challenges of conventional chemical synthesis. Here, we demonstrate a PbSe/SnSe2 heterojunction photodetector fabricated via dual-source thermal evaporation, providing a physical vapor deposition (PVD) route toward scalable, self-powered devices. Structural and interfacial properties were confirmed by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, Kelvin probe force microscopy, Hall measurements, and optical absorption analysis. Strikingly, the heterojunction exhibits strong rectification behavior, ultra-low dark current, and broadband photoresponse from the visible (405 nm) to the near-infrared (1550 nm). Under zero bias at 1550 nm illumination, the device achieves an Ion/Ioff ratio of 9.8 × 102, a responsivity of 2.67 mA W−1, a detectivity of 5.84 × 1010 Jones, and fast rise/fall times of 1.43/1.44 ms. Furthermore, we demonstrate an optoelectronic “OR” logic gate enabling dual-band encrypted data transmission and decryption. These results highlight the potential of PbSe/SnSe2 heterojunctions for low-power, broadband detection and dual-band encrypted optical communication.
硒化铅(PbSe)红外探测器有望实现非冷却操作,但仍然受到高功耗、检测性能欠佳以及传统化学合成可扩展性挑战的限制。在这里,我们展示了通过双源热蒸发制造的PbSe/SnSe2异质结光电探测器,为可扩展的自供电器件提供了物理气相沉积(PVD)途径。通过x射线衍射、扫描电子显微镜、x射线光电子能谱、开尔文探针力显微镜、霍尔测量和光吸收分析证实了其结构和界面性质。引人注目的是,异质结具有强整流行为,超低暗电流,以及从可见光(405 nm)到近红外(1550 nm)的宽带光响应。在1550 nm光照下,该器件的离子/ off比为9.8 × 102,响应度为2.67 mA W−1,探测率为5.84 × 1010 Jones,快速上升/下降时间为1.43/1.44 ms。此外,我们展示了一个光电“或”逻辑门,使双频加密数据传输和解密。这些结果突出了PbSe/SnSe2异质结在低功耗、宽带检测和双频加密光通信方面的潜力。
{"title":"Self-powered broadband photodetector based on vacuum-evaporated PbSe/SnSe2 heterostructure for encrypted optical communication","authors":"Wenjin Zhang ,&nbsp;Quanjiang Lv ,&nbsp;Siwei Liu ,&nbsp;Mingyang Yu ,&nbsp;Xuejun Zhao ,&nbsp;Yifei Wang ,&nbsp;Guiwu Liu ,&nbsp;Guanjun Qiao ,&nbsp;Junlin Liu","doi":"10.1016/j.mssp.2026.110469","DOIUrl":"10.1016/j.mssp.2026.110469","url":null,"abstract":"<div><div>Lead selenide (PbSe) infrared photodetectors hold promise for uncooled operation but remain limited by high power consumption, suboptimal detection performance, and the scalability challenges of conventional chemical synthesis. Here, we demonstrate a PbSe/SnSe<sub>2</sub> heterojunction photodetector fabricated via dual-source thermal evaporation, providing a physical vapor deposition (PVD) route toward scalable, self-powered devices. Structural and interfacial properties were confirmed by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, Kelvin probe force microscopy, Hall measurements, and optical absorption analysis. Strikingly, the heterojunction exhibits strong rectification behavior, ultra-low dark current, and broadband photoresponse from the visible (405 nm) to the near-infrared (1550 nm). Under zero bias at 1550 nm illumination, the device achieves an <em>I</em><sub><em>on</em></sub>/<em>I</em><sub><em>off</em></sub> ratio of 9.8 × 10<sup>2</sup>, a responsivity of 2.67 mA W<sup>−1</sup>, a detectivity of 5.84 × 10<sup>10</sup> Jones, and fast rise/fall times of 1.43/1.44 ms. Furthermore, we demonstrate an optoelectronic “OR” logic gate enabling dual-band encrypted data transmission and decryption. These results highlight the potential of PbSe/SnSe<sub>2</sub> heterojunctions for low-power, broadband detection and dual-band encrypted optical communication.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110469"},"PeriodicalIF":4.6,"publicationDate":"2026-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental study on the influencing factors of short-circuit characteristics of press-pack IGBTs 压装式igbt短路特性影响因素的实验研究
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-29 DOI: 10.1016/j.mssp.2026.110463
Ganyu Feng, Xuebao Li, Pengbo Miao, Yumeng Cai, Chen Tao, Chenran Jia, Peng Sun, Zhibin Zhao
As a core component in the field of flexible DC transmission, the press-pack Insulated Gate Bipolar Transistor (IGBT) is widely employed in a variety of power electronic applications. During short-circuit (SC) faults, the IGBT is simultaneously exposed to both high voltage and high current, and its SC behavior directly affects the reliability of the system. However, existing studies on the influencing factors of the SC characteristics of press-pack IGBT are relatively limited and fail to comprehensively capture the behavior under different operating conditions and chip parameters. This paper first establishes an experimental platform specifically designed to investigate the SC characteristics of press-pack IGBT, and analyzes the typical behaviors of short-circuit type I (SC-I) and type II (SC-II). Based on this platform, SC-I and SC-II waveforms are measured under varying conditions, including chip parameters, external circuit parameters, and environmental parameters. Furthermore, this study elucidates the distinct influences of these key parameters on SC-I versus SC-II characteristics and provides an in-depth discussion of the underlying mechanisms responsible for the observed differences. This study aims to elucidate the governing effects of multiple operating conditions and chip parameters on the SC-I and SC-II characteristics of press-pack IGBT and to explore the underlying physical mechanisms, which are of great significance for advancing the understanding of press-pack IGBT SC behavior and improving their SC withstand capability.
