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2018 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)最新文献

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Shearing strength of temporary bonding adhesive applied to different substrates 适用于不同基材的临时粘接胶的剪切强度
Liu Qiang, Xia Jianwen, Huang Mingqi, L. Jinhui, Zhang Guopingi
with the development of semiconductor industry, temporary bonding materials become more and more widely used in various process applications, such as wafer thinning, ultra-thin device preparation, thin wafers handing and so on. Different process applications may need different requirements for the application performance of materials. For example, the temporary bonding adhesive may be bonded with different surface of device wafer like gold layer, silicon and glass, which may also show different adhesive property. What needs to be emphasized is that the bonding wafers are easily peeling off with lower bonding strength, which may lead to low yield. And the bonding wafers with higher bonding strength may difficult to be released and cleaned. Therefore, the bonding strength of temporary bonding adhesive applied to different substrates should be considered as a crucial factor for application. There are several methods to release the wafers when de-bonding such as thermal sliding, mechanical peeling, solvent release and laser irradiation. In this paper, UV laser release systems with release layer and adhesive layer was focused. We studied several adhesive materials (both Adhesive B and Adhesive C were modified by Adhesive A) which showed different shearing strength with different substrates such as gold, silicon and glass. The shearing strength was studied by thrust force shearing force tester (DAGE 4000, USA). The chip with the size of 1mm ×1 mm was bonded on the substrates by the same pressure. The study showed that Adhesive C has higher shearing strength on different substrate. In addition, thermal stability was investigated by thermal gravimetric analyzer (TGA/DSC 2, Germany).
随着半导体工业的发展,临时键合材料越来越广泛地应用于各种工艺应用,如晶圆减薄、超薄器件制备、薄晶圆处理等。不同的工艺应用可能对材料的应用性能有不同的要求。例如,所述临时粘结剂可与器件晶圆的不同表面如金层、硅、玻璃等粘结,也可表现出不同的粘结性能。需要强调的是,结合晶片容易剥落,结合强度较低,可能导致成品率低。结合强度较高的结合晶片可能难以释放和清洗。因此,应用于不同基材的临时粘接胶的粘接强度应作为应用的关键因素加以考虑。在脱键过程中,有热滑动、机械剥离、溶剂释放和激光照射等几种方法来释放晶圆。本文主要研究了具有脱模层和粘接层的紫外激光脱模系统。我们研究了几种胶粘剂(胶粘剂B和胶粘剂C都是由胶粘剂A改性的),它们在不同的基材(如金、硅和玻璃)上表现出不同的剪切强度。采用推力式剪切力试验机(美国DAGE 4000)对其剪切强度进行了研究。采用相同的压力将尺寸为1mm ×1 mm的芯片粘接在基板上。研究表明,C胶在不同基材上具有较高的剪切强度。采用热重分析仪(TGA/DSC 2,德国)对其热稳定性进行了研究。
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引用次数: 0
A 76-81GHz High-linearity CMOS Receiver Front-end for Automotive Radar 用于汽车雷达的76-81GHz高线性CMOS接收机前端
Zongming Duan, Dongfang Pan, Yan Wang, Bingbing Liao, Yuefei Dai, F. Lin
a 76-81 GHz receiver (Rx) front-end is implemented in 65-nm COMS for automotive radar. The front-end consists of a low noise amplifier (LNA), an interstage network with two-stage transformer, and a mixer core with transconductance (Gm) stage and quad-switch. Flyback transformer-feedback technique is adopted for the three-stage common source (CS) LNA. Traditional Gilbert-mixer is improved by inset a transformer balun between Gm stage and switch stage. Therefore, high-linearity performance can be achieved. The Rx front-end consumes 22mW and the input 1dB compression point (P1dB) is - 15.5 dBm at 80 GHz. The conversion gain (CG) is 8.5-11.5 dB at 76-81 GHz, while noise figure is 7.2-8.7 dB. The chip size is only 0.23 mm2 excluding PADs.
