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2018 7th Electronic System-Integration Technology Conference (ESTC)最新文献

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Microfluidic Interposer for High Performance Fluidic Chip Cooling 用于高性能流控芯片冷却的微流控中间体
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546344
W. Steller, F. Windrich, D. Bremner, S. Robertson, R. Mrossko, J. Keller, T. Brunschwiler, G. Schlottig, H. Oppermann, M. Wolf, K. Lang
High operation temperatures are a main impact factor for long-term reliability. An efficient cooling approach is crucial especially for high performance computing processors (HPC). As reference, the “International Technology Roadmap for Semiconductors” (ITRS) predicted a power consumption of about 700W for data center server processors [1]. Different cooling approaches were investigated already [2]. Unfortunately, current solutions are not sufficient to fulfill high thermal HPC specifications. On one hand, the insufficient cooling performance is raising the chip junction temperature over the critical point. On other hand, the high performance requirements (e.g. low latency time, higher bandwidth) force to use 3D-Integration of components, which is additional raising the heat build-up [3, 4, 5]. Therefore, only the direct integration of a cooling approach within the 3D-stack can eliminate the overheating bottleneck at all. The fluidic cooling approach has a high potential to fulfill the requirements for this direct fluidic integration approach [6]. This work shows the integration and realization of microfluidic features (microfluidic channels and fluidic inlets/outlets) into an interposer. Furthermore we present the integration of this fluidic interposer into a System in Package (SiP) in order to realize a dual side chip cooling for a heat dissipation of 672W (168W/cm-2 which correlates with predicted power consumption of data center server processor according ITRS-Roadmap [1].
高工作温度是影响长期可靠性的主要因素。高效的冷却方法对于高性能计算处理器(HPC)尤为重要。作为参考,“国际半导体技术路线图”(ITRS)预测数据中心服务器处理器的功耗约为700W[1]。已经研究了不同的冷却方法[2]。不幸的是,目前的解决方案不足以满足高热高性能计算规范。一方面,散热性能不足导致芯片结温超过临界点。另一方面,高性能要求(例如低延迟时间,更高带宽)迫使使用组件的3d集成,这额外增加了热量积聚[3,4,5]。因此,只有在3d堆栈中直接集成冷却方法才能彻底消除过热瓶颈。流体冷却方法很有可能满足这种直接流体集成方法的要求[6]。这项工作展示了将微流控特征(微流控通道和流体入口/出口)集成和实现到一个中介器中。此外,我们提出将该流体介面器集成到系统级封装(SiP)中,以实现双侧芯片冷却,散热672W (168W/cm-2),这与ITRS-Roadmap[1]预测的数据中心服务器处理器功耗相关。
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引用次数: 5
Micro Heat Pipe Design and Fabrication on LTCC LTCC微热管的设计与制造
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546402
Malika Tlili, Maina Sinou, Camilla Kärnfelt, D. Bourreau, A. Péden
This paper presents work on micro heat pipe (MHP) fabrication in Low Temperature Cofired Ceramics (LTCC) modules for cooling purpose. The MHPs are fabricated in a 10 layer structure using ESL41020 tape. Different fabrication settings have been tested to minimize swelling and groove deformation. The best result is obtained by using fugitive tape, extended firing profile, and hot lamination at 50°C for 5 minutes with 70 bar pressure.
