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Compact and fabrication tolerant polarization insensitive mode-order converter for MDM systems 用于 MDM 系统的结构紧凑、制造容差小的偏振不敏感模阶转换器
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-13 DOI: 10.1016/j.optlastec.2024.111780

With the increasing capacity demands of data communications, mode division multiplexing in on-chip optical interconnect systems is becoming an attractive solution. Compact, broadband, and fabrication-tolerant mode-order converters unaffected by polarizations are considered crucial for the progress of on-chip systems utilizing mode division multiplexing. A proposal for a design scheme for an on-chip mode-order converter that is insensitive to polarization is presented, utilizing a combination of 3D finite-difference time-domain (FDTD) and particle swarm optimization (PSO). The conversion of TE0/TM0-to-TE1/TM1 mode is achieved through phase matching between a subwavelength grating and an input–output tapered waveguide. Theoretical studies indicate that the TE0-to-TE1 and TM0-to-TM1 insertion losses are below 0.46 dB and 0.78 dB at a wavelength of 1550 nm. The TE0-to-TE1 and TM0-to-TM1 insertion loss is under 1.0 dB, with crosstalk below −15 dB within the 190 nm (1432∼1622 nm) and 81 nm (1515∼1596 nm) operating ranges. Experimental data indicates that the device measuring 7 × 1.58 μm2 can successfully convert mode orders regardless of polarization within an 81 nm bandwidth (1515∼1596 nm), effectively doubling the data transmission capacity of the MDM system. In addition, the devices fabricated by a standard CMOS process demonstrate the potential for mass production.

随着数据通信容量需求的不断增长,片上光互连系统中的模分复用技术正成为一种极具吸引力的解决方案。不受偏振影响的紧凑型、宽带和制造耐受性模阶转换器被认为是利用模分复用技术的片上系统取得进展的关键。本文结合三维有限差分时域 (FDTD) 和粒子群优化 (PSO),提出了不受极化影响的片上模阶转换器的设计方案。通过亚波长光栅和输入输出锥形波导之间的相位匹配,实现了 TE0/TM0 到 TE1/TM1 模式的转换。理论研究表明,在波长为 1550 nm 时,TE0 转 TE1 和 TM0 转 TM1 的插入损耗分别低于 0.46 dB 和 0.78 dB。TE0 对 TE1 和 TM0 对 TM1 的插入损耗低于 1.0 dB,在 190 nm(1432∼1622 nm)和 81 nm(1515∼1596 nm)工作范围内,串扰低于 -15 dB。实验数据表明,尺寸为 7 × 1.58 μm2 的器件可在 81 nm 带宽(1515∼1596 nm)范围内成功转换模式阶次,而不受偏振的影响,从而有效地将 MDM 系统的数据传输能力提高了一倍。此外,采用标准 CMOS 工艺制作的器件还展示了批量生产的潜力。
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引用次数: 0
Air-stable and UV-NIR broadband photodetectors utilizing graphene and core/shell quantum dots hybrid heterostructure 利用石墨烯与核/壳量子点混合异质结构的空气稳定型和紫外-近红外宽带光电探测器
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-12 DOI: 10.1016/j.optlastec.2024.111768

Photodetectors based on PbSe quantum dots (QDs) are commonly used for light detection in the near-infrared (NIR) region. Nevertheless, the performance of photodetectors based on PbSe QDs is constrained by ineffective carrier transfer and poor photo and thermal stabilities. Herein, a promising strategy that harnesses PbSe/PbS core/shell QDs structures is developed and demonstrated to enhance the long-term stability of photodetectors, further combining with graphene to form hybrid heterojunctions that effectively promote carrier transfer. As a result, the devices exhibit a broad photoresponse to the incident light at range of 365–1250 nm, and also possess a high photosensitivity of 1.5 × 104 A/W and a high detectivity of 4.0 × 1013 Jones. Moreover, the lifetime of graphene-PbSe/PbS core/shell QDs hybrid photodetector was 9 times greater than that of uncoated QDs devices. The enormous boost might be attributed to the passivation and protection provided by the core–shell structure, and graphene’s efficient extraction of charge carriers.

