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1977 International Electron Devices Meeting最新文献

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Temperature-sensitive switching device thermosenstor 温度敏感开关装置
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189294
J. Nakata, T. Sogo, K. Yamanaka, Y. Mihashi, K. Shirahata
A p-n-p-n temperature-sensitive switching device "Thermosenstor" operatable in the temperature range of -30°C to 150°C has been developed by implanting argon ion to the collector junction of the p-n-p-n structure. Argon ion implantation also permits the device to be less sensitive to the dV/dt triggering as well as to eliminate the on-off switching temperature differential. The construction, characteristics and reliability are described.
通过在p-n-p-n结构的集电极结处注入氩离子,开发了一种工作温度范围为-30℃至150℃的p-n-p-n温度敏感开关器件“热敏器”。氩离子注入还允许该装置对dV/dt触发不那么敏感,并消除开关温度差。介绍了其结构、特点及可靠性。
{"title":"Temperature-sensitive switching device thermosenstor","authors":"J. Nakata, T. Sogo, K. Yamanaka, Y. Mihashi, K. Shirahata","doi":"10.1109/IEDM.1977.189294","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189294","url":null,"abstract":"A p-n-p-n temperature-sensitive switching device \"Thermosenstor\" operatable in the temperature range of -30°C to 150°C has been developed by implanting argon ion to the collector junction of the p-n-p-n structure. Argon ion implantation also permits the device to be less sensitive to the dV/dt triggering as well as to eliminate the on-off switching temperature differential. The construction, characteristics and reliability are described.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"62 10","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134226674","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Femto-Joule, high-speed planar GaAs E-JFET logic 飞焦耳,高速平面GaAs E-JFET逻辑
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189204
R. Zuleeg, J. Notthoff, P. E. Friebertshauser, G. Troeger
Selective ion implantation was utilized to fabricate planar integrated circuits with GaAs enhancement-mode junction field-effect transistors (=E-JFET). A nine-stage ring oscillator was fabricated and served as a test vehicle for assessing the speed-power product for digital applications. Correlation of experimental results with theoretical predictions revealed femto-Joule switching characteristics of short-channel devices with LSI capability. The GaAs depletion-mode metal semiconductor field-effect transistor (=D-MESFET) logic gate performance and IC capability were compared with those of the E-JFET.
采用选择性离子注入技术制备了GaAs增强型结场效应晶体管(=E-JFET)的平面集成电路。制作了一个九级环形振荡器,作为评估数字应用中速度-功率产品的测试载体。实验结果与理论预测的相关性揭示了具有大规模集成电路能力的短通道器件的飞焦耳开关特性。比较了GaAs耗尽型金属半导体场效应晶体管(=D-MESFET)与E-JFET的逻辑门性能和集成电路性能。
{"title":"Femto-Joule, high-speed planar GaAs E-JFET logic","authors":"R. Zuleeg, J. Notthoff, P. E. Friebertshauser, G. Troeger","doi":"10.1109/IEDM.1977.189204","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189204","url":null,"abstract":"Selective ion implantation was utilized to fabricate planar integrated circuits with GaAs enhancement-mode junction field-effect transistors (=E-JFET). A nine-stage ring oscillator was fabricated and served as a test vehicle for assessing the speed-power product for digital applications. Correlation of experimental results with theoretical predictions revealed femto-Joule switching characteristics of short-channel devices with LSI capability. The GaAs depletion-mode metal semiconductor field-effect transistor (=D-MESFET) logic gate performance and IC capability were compared with those of the E-JFET.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133176992","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
High performance thin solar cell 高性能薄太阳能电池
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189335
S. Chiang, B. G. Carbajal, G. F. Wakefield
A silicon solar cell was designed which has collecting junctions on both the illuminated and dark sides. The characteristics of the two junctions are interdependent, thus the cell is called a Tandem Junction Cell (TJC). The photoresponse I-V performance of cells was measured with either collection from both sides or collection from only the nonilluminated side. Current collected from both sides of a 100 micrometer thick TJC cell was approximately 46mA/cm2(AMO), with the maximum expected at 30-50 micrometers. Current collected from the nonilluminated side only was 34 mA/cm2for 125 micrometer cell and 45 mA/cm2is expected for 30-50 micrometer thickness. The performance of the TJC is forecast to yield a Vocof 0.6V, Iscof 50 mA/cm2for an efficiency of approximately 18% (AMO, 25°C). Comparison of the experimental and calculated current collection results shows close agreement.
