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Laser generated micro/nanotexturing and controllable wettability of the titanium surface for its implications in different fields 激光产生的微纳织构及其对钛表面润湿性的控制在不同领域的应用
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-06-01 Epub Date: 2026-02-14 DOI: 10.1016/j.optlastec.2026.114938
P.Chandrakanta Singh, Vineet Kumar Shukla, R.K. Singh
In this investigation, laser induced micro/nanostructures are generated on the titanium surface for improving its applicability in biomedical engineering. Emphasis is given on controlled manipulation of surface wettability which play the crucial role in several applications, including biomedical implants, tribological systems, self-cleaning surfaces, anti-corrosion coatings and etc. Three distinct scanning schemes, raster, cross-raster and shift-raster scans are applied under varying laser parameter to generate structures on the Ti surface. Surface morphology, roughness, and wettability are systematically studies using SEM, 3D profilometry and static contact angle measurements respectively. It has been observed that the laser fluence and scanning strategy significantly influence the shape, size and distributions of generated structures. Formation of ripples and microgroove structures on the surface at relatively low laser fluence exhibit the superhydrophilic behaviour whereas superhydrophobic behaviours are observed in hierarchical structuring at high laser fluence. Further, role of surface chemistry of different textures are also correlated with their hydrophilic and hydrophobic behaviour using optical emission spectroscopy. The observed correlation between laser processing parameters, surface topography and wettability establishes a versatile, single step approach for functionalizing surfaces as per desired applications.
为了提高钛在生物医学工程中的适用性,本研究在钛表面制备了激光诱导微纳结构。重点是对表面润湿性的控制,这在许多应用中起着至关重要的作用,包括生物医学植入物,摩擦学系统,自清洁表面,防腐涂层等。在不同的激光参数下,采用光栅扫描、交叉光栅扫描和位移光栅扫描三种不同的扫描方案在Ti表面生成结构。表面形貌、粗糙度和润湿性分别使用扫描电镜、三维轮廓术和静态接触角测量进行系统研究。结果表明,激光辐照强度和扫描策略对生成结构的形状、尺寸和分布有显著影响。在相对较低的激光通量下,表面形成的波纹和微槽结构表现出超亲水行为,而在高激光通量下,在分层结构中观察到超疏水行为。此外,利用光学发射光谱分析了不同结构的表面化学作用与其亲疏水行为之间的关系。观察到的激光加工参数、表面形貌和润湿性之间的相关性建立了一种通用的、单步的方法,可以根据所需的应用对表面进行功能化。
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引用次数: 0
A review of the application of machine learning in short-pulse and ultrashort-pulse laser etching 机器学习在短脉冲和超短脉冲激光刻蚀中的应用综述
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-06-01 Epub Date: 2026-02-13 DOI: 10.1016/j.optlastec.2026.114871
Zhensheng Sun , Peilei Zhang , Shijie Song , Kefan Chen , Keran Jiang , Guanglong Chen , Qinghua Lu , Chao Fang
Short Pulse Laser (SPL) and Ultrashort Pulse Laser (USPL) etching are pivotal for fabricating high-precision components in extreme manufacturing. However, their industrial deployment faces significant challenges. The highly non-linear nature of laser-material interactions necessitates expensive trial-and-error, while pure data-driven models suffer from “black-box” interpretability issues and data scarcity, and traditional static optimization fails to adapt to dynamic disturbances during real-time processing. To address these issues, machine learning (ML) and metaheuristic algorithms (MA) have been widely used in SPL and USPL processing. The primary objective of this review is to systematically synthesize and critically evaluate the applications of Machine Learning (ML) and MA in SPL/USPL etching, specifically focusing on drilling, microchannel fabrication, and Laser-Induced Periodic Surface Structures (LIPSS) . We categorize core strategies into “Forward Modeling” (quality prediction) and “Reverse Design” (parameter optimization) to elucidate how these algorithms mitigate the aforementioned challenges, and providing a forward-looking perspective, highlighting Physics-Informed Machine Learning (PINNs) for enhancing interpretability with sparse data. This review expands on the little-covered part of the existing review literature on the application of ML and MA in the field of laser processing and summarises the effectiveness of different ML models and MA for SPL and USPL in terms of etching. It further explores the potential of emerging, multiple ML converged processing and provides an outlook on novel trends and challenges at the intersection of laser etching and ML.