基于 PbSe 量子点(QDs)的光电探测器通常用于近红外(NIR)区域的光探测。然而,基于 PbSe QDs 的光电探测器的性能受到载流子传输效率低、光稳定性和热稳定性差的限制。在此,我们开发并展示了一种利用 PbSe/PbS 核/壳 QDs 结构来增强光电探测器长期稳定性的可行策略,并进一步与石墨烯结合形成可有效促进载流子传输的混合异质结。因此,该器件在 365-1250 nm 波长范围内对入射光呈现出宽广的光响应,同时还具有 1.5 × 104 A/W 的高光敏度和 4.0 × 1013 Jones 的高探测率。此外,石墨烯-PbSe/PbS 核/壳混合 QDs 光电探测器的寿命是未涂层 QDs 器件的 9 倍。这种巨大的提升可能归功于核壳结构提供的钝化和保护,以及石墨烯对电荷载流子的高效提取。
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引用次数: 0
A review on laser-assisted manufacturing process of thermoset composites: A review of fundamentals, processes, scientific modelling, challenges and prospective 热固性复合材料激光辅助制造工艺综述:基础知识、工艺、科学建模、挑战和前景综述
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-12 DOI: 10.1016/j.optlastec.2024.111713

Thermoset composites are vital materials in modern manufacturing due to their exceptional mechanical properties, chemical resilience, and thermal endurance across diverse industries. However, conventional manufacturing methods often struggle to achieve precise control over fabrication processes and optimize material characteristics. The emergence of laser-assisted manufacturing presents a promising solution to these challenges, offering novel avenues for advancing thermoset composite production. By harnessing laser energy’s unique attributes such as localized heating and precise material processing control, laser-assisted manufacturing provides unprecedented opportunities for attaining superior quality, intricate geometries, and tailored properties in thermoset composites. This comprehensive review addresses the pressing needs and gaps in the fundamentals, processes, scientific modeling, challenges, and prospective developments in laser manufacturing processes for thermoset composites. This study examines thermoset composites’ behavior, focusing on structures and properties. Section 3 discusses laser-composite interaction fundamentals, including heating principles and energy absorption mechanisms. Section 4 explores tailored laser manufacturing techniques, and Section 5 covers modeling approaches. Section 6 addresses challenges and future prospects, while Section 7 presents conclusions guiding innovation in laser-assisted manufacturing for thermoset composites. Subsequent sections will explore thermoset composite fundamentals (Section 2) and laser-composite interaction (Section 3), covering heating principles, energy transfer, and thermal effects. Section 4 will examine laser manufacturing techniques, with comparative analysis. Modeling approaches will be discussed in Section 5, while Section 6 addresses challenges and future prospects.

热固性复合材料具有优异的机械性能、化学复原力和耐热性,是现代制造业的重要材料。然而,传统制造方法往往难以实现对制造过程的精确控制和材料特性的优化。激光辅助制造技术的出现为应对这些挑战提供了一个前景广阔的解决方案,为推进热固性复合材料的生产提供了新的途径。通过利用激光能量的独特属性(如局部加热和精确的材料加工控制),激光辅助制造为获得热固性复合材料的卓越质量、复杂几何形状和定制特性提供了前所未有的机会。本综述探讨了热固性复合材料激光制造工艺的基础、工艺、科学建模、挑战和前瞻性发展方面的迫切需求和差距。本研究探讨了热固性复合材料的行为,重点是结构和性能。第 3 部分讨论激光与复合材料相互作用的基本原理,包括加热原理和能量吸收机制。第 4 节探讨了量身定制的激光制造技术,第 5 节介绍了建模方法。第 6 节讨论了挑战和未来前景,第 7 节提出了指导热固性复合材料激光辅助制造创新的结论。接下来的章节将探讨热固性复合材料的基本原理(第2节)和激光与复合材料的相互作用(第3节),包括加热原理、能量传递和热效应。第 4 节将探讨激光制造技术,并进行比较分析。第 5 节将讨论建模方法,第 6 节将讨论挑战和未来前景。
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引用次数: 0
A comprehensive study of optical resonances in metals, dielectrics, and excitonic materials in double interface structures 双界面结构中金属、电介质和激子材料的光学共振综合研究
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-12 DOI: 10.1016/j.optlastec.2024.111771

From an optical perspective, depending on the relationship between the real (n) and imaginary (k) parts of its refractive index, three broad categories of materials can be distinguished: metals (kn), dielectrics (nk), and materials in which nk (termed here excitonic materials). The modes and optical resonances that appear in a thin film bounded by two dielectrics with similar refractive index, what we call here a double interface structure, have been widely studied in the case of metals, but not for dielectrics, or materials with nk. In this work, we propose a new approach, based on employing the phase matching condition to correlate the resonances that appear in the wavelength versus incident angle color maps of the reflected power with the modal analysis of the cross section of the structure. This analysis is performed, using an attenuated total reflection (ATR) setup, for thin film materials that belong to each of the mentioned categories: a metal (gold, Au), a dielectric (titanium dioxide, TiO2), and a material with nk (chromium, Cr). The theoretical analysis is supported with experimental results. It is demonstrated that this method enables to identify any resonance at any wavelength or incident angle, being valid for all three types of materials. Therefore, it is considered the suggested approach will help the research in these materials and in the double interface structure in the optics and photonics field.

