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Quantitative evaluation of residual resist in electron beam lithography based on scanning electron microscopy imaging and thresholding segmentation algorithm. 基于扫描电子显微镜成像和阈值分割算法的电子束光刻残留抗蚀剂定量评估。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-11-01 DOI: 10.1088/1361-6528/ad8a6a
Qingyuan Mao, Jingyuan Zhu, Zhanshan Wang

Electron beam lithography is a critical technology for achieving high-precision nanoscale patterning. The presence of resist residues in the structures can significantly affect subsequent processes such as etching and lift-off. However, the evaluation and optimization of resist residues currently relies on qualitative observations like scanning electron microscopy (SEM), necessitating multiple experiments to iteratively optimize exposure parameters, which is not only labor-intensive but also costly. Here, we propose a quantitative method to evaluate resist residues. By processing the obtained SEM images using a threshold segmentation algorithm, we segmented the resist structure region and the residual resist region in the images. The grayscale values of these two regions are identified, and the residues are quantified based on the ratio of these values. Furthermore, a relationship curve between the residue amount and the exposure dose is plotted to predict the optimal exposure dose. To validate this method, we fabricated hydrogen silsesquioxane annular grating structures with 30 nm linewidth and analyzed the residue levels over an exposure dose range of 2000-2500μC cm-2, predicting the optimal dose to be 1800μC cm-2and confirming this through experiments. Additionally, we applied the method to polymethyl methacrylate and ZEP-520A structures, achieving similarly accurate results, further confirming the method's general applicability. This method has the potential to reduce experimental costs and improve yield and production efficiency in nano fabrication.

电子束光刻(EBL)是实现高精度纳米级图案化的关键技术。结构中抗蚀剂残留物的存在会严重影响蚀刻和剥离等后续工艺。然而,目前对抗蚀剂残留的评估和优化主要依赖于扫描电子显微镜(SEM)等定性观察,需要进行多次实验来反复优化曝光参数,不仅耗费大量人力,而且成本高昂。在这里,我们提出了一种评估抗蚀剂残留的定量方法。通过使用阈值分割算法处理获得的 SEM 图像,我们分割出了图像中的抗蚀剂结构区域和抗蚀剂残留区域。识别这两个区域的灰度值,并根据这些值的比值量化残留物。此外,我们还绘制了残留量与曝光剂量之间的关系曲线,以预测最佳曝光剂量。为了验证这种方法,我们制作了线宽为 30 nm 的硅倍半氧烷(HSQ)环形光栅结构,并分析了 2000~2500 μC/cm² 暴露剂量范围内的残留量,预测最佳剂量为 1800 μC/cm²,并通过实验证实了这一点。此外,我们还将该方法应用于聚甲基丙烯酸甲酯(PMMA)和 ZEP-520A 结构,取得了同样精确的结果,进一步证实了该方法的普遍适用性。该方法有望降低实验成本,提高纳米制造的产量和生产效率。
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引用次数: 0
Effect of hydrogen sulfide concentration on two-dimensional SnS2film by atomic layer deposition in annealing process. 退火过程中原子层沉积硫化氢浓度对二维 SnS2 薄膜的影响
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-30 DOI: 10.1088/1361-6528/ad89b7
Heejun Yoon, Hyeongtag Jeon

Two-dimensional materials are widely studied due to its unique physical, optical, electrical properties, and good compatibility with various synthesis methods. And among the many fabrication methods, tin disulfide (SnS2) material, a two-dimensional (2D) material that can be achieved with accurate thickness control using atomic layer deposition (ALD), high uniformity and conformality even at low process temperatures is attracting attention. However, since the crystallinity of the thin film is low at a low process temperature, various post-annealing methods are being studied to compensate for film quality. In this work, we compared the crystal structures, chemical binding energies, and electrical properties of the thin films by post-annealing SnS2thin films according to the hydrogen sulfide concentrations of 4.00% and 99.99% in the hydrogen sulfide atmospheres. The crystallinity, grain size, and carrier concentrations of the SnS2thin film were the highest at a post-annealing temperature of 350 °C at a hydrogen sulfide concentration of 99.99%, and the chemical binding energies also corresponded with the standard Sn4+states, forming a pure 2D-hexagonal SnS2phase. In addition, SnS2thin films deposited via ALD showed high uniformity and conformality in large-scale wafers and trench structure wafers.