本文介绍了低温共烧陶瓷(LTCC)模块冷却用微热管(MHP)的制备方法。mhp采用ESL41020磁带制成10层结构。已经测试了不同的制造设置,以尽量减少膨胀和凹槽变形。最好的结果是使用无功胶带,延长烧成轮廓,并在50°C, 70 bar压力下热层压5分钟。
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引用次数: 3
A novel TSV interposer based System-in-Package for RF applications 一种基于系统级封装的新型射频应用TSV中介器
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546492
Rongfeng Luo, Y. Chai, Shengli Ma, Xiaoyuzhang, Feng Ji, Qi Zhong
In this paper, a TSV interposer base SIP for RF applications is proposed. It’s composed of two separate TSV interposers based on high resistivity Si substrate, which is utilized as the substrate and Cap for RF SIP package. Choice of high resistivity Si substrate is intended to relieve RF loss. The one used for SIP package substrate is consisted of Cu TSVs, RF transmission lines and cavities, the cavity is coated with Copper layer inside, populated with electrical grounding Cu TSVs at the bottom surface, surrounded by lines of TSVs, and it’s utilized to accommodate RF microelectronic chips. The other one used for capping is similar to the bottom TSV interposer in structure. The two TSV interposers will be aligned in the final step with the cavities being sealed to form a close room for the inside RF device for improving the property in electromagnetic compatibility. To demonstrate TSV interposer based RF SIP, Process is developed for the TSV interposer. To testify theprocess, a test vehicle is designed and TSV interposer is fabricated, assembled and characterized.
本文提出了一种用于射频应用的基于TSV中继器的SIP。它由两个独立的基于高电阻率Si衬底的TSV介面组成,用作射频SIP封装的衬底和封盖。选择高电阻率的Si衬底是为了减轻射频损耗。SIP封装基板由Cu tsv、RF传输线和空腔组成,空腔内部镀有铜层,底面填充电接地Cu tsv,周围为tsv线,用于容纳RF微电子芯片。另一种用于封盖,其结构类似于底部TSV中间体。在最后一步中,将两个TSV介面对齐,并密封腔体,为内部射频器件形成一个封闭的房间,以提高电磁兼容性。为了演示基于TSV中介器的射频SIP,开发了TSV中介器的流程。为了验证这一过程,设计了一辆试验车,并对TSV中介器进行了制造、组装和表征。
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引用次数: 2
3D-Printed Eco-Friendly and Cost-Effective Wireless Platforms 3d打印环境友好,成本效益高的无线平台
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546358
Xiaochen Chen, Han He, L. Ukkonen, J. Virkki
We present passive UHF RFID platforms composed of 3D-printed biodegradable plastic structures and conductive thread. Due to its flexibility, this extremely cost-effective and environmentally friendly wireless platform can be easily embedded into versatile structures. We evaluated the wireless performance of the tag fabricated from conductive thread both on a 3D-printed substrate as well as inside two 3D-printed layers. The read range of the tag on a 3D-printed substrate was around 6 meters between 860-960 MHz. Then, another layer was applied on top of the tag. Thus, the tag was left inside a 3D-printed platform, where it as protected from environmental stresses, such as moisture. The read range of this structure was still 6 meters throughout the global UHF RFID frequency band. Based on these initial results, these platforms show potential for unobtrusive identification and sensing solutions.
我们提出了由3d打印可生物降解塑料结构和导电线组成的无源超高频RFID平台。由于其灵活性,这种极具成本效益和环保的无线平台可以很容易地嵌入到多功能结构中。我们评估了在3d打印基板上以及在两个3d打印层内由导电线制成的标签的无线性能。标签在3d打印基板上的读取范围在860-960 MHz之间约为6米。然后,另一层应用在标签的顶部。因此,标签被放置在一个3d打印平台中,在那里它可以免受环境压力,比如潮湿。该结构在全球UHF RFID频带内的读取范围仍为6米。基于这些初步结果,这些平台显示出不引人注目的识别和传感解决方案的潜力。
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引用次数: 4
An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stacking 采用原位电阻测量方法提取可选冶金材料三维堆垛的IMC电阻率和动力学参数
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546500
L. Hou, J. Derakhshandeh, A. Radisic, M. Honore, J. de Coster, V. Cherman, P. Bex, K. Rebibis, G. Beyer, E. Beyne, I. De Wolf
In this work, an in-situ resistance measurement method is proposed to investigate the interfacial solid state reaction of alternative metallurgies, such as Ni and Cu/Ni as UBM materials, with Sn solders. The electrical properties of formed IMC phases for different metallurgies systems are extracted and discussed. Kinetic parameters, such as activation energy and power factor, of Ni/Sn and Cu/Ni/Sn solid-state reaction are extracted from in-situ resistance measurement. Power factor of Ni/Sn and Cu/Ni/Sn kinetic reaction indicate that the IMC evolution behaviors involve bulk diffusion-controlled (the time exponent n = 0.5) for Ni/Sn, while the growth evolution of (Cu,Ni)6Sn5 in Cu/Ni/Sn solid state reaction involves grain-boundary diffusion controlled (the time exponent n = 0.33) from in-situ resistance measurement. This proposed in-situ measurement methodology has the advantages of being quick and accurate to understand and characterize the reaction and phase formation between UBM and solder materials for 3D applications.