从光学角度来看,根据折射率的实部(n)和虚部(k)之间的关系,可将材料分为三大类:金属(k ≫ n)、电介质(n ≫ k)和 n ≈ k 的材料(这里称为激子材料)。在这项工作中,我们提出了一种新方法,即利用相位匹配条件,将反射功率的波长与入射角色图中出现的共振与结构横截面的模态分析联系起来。利用衰减全反射(ATR)装置,对属于上述各类的薄膜材料进行了分析:金属(金,Au)、电介质(二氧化钛,TiO2)和 n ≈ k 的材料(铬,Cr)。实验结果为理论分析提供了支持。实验结果表明,这种方法能够识别任何波长或入射角度下的任何共振,对所有三种类型的材料都有效。因此,我们认为所建议的方法将有助于这些材料以及光学和光子学领域双界面结构的研究。
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引用次数: 0
Optimized dual-band amplified spontaneous emission properties of PFO and BUBD-1 blend films based on AgNPs doped buffer layers 基于掺杂 AgNPs 缓冲层的 PFO 和 BUBD-1 混合薄膜的优化双波段放大自发辐射特性
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-12 DOI: 10.1016/j.optlastec.2024.111776

Dual-band amplified spontaneous emission (ASE) can be used as a spectral analysis technique to detect specific chemical or biological molecules. In this paper, the dual-band ASE properties of blend films containing a small organic molecule N,N’-(4,4′-(1E,1′E)-2, 2′-(1,4-phenylene) bis(ethene-2,1-diyl)) −bis(4,1-phenylene))-bis(2-ethyl-6-methyl-phenylaniline) (BUBD-1) and a conductive polymer Poly(9,9-dioctylfluorenyl-2,7-diyl) (PFO) were investigated and optimized. As the doping concentration of BUBD-1 in the PFO was increased from PFO: 1 wt% BUBD-1 to PFO: 5 wt% BUBD-1, the ASE emission wavelength shifted from single- to dual-band and then back. The dual-band ASE performance of the blend film was also improved by introducing a Poly(methyl methacrylate) (PMMA) buffer layer containing silver nanoparticles (AgNPs), which resulted in a significant decrease in the excitation energy threshold of both ASE peaks and a significant increase in the net gain. Due to the LSPR effect of AgNPs, the ASE thresholds for peaks at 460 nm (PFO) and 490 nm (BUBD-1) in the blend film decreased from 12.24 ± 0.49 μJ/pulse to 6.99 ± 0.28 μJ/pulse and from 12.75 ± 0.51 μJ/pulse to 7.03 ± 0.28 μJ/pulse, respectively. The experimental and theoretical simulation demonstrated that the incomplete energy transfer between PFO and BUBD-1 led to a dual-band ASE effect. In addition, the enhanced light absorption, emission, and scattering caused by LSPR in the AgNPs improved the threshold and gain for dual-band ASE. This provides a possibility of realizing dual-band organic semiconductor lasers.