76-81 GHz接收机(Rx)前端在65纳米的COMS中实现,用于汽车雷达。前端由低噪声放大器(LNA)、带两级变压器的级间网络和带跨导(Gm)级和四开关的混频器铁芯组成。三级共源LNA采用反激变压器反馈技术。传统的吉尔伯特混合器通过在Gm级和开关级之间插入变压器平衡器来改进。因此,可以实现高线性性能。Rx前端功耗为22mW, 80ghz时输入1dB压缩点(P1dB)为- 15.5 dBm。76 ~ 81 GHz时的转换增益(CG)为8.5 ~ 11.5 dB,噪声系数为7.2 ~ 8.7 dB。除去pad,芯片尺寸仅为0.23 mm2。
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引用次数: 0
Development and Characterization of Ti/TiN/Al Film Compensation Resistor with Low Resistance 低阻Ti/TiN/Al薄膜补偿电阻器的研制与表征
Wei Zhang, Xiulan Cheng, Xiaodong Wang
Low compensation Ti/TiN/Al film resistor including resistance and two pads was designed and fabricated with one step of lithography and metal sputter. The fabricated 8$mu$m width near 50$Omega$ resistor was stable and precise after annealing, which can be loaded with 8V DC voltage for over 60 minutes.
采用光刻和金属溅射一步法制备了低补偿Ti/TiN/Al薄膜电阻器。在50 $Omega$附近制作的8 $mu$ m宽度电阻经退火后稳定、精确,可在8V直流电压下加载60分钟以上。
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引用次数: 0
A 0.696-mW 9-bit 80-MS/s 2-b/cycle Nonbinary SAR ADC in 130-nm SOI CMOS 基于130nm SOI CMOS的0.696 mw 9位80 ms /s 2-b/周期非二进制SAR ADC
Liang Zhao, Xiaobing Ding, Jiaqi Yang, F. Lin
A 2b/cycle nonbinary successive approximation register (SAR) analog-to-digital converter (ADC) is presented in this brief. Two capacitor DACs, a Signal-DAC (SIG-DAC) and a Reference-DAC (REF-DAC), which are used to implement the 2b/cycle architecture, are designed to be nonbinary weighted. Such an approach can make the ADC robust enough to comparator offset variations and mismatch between DACs. In DAC settling phase, with splitting capacitors array, both the SIGDAC and REF-DAC capacitors use monotonic switching method, which can reduce the power dissipation and speed up the conversion. A prototype 9b ADC using 130-nm Silicon-On-Insulator (SOI) CMOS process works at 80MS/s from 1.2V supply, the simulation results shows a signal-to-noise plus distortion ratio (SNDR) of 50.40dB and a spurious-free dynamic range (SFDR) of 52.94dB. The total power consumption of the ADC is 0.696mW and the FoM is 32 fJ/conversion-step.
本文介绍了一种2b/周期非二进制逐次逼近寄存器(SAR)模数转换器(ADC)。两个电容dac,一个信号dac (SIG-DAC)和一个参考dac (REF-DAC),用于实现2b/周期架构,被设计为非二进制加权。这种方法可以使ADC足够健壮,以比较ADC之间的偏移变化和不匹配。在DAC稳定阶段,SIGDAC和REF-DAC电容器均采用分路电容阵列,采用单调开关方式,降低了功耗,加快了转换速度。采用130 nm绝缘体上硅(SOI) CMOS工艺的9b原型ADC在1.2V电源下工作速度为80MS/s,仿真结果表明信噪加失真比(SNDR)为50.40dB,无杂散动态范围(SFDR)为52.94dB。ADC的总功耗为0.696mW, FoM为32 fJ/转换步长。
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引用次数: 0
Slotline-Based Balun with Wide Bandwidth and High Isolation 基于槽线的宽带宽高隔离Balun
King Zeng, Xiaojun Bi
A slotline-based balun with wide bandwidth and high isolation is proposed in this paper. The proposed balun integrates Wilkinson power divider, which is devoted to improving the isolation between the differential output ports. By utilizing asymmetrical slotline and symmetrical output microstrip, the implemented balun achieves excellent balance performance and wideband response. The simulation results demonstrate a wideband property with a return loss better than 10 dB from 4.4 GHz to 20.4 GHz, an improved minimum isolation of 10 dB as well as competitive balance performances including 0.5 dB amplitude imbalance and 3. 7 phase imbalance.
