Pub Date : 2024-09-17DOI: 10.1038/s41928-024-01242-9
Xinchuan Du, Yang Wang, Yi Cui, Gaofeng Rao, Jianwen Huang, Xinrui Chen, Ting Zhou, Chunyang Wu, Zongyin Yang, Hanxiao Cui, Yicheng Zhao, Jie Xiong
Computational spectrometers with small footprints can be integrated with other devices for use in applications such as chemical analysis, medical diagnosis and environmental monitoring. However, their spectral resolution is limited because conventional photoelectric detectors only measure an amplitude-dependent response to incident light. Here we show that a deformable two-dimensional homojunction can be used to create a microspectrometer with dual-signal spectral reconstruction. The semifloating molybdenum disulfide homojunction exhibits a giant electrostriction effect through which the kinetics of photo-generated carriers can be manipulated via an in-plane electric field generated by gate voltage. By leveraging the tunability of both amplitude and relaxation time of the photoelectric response, a dual-signal response can be used with a deep neural network algorithm to reconstruct an incident spectrum. Our dual-signal microspectrometer has a footprint of 20 × 25 µm2, offers a resolution of 1.2 nm and has a spectral waveband number of 380, which is comparable to benchtop spectrometers. A semifloating molybdenum disulfide homojunction exhibits a photoelectric response with a tunable amplitude and relaxation time, which can be used for reconstructive spectroscopy with high resolution and a small device footprint.
{"title":"A microspectrometer with dual-signal spectral reconstruction","authors":"Xinchuan Du, Yang Wang, Yi Cui, Gaofeng Rao, Jianwen Huang, Xinrui Chen, Ting Zhou, Chunyang Wu, Zongyin Yang, Hanxiao Cui, Yicheng Zhao, Jie Xiong","doi":"10.1038/s41928-024-01242-9","DOIUrl":"10.1038/s41928-024-01242-9","url":null,"abstract":"Computational spectrometers with small footprints can be integrated with other devices for use in applications such as chemical analysis, medical diagnosis and environmental monitoring. However, their spectral resolution is limited because conventional photoelectric detectors only measure an amplitude-dependent response to incident light. Here we show that a deformable two-dimensional homojunction can be used to create a microspectrometer with dual-signal spectral reconstruction. The semifloating molybdenum disulfide homojunction exhibits a giant electrostriction effect through which the kinetics of photo-generated carriers can be manipulated via an in-plane electric field generated by gate voltage. By leveraging the tunability of both amplitude and relaxation time of the photoelectric response, a dual-signal response can be used with a deep neural network algorithm to reconstruct an incident spectrum. Our dual-signal microspectrometer has a footprint of 20 × 25 µm2, offers a resolution of 1.2 nm and has a spectral waveband number of 380, which is comparable to benchtop spectrometers. A semifloating molybdenum disulfide homojunction exhibits a photoelectric response with a tunable amplitude and relaxation time, which can be used for reconstructive spectroscopy with high resolution and a small device footprint.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 11","pages":"984-990"},"PeriodicalIF":33.7,"publicationDate":"2024-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142235155","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-09-11DOI: 10.1038/s41928-024-01243-8
Mengge Wu, Kuanming Yao, Xinge Yu
A neurostimulation device with a conformable sensor array can stimulate the brain with ultrasound while minimizing the effect of ultrasound-induced artefacts on signal feedback, allowing for closed-loop control of epileptic seizures.