双波段放大自发辐射(ASE)可作为一种光谱分析技术来检测特定的化学或生物分子。本文研究了含有小分子有机物 N,N'-(4,4′-(1E,1′E)-2,2′-(1,4-亚苯基)双(乙烯-2,1-二基))-(BUBD-1) 和导电聚合物聚(9,9-二辛基芴-2,7-二基)(PFO) 进行了研究和优化。随着 BUBD-1 在 PFO 中的掺杂浓度从 PFO: 1 wt% BUBD-1 增加到 PFO: 5 wt% BUBD-1,ASE 发射波长从单频转为双频,然后又转回单频。通过引入含有银纳米颗粒(AgNPs)的聚甲基丙烯酸甲酯(PMMA)缓冲层,混合物薄膜的双波段 ASE 性能也得到了改善,从而使两个 ASE 峰的激发能量阈值显著降低,净增益显著增加。由于 AgNPs 的 LSPR 效应,混合膜中 460 纳米(PFO)和 490 纳米(BUBD-1)峰的 ASE 阈值分别从 12.24 ± 0.49 μJ/pulse 降至 6.99 ± 0.28 μJ/pulse 和从 12.75 ± 0.51 μJ/pulse 降至 7.03 ± 0.28 μJ/pulse。实验和理论模拟结果表明,PFO 和 BUBD-1 之间不完全的能量转移导致了双波段 ASE 效应。此外,AgNPs 中的 LSPR 增强了光的吸收、发射和散射,提高了双波段 ASE 的阈值和增益。这为实现双波段有机半导体激光器提供了可能。
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引用次数: 0
Structured light 3D shape measurement for translucent media base on deep Bayesian inference 基于深度贝叶斯推理的半透明介质结构光三维形状测量技术
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-11 DOI: 10.1016/j.optlastec.2024.111758

Traditional structured light technique faces challenges in measuring translucent media due to low fringe modulation and strong random noise caused by subsurface scattering, thereby significantly reducing phase quality. In addition, the difficulty in obtaining ground truth makes it hard to assess reliability even though obtaining measured results. Here, we proposed a 3D measurement method for translucent media base on deep Bayesian inference to achieve both fringe enhancement and phase uncertainty evaluation. Specifically, a deep network incorporated with quatuor-branch residual block is developed to significantly enhance the fringe modulation and signal-to-noise ratio (SNR) for accurate phase recovery. Subsequently, a Bayesian inference mechanism is established for probabilistic statistics, which allows for the optimization of fringe output and provides uncertainty self-evaluation based on Monte Carlo (MC) sampling. Furthermore, by incorporating both numerical and physical constraints into the supervised learning, the network can effectively mitigate phase-shifted errors in the final results. The proposed method shows high efficiency and flexibility since it requires no additional patterns or hardware setup. Experiments validate the feasibility of the proposed method.

传统的结构光技术在测量半透明介质时面临着挑战,原因是条纹调制较低,而且次表层散射会产生较强的随机噪声,从而大大降低了相位质量。此外,由于难以获得地面实况,即使获得了测量结果,也很难评估其可靠性。在此,我们提出了一种基于深度贝叶斯推理的半透明介质三维测量方法,以实现边缘增强和相位不确定性评估。具体来说,我们开发了一种包含四分支残差块的深度网络,以显著增强条纹调制和信噪比(SNR),从而实现精确的相位恢复。随后,为概率统计建立了贝叶斯推理机制,从而优化了边缘输出,并在蒙特卡罗(MC)采样的基础上提供了不确定性自我评估。此外,通过将数字和物理约束纳入监督学习,该网络可以有效地减少最终结果中的相移误差。由于不需要额外的模式或硬件设置,所提出的方法显示出高效率和灵活性。实验验证了所提方法的可行性。
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引用次数: 0
Vector magnetic field measurement based on fiber ring microwave photonic filter with the Vernier effect 基于具有游标效应的光纤环微波光子滤波器的矢量磁场测量技术
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-11 DOI: 10.1016/j.optlastec.2024.111767

A vector magnetic field sensor based on enhanced Vernier effect is experimentally demonstrated. The Vernier effect is generated from two microwave photonic filters (MPFs) with close free spectral range (FSR), which is constructed by the fiber ring (FR) and the optical carrier microwave interferometry (OCMI). Linear chirped fiber Bragg grating (LCFBG) is inserted in the FR to act as the dispersion element to provide time delay. By attaching the fiber Bragg grating (FBG) on the magnetostrictive material (MA), the magnetic field can be transferred into the wavelength shift, as well as the time delay of the FR and the frequency response of the FR-MPF. By choosing opposite dispersion of LCFBGs and closer FSRs, cascaded FR-MPFs based sensor can greatly improve the sensitivity. The sensitivities for the magnetic field intensity and direction are 127.71 kHz/Oe, the magnification factor of which is 432, and 418.16 kHz/deg. The proposed scheme has merits of high sensitivity and interference immunity, which is suitable for high precision measurement.