提出了一种基于槽线的宽带高隔离平衡器。该均衡器集成了威尔金森功率分压器,致力于提高差动输出端口之间的隔离度。利用非对称槽线和对称输出微带,实现了良好的平衡性能和宽带响应。仿真结果表明,在4.4 GHz ~ 20.4 GHz范围内,回波损耗优于10 dB的宽带特性,提高了10 dB的最小隔离度,并具有0.5 dB振幅不平衡和3。相位不平衡。
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引用次数: 1
Optimization for Efficient Hardware Implementation of CNN on FPGA CNN在FPGA上高效硬件实现的优化
F. Farrukh, Tuo Xie, Chun Zhang, Zhihua Wang
Deep neural networks (DNN) have been a hot research topic in recent years. The key element of DNN is to explore the real time hardware implementation. However, it requires a complete knowledge of hardware where the DNN is going to be implemented. The computational complexity and resource consumption of DNN is increasing by the time. Convolutional Neural Network (CNN) is the popular architecture of DNN especially for image classification. One requires an efficient implementation strategy of CNN to incorporate more computations in real time. Field Programmable Gate Array (FPGA) is considered to be the energy efficient choice for CNN as compared to Graphical Processing Units (GPUs). In this paper, new idea is explored and implemented for basic Processing Element (PE) of CNN. FPGA has limited built-in multiplier accumulator (MAC) units. In this work, MAC units are replaced by Wallace Tree based Multiplier which belongs to the family of log time array multipliers. The resources are saved in terms of MAC units and we can implement more processing elements on FPGA.
深度神经网络(DNN)是近年来的一个研究热点。深度神经网络的关键是探索实时硬件实现。然而,它需要对DNN将要实现的硬件有完整的了解。随着时间的推移,深度神经网络的计算复杂度和资源消耗不断增加。卷积神经网络(Convolutional Neural Network, CNN)是深度神经网络(DNN)中比较流行的架构,尤其适用于图像分类。一是需要一个有效的CNN实现策略来实时地整合更多的计算。与图形处理单元(gpu)相比,现场可编程门阵列(FPGA)被认为是CNN的节能选择。本文对CNN的基本处理单元(PE)进行了新思路的探索和实现。FPGA具有有限的内置乘数累加器(MAC)单元。在这项工作中,MAC单元被华莱士树乘法器所取代,该乘法器属于对数时间阵列乘法器族。在MAC单元方面节省了资源,并且我们可以在FPGA上实现更多的处理元素。
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引用次数: 20
A Selector with Special Design for High on-current and Selectivity 具有特殊设计的高通流选择性选择器
Qi Lin, Qu Cheng, H. Tong, X. Miao
In this letter, we proposed a special design method to realize both high on-current and selectivity of selectors. By introducing CuS as ion supply layer, our proposed selector supplies limited Cu ions to form weak filament to switch on at voltage over Vth, and effectively retract Cu ions to break down the filament to switch off at voltage lower than Vhold. Meanwhile, high-defect-density and wide-band-gap chalcogenide GeSe assists the diffusion process of Cu atoms and enhance selectivity.
在这封信中,我们提出了一种特殊的设计方法来实现高通流和选择性的选择器。通过引入Cu作为离子供应层,我们提出的选择器提供有限的Cu离子形成弱灯丝,在电压超过Vth时打开,并有效地收缩Cu离子击穿灯丝,在电压低于Vhold时关闭。同时,高缺陷密度和宽带隙的硫系GeSe有助于Cu原子的扩散过程,提高了选择性。
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引用次数: 0
Dynamic-Replica-Based All-Condition-Stable LDO Regulator with 5X Improved Load Regulation 基于动态复制的5倍改进负载调节的全条件稳定LDO调节器
Guanhua Wang, Chenchang Zhan, Junyao Tang, Ning Zhang
An NMOS LDO regulator using a dynamic replica to significantly improve the regulation precision is presented. By sensing the load current and dynamically adjusting the replica current, the power transistor is biased properly to improve regulation without compromising the all-condition stability of a classical fixed-replica regulator. The proposed LDO regulator is implemented in a 0.18-μm CMOS process, occupying an active chip area of 0.039 mm2. With 1.2 V input and 1.1 V nominal output voltage, the proposed design achieves 5 times improved load regulation, at the same time demonstrating stable and fast transient responses over the wide load capacitance range from 0 to virtually infinity.