作为柔性直流传输领域的核心器件,压包绝缘栅双极晶体管(IGBT)被广泛应用于各种电力电子应用中。在发生短路故障时,IGBT同时处于高压和大电流下,其短路行为直接影响到系统的可靠性。然而,现有对压包IGBT SC特性影响因素的研究相对有限,未能全面捕捉不同工作条件和芯片参数下的SC特性。本文首先搭建了专门研究压包式IGBT的SC特性的实验平台,分析了I型短路(SC-I)和II型短路(SC-II)的典型行为。基于该平台,可以在不同条件下测量SC-I和SC-II波形,包括芯片参数、外部电路参数和环境参数。此外,本研究阐明了这些关键参数对SC-I和SC-II特征的不同影响,并深入讨论了造成观察到的差异的潜在机制。本研究旨在阐明多种工作条件和芯片参数对压装IGBT SC- i和SC- ii特性的控制作用,并探讨其潜在的物理机制,这对于推进对压装IGBT SC行为的理解和提高其SC承受能力具有重要意义。
{"title":"Experimental study on the influencing factors of short-circuit characteristics of press-pack IGBTs","authors":"Ganyu Feng,&nbsp;Xuebao Li,&nbsp;Pengbo Miao,&nbsp;Yumeng Cai,&nbsp;Chen Tao,&nbsp;Chenran Jia,&nbsp;Peng Sun,&nbsp;Zhibin Zhao","doi":"10.1016/j.mssp.2026.110463","DOIUrl":"10.1016/j.mssp.2026.110463","url":null,"abstract":"<div><div>As a core component in the field of flexible DC transmission, the press-pack Insulated Gate Bipolar Transistor (IGBT) is widely employed in a variety of power electronic applications. During short-circuit (SC) faults, the IGBT is simultaneously exposed to both high voltage and high current, and its SC behavior directly affects the reliability of the system. However, existing studies on the influencing factors of the SC characteristics of press-pack IGBT are relatively limited and fail to comprehensively capture the behavior under different operating conditions and chip parameters. This paper first establishes an experimental platform specifically designed to investigate the SC characteristics of press-pack IGBT, and analyzes the typical behaviors of short-circuit type I (SC-I) and type II (SC-II). Based on this platform, SC-I and SC-II waveforms are measured under varying conditions, including chip parameters, external circuit parameters, and environmental parameters. Furthermore, this study elucidates the distinct influences of these key parameters on SC-I versus SC-II characteristics and provides an in-depth discussion of the underlying mechanisms responsible for the observed differences. This study aims to elucidate the governing effects of multiple operating conditions and chip parameters on the SC-I and SC-II characteristics of press-pack IGBT and to explore the underlying physical mechanisms, which are of great significance for advancing the understanding of press-pack IGBT SC behavior and improving their SC withstand capability.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110463"},"PeriodicalIF":4.6,"publicationDate":"2026-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081134","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Monolithic inverters using GaN-based fin-gated multichannel complementary metal-oxide-semiconductor high-electron mobility transistors with source field plate 单片逆变器采用基于氮化镓的多通道互补金属氧化物半导体高电子迁移率晶体管和源场板
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-29 DOI: 10.1016/j.mssp.2026.110476
Pin-Hong He , Ching-Ting Lee , Jone-Fang Chen , Hsin-Ying Lee
In this study, the monolithic inverters with complementary metal-oxide-semiconductor (CMOS) structure were fabricated by integrating depletion-mode (D-mode) and enhancement-mode (E-mode) GaN-based fin-gated multichannel metal-oxide-semiconductor high-electron-mobility transistors (MOSHEMTs). The gate oxide layer of the D-mode devices was directly grown using a photoelectrochemical (PEC) oxidation method, while the gate oxide layers of the E-mode devices were fabricated using the PEC etching method and the ferroelectric charge trap gate-stacked Al2O3/HfO2/LiNbO3 oxide layers. To achieve unskewed inverter operation, the drain-source current of the D-mode devices was controlled by modulating the depth of gate-recessed regions created simultaneously during gate oxide layer growth. To study the impact of source field plates in D-mode and E-mode GaN-based fin-gated multichannel MOSHEMTs and the resulting monolithic inverters, source field plates with various lengths were incorporated. Their associated drain-source breakdown voltage increased, while the other characteristics were almost unaffected by the incorporation of the source field plate. However, the enhanced drain-source breakdown voltage was influenced by the length of the source field plate. It was found that the maximum drain-source breakdown voltage was obtained by placing the source field plate edge on the midpoint between the drain and gate. However, the high-frequency performance of the monolithic inverters was degraded by incorporating a long source field plate due to the induced additional parasitic capacitance.
