Namgun Kim, Whan Kyun Kim, Dongjun Shin, Jong Kyu Kim, Chan Min Lee, Kuk Han Yoon, Youngju Ko, Heeyeop Chae
A comparative study of argon (Ar) and helium (He) plasmas is conducted in quasi‐atomic layer etching (ALE) processes for silicon (Si). The ALE window is identified to be between 35 and 55 V for Ar and 25–45 V for He, with an etch per cycle of 6.0 Å/cycle for Ar and 7.5 Å/cycle for He. Thirty percent thicker chlorination layers are observed with Cl2/He ALE than with Cl2/Ar ALE in the chlorination step. The penetration depth of He ions is twice that of Ar ions, with a standard deviation of 4.5 times greater. This study demonstrates that He ions in the removal steps considerably affect the subsequent modification steps in Si ALE.
在硅 (Si) 的准原子层蚀刻 (ALE) 过程中，对氩 (Ar) 和氦 (He) 等离子体进行了比较研究。确定氩气的 ALE 窗口在 35 至 55 V 之间，氦气的 ALE 窗口在 25 至 45 V 之间，氩气的蚀刻周期为 6.0 Å/周期，氦气的蚀刻周期为 7.5 Å/周期。在氯化步骤中，Cl2/He ALE 比 Cl2/Ar ALE 的氯化层厚 30%。He 离子的穿透深度是 Ar 离子的两倍，标准偏差是 Ar 离子的 4.5 倍。这项研究表明，He 离子在去除步骤中对 Si ALE 的后续改性步骤有很大影响。
{"title":"Quasi‐atomic layer etching of silicon with surface chlorination and removal using Ar or He plasmas","authors":"Namgun Kim, Whan Kyun Kim, Dongjun Shin, Jong Kyu Kim, Chan Min Lee, Kuk Han Yoon, Youngju Ko, Heeyeop Chae","doi":"10.1002/ppap.202400016","DOIUrl":"https://doi.org/10.1002/ppap.202400016","url":null,"abstract":"A comparative study of argon (Ar) and helium (He) plasmas is conducted in quasi‐atomic layer etching (ALE) processes for silicon (Si). The ALE window is identified to be between 35 and 55 V for Ar and 25–45 V for He, with an etch per cycle of 6.0 Å/cycle for Ar and 7.5 Å/cycle for He. Thirty percent thicker chlorination layers are observed with Cl<jats:sub>2</jats:sub>/He ALE than with Cl<jats:sub>2</jats:sub>/Ar ALE in the chlorination step. The penetration depth of He ions is twice that of Ar ions, with a standard deviation of 4.5 times greater. This study demonstrates that He ions in the removal steps considerably affect the subsequent modification steps in Si ALE.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":null,"pages":null},"PeriodicalIF":3.5,"publicationDate":"2024-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140196910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A touchable plasma device based on coplanar dielectric barrier discharge (CDBD) is designed for hand hygiene. The biological safety is evaluated from the aspects of electrical and thermal properties. The peak value of current through the human body (~3.5 mA) and the highest device surface temperature (~40°C) are lower than the threshold of perception current and thermal damage temperature, respectively. The typical bacteria that are present on our hands in daily life Escherichia coli and Staphylococcus aureus are selected to verify the sterilization performance of the device. The results of human contact safety evaluation and sterilization test have demonstrated that this proposed CDBD device is reliable and user‐friendly for applications in hand hygiene.
{"title":"Characteristics and performance of an integrated coplanar dielectric barrier discharge device for hand hygiene","authors":"Shiyun Liu, Haosheng Jin, Yunyang Lu, Li Wan, Danhua Mei, Zhi Fang","doi":"10.1002/ppap.202400011","DOIUrl":"https://doi.org/10.1002/ppap.202400011","url":null,"abstract":"A touchable plasma device based on coplanar dielectric barrier discharge (CDBD) is designed for hand hygiene. The biological safety is evaluated from the aspects of electrical and thermal properties. The peak value of current through the human body (~3.5 mA) and the highest device surface temperature (~40°C) are lower than the threshold of perception current and thermal damage temperature, respectively. The typical bacteria that are present on our hands in daily life <jats:italic>Escherichia coli</jats:italic> and <jats:italic>Staphylococcus aureus</jats:italic> are selected to verify the sterilization performance of the device. The results of human contact safety evaluation and sterilization test have demonstrated that this proposed CDBD device is reliable and user‐friendly for applications in hand hygiene.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":null,"pages":null},"PeriodicalIF":3.5,"publicationDate":"2024-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140196907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Martin Bellmann, Amelia Loesch‐Zhang, Dennis M. J. Möck, Jörn Appelt, Andreas Geissler, Wolfgang Viöl
Atmospheric pressure plasma polymerization represents a promising coating technology, addressing drawbacks of traditional processes (solvent use, multistep procedures, etc.) while enabling deposition of thin cross‐linked polymer layers with high contour fidelity. We address technological challenges with a novel plasma device that integrates multiple plasma source benefits and investigate the suitability of two plant‐based precursors, chia and tung oil, for plasma polymerization to hydrophobize glass and paper. Chia oil enables the deposition of thin, covalently bonded hydrophobic polymer layers. Such coatings have diverse applications especially inside the paper industry, where water repellents in the form of internal and surface sizing have always been an essential functionalization step. Using bio‐based precursors and reducing extra chemicals contributes to substituting fossil‐based or harmful substances.