设计了一种硅太阳能电池,在发光面和黑暗面都有收集结。这两个连接的特性是相互依赖的,因此这种细胞被称为串联连接细胞(TJC)。测量细胞的光响应I-V性能,要么从两侧收集,要么只从未照明的一侧收集。从100微米厚的TJC电池两侧收集的电流约为46mA/cm2(AMO),最大电流预计在30-50微米处。对于125微米的电池,仅从未照明侧收集的电流为34 mA/cm2,对于30-50微米的厚度,预计电流为45 mA/cm2。预计TJC的性能将产生0.6V的voc, 50 mA/cm2的isc2,效率约为18% (AMO, 25°C)。实验结果与计算结果的比较表明,两者吻合较好。
{"title":"High performance thin solar cell","authors":"S. Chiang, B. G. Carbajal, G. F. Wakefield","doi":"10.1109/IEDM.1977.189335","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189335","url":null,"abstract":"A silicon solar cell was designed which has collecting junctions on both the illuminated and dark sides. The characteristics of the two junctions are interdependent, thus the cell is called a Tandem Junction Cell (TJC). The photoresponse I-V performance of cells was measured with either collection from both sides or collection from only the nonilluminated side. Current collected from both sides of a 100 micrometer thick TJC cell was approximately 46mA/cm2(AMO), with the maximum expected at 30-50 micrometers. Current collected from the nonilluminated side only was 34 mA/cm2for 125 micrometer cell and 45 mA/cm2is expected for 30-50 micrometer thickness. The performance of the TJC is forecast to yield a Vocof 0.6V, Iscof 50 mA/cm2for an efficiency of approximately 18% (AMO, 25°C). Comparison of the experimental and calculated current collection results shows close agreement.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134096172","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Silicon on sapphire magnetodiodes of high sensitiveness 高灵敏度蓝宝石上硅磁二极管
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189178
G. Kamarinos, P. Viktorovitch, S. Cristoloveanu, J. Borel, R. Staderini
The values of recombination parameters (bulk lifetime and surface recombination velocities) of films of Silicon On Sapphire allow the realization of magnetodiodes, which are both very sensitive and compatible with the VLSI Technology. The S. O. S. magnetodiodes we present exhibit an average sensitiveness on the order of some 150 mA/Tesla (10 times the sensitiveness of Hall effect). Besides very low magnetic fields (B = 10-8T = 10γ) are easily detectable.
蓝宝石上硅薄膜的复合参数(体寿命和表面复合速度)的值允许实现磁致二极体,既非常敏感,又与超大规模集成电路技术兼容。我们提出的s.o.s.磁二极管的平均灵敏度约为150 mA/Tesla(霍尔效应灵敏度的10倍)。此外,很容易检测到极低的磁场(B = 10-8T = 10γ)。
{"title":"Silicon on sapphire magnetodiodes of high sensitiveness","authors":"G. Kamarinos, P. Viktorovitch, S. Cristoloveanu, J. Borel, R. Staderini","doi":"10.1109/IEDM.1977.189178","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189178","url":null,"abstract":"The values of recombination parameters (bulk lifetime and surface recombination velocities) of films of Silicon On Sapphire allow the realization of magnetodiodes, which are both very sensitive and compatible with the VLSI Technology. The S. O. S. magnetodiodes we present exhibit an average sensitiveness on the order of some 150 mA/Tesla (10 times the sensitiveness of Hall effect). Besides very low magnetic fields (B = 10-8T = 10γ) are easily detectable.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"469 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114202138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Performance of a 350 character TFT-LC display panel 350字符TFT-LC显示面板的性能
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189330
F. Luo, D. Davies, W. Hester, T. Brody
The problems encountered in increasing the resolution of a 6" × 6" TFT addressed liquid crystal display from 20 lpi to 30 lpi are described, together with the solutions developed. The major problem relates to the reduced capacitance of the LC element resulting in a lack of frame period storage. Two approaches were utilized: the first consisted of a systematic effort to analyze the factors that influence off "leakage" current in the TFT. As a consequence of this a TFT with leakage current of less than one nanoampere was achieved. The alternate approach was to incorporate an extra 5 pF capacitor in each display element. A layout of the matrix circuit was developed which incorporated the capacitor under the gate bus bar, thereby avoiding a sacrifice in the active area of the display element. Both approaches were successful and good quality displays fabricated. Electrical design considerations, TFT fabrication principles and performance of the resulting 6" × 6" 30 lpi TFT-LC panel will be presented.
