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2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM)最新文献

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Selective area growth of InP on nano-patterned SiO2/Si(100) substrates by molecular beam epitaxy 利用分子束外延技术在纳米SiO2/Si(100)衬底上选择性生长InP
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516047
S. Hasegawa, A. Yamano, N. S. Ahn, N. Cha, T. Kanki, H. Tanaka, H. Asahi
We have investigated the selective area growth of InP on nano-patterned Si substrates with SiO2 mask by molecular beam epitaxy. By optimizing the growth conditions, the growth of one separate InP single crystallite for each Si opening has been accomplished. It is found that when single crystallites coalesced into larger grains beyond Si openings, lattice strains were introduced in the grains because of the difference in thermal expansion coefficient between Si and InP. This clearly shows that the growth of one InP single crystallite for each Si opening is indispensable for growing stress- and defect-free InP regions on SiO2 towards the application to next generation MOSFETs as the channel materials.
本文采用分子束外延的方法研究了InP在SiO2掩膜纳米硅衬底上的选择性面积生长。通过优化生长条件,实现了每一个Si开口都能生长出一个独立的InP单晶。结果发现,当单晶在Si开孔外合并成较大晶粒时,由于Si和InP的热膨胀系数不同,晶粒中引入了晶格应变。这清楚地表明,对于每个Si开口生长一个InP单晶,对于在SiO2上生长无应力和无缺陷的InP区域,以应用于下一代mosfet作为通道材料是必不可少的。
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引用次数: 1
Scalable high-current density RTDs with low series resistance 具有低串联电阻的可扩展大电流密度rtd
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516377
A. Tchegho, B. Muenstermann, C. Gutsche, A. Poloczek, K. Blekker, Werner Prost, F. Tegude
InP-based double-barrier resonant tunnelling diodes have been optimized for high speed digital circuits. We present the scalability of high current density (JP ≈ 150 kA/cm2;) resonant tunnelling diodes in the sub-micrometer electrode area range. A small signal equivalent circuit has been developed and its parameters are precisely deduced from DC and RF measurements. Based on this model the scalability has been investigated with emphasis on a low but also scalable series resistance in order to keep the peak voltage constant. A comparison of dry and wet etching methods in the device fabrication will be presented. A multiple mesa concept has been adopted to provide reliable scalability at low emitter area (AE < 1 µm2).
基于inp的双势垒谐振隧穿二极管已被优化用于高速数字电路。我们提出了在亚微米电极面积范围内的高电流密度(JP≈150 kA/cm2;)共振隧穿二极管的可扩展性。研制了一种小信号等效电路,并通过直流和射频测量精确地推导出其参数。在此模型的基础上,研究了可扩展性,重点是低但可扩展的串联电阻,以保持峰值电压恒定。对干法和湿法刻蚀在器件制造中的应用进行了比较。采用了多台概念,在低发射面积(AE < 1µm2)下提供可靠的可扩展性。
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引用次数: 9
MOVPE growth of InPN films on InP(001) substrates InPN薄膜在InP(001)衬底上的MOVPE生长
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516039
Yukihiro Seki, Yanzhe Wang, Q. Thieu, S. Kuboya, S. Sanorpim, K. Onabe
Dilute-nitride alloy InPN films have been grown by metalorganic vapor phase epitaxy (MOVPE), and the N incorporation behavior is investigated by varying the major growth parameters. The grown-surface morphologies show that the 2-dimensional (2D) growth with atomically flat surfaces is obtained at 460–500°C with relatively high P supplies. The XRD analyses show that the N incorporation increases for lower growth temperatures and higher N/P ratios, and the N concentration up to 0.18% has been attained. The 150–170 nm-thick InPN films are coherently grown on InP(001) without lattice relaxation.
采用金属有机气相外延法(MOVPE)生长了稀氮合金InPN薄膜,并通过改变主要生长参数研究了氮的掺入行为。生长表面形貌表明,在460-500°C和相对高的P供应条件下,可以获得具有原子平面的二维生长。XRD分析表明,随着生长温度的降低和N/P比的提高,氮的掺入量增加,氮浓度达到0.18%。在无晶格弛豫的情况下,在InP(001)上相干生长了150 ~ 170 nm厚的InPN薄膜。
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引用次数: 0
Advances in the growth of lattice-matched III-V compounds on Si for optoelectronics 光电子学用硅上生长晶格匹配III-V化合物的研究进展
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516285
B. Kunert, K. Volz, W. Stolz
The novel direct band gap, dilute nitride Ga(NAsP)-material system allows for the first time the monolithic integration of a III/V laser material lattice matched to Si substrate. This lattice-matched approach offers the possibility for a high-quality, low defect density integration of a III/V-laser material potentially leading to long-term stable laser devices on Si-substrate. The present paper introduces this novel integration approach and discuss the monolithically growth in line with optical properties of first laser devices grown on exactly oriented (001) Si substrates.