短脉冲激光(SPL)和超短脉冲激光(USPL)刻蚀是制造高精度零件的关键技术。然而,它们的工业部署面临着重大挑战。激光与材料相互作用的高度非线性特性需要昂贵的试错,而纯粹的数据驱动模型则存在“黑盒”可解释性问题和数据稀缺问题,传统的静态优化无法适应实时处理过程中的动态干扰。为了解决这些问题,机器学习(ML)和元启发式算法(MA)被广泛应用于SPL和USPL处理中。本综述的主要目的是系统地综合和批判性地评估机器学习(ML)和MA在SPL/USPL蚀刻中的应用,特别是专注于钻孔,微通道制造和激光诱导周期性表面结构(LIPSS)。我们将核心策略分为“正向建模”(质量预测)和“逆向设计”(参数优化),以阐明这些算法如何缓解上述挑战,并提供前瞻性的视角,强调物理信息机器学习(pinn)用于增强稀疏数据的可解释性。本文对ML和MA在激光加工领域中应用的现有综述文献中很少涉及的部分进行了扩展,并总结了不同ML模型和MA在刻蚀方面对SPL和USPL的有效性。它进一步探讨了新兴的、多机器学习融合处理的潜力,并展望了激光蚀刻和机器学习交叉领域的新趋势和挑战。
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引用次数: 0
Fiber-array beamforming and modulation scheme with hybrid switching techniques for U2G-free space optical communication 基于混合交换技术的无u2g空间光通信光纤阵列波束形成和调制方案
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-06-01 Epub Date: 2026-02-06 DOI: 10.1016/j.optlastec.2026.114787
Tanzeel Ur Rahman , Guijun Li , Farman Ali , Adnan Daud Khan , Akhtar Rehman , Zhengbiao Ouyang , Haleem Afsar , Ali Alshamrani , Mardeni Roslee
Free-space optical (FSO) communication is essential for high-speed, long-range data transmission, particularly in UAV-to-ground (U2G) communication systems. However, existing FSO systems face critical challenges, including beam misalignment due to UAV movement, turbulence-induced signal degradation, and inefficient modulation schemes that fail to adapt dynamically to changing atmospheric conditions. Current solutions, such as mechanical beam tracking systems and conventional phased arrays, suffer from high complexity, limited scalability, and suboptimal energy efficiency, making them less suitable for U2G operations. Additionally, existing adaptive modulation schemes lack robustness in severe turbulence, leading to increased bit error rates and reduced system performance. This study proposes a Fiber-Array Beamforming and Modulation Scheme with Hybrid Switching Standards for enhanced U2G-FSO communication to address these challenges. The proposed system integrates a photodiode-based fiber-array antenna with a polymer-based nanophotonic optical phased array (OPA) to achieve precise beamforming and automatic misalignment correction. A hybrid switching standard is implemented to adjust the modulation format dynamically based on real-time turbulence variations, optimizing signal integrity and spectral efficiency. The research methodology includes mathematical modeling for phase optimization, experimental validation of beam steering performance, and turbulence-aware simulations to assess system adaptability. Experimental results demonstrate that the proposed system achieves a 3-dB beamwidth reduction of 8.5, a beam steering range of 20, and a 10 dB increase in power output, significantly improving signal robustness in turbulent atmospheric conditions. The hybrid switching mechanism effectively reduces SNR switching threshold deviation from conventional values, allowing for seamless modulation transitions and improved link stability.