描述了将6“× 6”TFT寻址液晶显示器的分辨率从20 lpi提高到30 lpi所遇到的问题,以及开发的解决方案。主要问题是LC元件的电容降低,导致帧周期存储不足。采用了两种方法:第一种方法包括系统地分析影响TFT中“泄漏”电流的因素。因此,实现了泄漏电流小于1纳米安培的TFT。另一种方法是在每个显示元件中加入一个额外的5pf电容器。设计了矩阵电路的布局,将电容置于栅极汇流排下,从而避免了显示元件有源区域的牺牲。这两种方法都取得了成功,并制造出了高质量的显示器。将介绍电气设计考虑因素,TFT制造原理以及由此产生的6“× 6”30 lpi TFT- lc面板的性能。
{"title":"Performance of a 350 character TFT-LC display panel","authors":"F. Luo, D. Davies, W. Hester, T. Brody","doi":"10.1109/IEDM.1977.189330","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189330","url":null,"abstract":"The problems encountered in increasing the resolution of a 6\" × 6\" TFT addressed liquid crystal display from 20 lpi to 30 lpi are described, together with the solutions developed. The major problem relates to the reduced capacitance of the LC element resulting in a lack of frame period storage. Two approaches were utilized: the first consisted of a systematic effort to analyze the factors that influence off \"leakage\" current in the TFT. As a consequence of this a TFT with leakage current of less than one nanoampere was achieved. The alternate approach was to incorporate an extra 5 pF capacitor in each display element. A layout of the matrix circuit was developed which incorporated the capacitor under the gate bus bar, thereby avoiding a sacrifice in the active area of the display element. Both approaches were successful and good quality displays fabricated. Electrical design considerations, TFT fabrication principles and performance of the resulting 6\" × 6\" 30 lpi TFT-LC panel will be presented.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116863499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Evidence of avalanche breakdown and microplasma noise in GaAs MESFETs 砷化镓mesfet中雪崩击穿和微等离子体噪声的证据
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189249
C. Tsironis, H. Beneking
Noise and prebreakdown properties of VPE GaAs MESFETs with and without VPE buffer layer have been investigated. The 1µm gate elements have been produced in the same common manner and with the same geometry starting from the same wafer. With buffer layer no prebreakdown effects are observed. Without buffer layer the instabilities of the DC characteristics, loops and current jumps, as well as the corresponding noise spikes and the noise spectrum can be related to microplasmas activated by avalanche breakdown in the space charge layer of the epi-substrate interface. This effect is located below the drain contact of the MESFETs and is associated by a substrate current flow, no gate current being present. The higher noise factor, also for frequencies higher than X-band, as well as anomalously low values of the breakdown voltage in power devices without buffer layer seems to be affected by that effect.