在这项工作中,提出了一种原位电阻测量方法来研究替代冶金材料(如Ni和Cu/Ni作为UBM材料)与Sn焊料的界面固相反应。对不同冶金体系形成的IMC相的电学性能进行了提取和讨论。通过原位电阻测量,提取了Ni/Sn和Cu/Ni/Sn固态反应的活化能和功率因数等动力学参数。Ni/Sn和Cu/Ni/Sn动力学的功率因数表明,Ni /Sn的IMC演化行为为体扩散控制(时间指数n = 0.5),而Cu/Ni/Sn固相反应中(Cu,Ni)6Sn5的生长演化为晶界扩散控制(时间指数n = 0.33)。提出的原位测量方法具有快速准确地理解和表征三维应用中UBM和焊料材料之间的反应和相形成的优点。
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引用次数: 2
Flex Cracking of Multilayer Ceramic Capacitors: Experiments on Fracture Propagation 多层陶瓷电容器的弯曲裂纹:断裂扩展实验
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546356
J. Ahmar, E. Wiss, S. Wiese
Cracking of the brittle X7R BaTiO3 ceramic dielectric material is a severe problem in areas where large sized multilayer ceramic capacitors (MLCC) are needed to provide larger capacities or higher dielectric strength for high voltage applications. Therefore the understanding of the crack formation within multilayer ceramic capacitors (MLCC) is an important issue. The paper will describe four-point-bending experiment on MLCCs, which were soldered on a pcb. The experimental design considered existing tests for the qualification of MLCC components. Basing on these considerations a specimen was designed that is able to detect the crack event via an in situ capacitance measurement. For the fabrication of the specimens two types of capacitors were chosen: MLCC 1206 and MLCC 1812. Both were made from an X7R BaTiO3 ceramic dielectric material. The substrate consisted on a 1.6 mm thick FR 4 pcb stripe having the same width as the capacitors. The capacitors were soldered using SnPbAg2, SnAg0.3Cu0.7 and SnAg3.8Cu0.7 solder alloys. After testing all samples were metallographically prepared, to analyze the cracks within the ceramic body of the capacitor by light microscopy. The paper will present the results of these microscopic studies, with regard to the crack shape that was found in the microsections of the tested specimens. The dependence of crack shape on the employed capacitor geometry and on the used solder alloy will be discussed.