在本研究中,通过集成耗尽模式(d模式)和增强模式(e模式)gan的鳍状门控多通道金属氧化物半导体高电子迁移率晶体管(MOSHEMTs),制作了具有互补金属氧化物半导体(CMOS)结构的单片逆变器。d模式器件的栅极氧化层采用光电化学(PEC)氧化法直接生长,e模式器件的栅极氧化层采用光电化学(PEC)刻蚀法和铁电电荷阱栅极堆叠Al2O3/HfO2/LiNbO3氧化层制备。为了实现无偏斜的逆变器工作,通过调制栅极氧化层生长过程中同时产生的栅极凹陷区域的深度来控制d模器件的漏源电流。为了研究源场板对d模和e模氮化镓鳍状门控多通道moshemt以及由此产生的单片逆变器的影响,采用了不同长度的源场板。它们的相关漏源击穿电压增加,而其他特性几乎不受源场板的影响。而漏源击穿电压的增强受源场极板长度的影响。在漏极和栅极之间的中点处放置源场极板可以获得最大漏极-源极击穿电压。然而,由于附加的寄生电容,单片逆变器的高频性能由于合并长源场板而降低。
{"title":"Monolithic inverters using GaN-based fin-gated multichannel complementary metal-oxide-semiconductor high-electron mobility transistors with source field plate","authors":"Pin-Hong He ,&nbsp;Ching-Ting Lee ,&nbsp;Jone-Fang Chen ,&nbsp;Hsin-Ying Lee","doi":"10.1016/j.mssp.2026.110476","DOIUrl":"10.1016/j.mssp.2026.110476","url":null,"abstract":"<div><div>In this study, the monolithic inverters with complementary metal-oxide-semiconductor (CMOS) structure were fabricated by integrating depletion-mode (D-mode) and enhancement-mode (E-mode) GaN-based fin-gated multichannel metal-oxide-semiconductor high-electron-mobility transistors (MOSHEMTs). The gate oxide layer of the D-mode devices was directly grown using a photoelectrochemical (PEC) oxidation method, while the gate oxide layers of the E-mode devices were fabricated using the PEC etching method and the ferroelectric charge trap gate-stacked Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub>/LiNbO<sub>3</sub> oxide layers. To achieve unskewed inverter operation, the drain-source current of the D-mode devices was controlled by modulating the depth of gate-recessed regions created simultaneously during gate oxide layer growth. To study the impact of source field plates in D-mode and E-mode GaN-based fin-gated multichannel MOSHEMTs and the resulting monolithic inverters, source field plates with various lengths were incorporated. Their associated drain-source breakdown voltage increased, while the other characteristics were almost unaffected by the incorporation of the source field plate. However, the enhanced drain-source breakdown voltage was influenced by the length of the source field plate. It was found that the maximum drain-source breakdown voltage was obtained by placing the source field plate edge on the midpoint between the drain and gate. However, the high-frequency performance of the monolithic inverters was degraded by incorporating a long source field plate due to the induced additional parasitic capacitance.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110476"},"PeriodicalIF":4.6,"publicationDate":"2026-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Shape-controlled embedded silver nanoparticles and nanopits in silicon substrates (100), (110), (111): A comparative study of potential SERS application 形状控制嵌入银纳米粒子和纳米粒子在硅衬底(100),(110),(111):潜在的SERS应用的比较研究
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-29 DOI: 10.1016/j.mssp.2026.110462
Anna Ermina , Artem Larin , Nikolay Solodovchenko , Danila Markov , Darina Krasilina , Nadejda Belskaya , Kristina Prigoda , Vladimir Bolshakov , Yuliya Zharova
This study reports an efficient, simple, and cost-effective approach for synthesizing shape-controlled silver nanoparticles (AgNPs) embedded in the subsurface layer of single-crystal silicon (c-Si), as well as nanopits in c-Si. The synthesis is based on a galvanic displacement reaction in an aqueous AgNO3:HF solution, followed by high-temperature annealing at 1100 °C in a pure water vapor for 180 min. The optical properties of the AgNPs embedded in c-Si were investigated by dark-field spectroscopy under p- and s-polarized illumination. The positions of the localized plasmon resonances were determined from the corresponding scattering spectra. The enhancement factors (EFs) of AgNPs and empty nanopits in silicon were evaluated using the finite element method as a function of their shape, period, and size, taking into account the dispersion of permittivity. AgNPs embedded in silicon exhibited numerical EFs of the order of 107109, while empty nanopits showed EFs of 102104. The functionality of these structures as surface-enhanced Raman scattering (SERS) substrates was investigated using an aqueous solution of the triphenylmethane brilliant green (BG) dye, a genotoxic and carcinogenic analyte. The limit of detection for BG concentration and the corresponding EFs were found to be 0.1 μM and 4.3×105 for the initial Ag island film, 10 pM and 107 for AgNPs embedded in c-Si, and 1 μM and 102 for empty nanopits in c-Si, respectively. Thus, AgNPs embedded in silicon show high sensitivity, making them promising candidates for future sensing technologies.