实验证明了一种基于增强型弗尼尔效应的矢量磁场传感器。凡尔纳效应由两个自由光谱范围(FSR)接近的微波光子滤波器(MPF)产生,该滤波器由光纤环(FR)和光载波微波干涉仪(OCMI)构建而成。线性啁啾光纤布拉格光栅(LCFBG)插入光纤环中,作为色散元件提供时延。通过在磁致伸缩材料 (MA) 上安装光纤布拉格光栅 (FBG),磁场可以传递到波长偏移以及 FR 的时延和 FR-MPF 的频率响应中。通过选择相反色散的 LCFBG 和更近的 FSR,基于级联 FR-MPF 的传感器可以大大提高灵敏度。对磁场强度和方向的灵敏度分别为 127.71 kHz/Oe(放大系数为 432)和 418.16 kHz/deg。所提出的方案具有灵敏度高、抗干扰能力强等优点,适用于高精度测量。
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引用次数: 0
Soft lithography for flexible structural color films by laser interference lithography 通过激光干涉光刻技术实现柔性结构彩色薄膜的软光刻
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-11 DOI: 10.1016/j.optlastec.2024.111689

To face the challenge of the fast, large area, and high-precision manufacturing for flexible structural color films, a strategy based on soft lithography to fabricate polydimethylsiloxane (PDMS) structural color films was proposed in this paper. The large area periodic structures as the template were obtained by means of laser interference lithography. After soft lithography, SEM images showed that the morphology and period are completely inversed with the templates. The colors of the films have an obvious angle dependence which was proved by an angle-resolved spectrometer(ARM), in which the peak position of the reflectance spectrum changed ∼267 nm as the angle increasing from 10° to 25° for the period ∼2.126 μm. In addition, the peaks of reflectance spectra have also an obvious redshift of ∼162 nm with increasing elongation ratio up to 40 %. Furthermore, the reflection peak of the flexible film will stably change between ∼697 nm and ∼617 nm before and after stretching from 0 to 40 % for 11 times. In conclusion, we explore an efficient way with the fast, large area, and high precision to fabricate flexible structural color films in the atmospheric environment, showing the potential application in optical anti-counterfeiting and mechanical sensor.

面对快速、大面积、高精度制造柔性彩色结构薄膜的挑战,本文提出了一种基于软光刻技术制造聚二甲基硅氧烷(PDMS)彩色结构薄膜的策略。通过激光干涉光刻技术获得了大面积的周期性结构作为模板。软光刻后,扫描电镜图像显示其形态和周期与模板完全相反。角度分辨光谱仪(ARM)证明了薄膜的颜色具有明显的角度依赖性,在周期 ∼ 2.126 μm 的条件下,当角度从 10°增加到 25°时,反射光谱的峰值位置变化了 ∼ 267 nm。此外,随着伸长率的增加,反射光谱的峰值也出现了 ∼162 nm 的明显红移,最高可达 40%。此外,柔性薄膜在从 0% 拉伸到 40% 拉伸 11 次前后,其反射峰会稳定地在∼697 nm 和∼617 nm 之间变化。总之,我们探索出了一种在大气环境中快速、大面积、高精度制备柔性结构彩色薄膜的有效方法,显示了其在光学防伪和机械传感器方面的潜在应用。
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引用次数: 0
Chirped apodized fiber Bragg gratings inverse design via deep learning 通过深度学习反向设计啁啾光阑光纤布拉格光栅
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-10 DOI: 10.1016/j.optlastec.2024.111766

Overcoming inverse design problems in fiber Bragg gratings (FBGs) can be challenging due to the significant nonlinearity of the problem and the intricate relationship between structural properties and optical characteristics. Here, we present a novel artificial intelligence-based approach that effectively addresses these challenges. We introduce a methodology centered on applying deep learning (DL) to estimate the reflective spectrum of FBGs. The results highlight DL’s exceptional capability in designing chirped apodized FBGs, with our model demonstrating significantly enhanced computational efficiency relative to traditional numerical simulations. Notably, our DL-based approach exhibits the remarkable ability to tackle the inverse design challenges of FBGs, thereby eliminating the reliance on trial-and-error or empirical methodologies. The predictive losses for both the forward and inverse models are impressively minimal, with low loss values of 2.2 × 10-2 and 1.6 × 10-2, respectively. The FBG configurations derived via DL are ideally suited for optical communications, heralding significant advancements in all-optical signal processing.

