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2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM)最新文献

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N+-InGaAs/InAlAs recessed gates for InAs/AlSb HFET development 用于InAs/AlSb HFET开发的N+-InGaAs/InAlAs嵌入式栅极
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516406
Wei-Zhi He, Heng-Kuang Lin, P. Chiu, J. Chyi, C. Ko, T. Kuan, Meng-Kuei Hsieh, Wen-Chin Lee, C. Wann
In this work, N+-InGaAs/InAlAs recessed gates for InAs/AlSb HFET development are presented. Highly doped N+-InGaAs cap layers are used to decrease the parasitic resistances in contact and access regions. As-grown modulation-doped epitaxy materials exhibit a Hall mobility of 14,200 cm2/V s and a sheet density of 6.15 ×1012 cm−2, while a mobility of 14,600 cm2/V s and a sheet density of 5.61×1012 cm−2 are shown after removal of the N+-InGaAs cap. Benefiting the energy band lowering using the highly doped cap layers, a low contact resistance of 0.06 Ω-mm is achieved. DC performances of IDSS=862mA/mm and gm, peak=927mS/mm and RF performances of fT=24GHz and fmax=51GHz are demonstrated in a 2.1μm-gate-length device. An fT-Lg product is as high as 51 GH-μm.
在这项工作中,提出了用于InAs/AlSb HFET开发的N+-InGaAs/InAlAs嵌入式栅极。高掺杂的N+-InGaAs帽层用于降低接触区和通路区的寄生电阻。生长调制掺杂外延材料的霍尔迁移率为14,200 cm2/V s,片密度为6.15 ×1012 cm−2,而去除N+-InGaAs帽层后的迁移率为14,600 cm2/V s,片密度为5.61×1012 cm−2。利用高掺杂帽层降低能带,实现了0.06 Ω-mm的低接触电阻。在2.1μm栅长器件中,得到了IDSS=862mA/mm和gm、峰值=927mS/mm、fT=24GHz和fmax=51GHz的直流性能。fT-Lg的产品高达51 GH-μm。
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引用次数: 1
Reliability study on InP/InGaAs emitter-base junction for high-speed and low-power InP HBT 高速低功耗InP HBT中InP/InGaAs发射基结可靠性研究
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5515966
Y. K. Fukai, K. Kurishima, N. Kashio, S. Yamahata
The reliability of sub-micrometers InP-based heterostructure bipolar transistors (HBTs), which are being applied in over-100-Gbit/s ICs, was examined at high current injection conditions. These HBTs had a ledge structure and an emitter electrode consisting with a refractory metal of W, which suppressed surface degradation and metal diffusion, respectively. We conducted bias-temperature (BT) stress tests in several stress conditions of current densities, Jc, up to 10 mA/μιη2 in order to investigate the stability of InP/InGaAs emitter-base (E-B) junction. At 10 mA/μιη2 operation with the junction temperature of 210 °C, dc current gain, ß, was stable for 1000 h. The activation energy for the reduction of β, however, decreased to 1.1 eV, which is suggesting the degradation of the emitter-base (E-B) junction. For the reliability of sub-micrometer, high-speed and low-power InP HBTs at high current densities, stability around the E-B junction has become more dominant.
研究了应用于100 gbit /s以上集成电路的亚微米inp基异质结构双极晶体管(hbt)在高电流注入条件下的可靠性。这些hbt具有突出的结构和由难熔金属W组成的发射极,分别抑制了表面降解和金属扩散。为了研究InP/InGaAs发射基(E-B)结的稳定性,我们在电流密度(Jc)至10 mA/μ iη 2的几种应力条件下进行了偏温(BT)应力测试。在10 mA/μιη2、210℃结温下,直流电流增益β在1000 h内保持稳定,而β还原的活化能下降到1.1 eV,表明E-B结发生了降解。在高电流密度下,为了保证亚微米、高速和低功率InP hbt的可靠性,E-B结周围的稳定性变得更加重要。
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引用次数: 6
Selective-area MOVPE growth and optical properties of single InAsP quantum dots embedded in InP NWs 嵌入InP NWs中单个InAsP量子点的选择性面积MOVPE生长和光学特性
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516180
Yasunori Kobayashi, J. Motohisa, K. Tomioka, S. Hara, K. Hiruma, T. Fukui
We grew InAsP and InP/InAsP/InP heterostructure NWs (NWs) by selective-area MOVPE and carried out micro-photoluminescence (µ-PL) measurement. We investigated growth conditions for InAsP NWs and that embedded in InP NWs, and obtained exciton and biexciton emissions from InAsP QDs at optimized growth conditions. Negative binding energy of biexciton was observed due to the strong Coulomb interaction between the holes in the QDs.