这种新型的直接带隙、稀氮化镓(NAsP)材料系统首次实现了与硅衬底匹配的III/V激光材料晶格的单片集成。这种晶格匹配方法为高质量、低缺陷密度的III/ v激光材料集成提供了可能,有可能在si衬底上实现长期稳定的激光器件。本文介绍了这种新颖的集成方法,并讨论了在精确定向(001)Si衬底上生长的第一个激光器件的单片生长与光学特性。
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引用次数: 2
Temperature sensitivity of 1.55μm (100) InAs/InP-based quantum dot lasers 1.55μm (100) InAs/ inp基量子点激光器的温度灵敏度
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516172
S. A. Sayid, I. Marko, S. Sweeney, P. Poole
Semiconductor lasers with quantum dot (QD) based active regions have generated a huge amount of interest for applications including communications networks due to their anticipated superior physical properties due to three dimensional carrier confinement. For example, the threshold current of ideal quantum dots is predicted to be temperature insensitive [1]. We have investigated the operating characteristics of 1.55 µm InAs/InP (100) quantum dot lasers focusing on their carrier recombination characteristics using a combination of low temperature and high pressure measurements. By measuring the intrinsic spontaneous emission from a window fabricated in the n-contact of the devices we have measured the radiative component of the threshold current density, Jrad. We find that Jrad is itself relatively temperature insensitive (Fig. 1). However, the total threshold current density, Jth, increases significantly with temperature leading to a characteristic temperature T0~72K around 220K-290K. From this data it is clear that the devices are dominated by a non-radiative recombination process which accounts for up to 94% of the threshold current at room temperature (Fig. 1).
基于量子点(QD)有源区域的半导体激光器由于其三维载流子限制所带来的优越物理特性,在包括通信网络在内的应用中产生了巨大的兴趣。例如,预测理想量子点的阈值电流对温度不敏感[1]。我们研究了1.55µm InAs/InP(100)量子点激光器的工作特性,重点研究了其载流子复合特性,采用低温和高压测量相结合的方法。通过测量在器件的n接触处制造的窗口的本征自发辐射,我们测量了阈值电流密度的辐射分量。我们发现Jrad本身对温度相对不敏感(图1)。然而,总阈值电流密度Jth随着温度的升高而显著增加,导致特征温度在220K-290K左右为T0~72K。从这些数据可以清楚地看出,器件主要由非辐射复合过程控制,该过程在室温下占阈值电流的94%(图1)。
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引用次数: 1
Plasma-resonant THz detection with HEMTs 等离子共振太赫兹探测与hemt
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516389
J. Mateos, H. Marinchio, C. Palermo, L. Varani, T. González
In this work, by means of Monte Carlo simulations we analyze the dependence of the DC drain current value in a 80nm-gate InAlAs/InGaAs HEMTs on the frequency of a sinusoidal signal superimposed to the DC gate bias. Interestingly, a resonant peak appears in the drain current response, which lies in the THz frequency range, in good agreement with recent experiments made on similar devices. Moreover, the frequency of the resonant peak is dependent on the length of the source-gate region, but independent of the length of the drain-gate region, thus indicating that the source-gate region acts as the plasma wave cavity leading to the resonant detection of THz radiation in HEMTs.
在这项工作中,通过蒙特卡罗模拟,我们分析了80nm栅极InAlAs/InGaAs hemt中直流漏极电流值与叠加到直流栅极偏置的正弦信号频率的关系。有趣的是,漏极电流响应中出现了一个谐振峰,它位于太赫兹频率范围内,与最近在类似设备上进行的实验很好地一致。此外,谐振峰的频率依赖于源极区域的长度,而与漏极区域的长度无关,这表明源极区域充当等离子体波腔,导致hemt中太赫兹辐射的共振检测。
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引用次数: 2
Composite-field MIC-PDs for low-bias-voltage operation 用于低偏压工作的复合场mic - pd
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516213
T. Yoshimatsu, Y. Muramoto, S. Kodama, T. Furuta, N. Shigekawa, H. Yokoyama, T. Ishibashi
A novel maximized-induced-current-photodiode (MIC-PD) structure with a composite field depletion layer achieves high responsivity of 0.8 A/W and a wide 3-dB bandwidth of 30 GHz at a low reverse bias voltage of 2 V for optical input power of +7 dBm.
一种新型的具有复合场耗尽层的最大感应电流光电二极管(MIC-PD)结构在2 V的低反向偏置电压下,光输入功率为+7 dBm,具有0.8 A/W的高响应率和30 GHz的宽3db带宽。
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引用次数: 4
An optoelectronic mixer based on composite transparent gate InAlAs/InGaAs metamorphic HEMT 基于复合透明栅InAlAs/InGaAs变质HEMT的光电混频器
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516402
Che-Kai Lin, Chao-Wei Lin, Yi-chun Wu, H. Chiu
In this work, we have fabricated the first transparent gate using sputtered ITO/Au/ITO composite films InAlAs/InGaAs metamorphic HEMT (CTG-MHEMT) on GaAs substrate. The CTG-MHEMT has been demonstrated to increase front side optical coupling efficiency as an optoelectronic mixer. By optimizing the bias condition, the optoelectronic mixing efficiency can be enhanced. The photodetection mechanism of CTG-MHEMT is clarified by investigating the internal photovoltaic gain (Gpv) and photoconductance gain (Gpc). For comparison of the optical characteristics, the transparent gate MHEMT (TG-MHEMT) has been fabricated. The CTG-MHEMT as an optoelectronic mixer is a promising candidate that can simplify the base station architecture in fiber-optic microwave transmission systems.