{"title":"A closed-loop neurostimulation device that reaches new levels","authors":"Mengge Wu, Kuanming Yao, Xinge Yu","doi":"10.1038/s41928-024-01243-8","DOIUrl":"10.1038/s41928-024-01243-8","url":null,"abstract":"A neurostimulation device with a conformable sensor array can stimulate the brain with ultrasound while minimizing the effect of ultrasound-induced artefacts on signal feedback, allowing for closed-loop control of epileptic seizures.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 9","pages":"731-732"},"PeriodicalIF":33.7,"publicationDate":"2024-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142166045","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-09-11DOI: 10.1038/s41928-024-01240-x
Sungjun Lee, Jeungeun Kum, Sumin Kim, Hyunjin Jung, Soojung An, Soon Jin Choi, Jae Hyuk Choi, Jinseok Kim, Ki Jun Yu, Wonhye Lee, Hyeok Kim, Hyung-Seop Han, Mikyung Shin, Hyungmin Kim, Donghee Son
Transcranial focused ultrasound has shown promising non-invasive therapeutic effects for drug-resistant epilepsy due to its spatial resolution and depth penetrability. However, current manual strategies, which use fixed neurostimulation protocols, cannot provide precise patient-specific treatment due to the absence of ultrasound wave-insensitive closed-loop neurostimulation devices. Here, we report a shape-morphing cortex-adhesive sensor for closed-loop transcranial ultrasound neurostimulation. The sensor consists of a catechol-conjugated alginate hydrogel adhesive, a stretchable 16-channel electrode array and a viscoplastic self-healing polymeric substrate, and is coupled to a pulse-controlled transcranial focused ultrasound device. It can provide conformal and robust fixation to curvy cortical surfaces, and we show that it is capable of stable neural signal recording in awake seizure rodents during transcranial focused ultrasound neurostimulation. The sensing performance allows real-time detection of preseizure signals with unexpected and irregular high-frequency oscillations, and we demonstrate closed-loop seizure control supervised by intact cortical activity under ultrasound stimulation in awake rodents. A sensor that consists of a catechol-conjugated alginate hydrogel adhesive, a stretchable 16-channel electrode array and a viscoplastic self-healing polymeric substrate, and is coupled to a pulse-controlled transcranial focused ultrasound device, can be used for closed-loop transcranial ultrasound neurostimulation.
{"title":"A shape-morphing cortex-adhesive sensor for closed-loop transcranial ultrasound neurostimulation","authors":"Sungjun Lee, Jeungeun Kum, Sumin Kim, Hyunjin Jung, Soojung An, Soon Jin Choi, Jae Hyuk Choi, Jinseok Kim, Ki Jun Yu, Wonhye Lee, Hyeok Kim, Hyung-Seop Han, Mikyung Shin, Hyungmin Kim, Donghee Son","doi":"10.1038/s41928-024-01240-x","DOIUrl":"10.1038/s41928-024-01240-x","url":null,"abstract":"Transcranial focused ultrasound has shown promising non-invasive therapeutic effects for drug-resistant epilepsy due to its spatial resolution and depth penetrability. However, current manual strategies, which use fixed neurostimulation protocols, cannot provide precise patient-specific treatment due to the absence of ultrasound wave-insensitive closed-loop neurostimulation devices. Here, we report a shape-morphing cortex-adhesive sensor for closed-loop transcranial ultrasound neurostimulation. The sensor consists of a catechol-conjugated alginate hydrogel adhesive, a stretchable 16-channel electrode array and a viscoplastic self-healing polymeric substrate, and is coupled to a pulse-controlled transcranial focused ultrasound device. It can provide conformal and robust fixation to curvy cortical surfaces, and we show that it is capable of stable neural signal recording in awake seizure rodents during transcranial focused ultrasound neurostimulation. The sensing performance allows real-time detection of preseizure signals with unexpected and irregular high-frequency oscillations, and we demonstrate closed-loop seizure control supervised by intact cortical activity under ultrasound stimulation in awake rodents. A sensor that consists of a catechol-conjugated alginate hydrogel adhesive, a stretchable 16-channel electrode array and a viscoplastic self-healing polymeric substrate, and is coupled to a pulse-controlled transcranial focused ultrasound device, can be used for closed-loop transcranial ultrasound neurostimulation.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 9","pages":"800-814"},"PeriodicalIF":33.7,"publicationDate":"2024-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142166048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-09-03DOI: 10.1038/s41928-024-01235-8
Zhaofeng Ouyang, Shuo Wang, Yan Wang, Hao Sun
An on-finger wearable microgrid that collects and stores energy from sweat can continuously power the monitoring of several metabolic biomarkers.