采用选择性面积MOVPE培养InAsP和InP/InAsP/InP异质结构NWs (NWs),并进行微光致发光(µpl)测量。研究了InAsP量子点和嵌入InP量子点的生长条件,并在优化的生长条件下获得了InAsP量子点的激子和双激子发射。由于量子点中空穴之间存在强的库仑相互作用,双激子具有负结合能。
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引用次数: 3
Quantum and classical information processing with a single quantum dot in photonic crystal cavity 光子晶体腔中单量子点的量子与经典信息处理
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516293
A. Majumdar, A. Faraon, D. Englund, Erik D. Kim, I. Fushman, Hyochul Kim, P. Petroff, J. Vučković
Quantum dots (QDs) coupled to photonic crystal cavities are interesting both as a testbed for fundamental cavity quantum electrodynamics (CQED) experiments, as well as nano-scale devices for optical quantum and classical information processing. In addition to providing a scalable, robust, on-chip, semiconductor platform, this coupled system also enables very large dipole-field interaction strength, as a result of the field localization inside of sub-cubic wavelength volume (vacuum Rabi frequency is in the range of 10s of GHz). In this paper, we describe some of the recent experiments performed on this system in our group.
耦合到光子晶体腔的量子点(QDs)作为基本腔量子电动力学(CQED)实验的试验台,以及用于光学量子和经典信息处理的纳米级器件都很有趣。除了提供可扩展的、健壮的片上半导体平台外,该耦合系统还可以实现非常大的偶极子场相互作用强度,这是由于场定位在亚立方波长体积内(真空拉比频率在10s GHz范围内)。在本文中,我们描述了我们小组最近在该系统上进行的一些实验。
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引用次数: 0
Submicron InP/InGaAs composite channel MOSFETs with selectively regrown N+-source/drain buried in channel undercut 亚微米InP/InGaAs复合沟道mosfet,选择性再生N+源极/漏极埋在沟道凹边
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5515922
T. Kanazawa, K. Wakabayashi, H. Saito, R. Terao, Tomonori Tajima, S. Ikeda, Y. Miyamoto, K. Furuya
We demonstrated a high-mobility InP 5 nm/InGaAs 12 nm composite channel MOSFET with MOVPE regrown n+-source/drain region for low series resistance and high source injection current. A gate dielectric was SiO2 and thickness was 20 nm. A carrier density of regrown InGaAs source/drain layer was over 4 × 1019 cm−3. In the measurement of submicron (= 150 nm) device, the drain current was 0.93 mA/µm at Vg = 3 V, Vd = 1 V and the peak transconductance was 0.53 mS/µm at Vd = 0.65 V, respectively. The channel length dependence of transconductance indicated the good relativity.
我们展示了一个高迁移率的inp5nm /InGaAs 12nm复合沟道MOSFET,具有MOVPE再生的n+源/漏区,具有低串联电阻和高源注入电流。栅极电介质为SiO2,厚度为20 nm。再生InGaAs源/漏层载流子密度大于4 × 1019 cm−3。在亚微米(= 150 nm)器件的测量中,Vg = 3 V时漏极电流为0.93 mA/µm, Vd = 1 V时峰值跨导率为0.53 mS/µm。跨电导的通道长度依赖性表现出良好的相对性。
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引用次数: 2
High frequency performance of vertical InAs nanowire MOSFET 垂直InAs纳米线MOSFET的高频性能
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516010
E. Lind, M. Egard, Sofia Johansson, A. Johansson, B. Borg, C. Thelander, Karl‐Magnus Persson, A. Dey, L. Wernersson
We report on RF characterization of vertical, 100-nm-gate length InAs nanowire MOSFETs, utilizing wrap-gate technology and Al2O3 high-K gate oxide. The transistors show ft=5.6 GHz and fmax=22 GHz, mainly limited by parasitic capacitances. The RF device performance is described using a hybrid-π model taking hole generation at the drain into account. Electrostatic modeling of the parasitic capacitances for arrays of vertical nanowires indicates that a strong reduction in extrinsic capacitances can be achieved for devices with a small inter-wire separation.