本研究报告了一种高效、简单、经济的方法来合成嵌入在单晶硅(c-Si)亚表层的形状控制银纳米颗粒(AgNPs),以及c-Si中的纳米颗粒。该合成基于AgNO3:HF水溶液中的电位移反应,然后在1100℃的纯水蒸气中高温退火180分钟。在p和s偏光下,用暗场光谱研究了嵌入c-Si的AgNPs的光学性质。根据相应的散射光谱确定了局域等离子体共振的位置。在考虑介电常数色散的情况下,利用有限元方法评估了硅中AgNPs和空纳米粒子的增强因子(EFs)作为其形状、周期和尺寸的函数。嵌入在硅中的AgNPs表现出107-109数量级的电场效应,而空纳米粒子表现出102-104数量级的电场效应。这些结构的功能作为表面增强拉曼散射(SERS)底物的研究使用三苯基甲烷亮绿(BG)染料的水溶液,一种遗传毒性和致癌分析物。对于初始Ag岛膜,BG浓度的检测限为0.1 μM和4.3×105;对于c-Si中嵌入的AgNPs,检测限为10 μM和~ 107;对于c-Si中的空纳米粒子,检测限为1 μM和~ 102。因此,嵌入在硅中的AgNPs显示出高灵敏度,使其成为未来传感技术的有希望的候选者。
{"title":"Shape-controlled embedded silver nanoparticles and nanopits in silicon substrates (100), (110), (111): A comparative study of potential SERS application","authors":"Anna Ermina ,&nbsp;Artem Larin ,&nbsp;Nikolay Solodovchenko ,&nbsp;Danila Markov ,&nbsp;Darina Krasilina ,&nbsp;Nadejda Belskaya ,&nbsp;Kristina Prigoda ,&nbsp;Vladimir Bolshakov ,&nbsp;Yuliya Zharova","doi":"10.1016/j.mssp.2026.110462","DOIUrl":"10.1016/j.mssp.2026.110462","url":null,"abstract":"<div><div>This study reports an efficient, simple, and cost-effective approach for synthesizing shape-controlled silver nanoparticles (AgNPs) embedded in the subsurface layer of single-crystal silicon (c-Si), as well as nanopits in c-Si. The synthesis is based on a galvanic displacement reaction in an aqueous AgNO<span><math><msub><mrow></mrow><mrow><mn>3</mn></mrow></msub></math></span>:HF solution, followed by high-temperature annealing at 1100 °C in a pure water vapor for 180 min. The optical properties of the AgNPs embedded in c-Si were investigated by dark-field spectroscopy under p- and s-polarized illumination. The positions of the localized plasmon resonances were determined from the corresponding scattering spectra. The enhancement factors (EFs) of AgNPs and empty nanopits in silicon were evaluated using the finite element method as a function of their shape, period, and size, taking into account the dispersion of permittivity. AgNPs embedded in silicon exhibited numerical EFs of the order of <span><math><mrow><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mn>7</mn></mrow></msup></mrow></math></span>–<span><math><mrow><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mn>9</mn></mrow></msup></mrow></math></span>, while empty nanopits showed EFs of <span><math><mrow><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mn>2</mn></mrow></msup></mrow></math></span>–<span><math><mrow><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mn>4</mn></mrow></msup></mrow></math></span>. The functionality of these structures as surface-enhanced Raman scattering (SERS) substrates was investigated using an aqueous solution of the triphenylmethane brilliant green (BG) dye, a genotoxic and carcinogenic analyte. The limit of detection for BG concentration and the corresponding EFs were found to be 0.1 <span><math><mi>μ</mi></math></span>M and <span><math><mrow><mn>4</mn><mo>.</mo><mn>3</mn><mo>×</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mn>5</mn></mrow></msup></mrow></math></span> for the initial Ag island film, 10 pM and <span><math><mrow><mo>∼</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mn>7</mn></mrow></msup></mrow></math></span> for AgNPs embedded in c-Si, and 1 <span><math><mi>μ</mi></math></span>M and <span><math><mrow><mo>∼</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mn>2</mn></mrow></msup></mrow></math></span> for empty nanopits in c-Si, respectively. Thus, AgNPs embedded in silicon show high sensitivity, making them promising candidates for future sensing technologies.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110462"},"PeriodicalIF":4.6,"publicationDate":"2026-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability design of power modules: multi time sequence simulation of soldering warpage deformation and fatigue life prediction of solder layers 电源模块可靠性设计:焊接翘曲变形多时间序列仿真及焊料层疲劳寿命预测
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-28 DOI: 10.1016/j.mssp.2026.110474
Sheng Bi , Dao-Hang Li , Can-Pu Wang , Zemin Bu , Yun-Hui Mei