手指上的可穿戴微电网能从汗液中收集并储存能量，从而为多种代谢生物标志物的监测提供持续动力。
{"title":"Sweat sensing at your fingertips","authors":"Zhaofeng Ouyang, Shuo Wang, Yan Wang, Hao Sun","doi":"10.1038/s41928-024-01235-8","DOIUrl":"10.1038/s41928-024-01235-8","url":null,"abstract":"An on-finger wearable microgrid that collects and stores energy from sweat can continuously power the monitoring of several metabolic biomarkers.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 9","pages":"729-730"},"PeriodicalIF":33.7,"publicationDate":"2024-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142123628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-09-03DOI: 10.1038/s41928-024-01236-7
Shichao Ding, Tamoghna Saha, Lu Yin, Ruixiao Liu, Muhammad Inam Khan, An-Yi Chang, Hyungjin Lee, Han Zhao, Yuanzhe Liu, Ariane Sina Nazemi, Jiachi Zhou, Chuanrui Chen, Zhengxing Li, Chenyang Zhang, Sara Earney, Selene Tang, Omeed Djassemi, Xiangjun Chen, Muyang Lin, Samar S. Sandhu, Jong-Min Moon, Chochanon Moonla, Ponnusamy Nandhakumar, Youngmin Park, Kuldeep Mahato, Sheng Xu, Joseph Wang
Wearable health monitoring platforms require advanced sensing modalities with integrated electronics. However, current systems suffer from limitations related to energy supply, sensing capabilities, circuitry regulations and large form factors. Here, we report an autonomous and continuous sweat sensing system that operates on a fingertip. The system uses a self-voltage-regulated wearable microgrid based on enzymatic biofuel cells and AgCl-Zn batteries to harvest and store bioenergy from sweat, respectively. It relies on osmosis to continuously supply sweat to the sensor array for on-demand multi-metabolite sensing and is combined with low-power electronics for signal acquisition and wireless data transmission. The wearable system is powered solely by fingertip perspiration and can detect glucose, vitamin C, lactate and levodopa over extended periods of time. A wearable microgrid powered solely by fingertip perspiration can monitor metabolic biomarkers over extended periods of time.
{"title":"A fingertip-wearable microgrid system for autonomous energy management and metabolic monitoring","authors":"Shichao Ding, Tamoghna Saha, Lu Yin, Ruixiao Liu, Muhammad Inam Khan, An-Yi Chang, Hyungjin Lee, Han Zhao, Yuanzhe Liu, Ariane Sina Nazemi, Jiachi Zhou, Chuanrui Chen, Zhengxing Li, Chenyang Zhang, Sara Earney, Selene Tang, Omeed Djassemi, Xiangjun Chen, Muyang Lin, Samar S. Sandhu, Jong-Min Moon, Chochanon Moonla, Ponnusamy Nandhakumar, Youngmin Park, Kuldeep Mahato, Sheng Xu, Joseph Wang","doi":"10.1038/s41928-024-01236-7","DOIUrl":"10.1038/s41928-024-01236-7","url":null,"abstract":"Wearable health monitoring platforms require advanced sensing modalities with integrated electronics. However, current systems suffer from limitations related to energy supply, sensing capabilities, circuitry regulations and large form factors. Here, we report an autonomous and continuous sweat sensing system that operates on a fingertip. The system uses a self-voltage-regulated wearable microgrid based on enzymatic biofuel cells and AgCl-Zn batteries to harvest and store bioenergy from sweat, respectively. It relies on osmosis to continuously supply sweat to the sensor array for on-demand multi-metabolite sensing and is combined with low-power electronics for signal acquisition and wireless data transmission. The wearable system is powered solely by fingertip perspiration and can detect glucose, vitamin C, lactate and levodopa over extended periods of time. A wearable microgrid powered solely by fingertip perspiration can monitor metabolic biomarkers over extended periods of time.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 9","pages":"788-799"},"PeriodicalIF":33.7,"publicationDate":"2024-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142123569","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-09-03DOI: 10.1038/s41928-024-01237-6
Kyung Yeun Kim, Joohyuk Kang, Sangmin Song, Kyungwoo Lee, Suk-Won Hwang, Seung Hwan Ko, Hojeong Jeon, Jae-Hoon Han, Wonryung Lee
Organic electrochemical transistors can be used in wearable sensors to amplify biological signals. Other wireless communication systems are required for applications in continuous health monitoring. However, conventional wireless communication circuits, which are based on inorganic integrated chips, face limitations in terms of conformability due to the thick and rigid integrated circuit chips. Here, we report an ultrathin organic–inorganic device for wireless optical monitoring of biomarkers, such as glucose in sweat and glucose, lactate and pH in phosphate-buffered saline. The conformable system integrates an organic electrochemical transistor and a near-infrared inorganic micro-light-emitting diode on a thin parylene substrate. The device has an overall thickness of 4 μm. The channel current of the transistor changes according to the biomarker concentration, which alters the irradiance from the light-emitting diode to enable biomarker monitoring. We combine the device with an elastomeric battery circuit to create a wearable patch. We also show that the system can be used for near-infrared image analysis. A wireless monitoring system that integrates an organic electrochemical transistor and a near-infrared inorganic micro-light-emitting diode on a thin parylene substrate can be used to monitor biomarkers such as glucose, lactate and pH.