我们报告了垂直,100纳米栅极长度的InAs纳米线mosfet的射频特性,利用包裹栅技术和Al2O3高k栅极氧化物。晶体管显示ft=5.6 GHz和fmax=22 GHz,主要受寄生电容的限制。使用混合-π模型描述了射频器件的性能,考虑了漏极处的空穴产生。垂直纳米线阵列的寄生电容的静电建模表明,对于具有较小线间间距的器件,可以实现外部电容的大幅降低。
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引用次数: 4
Advances in the growth and performance of antimonide-based mid-infrared interband cascade lasers 锑基中红外带间级联激光器的生长与性能研究进展
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5515970
W. Bewley, C. Canedy, C. Kim, M. Kim, J. Lindle, J. Abell, I. Vurgaftman, J. Meyer
We discuss the growth and state-of-the-art performance characteristics of mid-infrared interband cascade lasers. Broad-area devices with 5 active stages display pulsed threshold current densities as low as 400 A/cm2 at room temperature, owing to an unexpectedly strong suppression of Auger recombination. New designs also produce lasers with internal losses as low as ≈ 6 cm−1 at room temperature. We also study the performance of narrow ridges that dissipate heat efficiently for high-temperature cw operation. The degradations of the threshold current density and differential slope efficiency are modest until the ridge width is decreased to 3 μm. A 13-μm-wide uncoated ridge produces up to 45 mW of cw power at 293 K, and displays a maximum wall-plug efficiency of 3.5%. A 5-μm-wide 3-mm-long ridge without any facet coatings operates cw to 345 K, which is a new record high temperature for any semiconductor laser emitting in the 3.0–4.6 μm spectral range.
我们讨论了中红外波段间级联激光器的发展和最新性能特征。具有5个有源级的广域器件在室温下显示脉冲阈值电流密度低至400 A/cm2,这是由于对埃歇复合的出乎意料的强抑制。新的设计也生产出在室温下内部损耗低至≈6 cm−1的激光器。我们还研究了窄脊在高温连续工作中有效散热的性能。在脊宽减小到3 μm之前,阈值电流密度和差分斜率效率的下降幅度不大。一个13 μm宽的无涂层脊在293 K下产生高达45 mW的连续波功率,并显示出3.5%的最大壁插效率。一个5 μm宽3 mm长的脊线,在没有任何表面涂层的情况下工作到345 K,这是在3.0-4.6 μm光谱范围内发射的半导体激光器的新高温记录。
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引用次数: 0
High linearity 2-bit current steering InP/GaInAs DHBT digital-to-analog converter 高线性2位电流转向InP/GaInAs DHBT数模转换器
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516140
S. Kraus, I. Kallfass, R. Makon, J. Rosenzweig, R. Driad, M. Moyal, D. Ritter
We present a high linearity 2-bit digital-to-analog converter (DAC) implemented in an InP/GaInAs DHBT technology. The DAC is based upon the current steering architecture. Cascode structure and layout techniques, i.e. static shuffling and dummy devices, have been used to enhance the linearity. The DAC exhibits static integral/differential nonlinearities of 5.5×10−3 LSB, equivalent to a resolution of 9.2 bits. Dynamic measurements qualitatively show proper behavior at 6 GS/s, while simulations with typical on-chip load exhibit sufficiently fast settling at 20 GS/s.