自由空间光(FSO)通信对于高速、远程数据传输至关重要,特别是在无人机对地(U2G)通信系统中。然而,现有的FSO系统面临着严峻的挑战,包括无人机运动引起的波束失调、湍流引起的信号退化以及无法动态适应不断变化的大气条件的低效调制方案。目前的解决方案,如机械波束跟踪系统和传统的相控阵,都存在高复杂性、有限的可扩展性和不理想的能源效率,使它们不太适合U2G操作。此外,现有的自适应调制方案在严重湍流中缺乏鲁棒性,导致误码率增加和系统性能降低。本研究提出了一种具有混合交换标准的光纤阵列波束形成和调制方案,用于增强U2G-FSO通信,以应对这些挑战。该系统集成了基于光电二极管的光纤阵列天线和基于聚合物的纳米光子光学相控阵(OPA),以实现精确的波束形成和自动纠偏。实现了一种基于实时湍流变化动态调整调制格式的混合切换标准,优化了信号完整性和频谱效率。研究方法包括相位优化的数学建模、波束导向性能的实验验证以及评估系统适应性的湍流感知仿真。实验结果表明,该系统的波束宽度减小了8.5°,波束转向范围为20°,输出功率增加了10 dB,显著提高了信号在湍流大气条件下的鲁棒性。混合开关机制有效地降低了信噪比开关阈值与常规值的偏差,允许无缝调制转换和提高链路稳定性。
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引用次数: 0
A miniaturized atomic magnetometer enabled by cascaded metasurfaces 通过级联超表面实现的小型化原子磁强计
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-06-01 Epub Date: 2026-02-11 DOI: 10.1016/j.optlastec.2026.114921
Yujing Shen , Yan Xuan , Shuo Sun , Pengcheng Du , Jin Li
Driven by increasing demand for portable magnetic field detection in multiple application scenarios, optically pumped atomic magnetometers (OPAMs) are rapidly advancing toward smaller, portable designs, with the single-beam elliptically polarized architecture offering inherent compactness due to its simplified optical path. However, traditional implementations that use bulky multiple waveplates for polarization conversion fundamentally hinder system miniaturization. This study proposes and experimentally validates a new scheme for a chip-scale integrated OPAM. The scheme is based on a 39K atom system with an Mx-mode, single-beam configuration. Its core innovation lies in employing a polarization-independent cascaded metasurface to replace the traditional multi-component polarization optics system with a monolithic device. Experiments demonstrate that this scheme, under a 10,000 nT magnetic field, maintains a sensitivity comparable to that of a commercial waveplate-based system (approximately 8.36pT/Hz1/2 in the 70–90 Hz band) while achieving a reduction in the core optical module volume of over 60% and keeping polarization control accuracy within 3%. This work successfully verifies the feasibility of the metasurface-based approach for realizing miniaturized, manual-alignment-free optical pumping, thereby paving the way for and laying a key technical foundation for the eventual realization of fully chip-integrated, field-deployable quantum magnetometers.
由于在多种应用场景中对便携式磁场检测的需求不断增加,光泵原子磁强计(opam)正迅速向更小、便携的设计发展,单光束椭圆偏振结构由于其简化的光路而具有固有的紧凑性。然而,使用庞大的多个波片进行偏振转换的传统实现从根本上阻碍了系统的小型化。本文提出并实验验证了一种芯片级集成OPAM的新方案。该方案是基于一个39K原子系统与一个mx模式,单束配置。其核心创新在于采用与偏振无关的级联超表面,用单片器件取代传统的多分量偏振光学系统。实验表明,在10,000 nT的磁场下,该方案保持了与商用波片系统相当的灵敏度(在70-90 Hz波段约为8.36pT/Hz1/2),同时实现了核心光模块体积减少60%以上,偏振控制精度保持在3%以内。本工作成功验证了基于超表面的方法实现小型化、无需手动对准的光泵浦的可行性,从而为最终实现全芯片集成、可现场部署的量子磁力计铺平了道路,奠定了关键技术基础。
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引用次数: 0
Apodized hollow conical occulter with gradient transmittance for stray-light suppression 用于杂散光抑制的渐变透过率空心锥形消光器
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-06-01 Epub Date: 2026-02-04 DOI: 10.1016/j.optlastec.2026.114855
Hongzu Zhang , Li Wang , Bo Li , Hanshuang Li , Guochao Gu , Xu Zhang
This study addresses faint target detection under intense backgrounds by proposing a novel hollow truncated conical external occulter for stray light suppression in imaging systems. Unlike material-dependent transmittance control methods, the design innovatively optimizes transmittance distribution via geometric parameter tuning, significantly reducing edge diffraction and attenuating image-plane stray light. Leveraging TRACEPRO’s optimization capabilities and gradient transmittance diffraction theory, a precise optical model is established, with the occulter’s diffraction and stray light characteristics quantitatively analyzed through numerical optimization workflows. During optimization, the occulter structure and lens configuration are co-optimized to enhance imaging quality while boosting weak-signal detection capability. Combined with an internal occulter and Lyot stop in a multi-stage suppression scheme, the design reduces image-plane background irradiance to the 10−8 order, maintaining effective imaging at a minimum angular separation of 0.5°. This approach discards the traditional method of achieving transmittance variation through multiple materials, but rather leverages flexible geometric structures to control a single material, enabling precise optimization of graded transmittance. It not only exhibits excellent diffraction light suppression performance but also opens up a novel technical pathway for the manufacturing of external occulters. Additionally, it effectively mitigates strong background interference such as solar radiation, significantly enhancing space target detection accuracy and providing reliable support for weak signal acquisition in space target monitoring and exploration missions.