二维(2D)材料因其独特的物理、光学和电学特性以及与各种合成方法的良好兼容性而被广泛研究。二硫化锡(SnS2)即使在较低的工艺温度下也具有较高的均匀性和保形性,是一种可以利用原子层沉积(ALD)技术精确控制厚度的二维材料。然而,由于在低工艺温度下薄膜的结晶度较低,人们正在研究各种后退火方法来补偿薄膜质量。在这项工作中,我们比较了硫化氢浓度为 4.00 % 和 99.99 % 时退火后 SnS2 薄膜的晶体结构、化学结合能和电学特性。在退火后温度为 350 ℃、硫化氢浓度为 99.99 % 时,SnS2 薄膜的结晶度、晶粒尺寸和载流子浓度最高,化学结合能与标准 Sn4+ 态一致,形成了纯粹的二维六方 SnS2 相。此外,通过 ALD 沉积的 SnS2 薄膜在大规模晶片和沟槽结构晶片中显示出高度的一致性和保形性。
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引用次数: 0
MOF-derived three-dimensional porous dodecahedral structured bimetallic Mn/Co-C-N composite for high-performance durable oxygen reduction reaction electrocatalysts. MOF衍生的三维多孔十二面体结构双金属Mn/Co-C-N复合材料用于高性能耐久性氧还原反应电催化剂。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-29 DOI: 10.1088/1361-6528/ad8929
Yelin Qiao, Yuanyuan Guo, Yueqi Zhao, Caiyun Chang, Shuo Wang, Xiaoting Zhang, Faming Gao, Rongna Chen, Li Hou

Investigating high-efficiency oxygen reduction reaction (ORR) catalysts is one of the most effective methods for addressing the sluggish kinetics at the fuel cell cathode. Bimetallic three-dimensional porous materials have garnered significant attention due to their diverse structures, large specific surface area and synergistic catalytic effects. Herein, we synthesized a bimetallic three-dimensional porous dodecahedral structure, Mn/Co-C-N, derived from MOF using a straightforward approach. Experimental reults confirm that the strategic incorporation of Mn enhances the electrocatalytic activity for ORR. Meanwhile, the synergistic effects of Mn and Co, as well as the advantages of the dodecahedral structure for expediting electron transfer, all contribute to the exceptional ORR performance. Arc testing in an alkaline electrolyte reveals that the initial potential (Eonset) and the half-wave potential (E1/2) are 0.89 V and 0.80 V, closely approximating those of commercial Pt/C (20 wt%). Following 10 000 stability test cycles, the half-wave potential exhibits a mere 8 mV change, confirming its remarkable stability.

研究高效氧还原反应(ORR)催化剂是解决燃料电池阴极动力学迟缓问题的最有效方法之一。双金属三维多孔材料因其多样的结构、较大的比表面积和协同催化效应而备受关注。在此,我们采用简单的方法合成了一种源自 MOF 的双金属十二面体三维多孔结构 Mn/Co-C-N。实验结果证实,锰的战略性加入增强了 ORR 的电催化活性。同时,锰和钴的协同作用以及十二面体结构在加速电子传递方面的优势都有助于提高 ORR 的优异性能。在碱性电解液中进行的电弧测试表明,初始电位(Eonset)和半波电位(E1/2)分别为 0.89V 和 0.80V,非常接近商用铂/钴(20wt%)的电位。经过 10,000 次稳定性测试循环后,半波电位的变化仅为 8 mV,这证实了其卓越的稳定性。
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引用次数: 0
High thermoelectric performances of monolayer GeTe allotropes. 单层 GeTe 同素异形体的高热电性能。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-29 DOI: 10.1088/1361-6528/ad88e1
L J Gong, Q Z Han, J Yang, H L Shi, Y H Ren, Y H Zhao, H Yang, Q H Liu, Z T Jiang