{"title":"Hydrophobic glass and paper coatings based on plasma polymerized vegetable oils using a novel atmospheric pressure plasma concept","authors":"Martin Bellmann, Amelia Loesch‐Zhang, Dennis M. J. Möck, Jörn Appelt, Andreas Geissler, Wolfgang Viöl","doi":"10.1002/ppap.202300224","DOIUrl":"https://doi.org/10.1002/ppap.202300224","url":null,"abstract":"Atmospheric pressure plasma polymerization represents a promising coating technology, addressing drawbacks of traditional processes (solvent use, multistep procedures, etc.) while enabling deposition of thin cross‐linked polymer layers with high contour fidelity. We address technological challenges with a novel plasma device that integrates multiple plasma source benefits and investigate the suitability of two plant‐based precursors, chia and tung oil, for plasma polymerization to hydrophobize glass and paper. Chia oil enables the deposition of thin, covalently bonded hydrophobic polymer layers. Such coatings have diverse applications especially inside the paper industry, where water repellents in the form of internal and surface sizing have always been an essential functionalization step. Using bio‐based precursors and reducing extra chemicals contributes to substituting fossil‐based or harmful substances.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":null,"pages":null},"PeriodicalIF":3.5,"publicationDate":"2024-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139953573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Rosario Ramírez, Fernando G. Flores-Nava, Elena Colín-Orozco, J. Cuauhtémoc Palacios, M. Guadalupe Olayo, Adriana Ventolero, Guillermo J. Cruz
This work presents a comparison between electrochemical (Echem), plasma glow, and arc discharge polymerizations of pyrrole doped with iodine to correlate the energy of synthesis, chemical structure, and electrical conductivity of the polymers. Plasma glow discharges were used in the gas phase, electrochemistry in liquid, and arc discharges in a hybrid gas–liquid combination. Polypyrroles had structure and conductivity that varied with the synthesis parameters; Echem produced polymers with high carbonization and without the C≡N triple bonds resulting from the other syntheses. Conductivity divided the polymers in two: those synthesized in liquid were in the 0.01–1.0 S/m range, and those synthesized in gas were in the 10–9–10–7 S/m range, with differences of up to eight orders of magnitude due to the dopants and electrolytes.
{"title":"Electro-polymerization of polypyrroles, comparison among electrochemistry, glow, and arc discharges","authors":"Rosario Ramírez, Fernando G. Flores-Nava, Elena Colín-Orozco, J. Cuauhtémoc Palacios, M. Guadalupe Olayo, Adriana Ventolero, Guillermo J. Cruz","doi":"10.1002/ppap.202300199","DOIUrl":"https://doi.org/10.1002/ppap.202300199","url":null,"abstract":"This work presents a comparison between electrochemical (Echem), plasma glow, and arc discharge polymerizations of pyrrole doped with iodine to correlate the energy of synthesis, chemical structure, and electrical conductivity of the polymers. Plasma glow discharges were used in the gas phase, electrochemistry in liquid, and arc discharges in a hybrid gas–liquid combination. Polypyrroles had structure and conductivity that varied with the synthesis parameters; Echem produced polymers with high carbonization and without the C≡N triple bonds resulting from the other syntheses. Conductivity divided the polymers in two: those synthesized in liquid were in the 0.01–1.0 S/m range, and those synthesized in gas were in the 10<sup>–9</sup>–10<sup>–7 </sup>S/m range, with differences of up to eight orders of magnitude due to the dopants and electrolytes.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":null,"pages":null},"PeriodicalIF":3.5,"publicationDate":"2024-02-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139926233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Muhammad Yousaf, Tahir Iqbal, Muhammad Salim Mansha, Adnan Saeed, Muhammad Abrar, Sumera Afsheen, Irfan Ahmed, Abeer A. AlObaid, Basheer M. Al-Maswari, Muhammad Yasir
In this study, we address challenges in the biocompatibility of nickel-based (NiCr) alloys, prevalent in the dental industry, due to toxic metal ion release impacting corrosion resistance and cytotoxicity. Employing magnetron sputtering and cathodic cage plasma nitriding (CCPN), a duplex plasma treatment (DPT) is introduced to the NiCr alloy. The novel approach enhances surface morphology, notably reducing ion leakage compared with untreated samples. Specifically, the CCPN-TiN-treated sample significantly improves corrosion resistance and minimizes metal ion leakage. This transformative DPT emerges as a promising solution for surface modification, particularly mitigating toxic ion leaching in aggressive electrolytes. This research demonstrates a major stride in enhancing NiCr alloy biocompatibility, emphasizing the vital role of innovative surface modification techniques for biomedical applications and challenges.