{"title":"An ultrathin organic–inorganic integrated device for optical biomarker monitoring","authors":"Kyung Yeun Kim, Joohyuk Kang, Sangmin Song, Kyungwoo Lee, Suk-Won Hwang, Seung Hwan Ko, Hojeong Jeon, Jae-Hoon Han, Wonryung Lee","doi":"10.1038/s41928-024-01237-6","DOIUrl":"10.1038/s41928-024-01237-6","url":null,"abstract":"Organic electrochemical transistors can be used in wearable sensors to amplify biological signals. Other wireless communication systems are required for applications in continuous health monitoring. However, conventional wireless communication circuits, which are based on inorganic integrated chips, face limitations in terms of conformability due to the thick and rigid integrated circuit chips. Here, we report an ultrathin organic–inorganic device for wireless optical monitoring of biomarkers, such as glucose in sweat and glucose, lactate and pH in phosphate-buffered saline. The conformable system integrates an organic electrochemical transistor and a near-infrared inorganic micro-light-emitting diode on a thin parylene substrate. The device has an overall thickness of 4 μm. The channel current of the transistor changes according to the biomarker concentration, which alters the irradiance from the light-emitting diode to enable biomarker monitoring. We combine the device with an elastomeric battery circuit to create a wearable patch. We also show that the system can be used for near-infrared image analysis. A wireless monitoring system that integrates an organic electrochemical transistor and a near-infrared inorganic micro-light-emitting diode on a thin parylene substrate can be used to monitor biomarkers such as glucose, lactate and pH.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 10","pages":"914-923"},"PeriodicalIF":33.7,"publicationDate":"2024-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142123589","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-08-28DOI: 10.1038/s41928-024-01234-9
Bo Hou, Dingzhu Yang, Xiaoyuan Ren, Luying Yi, Xiaogang Liu
Wearable systems that incorporate soft tactile sensors that transmit spatio-temporal touch patterns may be useful in the development of biomedical robotics. Such systems have been employed for tasks such as typing and device operation, but their effectiveness in converting pressure patterns into specific control commands lags behind that of traditional finger-operated electronic devices. Here, we describe a tactile oral pad with a touch sensor array made from a carbon nanotube and silicone composite. The oral pad can be operated by moving either the tongue or teeth, and it can detect various strains so that it functions like a touchscreen. Combined with a recurrent neural network, we show that the oral pad can be used for typing, gaming and wheelchair navigation through cooperative control of tongue sliding (below 50 kPa pressure) and teeth clicking (above 500 kPa pressure). A tactile oral pad made from a carbon nanotube and silicone composite that can be controlled by teeth and tongue movements can be used for typing, gaming and wheelchair navigation.
{"title":"A tactile oral pad based on carbon nanotubes for multimodal haptic interaction","authors":"Bo Hou, Dingzhu Yang, Xiaoyuan Ren, Luying Yi, Xiaogang Liu","doi":"10.1038/s41928-024-01234-9","DOIUrl":"10.1038/s41928-024-01234-9","url":null,"abstract":"Wearable systems that incorporate soft tactile sensors that transmit spatio-temporal touch patterns may be useful in the development of biomedical robotics. Such systems have been employed for tasks such as typing and device operation, but their effectiveness in converting pressure patterns into specific control commands lags behind that of traditional finger-operated electronic devices. Here, we describe a tactile oral pad with a touch sensor array made from a carbon nanotube and silicone composite. The oral pad can be operated by moving either the tongue or teeth, and it can detect various strains so that it functions like a touchscreen. Combined with a recurrent neural network, we show that the oral pad can be used for typing, gaming and wheelchair navigation through cooperative control of tongue sliding (below 50 kPa pressure) and teeth clicking (above 500 kPa pressure). A tactile oral pad made from a carbon nanotube and silicone composite that can be controlled by teeth and tongue movements can be used for typing, gaming and wheelchair navigation.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 9","pages":"777-787"},"PeriodicalIF":33.7,"publicationDate":"2024-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142085073","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-08-28DOI: 10.1038/s41928-024-01241-w
The further development of transistors based on two-dimensional transition metal dichalcogenides faces various issues, starting with the high density of defects typically found in the materials.