本研究提出了一种新型的中空截锥形外掩光器,用于成像系统中的杂散光抑制,解决了强背景下的微弱目标检测问题。与依赖于材料的透光率控制方法不同,该设计通过几何参数调整创新地优化了透光率分布,显著减少了边缘衍射和衰减像平面杂散光。利用TRACEPRO的优化能力和梯度透射衍射理论,建立了精确的光学模型,并通过数值优化工作流程定量分析了掩膜的衍射和杂散光特性。在优化过程中,对掩光结构和透镜配置进行了协同优化,以提高成像质量,同时增强弱信号检测能力。结合内部遮光器和多级抑制方案中的Lyot停止,该设计将图像平面背景辐照度降低到10 - 8阶,在最小角分离0.5°的情况下保持有效成像。这种方法抛弃了通过多种材料实现透光率变化的传统方法,而是利用灵活的几何结构来控制单一材料,从而实现梯度透光率的精确优化。它不仅具有优异的衍射抑制性能,而且为外掩星的制造开辟了一条新的技术途径。有效缓解太阳辐射等强背景干扰,显著提高空间目标探测精度,为空间目标监测探测任务中的微弱信号采集提供可靠支持。
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引用次数: 0
Plasmon-enhanced ultrabroadband optical limiting performance of colloidal and thin film silver nanowires 等离子体增强胶体和薄膜银纳米线的超宽带光学限制性能
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-05-01 Epub Date: 2026-01-18 DOI: 10.1016/j.optlastec.2026.114741
Elif Yildiz , Nur Unal , Onuralp Cakir , Yasemin Pepe , Sahin Coskun , Ahmet Karatay , Husnu Emrah Unalan , Ayhan Elmali
Optical limiting materials are essential for the innovation of optoelectronic devices and human eyes in defense industry. The two most important parameters for an ideal optical limiter are the optical limiting spectral range and a low optical limiting threshold value. Herein, silver nanowires (Ag NWs) were examined in both colloidal dispersion and as thin films embedded within a polymethyl methacrylate (PMMA) matrix to evaluate their optical limiting performance across an ultrabroad wavelength range. PMMA polymer, which does not exhibit nonlinear absorption, was used to reveal the nonlinear optical property of Ag NWs. For this purpose, the nonlinear optical response of colloidal and thin film Ag NWs was investigated using the open aperture Z-scan technique, under varying excitation wavelengths and input intensities using a femtosecond pulsed laser system. To gain deeper insight into the underlying mechanism of nonlinear optical behavior, ultrafast pump–probe spectroscopy measurements were conducted. Open aperture Z-scan experiments revealed that both colloidal and thin-film AgNWs exhibit similar nonlinear optical behavior under excitation wavelengths ranging from 400 to 800 nm with increments of 100 nm. Moreover, to analyze nonlinear absorption properties in near infrared region, experiments were also carried out using pulsed laser excitation at 1200 and 1600 nm. Among the excitation wavelengths studied, 1600 nm located in the longitudinal mode of surface plasmon resonance of Ag NWs produced the highest βeff value. This enhancement was attributed to multiphoton absorption and plasmon-enhanced excited-state absorption (ESA) processes. Under 1200 and 1600 nm excitation, the colloidal Ag NW dispersion exhibited reverse saturable absorption (RSA) signals superimposed on saturable absorption (SA) behavior, in contrast to the thin-film form, where only RSA was observed. Across the ultrabroadband excitation range of 400-1600 nm, the optical limiting performance exhibited threshold values ranging from 0.02 to 0.33 J/cm2, indicating wavelength-dependent nonlinear absorption behavior. This work is among the first to systematically investigate Ag NW based optical limiters over an ultrabroad excitation range extending from the visible to the near-infrared (400–1600 nm). Overall, Ag NWs in both colloidal and thin-film forms exhibited ultrabroadband optical limiting responses, highlighting their potential for photonic and optoelectronic applications.