{"title":"Improved corrosion resistance and cytotoxicity of nickel-based alloy using novel plasma processing technique","authors":"Muhammad Yousaf, Tahir Iqbal, Muhammad Salim Mansha, Adnan Saeed, Muhammad Abrar, Sumera Afsheen, Irfan Ahmed, Abeer A. AlObaid, Basheer M. Al-Maswari, Muhammad Yasir","doi":"10.1002/ppap.202300151","DOIUrl":"https://doi.org/10.1002/ppap.202300151","url":null,"abstract":"In this study, we address challenges in the biocompatibility of nickel-based (NiCr) alloys, prevalent in the dental industry, due to toxic metal ion release impacting corrosion resistance and cytotoxicity. Employing magnetron sputtering and cathodic cage plasma nitriding (CCPN), a duplex plasma treatment (DPT) is introduced to the NiCr alloy. The novel approach enhances surface morphology, notably reducing ion leakage compared with untreated samples. Specifically, the CCPN-TiN-treated sample significantly improves corrosion resistance and minimizes metal ion leakage. This transformative DPT emerges as a promising solution for surface modification, particularly mitigating toxic ion leaching in aggressive electrolytes. This research demonstrates a major stride in enhancing NiCr alloy biocompatibility, emphasizing the vital role of innovative surface modification techniques for biomedical applications and challenges.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":null,"pages":null},"PeriodicalIF":3.5,"publicationDate":"2024-02-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139926234","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zulka Ziblim, B. Thapsukhon, Vachira Choommongkol, Dhreerawan Boonyawan, K. Inthanon, Orawan Khantamat, J. Ruangsuriya
Novel biomaterials suitable for bone tissue engineering are currently in demand, and reformulating natural and synthetic biomaterials has caught scientists' attention. Cellulose and collagen have been utilized in biomedical fields. This research aimed to fabricate collagen‐cellulose‐poly(l‐lactide) (Col‐Cel‐PLL) scaffold using collagen, cellulose, and poly( l‐lactide) through electrospinning and radiofrequency plasma treatment and to examine the scaffold's physicochemical and biological properties. Fourier transform infrared spectroscopy revealed its chemistry, and scanning electron microscopy showed fine interconnecting microfibrous fibers; it was super‐hydrophilic with low crystallinity (25.59%) and great Young's modulus (163.940 ± 8.008 MPa), and it was reasonably degraded. Regarding biological properties, the scaffold was biocompatible by supporting cell attachment and viability. Cells on the Col‐Cel‐PLL produced high total protein levels and collagen deposition. However, the alkaline phosphatase activity was significantly low.
{"title":"Collagen‐cellulose‐poly(l‐lactide) scaffold by electrospinning and plasma‐assisting fabrication for bone tissue engineering applications","authors":"Zulka Ziblim, B. Thapsukhon, Vachira Choommongkol, Dhreerawan Boonyawan, K. Inthanon, Orawan Khantamat, J. Ruangsuriya","doi":"10.1002/ppap.202300209","DOIUrl":"https://doi.org/10.1002/ppap.202300209","url":null,"abstract":"Novel biomaterials suitable for bone tissue engineering are currently in demand, and reformulating natural and synthetic biomaterials has caught scientists' attention. Cellulose and collagen have been utilized in biomedical fields. This research aimed to fabricate collagen‐cellulose‐poly(l‐lactide) (Col‐Cel‐PLL) scaffold using collagen, cellulose, and poly(\u0000l‐lactide) through electrospinning and radiofrequency plasma treatment and to examine the scaffold's physicochemical and biological properties. Fourier transform infrared spectroscopy revealed its chemistry, and scanning electron microscopy showed fine interconnecting microfibrous fibers; it was super‐hydrophilic with low crystallinity (25.59%) and great Young's modulus (163.940 ± 8.008 MPa), and it was reasonably degraded. Regarding biological properties, the scaffold was biocompatible by supporting cell attachment and viability. Cells on the Col‐Cel‐PLL produced high total protein levels and collagen deposition. However, the alkaline phosphatase activity was significantly low.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":null,"pages":null},"PeriodicalIF":3.5,"publicationDate":"2024-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139834496","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zulka Ziblim, B. Thapsukhon, Vachira Choommongkol, Dhreerawan Boonyawan, K. Inthanon, Orawan Khantamat, J. Ruangsuriya
Novel biomaterials suitable for bone tissue engineering are currently in demand, and reformulating natural and synthetic biomaterials has caught scientists' attention. Cellulose and collagen have been utilized in biomedical fields. This research aimed to fabricate collagen‐cellulose‐poly(l‐lactide) (Col‐Cel‐PLL) scaffold using collagen, cellulose, and poly( l‐lactide) through electrospinning and radiofrequency plasma treatment and to examine the scaffold's physicochemical and biological properties. Fourier transform infrared spectroscopy revealed its chemistry, and scanning electron microscopy showed fine interconnecting microfibrous fibers; it was super‐hydrophilic with low crystallinity (25.59%) and great Young's modulus (163.940 ± 8.008 MPa), and it was reasonably degraded. Regarding biological properties, the scaffold was biocompatible by supporting cell attachment and viability. Cells on the Col‐Cel‐PLL produced high total protein levels and collagen deposition. However, the alkaline phosphatase activity was significantly low.