Aiming at finding wide-temperature-zone thermoelectric (TE) materials, five kinds of monolayer GeTe allotropes including the newly designedγ-,δ-, andɛ-GeTe monolayers and the usualα- andβ-GeTe ones are constructed. By using the density functional theory and the nonequilibrium Green's function method, all their electronic properties and TE transport properties are comparatively investigated. It is found that the room-temperature figure of meritZTof theγ-GeTe (ɛ-GeTe) along the armchair (zigzag) direction can amount to 4.5 (3.5), which is further increased to 7.15 (5.91) at 700 K. TheseZTvalues are much higher than the other IV-VI compounds usually withZT < 3, indicating that the armchairγ-GeTe and the zigzagɛ-GeTe we designed here can be used as superior wide-temperature-zone and high-performance TE materials in the temperature range from 300 K to 700 K. Moreover, with the increase of temperature, theZTpeaks will become wider in width and move towards the position of zero chemical potential, which will make the GeTe-based TE devices work at low bias voltages more efficiently. This work should be an important reference on the way to the stage ofZT⩾4, which will motivate more explorations into the high-performance TE materials working in a wider temperature scope.

为了寻找宽温区热电(TE)材料,我们构建了五种单层 GeTe 同素异形体,包括新设计的γ-、δ- 和ɛ-GeTe 单层以及常见的α- 和β-GeTe 单层。利用密度泛函理论和非平衡格林函数方法,对它们的所有电子特性和 TE 传输特性进行了比较研究。研究发现,γ-GeTe(ɛ-GeTe)沿扶手(之字形)方向的室温优点ZT值可达 4.5(3.5),在 700 K 时进一步增至 7.15(5.91)。这些 ZT 值远远高于其他通常具有 ZT γ-GeTe 的 IV-VI 化合物,我们在此设计的人字形ɛ-GeTe 可在 300 K 到 700 K 的温度范围内用作优异的宽温区高性能 TE 材料。此外,随着温度的升高,ZT 峰的宽度会变宽,并向化学势为零的位置移动,这将使基于 GeTe 的 TE 器件在低偏置电压下更高效地工作。这项工作应该是迈向 ZT⩾4 阶段的重要参考,它将激励人们对工作在更宽温度范围内的高性能 TE 材料进行更多探索。
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引用次数: 0
Fabrication of a uniform quantum dot film with a high quantum yield. 制造具有高量子产率的均匀量子点薄膜。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-29 DOI: 10.1088/1361-6528/ad86c6
Min Woo Oh, Byung Hee Son, Jee Sang Yoon, Yonghwan Yoo, Yongduk Kim, Soo Bong Choi, Yeong Hwan Ahn, Won Bae Cho, Doo Jae Park

We present a method that uses viscosity-lowering materials to fabricate flexible polydimethylsiloxane-based quantum dot (QD) films with high quantum yield (QY) and improved uniformity. We found that the aggregation of individual QDs was prevented, and the QY improved simultaneously in films that contained surfactants. These films showed an improved absorption of approximately 27% in the near-UV and blue light regions, along with an improved photoluminescence of approximately 18%, indicating improved light conversion from the UV to the visible frequency region.