我们提出了一种采用InP/GaInAs DHBT技术实现的高线性2位数模转换器(DAC)。DAC是基于当前的转向架构。级联结构和布局技术,即静态洗牌和虚拟装置,已被用于提高线性度。该DAC具有5.5×10−3 LSB的静态积分/微分非线性,相当于9.2比特的分辨率。动态测量定性地显示在6 GS/s时的正常行为,而典型片上负载的模拟显示在20 GS/s时足够快地稳定。
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引用次数: 0
Very-high-bit-rate integrated photonic devices for next-generation Ethernet 用于下一代以太网的超高比特率集成光子器件
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516160
K. Shinoda, S. Makino, T. Fukamachi, K. Adachi, Y. Lee, H. Hayashi, S. Tanaka, M. Aoki, S. Tsuji
Recent advances in integrated photonic devices for next-generation Ethernet are described. In particular, 1.3-µm-range uncooled photonic devices (namely, electroabsorption modulator integrated lasers, directly modulated lasers, and lens integrated devices) are focused on. A key technology for uncooled operation is an InGaAlAs multiple quantum well (MQW), which produces a strong electron confinement. The electroabsorption modulator integrated lasers, which incorporated an InGaAlAs-MQW absorption layer, exhibit uncooled 25.8-Gbit/s and 43-Gbit/s single-mode fiber 10-km transmissions. The 1.3-µm directly modulated laser, which consists of an InGaAlAs MQW distributed feedback (DFB) active stripe, exhibits uncooled direct modulation at 25 Gbit/s. To improve the optical coupling of the directly modulated laser, we developed a lens-integrated surface-emitting laser, which incorporates an InGaAlAs DFB active stripe. This lens-integrated laser exhibits 25-Gbit/s direct modulation up to 100°C. Furthermore, the lens-integrated photodiode exhibited high speed (35 GHz), high responsivity (0.8 A/W), and large alignment tolerance (26 µm) for direct coupling to a single-mode fiber. These photonic devices have demonstrated their potential for implementation in cost-effective 100-Gbit/s and 40-Gbit/s Ethernet.
介绍了用于下一代以太网的集成光子器件的最新进展。特别是,1.3µm范围的非冷却光子器件(即电吸收调制器集成激光器,直接调制激光器和透镜集成器件)的重点。非冷却运行的关键技术是InGaAlAs多量子阱(MQW),它能产生强电子约束。电吸收调制器集成激光器采用了InGaAlAs-MQW吸收层,具有非冷却的25.8 gbit /s和43 gbit /s单模光纤10公里传输。1.3µm直接调制激光器,由InGaAlAs MQW分布反馈(DFB)有源条纹组成,具有25gbit /s的非冷却直接调制特性。为了改善直接调制激光器的光耦合,我们开发了一种集成了InGaAlAs DFB有源条纹的透镜表面发射激光器。这种透镜集成激光器具有25 gbit /s的直接调制,最高可达100°C。此外,该透镜集成光电二极管具有高速(35 GHz)、高响应性(0.8 A/W)和大对准公差(26µm),可直接耦合到单模光纤。这些光子器件已经证明了它们在具有成本效益的100 gbit /s和40 gbit /s以太网中实现的潜力。
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引用次数: 1
Monolithically-integrated 8:1 SOA gate switch with small gain deviation and large input power dynamic range for WDM signals 单片集成8:1 SOA门开关,增益偏差小,WDM信号输入功率动态范围大
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5515990
Shinsuke Tanaka, Seok-Hwan Jeong, A. Uetake, S. Yamazaki, K. Morito
We developed a highly uniform monolithically integrated 8-input and 1-output (8:1) SOA gate switch for a large-scale high-speed switching system. The gain fluctuation due to an internal interference was suppressed with a low loss 8:1 tapered MMI coupler. The device exhibited a very small gain deviation of <2.0 dB for all wavelengths in the C-band, together with a high extinction ratio of >50 dB and an ON-state gain of >10 dB. We also demonstrated a penalty-free amplification of 8×10 Gb/s WDM signals with a large input power dynamic range of >9.8 dB
我们为大规模高速交换系统开发了一种高度统一的单片集成8输入1输出(8:1)SOA门开关。低损耗8:1锥形MMI耦合器抑制了由内部干扰引起的增益波动。该器件的增益偏差非常小,仅为50 dB,导通状态增益>10 dB。我们还演示了在>9.8 dB的大输入功率动态范围下对8×10 Gb/s WDM信号的无罚分放大
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引用次数: 0
期刊
2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM)
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