在国防工业中,光学限制材料对于光电器件和人眼的创新至关重要。理想的光限制器的两个最重要的参数是光限制光谱范围和低的光限制阈值。在此,银纳米线(Ag NWs)以胶体分散和薄膜形式嵌入聚甲基丙烯酸甲酯(PMMA)基质中,以评估其在超远波长范围内的光学限制性能。利用不表现非线性吸收的PMMA聚合物揭示了银纳米墙的非线性光学性质。为此,利用开孔z扫描技术,利用飞秒脉冲激光系统,在不同的激发波长和输入强度下,研究了胶体和薄膜Ag NWs的非线性光学响应。为了更深入地了解非线性光学行为的潜在机制,进行了超快泵浦探针光谱测量。开放孔径z扫描实验表明,在400 ~ 800 nm激发波长范围内,以100 nm为增量,胶体态和薄膜态AgNWs均表现出相似的非线性光学行为。此外,为了分析其在近红外区域的非线性吸收特性,还在1200和1600 nm处进行了脉冲激光激发实验。在所研究的激发波长中,位于银纳米粒子表面等离子体共振纵向模式的1600 nm产生的βeff值最高。这种增强归因于多光子吸收和等离子体增强激发态吸收(ESA)过程。在1200和1600 nm激发下,胶体银NW色散表现出叠加在饱和吸收(SA)行为上的反向饱和吸收(RSA)信号,而薄膜形式只有RSA信号。在400 ~ 1600 nm的超宽带激发范围内,光限制性能的阈值在0.02 ~ 0.33 J/cm2之间,表现出波长相关的非线性吸收行为。这项工作是第一次系统地研究基于Ag NW的光学限制器,其激发范围从可见光延伸到近红外(400-1600 nm)。总的来说,胶体和薄膜形式的Ag NWs都表现出超宽带光限制响应,突出了它们在光子和光电子应用方面的潜力。
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引用次数: 0
Comparison of QEPAS and BF-QEPAS approaches for methane and ethane sequential detection in the near-IR spectral range QEPAS和BF-QEPAS方法在近红外光谱范围内甲烷和乙烷序列检测的比较
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-05-01 Epub Date: 2026-01-31 DOI: 10.1016/j.optlastec.2026.114847
Luigi Melchiorre , Giansergio Menduni , Giovanni Magno , Liam O’Faolain , Pietro Patimisco , Vincenzo Spagnolo , Angelo Sampaolo
This paper presents a comparison between quartz-enhanced photoacoustic spectroscopy (QEPAS) and beat-frequency QEPAS (BF-QEPAS) techniques for the sequential detection of methane (C1) and ethane (C2) in the near-infrared spectral range. Both approaches exploit a T-shaped quartz tuning fork (QTF)—coupled with acoustic resonator tubes—as sensitive element but differ fundamentally in the signal generation and acquisition methods. While conventional QEPAS-based approach requires periodic QTF characterization and longer acquisition time, BF-QEPAS enables simultaneous measurement of target gas concentration, QTF resonance frequency and quality factor through analysis of transient response signals. Experiments were performed using a laser diode emitting at a central wavelength of 1683.53 nm, targeting C1 and C2 absorption features. Our results demonstrate that the BF-QEPAS approach significantly reduces measurement time from minutes to few seconds and maintains comparable detection sensitivity, also for broadband absorbers such as ethane. For methane, minimum detection limits (MDLs) of 1.7 parts-per-million (ppm) and 5 ppm were achieved with QEPAS and BF-QEPAS techniques, respectively, while for ethane MDLs of 20 ppm and 62 ppm were obtained, respectively. The BF-QEPAS technique enables continuous, uninterrupted monitoring of both target gases in sequential detection mode, with the simultaneous validation of the measurement through the evaluation of the QTF resonance parameters.