我们介绍了一种使用降粘材料制造基于聚二甲基硅氧烷的柔性量子点薄膜的方法,这种薄膜具有高量子产率和更好的均匀性。我们发现,在含有表面活性剂的薄膜中,单个量子点的聚集得到了防止,量子产率也同时得到了提高。这些薄膜在近紫外线和蓝光区域的吸收率提高了约 27%,光致发光率提高了约 18%,表明从紫外线到可见光频率区域的光转换得到了改善。
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引用次数: 0
Coherent NiS2@SnS2nanosheet for accelerating electrocatalytic nitrate reduction to ammonia. 用于加速电催化硝酸盐还原成氨的相干 NiS2@SnS2 纳米片。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-24 DOI: 10.1088/1361-6528/ad86c8
Jinxiu Zhao, Kai Li, Jingyi Xu, Xiang Ren, Liyi Shi

The development of an effective and selective catalyst is the key to improving the multi-electron transfer nitrate reduction reaction (NO3-RR) to ammonia. Here, we synthesized a coherent NiS2@SnS2nanosheet catalyst loaded on carbon cloth via one-step solvothermal method. Experimental data reveals that the integration of NiS2and SnS2can enhance the NO3-RR performance in terms of high NH3yield rate of 408.2μg h-1cm-2and Faradaic efficiency of 89.61%, as well as satisfying cycling and long-time stability.

开发一种有效且具有选择性的催化剂是改善多电子转移硝酸盐还原反应(NO3-RR)生成氨的关键。在此,我们通过一步溶热法合成了一种负载在碳布上的相干 NiS2@SnS2 纳米片催化剂。实验数据表明,NiS2和SnS2的结合可以提高NO3-RR的性能,NH3产率高达408.2μg h-1cm-2,Faradaic效率高达89.61%,并且具有良好的循环性和长期稳定性。
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引用次数: 0
Preparation and identification of a fluorescent probe with CsPbBr3perovskite quantum dots and CD44v6 specific peptide for gastric cancer imaging. 利用 CsPbBr3 Perovskite 量子点和 CD44v6 特异性肽制备和鉴定用于胃癌成像的荧光探针。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-24 DOI: 10.1088/1361-6528/ad86c7
Dan Zhang, Hao Wang, Chunyang Chen, Guifang Lu, Yan Yin, Mudan Ren, Jin Huang

Since the sensitivity and accuracy of traditional detection for early gastric cancer diagnosis are still insufficient, it is significant to continuously optimize the optical molecular imaging detection technology based on an endoscopic platform. The signal intensity and stability of traditional chemical fluorescent dyes are low, which hinders the clinical application of molecular imaging detection technology. This work developed a probe based on perovskite quantum dots (PQDs) and peptide ligands. By utilizing CsPbBr3perovskite PQDs modified by azithromycin (AZI), combined with the specific polypeptide ligand of CD44v6, a gastric cancer biomarker, the perovskite-based probe (AZI-PQDs probe) which can specifically identify gastric cancer tumor was prepared. Owing to the high photoluminescence quantum yield of CsPbBr3PQDs, the naked eye can observe the imaging under the excitation of the hand-held ultraviolet light source. AZI-PQDs probe can accurately identify gastric cancer cells, tissues, and xenograft models with experiments ofex vivoandin vivofluorescence imaging detection. It also exhibited low toxicity and immunogenicity, indicating the safety of the probe. This work provides a probe combined with cancer specificity and a reliable fluorescent signal that has the potential for application in gastric cancer optical molecular imaging.

由于传统检测方法对早期胃癌诊断的灵敏度和准确性仍然不足。不断优化基于内镜平台的光学分子成像检测技术具有重要意义。荧光燃料是光学检测的必要材料。传统化学荧光染料的信号强度和稳定性较低,阻碍了分子成像检测技术的临床应用。本研究开发了一种基于包晶量子点(PQDs)和肽配体的探针。利用经阿奇霉素(AZI)修饰的 CsPbBr3 包晶量子点,结合胃癌生物标志物 CD44v6 的特异性多肽配体,制备了能特异性识别胃癌肿瘤的包晶探针(AZI-PQDs 探针)。由于 CsPbBr3 PQDs 具有很高的光致发光量子产率,在手持紫外光源的激发下,肉眼即可观察到其成像。通过体内外荧光成像检测实验,AZI-PQDs 探针可准确识别胃癌细胞、组织和异种移植模型。该探针还具有低毒性和免疫原性,表明其安全性。这项工作提供了一种兼具癌症特异性和可靠荧光信号的探针,有望应用于胃癌光学分子成像。
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引用次数: 0
Growth of zinc oxide nanowires by a hot water deposition method. 用热水沉积法生长氧化锌纳米线。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-24 DOI: 10.1088/1361-6528/ad86c9
Nawzat S Saadi, Laylan B Hassan, S M Sayem, Karren L More, Tansel Karabacak