由于光纤布拉格光栅(FBG)问题具有明显的非线性,而且结构特性与光学特性之间的关系错综复杂,因此克服光纤布拉格光栅(FBG)的逆向设计问题非常具有挑战性。在此,我们提出了一种基于人工智能的新方法,可有效解决这些难题。我们介绍了一种以深度学习(DL)为核心的方法,用于估算 FBG 的反射光谱。结果凸显了深度学习在设计啁啾光栅方面的卓越能力,与传统的数值模拟相比,我们的模型显著提高了计算效率。值得注意的是,我们基于 DL 的方法在应对 FBG 反向设计挑战方面表现出了非凡的能力,从而消除了对试错或经验方法的依赖。正向和反向模型的预测损耗都非常小,分别为 2.2 × 10-2 和 1.6 × 10-2 的低损耗值,令人印象深刻。通过 DL 得出的 FBG 配置非常适合光通信,预示着全光信号处理领域的重大进步。
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引用次数: 0
Research on laser-induced Plasma-Assisted ablation of single crystal Diamond: Experiment and molecular dynamics simulation 激光诱导等离子体辅助烧蚀单晶金刚石的研究:实验和分子动力学模拟
IF 4.6 2区 物理与天体物理 Q1 OPTICS Pub Date : 2024-09-10 DOI: 10.1016/j.optlastec.2024.111757

Traditional machining methods face significant challenges in removing and processing diamond due to its high hardness, brittleness and wear resistance. A promising solution is laser-induced plasma-assisted ablation (LIPAA), which has gained attention as a reliable technology for processing transparent, hard and brittle materials, especially diamond. However, the complexity of the machining mechanism of LIPAA limits its widespread application. This study aimed to investigate the characteristics of LIPAA processing on diamond through experimental and simulation analysis. The experimental results revealed that the amorphization threshold of laser energy density is 3.36 J/cm2, the deposition threshold is 3.89J/cm2, and the etching threshold is 4.07 J/cm2. When employing an infrared laser with a repetition rate of 115 kHz, the range of laser single pulse energy for LIPAA etching on single crystal diamond is from 115μJ to 145μJ, the range of the laser energy density is from 4.07 J/cm2.to 5.13 J/cm2. In addition, the width, depth and material remove rate of the diamond microgrooves increases with the increasing laser energy. A simulation model employing molecular dynamics (MD) technology was developed to examine the impact of copper plasma bombardment on single crystal diamond. The simulation results show that the deposition velocity threshold of copper ion bombardment on single crystal diamond is 1.062 × 104 m/s, while the etching velocity threshold is 1.143 × 104 m/s. The degree of amorphization on the diamond surface increased with the increase of bombardment speeds and system temperatures. The morphology, element distribution, and the graphite layer quality of the microgrooves were analyzed, and the formation mechanism of the microgrooves was explored. By combining experiments and simulations, it is concluded that the mechanism of LIPAA processing single crystal diamond is the formation of amorphous regions on the diamond surface by ion bombardment, while high-energy laser beams and plasma ablate the amorphous regions to form grooves.

由于金刚石具有高硬度、脆性和耐磨性,传统的加工方法在去除和加工金刚石方面面临着巨大的挑战。激光诱导等离子体辅助烧蚀(LIPAA)是一种很有前途的解决方案,它作为一种加工透明、硬脆材料(尤其是金刚石)的可靠技术而备受关注。然而,LIPAA 加工机制的复杂性限制了它的广泛应用。本研究旨在通过实验和模拟分析研究 LIPAA 对金刚石的加工特性。实验结果表明,激光能量密度的非晶化阈值为 3.36 J/cm2,沉积阈值为 3.89 J/cm2,蚀刻阈值为 4.07 J/cm2。当使用重复频率为 115 kHz 的红外激光器时,在单晶金刚石上蚀刻 LIPAA 的激光单脉冲能量范围为 115μJ 至 145μJ,激光能量密度范围为 4.07 J/cm2 至 5.13 J/cm2。此外,金刚石微槽的宽度、深度和材料去除率随着激光能量的增加而增加。为了研究铜等离子体轰击对单晶金刚石的影响,我们利用分子动力学(MD)技术开发了一个模拟模型。模拟结果表明,铜离子轰击在单晶金刚石上的沉积速度阈值为 1.062 × 104 m/s,而蚀刻速度阈值为 1.143 × 104 m/s。金刚石表面的非晶化程度随着轰击速度和系统温度的增加而增加。分析了微凹槽的形态、元素分布和石墨层质量,并探讨了微凹槽的形成机理。结合实验和模拟,得出 LIPAA 处理单晶金刚石的机理是离子轰击在金刚石表面形成非晶区,高能激光束和等离子体烧蚀非晶区形成沟槽。
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Optics and Laser Technology
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