研究了有和没有VPE缓冲层的VPE GaAs mesfet的噪声和预击穿特性。1µm栅极元件以相同的通用方式和相同的几何形状从相同的晶圆开始生产。有缓冲层时,未观察到预击穿效应。在没有缓冲层的情况下,外延-衬底界面空间电荷层中雪崩击穿激活的微等离子体会导致直流特性、环路和电流跳变的不稳定性以及相应的噪声尖峰和噪声谱。这种效应位于mesfet的漏极触点下方,与基片电流流动有关,没有栅极电流存在。对于频率高于x波段的高噪声因子,以及没有缓冲层的功率器件中击穿电压的异常低值似乎受到该效应的影响。
{"title":"Evidence of avalanche breakdown and microplasma noise in GaAs MESFETs","authors":"C. Tsironis, H. Beneking","doi":"10.1109/IEDM.1977.189249","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189249","url":null,"abstract":"Noise and prebreakdown properties of VPE GaAs MESFETs with and without VPE buffer layer have been investigated. The 1µm gate elements have been produced in the same common manner and with the same geometry starting from the same wafer. With buffer layer no prebreakdown effects are observed. Without buffer layer the instabilities of the DC characteristics, loops and current jumps, as well as the corresponding noise spikes and the noise spectrum can be related to microplasmas activated by avalanche breakdown in the space charge layer of the epi-substrate interface. This effect is located below the drain contact of the MESFETs and is associated by a substrate current flow, no gate current being present. The higher noise factor, also for frequencies higher than X-band, as well as anomalously low values of the breakdown voltage in power devices without buffer layer seems to be affected by that effect.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117104397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Safe method of designing of power transistors circuits with forward second breakdown taken into consideration 考虑正向二次击穿的功率晶体管电路的安全设计方法
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189276
Z. Pióro
In this paper the results of studies of second breakdown phenomenon in bipolar transistors are presented. Along with this a new feature of second breakdown phenomenon and new method of designing of electronic power circuits based on this feature is discussed.
本文介绍了双极晶体管二次击穿现象的研究结果。同时讨论了二次击穿现象的新特征和基于此特征的电力电路设计新方法。
{"title":"Safe method of designing of power transistors circuits with forward second breakdown taken into consideration","authors":"Z. Pióro","doi":"10.1109/IEDM.1977.189276","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189276","url":null,"abstract":"In this paper the results of studies of second breakdown phenomenon in bipolar transistors are presented. Along with this a new feature of second breakdown phenomenon and new method of designing of electronic power circuits based on this feature is discussed.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"96 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124675278","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A high gain vertical channel controlled thyristor 一种高增益垂直通道控制晶闸管
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189151
B. Wessels, B. Baliga
A new vertical channel field controlled thyristor structure is described. This device has a surface grid structure with a high channel length to width aspect ratio which simultaneously allows achieving high blocking gains and fast gate turn-off capability. The devices have the capability of blocking more than 1000 volts with an applied grid bias of 32 volts, and simultaneously exhibiting a low forward voltage drop in the on-state. In addition, the surface grid structure allows gate turn-off capability with a cathode current turn-off time of less than 0.5 microseconds.
介绍了一种新的垂直沟道场控晶闸管结构。该器件具有具有高通道长宽比的表面网格结构,同时允许实现高阻塞增益和快速栅极关断能力。该器件具有阻挡超过1000伏的能力,外加32伏的栅极偏置,同时在导通状态下表现出低正向压降。此外,表面网格结构允许栅极关断能力,阴极电流关断时间小于0.5微秒。
{"title":"A high gain vertical channel controlled thyristor","authors":"B. Wessels, B. Baliga","doi":"10.1109/IEDM.1977.189151","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189151","url":null,"abstract":"A new vertical channel field controlled thyristor structure is described. This device has a surface grid structure with a high channel length to width aspect ratio which simultaneously allows achieving high blocking gains and fast gate turn-off capability. The devices have the capability of blocking more than 1000 volts with an applied grid bias of 32 volts, and simultaneously exhibiting a low forward voltage drop in the on-state. In addition, the surface grid structure allows gate turn-off capability with a cathode current turn-off time of less than 0.5 microseconds.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122965292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Numerical model of the thyristor turn off 晶闸管关断的数值模型
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189240
M. Lietz
Numerical modelling of semiconductor device operation has become a useful tool for obtaining a better understanding of physical behavior and for optimizing device performance. In the field of thyristors only a few aspects of transient processes have so far been described. In this paper, results will be presented of the turnoff behavior of power thyristors, based on a numerical one-dimensional time-dependent model of a p+pnpn+structure. The phenomenological semiconductor equations are solved including realistic mobility dependencies and arbitrary base width, doping profile, carrier lifetime distribution, and current commutation rate. Emphasis is laid on the reverse current phase. It is shown: to what extent the reverse current depletes the base - the building up of the blocking voltage and the corresponding reverse current peak - the reverse recovery phase - the dependencies on lifetime distribution, initial current and current commutation rate, which can partly be expressed by analytical formulae. Conclusions concerning the most favorable lifetime profiles are drawn. The calculations are in good agreement with voltage versus time measurements performed on standard devices.