This paper mainly proposes a power module life prediction method based on the “testing – modeling – simulation – prediction” framework. Firstly, a multi time sequence simulation method for soldering warpage deformation and residual stress in power modules has been established, which is based on the Anand viscoplastic constitutive model. This approach resolves issues of warpage assessment deviation and abnormal localization of maximum residual stress caused by inaccurate material parameters. Secondly, a technical system encompassing “finite element modeling – identification of weak regions – extraction of damage parameters – fatigue life prediction” has been developed for power modules, providing crucial technical support for reliability assessment of power modules. Thirdly, a non-contact strain measurement technique based on the Digital Image Correlation method has been developed, along with the concurrent establishment of a supporting experimental platform. This effectively addresses the systematic errors caused by backlash in traditional displacement-controlled fatigue testing, as well as the technical bottleneck of insufficient measurement accuracy associated with contact-type mechanical extensometers.
本文主要提出了一种基于“试验-建模-仿真-预测”框架的电源模块寿命预测方法。首先,基于Anand粘塑性本构模型,建立了功率模块焊接翘曲变形和残余应力的多时间序列仿真方法。该方法解决了由于材料参数不准确引起的翘曲评估偏差和最大残余应力定位异常问题。其次,建立了电力模块“有限元建模-薄弱区域识别-损伤参数提取-疲劳寿命预测”的技术体系,为电力模块可靠性评估提供了关键技术支撑。第三,开发了基于数字图像相关法的非接触应变测量技术,并搭建了相应的实验平台。这有效地解决了传统位移控制疲劳试验中由于间隙引起的系统误差,以及接触式机械伸缩仪测量精度不足的技术瓶颈。
{"title":"Reliability design of power modules: multi time sequence simulation of soldering warpage deformation and fatigue life prediction of solder layers","authors":"Sheng Bi ,&nbsp;Dao-Hang Li ,&nbsp;Can-Pu Wang ,&nbsp;Zemin Bu ,&nbsp;Yun-Hui Mei","doi":"10.1016/j.mssp.2026.110474","DOIUrl":"10.1016/j.mssp.2026.110474","url":null,"abstract":"<div><div>This paper mainly proposes a power module life prediction method based on the “testing – modeling – simulation – prediction” framework. Firstly, a multi time sequence simulation method for soldering warpage deformation and residual stress in power modules has been established, which is based on the Anand viscoplastic constitutive model. This approach resolves issues of warpage assessment deviation and abnormal localization of maximum residual stress caused by inaccurate material parameters. Secondly, a technical system encompassing “finite element modeling – identification of weak regions – extraction of damage parameters – fatigue life prediction” has been developed for power modules, providing crucial technical support for reliability assessment of power modules. Thirdly, a non-contact strain measurement technique based on the Digital Image Correlation method has been developed, along with the concurrent establishment of a supporting experimental platform. This effectively addresses the systematic errors caused by backlash in traditional displacement-controlled fatigue testing, as well as the technical bottleneck of insufficient measurement accuracy associated with contact-type mechanical extensometers.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110474"},"PeriodicalIF":4.6,"publicationDate":"2026-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Construction of S-scheme MoS2/g-C3N4 heterojunction on halloysite nanotubes for effective photocatalytic tetracycline degradation and H2 production 高岭土纳米管上S-scheme MoS2/g-C3N4异质结的构建及其对四环素的有效光催化降解和制氢
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-28 DOI: 10.1016/j.mssp.2026.110464
Xiaoting Chen , Xiaoyu Wang , Long Zhang , Junying Song , Qingbin Guo , Dengzheng Gao , Li Wang , Xiaolong Hu
In this study, a novel S-scheme MoS2/g-C3N4/halloysite ternary photocatalyst was successfully synthesized by high-temperature calcination method and one-pot hydrothermal strategy for photocatalytic tetracycline (TC) degradation and H2 evolution under visible light irradiation. The result revealed that MoS2/g-C3N4/halloysite-70% exhibited significantly enhanced photocatalytic performance for TC degradation, with an efficiency of up to 91.6% within 180 min. The corresponding reaction rate constant was 0.00988 min−1, which was 2.74 and 3.87 times higher than that of pure MoS2 (0.0036 min−1) and g-C3N4 (0.00255 min−1), respectively. Meanwhile, under simulated visible light conditions, MoS2/g-C3N4/halloysite-70% exhibited the highest H2 production rate (494.2 μmol g−1 h−1), which was approximately 5.84 times and 2.83 times higher than that of g-C3N4 and MoS2, respectively. The unique S-scheme MoS2/g-C3N4 heterojunction structure and the introduction of halloysite support were responsible for the notable enhancement of photocatalytic activity, primarily by promoting the separation and migration of photogenerated charge carriers, improving the light response capacity and retaining the higher redox ability. Furthermore, the intermediates of TC photocatalyzed by MoS2/g-C3N4/halloysite were identified via LC-MS. This study provides a new strategy for efficient photocatalytic H2 production and wastewater treatment based on the combination of mineral carrier and S-scheme heterojunction.