在这项工作中,我们在GaAs衬底上使用溅射ITO/Au/ITO复合薄膜InAlAs/InGaAs变质HEMT (CTG-MHEMT)制备了第一个透明栅极。作为光电混频器,CTG-MHEMT已被证明可以提高前端光耦合效率。通过优化偏置条件,可以提高光电混合效率。通过研究CTG-MHEMT的内部光伏增益(Gpv)和光电导增益(Gpc),阐明了CTG-MHEMT的光探测机理。为了比较其光学特性,制作了透明栅极MHEMT (TG-MHEMT)。CTG-MHEMT作为光电子混频器在光纤微波传输系统中具有简化基站结构的潜力。
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引用次数: 0
III-V-semiconductor-on-insulator MISFETs on Si with buried SiO2 and Al2O3 layers by direct wafer bonding iii - v -半导体-绝缘体misfet在硅与埋埋SiO2和Al2O3层的直接晶圆键合
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516261
M. Yokoyama, T. Yasuda, H. Takagi, Y. Urabe, H. Ishii, N. Miyata, H. Yamada, N. Fukuhara, M. Hata, M. Sugiyama, Y. Nakano, M. Takenaka, S. Takagi
We have developed III-V-OI MISFETs on Si with buried SiO2 and Al2O3 layers fabricated by low damage and low temperature direct wafer bonding processes. The III-V-OI MISFETs with both buried SiO2 and Al2O3 layers have demonstrated the high electron mobility of 1200 cm2/Vs. In addition, we found that the buried Al2O3 layers can improve the interface condition between III-V and the buried oxide layers, leading to the higher electron mobility of III-V-OI MISFETs even in the high electric field than that of Si MOSFETs. These high performance transistors will open up the way to the future high performance logic LSI systems.
通过低损伤和低温直接晶圆键合工艺,我们开发了埋置SiO2和Al2O3层的Si - v - oi型misfet。埋埋SiO2和Al2O3层的III-V-OI型misfet显示出1200 cm2/Vs的高电子迁移率。此外,我们发现埋置Al2O3层可以改善III-V和埋置氧化层之间的界面条件,导致III-V- oi misfet在高电场下的电子迁移率高于Si mosfet。这些高性能晶体管将为未来的高性能逻辑大规模集成电路系统开辟道路。
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引用次数: 2
The DARPA COSMOS program: The convergence of InP and Silicon CMOS technologies for high-performance mixed-signal DARPA COSMOS项目:融合InP和硅CMOS技术实现高性能混合信号
Pub Date : 2010-07-23 DOI: 10.1109/ICIPRM.2010.5516241
S. Raman, Tsu-Hsi Chang, C. L. Dohrman, M. Rosker
The COmpound Semiconductor Materials On Silicon (COSMOS) program of the U.S. Defense Advanced Research Projects Agency (DARPA) focuses on developing transistor-scale heterogeneous integration processes to intimately combine advanced compound semiconductor (CS) devices with high-density silicon circuits. The technical approaches being explored in this program include high-density micro assembly, monolithic epitaxial growth, and epitaxial layer printing processes. In Phase I of the program, performers successfully demonstrated world-record differential amplifiers through heterogeneous integration of InP HBTs with commercially fabricated CMOS circuits. In the current Phase II, complex wideband, large dynamic range, high-speed digital-to-analog convertors (DACs) are under development based on the above heterogeneous integration approaches. These DAC designs will utilize InP HBTs in the critical high-speed, high-voltage swing circuit blocks and will employ sophisticated in situ digital correction techniques enabled by CMOS transistors. This paper will also discuss the Phase III program plan as well as future directions for heterogeneous integration technology that will benefit mixed signal circuit applications.
美国国防高级研究计划局(DARPA)的硅基化合物半导体材料(COSMOS)项目专注于开发晶体管规模的异质集成工艺,将先进的化合物半导体(CS)器件与高密度硅电路紧密结合。该计划正在探索的技术方法包括高密度微组装,单片外延生长和外延层印刷工艺。在项目的第一阶段,表演者通过InP hbt与商业制造的CMOS电路的异构集成,成功地展示了世界纪录的差分放大器。在当前的第二阶段,基于上述异构集成方法的复杂宽带、大动态范围、高速数模转换器(dac)正在开发中。这些DAC设计将在关键的高速、高压摆幅电路块中使用InP hbt,并采用由CMOS晶体管实现的复杂的原位数字校正技术。本文还将讨论第三阶段的计划以及异构集成技术的未来方向,这将有利于混合信号电路的应用。
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引用次数: 30
期刊
2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM)
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