Recently, various methods have been developed for synthesizing zinc oxide (ZnO) nanostructures, including physical and chemical vapor deposition, as well as wet chemistry. These common methods require either high temperature, high vacuum, or toxic chemicals. In this study, we report the growth of zinc oxide ZnO nanowires by a new hot water deposition (HWD) method on various types of substrates, including copper plates, foams, and meshes, as well as on indium tin oxide (ITO)-coated glasses (ITO/glass). HWD is derived from the hot water treatment (HWT) method, which involves immersing piece(s) of metal and substrate(s) in hot deionized water and does not require any additives or catalysts. Metal acts as the source of metal oxide molecules that migrate in water and deposit on the substrate surface to form metal oxide nanostructures (MONSTRs). The morphological and crystallographic analyses of the source-metals and substrates revealed the presence of uniformly crystalline ZnO nanorods after the HWD. In addition, the growth mechanism of ZnO nanowires using HWD is discussed. This process is simple, inexpensive, low temperature, scalable, and eco-friendly. Moreover, HWD can be used to deposit a large variety of MONSTRs on almost any type of substrate material or geometry.

最近,人们开发出了各种合成氧化锌(ZnO)纳米结构的方法,包括物理和化学气相沉积法以及湿化学法。这些常用方法需要高温、高真空或有毒化学品。在本研究中,我们报告了通过一种新的热水沉积(HWD)方法在各种类型的基底(包括铜板、泡沫、网格以及涂有氧化铟锡(ITO)的玻璃(ITO/玻璃))上生长氧化锌纳米线的情况。HWD 源自热水处理 (HWT) 方法,该方法是将金属片和基底浸入热的去离子水中,不需要任何添加剂或催化剂。金属是金属氧化物分子的来源,这些分子在水中迁移并沉积在基底表面,形成金属氧化物纳米结构(MONSTR)。对源金属和基底的形态学和晶体学分析表明,经过 HWD 后,存在均匀结晶的 ZnO 纳米棒。此外,还讨论了利用 HWD 生长氧化锌纳米线的机理。该工艺简单、廉价、低温、可扩展且环保。此外,HWD 还可用于在几乎任何类型的基底材料或几何形状上沉积各种 MONSTR。
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引用次数: 0
Luminescent nanomaterials for developing high-contrast latent fingerprints. 用于制作高对比度潜伏指纹的发光纳米材料。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-24 DOI: 10.1088/1361-6528/ad84fc
G Swati, Savvi Mishra

Fingerprint patterns (or epidermal ridges) are by far one of the most reliable techniques for individual identification. Fingerprint patterns get deposited on all kinds of solid surfaces due to human transudation or exudation process. Bodily fluids through sweat glands contain moisture, natural oils and proteins. Since latent fingerprint patterns are not readily recognizable they are collected from a crime scene and are further processed physically or chemically. Fingerprints obtained using conventional black and white powders face severe drawbacks including low sensitivity, high background interference from the substrates, involvement of toxic materials, and poor stability. To overcome the above-listed issues, especially for coloured and transparent substrates, luminescent materials have emerged as potential agents for rapid visualization of high-contrast latent fingerprints. This review covers the recent advancements in luminescent nanomaterials of both kinds (up and down conversion) and persistent nanophosphors for developing latent fingerprints. Special emphasis has been given to an unusual class of luminescent materials known as persistent nanophosphors, which do not require a constant excitation, thereby completely eradicating background noise. The review also covers different approaches to gathering fingerprints such as powder dusting, cyanoacrylate fuming, ninhydrin fuming and vacuum metal deposition.