本研究采用高温煅烧法和一锅水热策略成功合成了新型S-scheme MoS2/g-C3N4/高岭土三元光催化剂,用于可见光下光催化四环素(TC)降解和析氢。结果表明,MoS2/g-C3N4/埃洛石-70%对TC的光催化性能有显著提高,在180 min内的光催化效率高达91.6%。相应的反应速率常数为0.00988 min−1,分别是纯二硫化钼(0.0036 min−1)和g-C3N4 (0.00255 min−1)的2.74和3.87倍。同时,在模拟可见光条件下,MoS2/g- c3n4 /埃洛石-70%的产氢率最高,为494.2 μmol g−1 h−1,分别是g- c3n4和MoS2的5.84倍和2.83倍。独特的S-scheme MoS2/g-C3N4异质结结构和高岭土载体的引入是光催化活性显著增强的原因,主要是通过促进光生载流子的分离和迁移,提高光响应能力和保持较高的氧化还原能力。此外,通过LC-MS鉴定了MoS2/g-C3N4/埃洛石光催化TC的中间体。本研究提供了一种基于矿物载体与s型异质结相结合的高效光催化制氢和废水处理新策略。
{"title":"Construction of S-scheme MoS2/g-C3N4 heterojunction on halloysite nanotubes for effective photocatalytic tetracycline degradation and H2 production","authors":"Xiaoting Chen ,&nbsp;Xiaoyu Wang ,&nbsp;Long Zhang ,&nbsp;Junying Song ,&nbsp;Qingbin Guo ,&nbsp;Dengzheng Gao ,&nbsp;Li Wang ,&nbsp;Xiaolong Hu","doi":"10.1016/j.mssp.2026.110464","DOIUrl":"10.1016/j.mssp.2026.110464","url":null,"abstract":"<div><div>In this study, a novel S-scheme MoS<sub>2</sub>/g-C<sub>3</sub>N<sub>4</sub>/halloysite ternary photocatalyst was successfully synthesized by high-temperature calcination method and one-pot hydrothermal strategy for photocatalytic tetracycline (TC) degradation and H<sub>2</sub> evolution under visible light irradiation. The result revealed that MoS<sub>2</sub>/g-C<sub>3</sub>N<sub>4</sub>/halloysite-70% exhibited significantly enhanced photocatalytic performance for TC degradation, with an efficiency of up to 91.6% within 180 min. The corresponding reaction rate constant was 0.00988 min<sup>−1</sup>, which was 2.74 and 3.87 times higher than that of pure MoS<sub>2</sub> (0.0036 min<sup>−1</sup>) and g-C<sub>3</sub>N<sub>4</sub> (0.00255 min<sup>−1</sup>), respectively. Meanwhile, under simulated visible light conditions, MoS<sub>2</sub>/g-C<sub>3</sub>N<sub>4</sub>/halloysite-70% exhibited the highest H<sub>2</sub> production rate (494.2 μmol g<sup>−1</sup> h<sup>−1</sup>), which was approximately 5.84 times and 2.83 times higher than that of g-C<sub>3</sub>N<sub>4</sub> and MoS<sub>2</sub>, respectively. The unique S-scheme MoS<sub>2</sub>/g-C<sub>3</sub>N<sub>4</sub> heterojunction structure and the introduction of halloysite support were responsible for the notable enhancement of photocatalytic activity, primarily by promoting the separation and migration of photogenerated charge carriers, improving the light response capacity and retaining the higher redox ability. Furthermore, the intermediates of TC photocatalyzed by MoS<sub>2</sub>/g-C<sub>3</sub>N<sub>4</sub>/halloysite were identified via LC-MS. This study provides a new strategy for efficient photocatalytic H<sub>2</sub> production and wastewater treatment based on the combination of mineral carrier and S-scheme heterojunction.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110464"},"PeriodicalIF":4.6,"publicationDate":"2026-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081137","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A metal micro-dot array-based alignment-free flip-chip bonding technique for Micro-LED display fabrication 一种基于金属微点阵列的无对准倒装芯片键合技术
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-28 DOI: 10.1016/j.mssp.2026.110466
Chi Wang , Tianxi Yang , Yijian Zhou , Jiawei Yuan , Chenglong Guo , Xiongtu Zhou , Jie Sun , Qun Yan
Because of their remarkable performance, Micro-LEDs have attracted a lot of attention in the display sector in recent years. This has driven the development of devices towards smaller sizes and higher pixel densities, but it has also introduced difficult fabrication problems. Standard flip-chip bonding technology poses very strict requirement the precise alignment of ultra-high pixel density Micro-LEDs to their driver substrates during the bonding, whereas typical wafer bonding techniques need high temperatures and pressures. In order to overcome these obstacles, we propose a novel method that uses a high-density metal micro-dot array with a spot size of 2 μm and a pitch of 4 μm to achieve alignment-free bonding under low-temperature and low-pressure conditions. This method enables the fabrication of Micro-LED devices with a pixel size of 6 μm and a pitch of 9 μm. According to experimental results, a 100 % bonding yield was achieved at 225 °C and 75 N, which are much lower than those reported by literature, respectively. The viability of low-temperature, low-pressure alignment-free bonding for the fabrication of ultra-high pixel-density Micro-LED devices has been effectively confirmed by this study.