在需要大尺寸多层陶瓷电容器(MLCC)为高压应用提供更大容量或更高介电强度的领域,脆性X7R BaTiO3陶瓷介电材料的开裂是一个严重的问题。因此,了解多层陶瓷电容器(MLCC)内部裂纹的形成是一个重要的问题。本文将描述焊接在pcb上的mlcc的四点弯曲实验。实验设计考虑了现有的MLCC部件鉴定试验。基于这些考虑,设计了一种能够通过原位电容测量来检测裂纹事件的试样。为了制作样品,选择了MLCC 1206和MLCC 1812两种类型的电容器。两者均由X7R BaTiO3陶瓷介电材料制成。衬底由1.6毫米厚的f4pcb条纹组成,其宽度与电容器相同。电容器采用SnPbAg2、SnAg0.3Cu0.7和SnAg3.8Cu0.7焊料合金进行焊接。测试后,对所有样品进行金相分析,用光学显微镜分析电容器陶瓷体内的裂纹。本文将介绍这些微观研究的结果,关于在测试样品的显微切片中发现的裂纹形状。将讨论裂纹形状与所采用的电容器几何形状和所使用的焊料合金的关系。
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引用次数: 0
Multi dies simultaneous bonding for power device with the newly developed pressure leveling film 动力装置多模同时粘接,采用新开发的压平膜
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546372
K. Honda, Y. Koseki, T. Ogawa, T. Nonaka
The performance of the newly developed film to level the applied pressure among dies in the process of multi dies simultaneous bonding was evaluated. Sintering Ag paste was used as pre-applied connection material. The leveling performance was evaluated by nine dies simultaneous bonding. The height of the dies was intentionally differed one another, which was controlled by a SUS tape insertion between the bonding tool and the dies. The film compensated the height difference of up to 50 $mu$m in the bonding process. The results of the cross sectional observation after the bonding showed that the dense sintered Ag layer was formed uniformly in all dies in spite of with and without the SUS tape insertion on the backsides of the dies.
评价了该薄膜在多模同时粘接过程中对模具间施加压力的均匀性。采用烧结银浆作为预涂连接材料。采用9个模具同时焊合的方法对整平性能进行了评价。模具的高度被故意地彼此不同,这是由粘合工具和模具之间的SUS磁带插入控制的。该薄膜在键合过程中补偿了高达50 $mu$m的高度差。结合后的截面观察结果表明,无论是否在模具背面插入SUS带,所有模具均均匀地形成致密的烧结银层。
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引用次数: 0
Minimizing Form Factor and Parasitic Inductances of Power Electronic Modules: The p2 Pack Technology 最小化电力电子模块的外形因数和寄生电感:p2封装技术
Pub Date : 2018-09-01 DOI: 10.1109/estc.2018.8546332
T. Gottwald, C. Roessle
Hybrid and electrical Drive is bringing momentum to the development of new solutions for high power drives, DC/DC and AC/DC converters. High power means increased challenges for high current and for thermal management of dissipated power as well. The p2 Pack Technology is a real alternative to conventional systems to further improve reliability, power dissipation at lower system complexity and lower cost. It also meets the challenge of minimized installation space due to its low volume. It could be shown that inductances of the switching cells can be less than 1nH. Therefore all application with the need for fast switching, especially wideband gap semiconductors like GaN and SiC can profit from this embedding architecture. With the new p2 Pack Technology a new architecture was developed, which is helpful for very robust, cost efficient and miniaturized high power Inverter configurations.
混合动力和电力驱动为大功率驱动器,DC/DC和AC/DC转换器的新解决方案的发展带来了动力。高功率意味着对高电流和耗散功率的热管理的挑战增加。p2 Pack技术是传统系统的真正替代品,可以进一步提高可靠性,降低系统复杂性和成本,降低功耗。由于体积小,它也满足了最小化安装空间的挑战。结果表明,该开关电池的电感可以小于1nH。因此,所有需要快速开关的应用,特别是像GaN和SiC这样的宽带隙半导体,都可以从这种嵌入架构中受益。利用新的p2封装技术,开发了一种新的架构,这有助于实现非常强大,经济高效和小型化的大功率逆变器配置。
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引用次数: 1
Copper-based Graphene Nanoplatelet Composites as Interconnect for Power Electronics Pacakging 铜基石墨烯纳米板复合材料在电力电子封装中的互连研究
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546493
Jing Wang, Zhaoxia Zhou, Wen-Feng Lin, Changqing Liu, B. Ahmadi, L. Empringham
The present investigation demonstrates a singlestep electrodeposition route for the fabrication of compact copper-based graphene nanoplatelets (GnPs) nanocomposite coatings, with dispersed GnP co-deposition. The effect of cathodic current density on the surface morphology of the deposits was examined. With increasing deposition current densities from 10 to 40 mA/cm2, there seemed to be a gradual increase in the lateral size of co-deposited GnPs and a decrease in their distribution density, along with a progressive decrease in the deposit surface feature. The chemical state of GnP from the sub-surface region of composite coatings was assessed using XPS in conjunction with Ar ion sputtering and found comparable to that of pristine GnPs. The Cu-GnP composite coatings exhibited slightly higher electrical sheet resistance, compared to that of the untreated Cu and pure Cu deposited counterparts.