本文比较了石英增强光声光谱技术(QEPAS)和热频QEPAS技术(BF-QEPAS)在近红外光谱范围内连续检测甲烷(C1)和乙烷(C2)的效果。这两种方法都利用t形石英音叉(QTF) -与声学谐振管耦合-作为敏感元件,但在信号产生和采集方法上存在根本差异。传统的基于qepas的方法需要周期性的QTF表征和较长的采集时间,而BF-QEPAS可以通过分析瞬态响应信号同时测量目标气体浓度、QTF共振频率和质量因子。利用中心波长为1683.53 nm的激光二极管,针对C1和C2的吸收特性进行了实验。我们的研究结果表明,BF-QEPAS方法显着将测量时间从几分钟缩短到几秒钟,并保持相当的检测灵敏度,也适用于乙烷等宽带吸收剂。对于甲烷,QEPAS和BF-QEPAS技术的最低检出限分别为1.7 ppm和5ppm,而乙烷的最低检出限分别为20 ppm和62 ppm。BF-QEPAS技术能够在顺序检测模式下连续、不间断地监测两种目标气体,同时通过评估QTF共振参数来验证测量结果。
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引用次数: 0
Low-Hydroxyl tellurite fiber for Mid-Infrared Er:YAG laser transmission 中红外Er:YAG激光传输用低羟基碲酸盐光纤
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-05-01 Epub Date: 2026-02-01 DOI: 10.1016/j.optlastec.2026.114829
Shuru Chen , Zhijian Wei , Jin Li , Biqing Wang , Yuze Wang , Kai Jiao , Shengchuang Bai , Pingxue Li , Vladimir Shiryaev , Xunsi Wang
Due to pronounced hydroxyl (–OH) absorption bands around 2.7 μm in the mid-infrared region, tellurite glasses typically exhibit limited performance for mid-infrared laser transmission, which in turn constrains their suitability for Er:YAG laser delivery. This limitation arises primarily from –OH impurities, which introduce strong absorption in the mid-infrared band and significantly degrade transmission efficiency. To enhance the mid-infrared transmission performance and laser-induced damage threshold of TeO2–ZnO–La2O3 (TZL) glass, high-temperature vacuum melting was employed as a physical purification method to effectively remove –OH impurities from the glass matrix. The effects of melting temperature and vacuum level on purification efficiency were systematically investigated. Through optimization of raw-material refining and melting parameters, low-hydroxyl tellurite glass was successfully obtained, exhibiting an –OH absorption coefficient as low as 0.004 cm–1—representing a 99.8% reduction compared with conventional unpurified samples. The purified glass was subsequently extruded into core–cladding preforms and drawn into flexible fibers with a core diameter of 300 μm and a cladding diameter of 600 μm. The fabricated TZL fiber achieved a maximum stable output power of 8.3 W at 2.94 μm, corresponding to an energy density of 1061 J cm–2. To the best of our knowledge, this is the first demonstration of a tellurite fiber capable of stably delivering more than 8 W of Er:YAG laser power at 2.94 μm, highlighting its strong potential for high-power mid-infrared laser applications in surgical medicine and industrial processing.
由于碲酸盐玻璃在中红外区2.7 μm附近有明显的羟基(-OH)吸收带,因此中红外激光传输性能有限,这反过来又限制了其对Er:YAG激光传输的适用性。这种限制主要来自于-OH杂质,它在中红外波段引入强吸收,显著降低了传输效率。为了提高TeO2-ZnO-La2O3 (TZL)玻璃的中红外透射性能和激光损伤阈值,采用高温真空熔炼作为物理净化方法,有效去除玻璃基体中的-OH杂质。系统地研究了熔炼温度和真空度对提纯效率的影响。通过优化原料精制和熔融参数,成功制得低羟基碲酸盐玻璃,其-OH吸收系数低至0.004 cm - 1,比常规未纯化样品降低99.8%。然后将纯化后的玻璃挤压成芯包覆预制品,拉伸成芯直径为300 μm、包层直径为600 μm的柔性纤维。所制备的TZL光纤在2.94 μm处的最大稳定输出功率为8.3 W,对应的能量密度为1061 J cm-2。据我们所知,这是碲酸盐光纤的首次演示,能够在2.94 μm下稳定地提供超过8 W的Er:YAG激光功率,突出了其在外科医学和工业加工中的高功率中红外激光器应用的强大潜力。
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引用次数: 0
Development of an optical critical dimension (OCD) measurement model enhanced by transformer-based data augmentation 基于变压器数据增强的光学临界尺寸(OCD)测量模型
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-05-01 Epub Date: 2026-01-31 DOI: 10.1016/j.optlastec.2026.114857
Jinyang Li , Dengji Guo , Ta-Cheng Mo , Yu-Hsiang Hsu , Changliang Zhu , Shien-Ping Feng , Hung-Fei Kuo
As semiconductor devices continue to scale down, manufacturing processes face increasing challenges. This necessitates more efficient metrology techniques to ensure process quality. Critical dimension (CD) measurement is a crucial step in process verification, as deviations in CD directly impact device performance. Optical critical dimension (OCD) method, based on scatterometry, offers a rapid and non-invasive solution in precise measurement. It can analyze diffraction images generated from periodic measurement marks and compare them with references to achieve linewidth measurements. In this work, an OCD measurement framework enhanced with data augmentation via a transformer-based conditional generative adversarial network (TCGAN) is proposed. Grating measurement marks with designed CDs ranging from 400 nm to 600 nm were simulated to generate diffraction images. The two-directional two-dimensional principal components analysis ((2D)2PCA) was applied to extract features and convert these images into sequential data. A TCGAN model was then trained to expand the diffraction dataset, increasing it to 21,000 samples. The augmented dataset was used to train a regression model capable of accurately predicting the linewidth of the grating measurement marks. The proposed model achieved a root mean squared error (RMSE) of 0.70 nm and a coefficient of determination (R2) of 0.99 in simulation test, indicating high linear correlation between predictions and ground truth. Experimental validation was conducted using fabricated measurement marks and the designed optics, achieving an RMSE of 1.14 nm, further confirming the effectiveness of TCGAN-assisted OCD measurement method.