指纹图案(或表皮纹)是迄今为止最可靠的个人身份识别技术之一。指纹图案沉积在任何固体表面都是由于人体的渗透或渗出过程。汗腺分泌的体液含有水分、天然油脂和蛋白质。由于潜伏指纹图案不易辨认,因此要从犯罪现场采集指纹,并对其进行进一步的物理或化学处理。使用传统的黑白粉末提取指纹存在严重的缺陷,包括灵敏度低、基质的背景干扰大、涉及有毒物质和稳定性差。为了克服上述问题,特别是在有色和透明基底上,发光材料已成为快速显现高对比度潜伏指纹的潜在媒介。这篇综述文章介绍了用于显现潜伏指纹的两种发光纳米材料(向上和向下转换)和持久性纳米磷酸盐的最新进展。文章特别强调了被称为持久性纳米磷酸盐的特殊发光材料,这种材料不需要持续的激发,因此可以完全消除背景噪声。综述还涉及收集指纹的不同方法,如粉末撒粉、氰基丙烯酸酯熏蒸、茚三酮熏蒸和真空金属沉积。
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引用次数: 0
Device simulation study of multilayer MoS2Schottky barrier field-effect transistors. 多层 MoS2 肖特基势垒场效应晶体管的器件模拟研究。
IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-10-24 DOI: 10.1088/1361-6528/ad823e
Zhuoyang He, HeeBong Yang, Na Young Kim

Molybdenum disulfide (MoS2) is a representative two-dimensional layered transition-metal dichalcogenide semiconductor. Layer-number-dependent electronic properties are attractive in the development of nanomaterial-based electronics for a wide range of applications including sensors, switches, and amplifiers. MoS2field-effect transistors (FETs) have been studied as promising future nanoelectronic devices with desirable features of atomic-level thickness and high electrical properties. When a naturallyn-doped MoS2is contacted with metals, a strong Fermi-level pinning effect adjusts a Schottky barrier and influences its electronic characteristics significantly. In this study, we investigate multilayer MoS2Schottky barrier FETs (SBFETs), emphasizing the metal-contact impact on device performance via computational device modeling. We find thatp-type MoS2SBFETs may be built with appropriate metals and gate voltage control. Furthermore, we propose ambipolar multilayer MoS2SBFETs with asymmetric metal electrodes, which exhibit gate-voltage dependent ambipolar transport behavior through optimizing metal contacts in MoS2device. Introducing a dual-split gate geometry, the MoS2SBFETs can further operate in four distinct configurations:p - p,n - n,p - n, andn - p. Electrical characteristics are calculated, and improved performance of a high rectification ratio can be feasible as an attractive feature for efficient electrical and photonic devices.

二硫化钼(MoS2)是一种具有代表性的二维层状过渡金属二卤化物半导体。层数相关的电子特性对开发基于纳米材料的电子器件具有吸引力,可广泛应用于传感器、开关和放大器等领域。MoS2 场效应晶体管(FET)具有原子级厚度和高电性能等理想特性,是未来很有前途的纳米电子器件。当天然 n 掺杂的 MoS2 与金属接触时,强大的费米级钉扎效应会调整肖特基势垒,并对其电子特性产生重大影响。在本研究中,我们研究了多层 MoS2 肖特基势垒场效应晶体管(SBFET),通过计算器件建模强调了金属接触对器件性能的影响。我们发现,通过适当的金属和栅极电压控制,可以制造出 p 型 MoS2 SBFET。此外,我们还提出了具有非对称金属电极的伏极型多层 MoS2 SBFET,通过优化 MoS2 器件中的金属触点,该器件表现出与栅极电压相关的伏极型传输行为。通过引入双分割栅极几何结构,MoS2SBFET 还能以四种不同的配置运行:p - p、n - n、p - n 和 n - p。
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引用次数: 0
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