基于二维过渡金属二卤化物的晶体管的进一步发展面临着各种问题，首先是材料中通常存在的高密度缺陷。
{"title":"Continuing challenges in 2D semiconductors","authors":"","doi":"10.1038/s41928-024-01241-w","DOIUrl":"10.1038/s41928-024-01241-w","url":null,"abstract":"The further development of transistors based on two-dimensional transition metal dichalcogenides faces various issues, starting with the high density of defects typically found in the materials.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 8","pages":"621-621"},"PeriodicalIF":33.7,"publicationDate":"2024-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.nature.com/articles/s41928-024-01241-w.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142090209","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-08-26DOI: 10.1038/s41928-024-01233-w
Yaqing Shen, Kaichen Zhu, Yiping Xiao, Dominic Waldhör, Abdulrahman H. Basher, Theresia Knobloch, Sebastian Pazos, Xianhu Liang, Wenwen Zheng, Yue Yuan, Juan B. Roldan, Udo Schwingenschlögl, He Tian, Huaqiang Wu, Thomas F. Schranghamer, Nicholas Trainor, Joan M. Redwing, Saptarshi Das, Tibor Grasser, Mario Lanza
Two-dimensional (2D) semiconductors could potentially be used as channel materials in commercial field-effect transistors. However, the interface between 2D semiconductors and most gate dielectrics contains traps that degrade performance. Layered hexagonal boron nitride (h-BN) can form a defect-free interface with 2D semiconductors, but when prepared by industry-compatible methods—such as chemical vapour deposition (CVD)—the presence of native defects increases leakage current and reduces dielectric strength. Here we show that metal gate electrodes with a high cohesive energy—platinum and tungsten—can allow CVD-grown layered h-BN to be used as a gate dielectric in transistors. The electrodes can reduce the current across CVD-grown h-BN by a factor of around 500 compared to similar devices with gold electrodes and can provide a high dielectric strength of at least 25 MV cm−1. We examine the behaviour statistically across 867 devices, which includes a microchip based on complementary metal–oxide–semiconductor technology. Metal gate electrodes with a high cohesive energy—platinum and tungsten—can be used to mitigate leakage currents and premature dielectric breakdown across chemical vapour deposition-grown multilayer hexagonal boron nitride, allowing the material to be used as a gate dielectric in two-dimensional-materials-based transistors.
{"title":"Two-dimensional-materials-based transistors using hexagonal boron nitride dielectrics and metal gate electrodes with high cohesive energy","authors":"Yaqing Shen, Kaichen Zhu, Yiping Xiao, Dominic Waldhör, Abdulrahman H. Basher, Theresia Knobloch, Sebastian Pazos, Xianhu Liang, Wenwen Zheng, Yue Yuan, Juan B. Roldan, Udo Schwingenschlögl, He Tian, Huaqiang Wu, Thomas F. Schranghamer, Nicholas Trainor, Joan M. Redwing, Saptarshi Das, Tibor Grasser, Mario Lanza","doi":"10.1038/s41928-024-01233-w","DOIUrl":"10.1038/s41928-024-01233-w","url":null,"abstract":"Two-dimensional (2D) semiconductors could potentially be used as channel materials in commercial field-effect transistors. However, the interface between 2D semiconductors and most gate dielectrics contains traps that degrade performance. Layered hexagonal boron nitride (h-BN) can form a defect-free interface with 2D semiconductors, but when prepared by industry-compatible methods—such as chemical vapour deposition (CVD)—the presence of native defects increases leakage current and reduces dielectric strength. Here we show that metal gate electrodes with a high cohesive energy—platinum and tungsten—can allow CVD-grown layered h-BN to be used as a gate dielectric in transistors. The electrodes can reduce the current across CVD-grown h-BN by a factor of around 500 compared to similar devices with gold electrodes and can provide a high dielectric strength of at least 25 MV cm−1. We examine the behaviour statistically across 867 devices, which includes a microchip based on complementary metal–oxide–semiconductor technology. Metal gate electrodes with a high cohesive energy—platinum and tungsten—can be used to mitigate leakage currents and premature dielectric breakdown across chemical vapour deposition-grown multilayer hexagonal boron nitride, allowing the material to be used as a gate dielectric in two-dimensional-materials-based transistors.","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 10","pages":"856-867"},"PeriodicalIF":33.7,"publicationDate":"2024-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142085067","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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