{"title":"Collagen‐cellulose‐poly(l‐lactide) scaffold by electrospinning and plasma‐assisting fabrication for bone tissue engineering applications","authors":"Zulka Ziblim, B. Thapsukhon, Vachira Choommongkol, Dhreerawan Boonyawan, K. Inthanon, Orawan Khantamat, J. Ruangsuriya","doi":"10.1002/ppap.202300209","DOIUrl":"https://doi.org/10.1002/ppap.202300209","url":null,"abstract":"Novel biomaterials suitable for bone tissue engineering are currently in demand, and reformulating natural and synthetic biomaterials has caught scientists' attention. Cellulose and collagen have been utilized in biomedical fields. This research aimed to fabricate collagen‐cellulose‐poly(l‐lactide) (Col‐Cel‐PLL) scaffold using collagen, cellulose, and poly(\u0000l‐lactide) through electrospinning and radiofrequency plasma treatment and to examine the scaffold's physicochemical and biological properties. Fourier transform infrared spectroscopy revealed its chemistry, and scanning electron microscopy showed fine interconnecting microfibrous fibers; it was super‐hydrophilic with low crystallinity (25.59%) and great Young's modulus (163.940 ± 8.008 MPa), and it was reasonably degraded. Regarding biological properties, the scaffold was biocompatible by supporting cell attachment and viability. Cells on the Col‐Cel‐PLL produced high total protein levels and collagen deposition. However, the alkaline phosphatase activity was significantly low.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":null,"pages":null},"PeriodicalIF":3.5,"publicationDate":"2024-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139774944","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Siqi Deng, Wenwu Xing, Takeru Sato, S. Zen, Nozomi Takeuchi
Low‐temperature plasma‐assisted nitrogen fixation is a promising method for organic‐polluted soil/water remediation, that improves N‐fertilizer performance and mitigates ammonia emission. Our study explores a novel approach: plasma bubbles‐assisted ammonia treatment, and investigates the role played by various reactive substances in the oxidation of ammonia. The specific reaction pathways and the contribution of OH radicals in the ammonia oxidation process in O2 plasma treatment are determined. Air emerges as the optimal feed gas owing to a positive feedback loop in the reaction between NO2− and H2O2. Air plasma treatment enriches N in the ammonia solution and minimizes ammonia loss during treatment. This study offers new insights into an advanced plasma‐assisted ammonia treatment method.
{"title":"Experimental and theoretical study on reactive oxygen and nitrogen species generation in plasma bubbles with ammonia solution","authors":"Siqi Deng, Wenwu Xing, Takeru Sato, S. Zen, Nozomi Takeuchi","doi":"10.1002/ppap.202300223","DOIUrl":"https://doi.org/10.1002/ppap.202300223","url":null,"abstract":"Low‐temperature plasma‐assisted nitrogen fixation is a promising method for organic‐polluted soil/water remediation, that improves N‐fertilizer performance and mitigates ammonia emission. Our study explores a novel approach: plasma bubbles‐assisted ammonia treatment, and investigates the role played by various reactive substances in the oxidation of ammonia. The specific reaction pathways and the contribution of OH radicals in the ammonia oxidation process in O2 plasma treatment are determined. Air emerges as the optimal feed gas owing to a positive feedback loop in the reaction between NO2− and H2O2. Air plasma treatment enriches N in the ammonia solution and minimizes ammonia loss during treatment. This study offers new insights into an advanced plasma‐assisted ammonia treatment method.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":null,"pages":null},"PeriodicalIF":3.5,"publicationDate":"2024-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139841113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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