micro - led由于其卓越的性能,近年来在显示领域受到了广泛的关注。这推动了器件朝着更小尺寸和更高像素密度的方向发展,但它也引入了困难的制造问题。标准的倒装芯片键合技术对超高像素密度micro - led在键合过程中的精确对准要求非常严格,而典型的晶圆键合技术则需要高温和高压。为了克服这些障碍,我们提出了一种在低温低压条件下使用2 μm、4 μm间距的高密度金属微点阵列实现无对准键合的新方法。该方法可以制作像素尺寸为6 μm、间距为9 μm的Micro-LED器件。实验结果表明,在225℃和75 N条件下均能达到100%的成键率,远低于文献报道。该研究有效地证实了低温、低压无对准键合用于制造超高像素密度Micro-LED器件的可行性。
{"title":"A metal micro-dot array-based alignment-free flip-chip bonding technique for Micro-LED display fabrication","authors":"Chi Wang ,&nbsp;Tianxi Yang ,&nbsp;Yijian Zhou ,&nbsp;Jiawei Yuan ,&nbsp;Chenglong Guo ,&nbsp;Xiongtu Zhou ,&nbsp;Jie Sun ,&nbsp;Qun Yan","doi":"10.1016/j.mssp.2026.110466","DOIUrl":"10.1016/j.mssp.2026.110466","url":null,"abstract":"<div><div>Because of their remarkable performance, Micro-LEDs have attracted a lot of attention in the display sector in recent years. This has driven the development of devices towards smaller sizes and higher pixel densities, but it has also introduced difficult fabrication problems. Standard flip-chip bonding technology poses very strict requirement the precise alignment of ultra-high pixel density Micro-LEDs to their driver substrates during the bonding, whereas typical wafer bonding techniques need high temperatures and pressures. In order to overcome these obstacles, we propose a novel method that uses a high-density metal micro-dot array with a spot size of 2 μm and a pitch of 4 μm to achieve alignment-free bonding under low-temperature and low-pressure conditions. This method enables the fabrication of Micro-LED devices with a pixel size of 6 μm and a pitch of 9 μm. According to experimental results, a 100 % bonding yield was achieved at 225 °C and 75 N, which are much lower than those reported by literature, respectively. The viability of low-temperature, low-pressure alignment-free bonding for the fabrication of ultra-high pixel-density Micro-LED devices has been effectively confirmed by this study.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110466"},"PeriodicalIF":4.6,"publicationDate":"2026-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preparation of graphite carbon modified g-C3N4 photocatalysts by stepwise activation method and study on degradation performance for sulfamethoxazole 阶梯活化法制备石墨碳改性g-C3N4光催化剂及对磺胺甲恶唑的降解性能研究
IF 4.6 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-28 DOI: 10.1016/j.mssp.2026.110432
Wanbin Hong , Qianming Lu , Hanyu Chen , Huikang Zhang , KunFeng Zhang
Graphite carbon-modified graphite nitride carbon (g-C3N4) exhibits potential application value in the degradation of antibiotic wastewater. In the study, a graphite carbon-modified g-C3N4 composite catalyst is synthesized by thermal condensation. The porous lamellar graphite carbon (SG) combines with g-C3N4, forming a composite material (SG-CN) with hierarchical structure. Under the condition of simulating visible light with Xenon lamp, the SG-CN can remove 92 % of sulfamethoxazole (SMX) in 120 min, displaying excellent sustainability and catalytic activity. Through a series of experiments and characterization, it has been proved that the enhanced photocatalytic performance arises from synergistic effects originating from the incorporation of activated graphite carbon. Its distinctive loose porous graphitized structure facilitates the formation of efficient charge transport pathways, thereby promoting electron transfer and shortening the migration distance of photogenerated electrons. In addition, the incorporation of carbon extends the response range of visible light. LC-MS identifies intermediate species and potential degradation routes of SMX. Quenching test indicates that •OH, h+ and •O2 radicals all participate in SMX degradation. Additionally, the photocatalyst shows broad-spectrum applicability to multiple sulfonamide antibiotics (degradation efficiencies >80 %), promoting universal applicability to sulfonamide-containing wastewater. These findings demonstrate that graphite modified g-C3N4 has good potential practical value in the antibiotic wastewater treatment.