提出了一种采用动态复制的NMOS LDO调节器,可显著提高其调节精度。通过感知负载电流并动态调整副本电流,在不影响经典固定副本稳压器的全条件稳定性的前提下,对功率晶体管进行适当的偏置,从而提高稳压性能。所提出的LDO稳压器采用0.18 μm CMOS工艺实现,占据0.039 mm2的有源芯片面积。在1.2 V输入电压和1.1 V标称输出电压下,所提出的设计实现了5倍的负载调节,同时在从0到几乎无穷大的宽负载电容范围内表现出稳定和快速的瞬态响应。
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引用次数: 1
A Low-power Computer Vision Engine for Video Surveillance 用于视频监控的低功耗计算机视觉引擎
Ke Xu, Yu Li, Bin Han, Xiao Zhang, Xin Liu, Jisong Ai
this paper presents the design and VLSI implementation of a CVE (Computer Vision Engine) for real-time video analysis. It offloads CPU/GPU for the power-hungry computation for various vision tasks such as face detection, object detection, motion tracking, etc. The design features 22 computation kernels and is divided into three main categories. The proposed CVE is integrated in a smart video surveillance SoC (System on Chip) and fabricated with TSMC 28nm technology. The total hardware costs are 392K gates and 75.5 KB memory. The measured results show that the design is able to achieve $1920times1080$ 30fps real-time video analysis when running at 400MHz. The total power consumption is 20mW and 0.32nJ/pixel of energy efficiency.
本文介绍了用于实时视频分析的计算机视觉引擎(CVE)的设计和VLSI实现。它为各种视觉任务(如人脸检测,物体检测,运动跟踪等)的耗电计算卸载CPU/GPU。该设计具有22个计算内核,并分为三个主要类别。该CVE集成在智能视频监控SoC(片上系统)中,并采用台积电28纳米技术制造。总硬件成本为392K门和75.5 KB内存。实测结果表明,在400MHz工作频率下,该设计能够实现$1920times1080$ 30fps的实时视频分析。总功耗为20mW,能效为0.32nJ/像素。
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引用次数: 1
Robust Low-Pass Filter Design with Bandgap Reference for Automotive and Industrial Applications 具有带隙参考的汽车和工业应用鲁棒低通滤波器设计
L. Xue, N. Yan, Yun Yin, Hongtao Xu
a robust low-pass filter (LPF) with bandgap reference for automotive and industrial applications is proposed in this paper. Bandgap reference provides suitable bias current for LPF. The low-pass filter consists of transimpedance amplifier (TIA) and programmable gain amplifier (PGA). A three-stage fully differential amplifier is used in both TIA and PGA. Common-mode Level Controlling Block (CLCB) and Resistor Controlling Block (RCB) are designed to adjust the input common-mode level and gain of LPF, respectively. According to the post layout simulation results, maximum of LPF gain achieves 21.42dB on nominal corner, while the proposed LPF is robust enough to work and keep stable gain over different process corners and across a wide temperature range.
提出了一种用于汽车和工业应用的带带隙参考的鲁棒低通滤波器(LPF)。带隙基准为LPF提供了合适的偏置电流。低通滤波器由跨阻放大器(TIA)和可编程增益放大器(PGA)组成。在TIA和PGA中都使用了三级全差分放大器。共模电平控制块(CLCB)和电阻控制块(RCB)分别用于调节LPF的输入共模电平和增益。根据布局后的仿真结果,LPF的最大增益在标称角处达到21.42dB,而所提出的LPF具有足够的鲁棒性,可以在不同的工艺角和宽温度范围内工作并保持稳定的增益。
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引用次数: 0
期刊
2018 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)
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