半导体器件操作的数值模拟已经成为更好地理解物理行为和优化器件性能的有用工具。在晶闸管领域,迄今为止只描述了瞬态过程的几个方面。本文将基于p+pnpn+结构的一维时间依赖模型,给出功率晶闸管关断行为的结果。求解了包括实际迁移率依赖关系和任意基宽、掺杂谱、载流子寿命分布和电流换流率在内的现象学半导体方程。重点放在反向电流相位上。结果表明:反向电流消耗基极的程度——阻塞电压和相应反向电流峰值的建立——反向恢复相位——与寿命分布、初始电流和电流换流率的关系,可以部分地用解析公式表示。得出了关于最有利的寿命曲线的结论。计算结果与在标准器件上进行的电压与时间测量结果很好地吻合。
{"title":"Numerical model of the thyristor turn off","authors":"M. Lietz","doi":"10.1109/IEDM.1977.189240","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189240","url":null,"abstract":"Numerical modelling of semiconductor device operation has become a useful tool for obtaining a better understanding of physical behavior and for optimizing device performance. In the field of thyristors only a few aspects of transient processes have so far been described. In this paper, results will be presented of the turnoff behavior of power thyristors, based on a numerical one-dimensional time-dependent model of a p+pnpn+structure. The phenomenological semiconductor equations are solved including realistic mobility dependencies and arbitrary base width, doping profile, carrier lifetime distribution, and current commutation rate. Emphasis is laid on the reverse current phase. It is shown: to what extent the reverse current depletes the base - the building up of the blocking voltage and the corresponding reverse current peak - the reverse recovery phase - the dependencies on lifetime distribution, initial current and current commutation rate, which can partly be expressed by analytical formulae. Conclusions concerning the most favorable lifetime profiles are drawn. The calculations are in good agreement with voltage versus time measurements performed on standard devices.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122678781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Advanced compatible LSI process for N-MOS, CMOS and bipolar transistors 先进的兼容N-MOS, CMOS和双极晶体管的LSI工艺
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189225
B. Hoefflinger, J. Schneider, G. Zimmer
An advanced LSI process is presented which puts high-performance, high-density n-MOS enhancement/depletion, CMOS and npn bipolar transistors on the same chip in order to realize on-chip systems with combined analog and digital functions. The process involves 6 masks for structure definition and up to 3 photoresist masks for selective implants. Doping is done exclusively by implantation. Standard deviations of MOS threshold voltages are < 100 mV, bipolar current gains can be set between 60 and 300. Sheet resistances of the source and drain as well as the inactive base regions are low for high-frequency performance and high levels of integration. Field threshold and breakdown voltages exceed 25 V.
提出了一种先进的大规模集成电路工艺,将高性能、高密度n-MOS增强/耗尽、CMOS和npn双极晶体管集成在同一芯片上,以实现具有模拟和数字功能的片上系统。该过程涉及6个用于结构定义的掩膜和多达3个用于选择性植入物的光刻胶掩膜。兴奋剂只能通过植入来完成。MOS阈值电压的标准差< 100mv,双极电流增益可设置在60 ~ 300之间。源极和漏极以及非活动基极区域的片电阻对于高频性能和高集成度来说是低的。场阈值和击穿电压超过25v。
{"title":"Advanced compatible LSI process for N-MOS, CMOS and bipolar transistors","authors":"B. Hoefflinger, J. Schneider, G. Zimmer","doi":"10.1109/IEDM.1977.189225","DOIUrl":"https://doi.org/10.1109/IEDM.1977.189225","url":null,"abstract":"An advanced LSI process is presented which puts high-performance, high-density n-MOS enhancement/depletion, CMOS and npn bipolar transistors on the same chip in order to realize on-chip systems with combined analog and digital functions. The process involves 6 masks for structure definition and up to 3 photoresist masks for selective implants. Doping is done exclusively by implantation. Standard deviations of MOS threshold voltages are < 100 mV, bipolar current gains can be set between 60 and 300. Sheet resistances of the source and drain as well as the inactive base regions are low for high-frequency performance and high levels of integration. Field threshold and breakdown voltages exceed 25 V.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128389313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
期刊
1977 International Electron Devices Meeting
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