石墨碳改性氮化石墨碳(g-C3N4)在抗生素废水的降解中具有潜在的应用价值。本研究采用热缩合法合成了石墨碳改性g-C3N4复合催化剂。多孔层状石墨碳(SG)与g-C3N4结合,形成具有层次结构的复合材料(SG- cn)。在氙灯模拟可见光条件下,SG-CN在120 min内可脱除92%的磺胺甲恶唑(SMX),表现出良好的可持续性和催化活性。通过一系列的实验和表征,证明了增强的光催化性能是由活性炭的掺入产生的协同效应引起的。其独特的松散多孔石墨化结构有利于形成有效的电荷传递途径,从而促进电子转移,缩短光生电子的迁移距离。此外,碳的加入扩大了可见光的响应范围。LC-MS鉴定了SMX的中间种类和潜在的降解途径。淬灭实验表明•OH、h+和•O2−自由基均参与SMX的降解。此外,该光催化剂对多种磺胺类抗生素具有广谱适用性(降解效率>; 80%),促进了对含磺胺类废水的普遍适用性。研究结果表明,石墨改性g-C3N4在抗生素废水处理中具有良好的潜在实用价值。
{"title":"Preparation of graphite carbon modified g-C3N4 photocatalysts by stepwise activation method and study on degradation performance for sulfamethoxazole","authors":"Wanbin Hong ,&nbsp;Qianming Lu ,&nbsp;Hanyu Chen ,&nbsp;Huikang Zhang ,&nbsp;KunFeng Zhang","doi":"10.1016/j.mssp.2026.110432","DOIUrl":"10.1016/j.mssp.2026.110432","url":null,"abstract":"<div><div>Graphite carbon-modified graphite nitride carbon (g-C<sub>3</sub>N<sub>4</sub>) exhibits potential application value in the degradation of antibiotic wastewater. In the study, a graphite carbon-modified g-C<sub>3</sub>N<sub>4</sub> composite catalyst is synthesized by thermal condensation. The porous lamellar graphite carbon (SG) combines with g-C<sub>3</sub>N<sub>4</sub>, forming a composite material (SG-CN) with hierarchical structure. Under the condition of simulating visible light with Xenon lamp, the SG-CN can remove 92 % of sulfamethoxazole (SMX) in 120 min, displaying excellent sustainability and catalytic activity. Through a series of experiments and characterization, it has been proved that the enhanced photocatalytic performance arises from synergistic effects originating from the incorporation of activated graphite carbon. Its distinctive loose porous graphitized structure facilitates the formation of efficient charge transport pathways, thereby promoting electron transfer and shortening the migration distance of photogenerated electrons. In addition, the incorporation of carbon extends the response range of visible light. LC-MS identifies intermediate species and potential degradation routes of SMX. Quenching test indicates that •OH, h<sup>+</sup> and •O<sub>2</sub><sup>−</sup> radicals all participate in SMX degradation. Additionally, the photocatalyst shows broad-spectrum applicability to multiple sulfonamide antibiotics (degradation efficiencies &gt;80 %), promoting universal applicability to sulfonamide-containing wastewater. These findings demonstrate that graphite modified g-C<sub>3</sub>N<sub>4</sub> has good potential practical value in the antibiotic wastewater treatment.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"207 ","pages":"Article 110432"},"PeriodicalIF":4.6,"publicationDate":"2026-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146081215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Materials Science in Semiconductor Processing
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1