随着半导体器件的不断缩小,制造工艺面临越来越多的挑战。这就需要更有效的计量技术来确保过程质量。关键尺寸(CD)测量是工艺验证的关键步骤,因为CD的偏差直接影响器件的性能。光学临界尺寸法(OCD)是一种基于散射法的快速、无创的精确测量方法。它可以分析由周期性测量标记产生的衍射图像,并将其与参考文献进行比较,从而实现线宽测量。在这项工作中,提出了一个通过基于变压器的条件生成对抗网络(TCGAN)增强数据增强的强迫症测量框架。对设计的CDs范围为400 ~ 600 nm的光栅测量标记进行了模拟,生成了衍射图像。利用双向二维主成分分析(two-directional two principal components analysis, 2D)2PCA提取特征,并将这些图像转换为序列数据。然后训练TCGAN模型来扩展衍射数据集,将其增加到21,000个样本。利用增强的数据集训练能够准确预测光栅测量标记线宽的回归模型。在模拟测试中,该模型的均方根误差(RMSE)为0.70 nm,决定系数(R2)为0.99,表明预测结果与实际情况具有较高的线性相关性。利用自制的测量标记和设计的光学器件进行实验验证,RMSE为1.14 nm,进一步证实了tcgan辅助OCD测量方法的有效性。
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引用次数: 0
Single-Shot 3D phase recovery through scattering media via Complex-Valued neural network 基于复值神经网络的散射介质单次三维相位恢复
IF 5 2区 物理与天体物理 Q1 OPTICS Pub Date : 2026-05-01 Epub Date: 2026-01-22 DOI: 10.1016/j.optlastec.2026.114782
Yujian Mai , Ju Tang , Tingwei Shi , Jiazhen Dou , Jianglei Di , Yuwen Qin
Accurate recovery of three-dimensional (3D) phase information through scattering media is crucial for applications in biological imaging, material analysis, and optical diagnostics. However, recovering axial multi-layer phase structures remains challenging due to the intrinsic coupling of amplitude and phase in speckle fields. We present a complex-valued end-to-end framework that directly processes complex speckle data, exploiting amplitude–phase coupling to enable single-shot reconstruction of multi-layer 3D phase distributions. Simulations and experiments verify robust performance across varying axial depths, layer numbers, and noise levels, significantly surpassing conventional real-valued approaches. This data-efficient and physically interpretable method provides a rapid solution for precise 3D phase imaging in strongly scattering environments, with broad implications for non-invasive biomedical and optical imaging.
通过散射介质精确恢复三维(3D)相位信息对于生物成像、材料分析和光学诊断的应用至关重要。然而,由于散斑场中振幅和相位的固有耦合,恢复轴向多层相结构仍然具有挑战性。我们提出了一个复杂值端到端框架,直接处理复杂的散斑数据,利用幅相耦合实现多层三维相位分布的单次重建。仿真和实验验证了在不同轴向深度、层数和噪声水平下的稳健性能,显著优于传统的实值方法。这种数据高效且物理可解释的方法为强散射环境下的精确3D相位成像提供了快速解决方案,对非侵入性生物医学和光学成像具有广泛意义。
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引用次数: 0
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Optics and Laser Technology
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