本研究展示了一种单步电沉积方法,用于制备致密的铜基石墨烯纳米片(GnPs)纳米复合涂层,并与分散的GnP共沉积。研究了阴极电流密度对镀层表面形貌的影响。随着沉积电流密度从10 mA/cm2增加到40 mA/cm2,共沉积GnPs的横向尺寸逐渐增大,分布密度逐渐减小,沉积物表面特征逐渐减小。利用XPS结合Ar离子溅射对复合涂层亚表面区域的GnP进行了化学状态评估,发现其与原始GnPs相当。与未处理Cu和纯Cu镀层相比,Cu- gnp复合镀层的电阻略高。
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引用次数: 0
Delamination Detection in an Electronic Package by Means of a Newly Developed Delamination Chip Based on Thermal Pixel (Thixel) Array 基于热像素(thxel)阵列分层芯片的电子封装分层检测
Pub Date : 2018-09-01 DOI: 10.1109/ESTC.2018.8546389
Akhil Kumar, M. Schulz, S. Sheva, J. Keller, V. Bader, M. Wöhrmann, J. Bauer, D. May, B. Wunderle
We have made advancement towards developing our novel and non-destructive system for in-situ condition monitoring and detection of delamination of interfaces within electronic packages. A matrix of $5 times 5$ solder based Thixels has been designed within each of the 4 Quadrants of a flip chip with a $10 times 10$mm2 Silicon die. Hardware layout based on a FCOB approach was designed. Before the production and assembly of the FCOB along with the testing system, a finite element study was performed to make a feasibility check by using a UBM of SiO2 on the Silicon side. Afterwards, two batches of FCOB assemblies were produced. One set with underfill and the other without. These were then tested upon a multiplexer based self-built measurement system with a software based lock-in algorithm to receive 3 omega output signals. The change in the 3 omega voltage was successfully measured in the Thixel and the results depict a good SNR at the frequency of optimum sensitivity of 500 Hz. However, we are currently able to measure one quadrant at a time and in future have the possibility to extend this to at least two, if not more. Also, with the good SNR value that has been achieved, we can further decrease the measurement time per sensor to less than 1.25 s by varying sampling parameters.
我们在开发新的无损系统方面取得了进展,该系统用于现场状态监测和检测电子封装内接口的分层。在具有10 × 10$mm2硅芯片的倒装芯片的4个象限中的每一个象限内都设计了基于5 × 5$焊料的thxels矩阵。设计了基于FCOB方法的硬件布局。在FCOB的生产和组装以及测试系统之前,通过在硅侧使用SiO2的UBM进行了有限元研究,以进行可行性验证。随后,生产了两批FCOB组件。一套有底料,另一套没有。然后在基于多路复用器的自建测量系统上进行测试,该系统具有基于软件的锁定算法,以接收3 ω输出信号。在Thixel中成功测量了3 ω电压的变化,结果显示在最佳灵敏度为500 Hz的频率下具有良好的信噪比。然而,我们目前能够一次测量一个象限,并且将来有可能将其扩展到至少两个象限,甚至更多。此外,由于获得了良好的信噪比值,我们可以通过改变采样参数将每个传感器的测量时间进一步减少到1.25 s以下。
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引用次数: 1
期刊
2018 7th Electronic System-Integration Technology Conference (ESTC)
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