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1977 International Electron Devices Meeting最新文献

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PbS-Si anisotype heterojunction characteristics PbS-Si各向异性异质结特性
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189316
A. Steckl, H. Elabd, T. Jakobus
The operation of p-n PbS-Si heterojunction devices at 200 K and 300 K is reported. The I-V and C-V characteristics are presented and compared to those of p-p heterojunctions. At 200 K and a wavelength of 2.7 µm, the open circuit detectivity and voltage responsivity achieved are D*λ(100 Hz, 1 Hz) = 4 × 109cm Hz1/2/W and RV, λ(100 Hz) = 4 × 103V/W. Under the same conditions but in short circuit, zero bias operation, the detector performance achieved is, D*λ(100 Hz, 1 Hz = 3.4 × 109cm Hz1/2/W and RI, λ, = 4.8 × 10-4A/W.
报道了p-n PbS-Si异质结器件在200k和300k下的工作情况。给出了其I-V和C-V特性,并与p-p异质结进行了比较。在200 K和2.7µm波长下,得到的开路探测率和电压响应率分别为D*λ(100 Hz, 1 Hz) = 4 × 109cm Hz1/2/W和RV, λ(100 Hz) = 4 × 103V/W。在相同条件下但在短路、零偏工作时,所实现的探测器性能为,D*λ(100 Hz, 1 Hz = 3.4 × 109cm Hz1/2/W, RI, λ = 4.8 × 10-4A/W。
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引用次数: 1
A perspective on electron bombarded semiconductor power devices 电子轰击半导体功率器件的展望
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189185
D. J. Bates, R. Knight
For 20 years, Electron Bombarded Semiconductor, or EBS, devices have shown promise for power amplification and power control applications. Until recently, products were not available; however, commercially available devices now provide characteristics superior to competing semiconductors and vacuum tubes. For the EBS operating principle, two device configurations and present and projected performance characteristics are given. Also included are figures of merit for pulsed and CW amplifiers for use in comparing the EBS with other devices. The life cycle of the EBS, from its birth through its present early adolescence, has involved Considerable struggle. The marriage of two foreign technologies has resulted in an offspring which only now is justifying the support of its early advocates, thus, the EBS must be considered to be an emerging device. This should be remembered when comparisons are made to RF power transistors, which are mature devices with only small evolutionary performance improvements to be expected in the future.
20年来,电子轰击半导体(EBS)设备在功率放大和功率控制应用方面显示出了前景。直到最近,产品还没有上市;然而,商业上可用的设备现在提供优于竞争半导体和真空管的特性。对于EBS的工作原理,给出了两种设备配置以及目前和预计的性能特征。还包括脉冲和连续波放大器的优点数字,用于将EBS与其他设备进行比较。EBS的生命周期,从它的诞生到它现在的青春期早期,包含了相当多的斗争。两种外国技术的结合产生了现在才证明其早期拥护者支持的后代,因此EBS必须被视为新兴设备。当与射频功率晶体管进行比较时,应该记住这一点,射频功率晶体管是成熟的器件,未来只有很小的性能改进。
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引用次数: 0
Stroboscopic scanning electron microscope to observe two-dimensional and dynamic potential distribution of semiconductor devices 频闪扫描电子显微镜观察半导体器件的二维和动态电位分布
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189301
K. Ura, H. Fujioka, T. Hosokawa
The stroboscopic SEM is very usuful to observe the dynamic voltage contrast image of semiconductor devices at a certain phase of repeating cycles. It consists of the usual SEM and the pulse gate which is inserted between the electron gun and the first condenser lens. The effect which affects the pulse width in the picosecond region is avoided in the design of the pulse gate. The shortest half-width of pulse is 0.2 ps. The spot size at usual pulse operations (several ps - several ns) is smaller than 0.1 µm. Examples of the two-dimensional voltage contrast images are shown in cases of 1 GHz Gunn diode and of a Simple 8 MHz IC.
频闪扫描电镜对于观察半导体器件在重复周期的某一相位的动态电压对比图像是非常有用的。它由通常的扫描电镜和插在电子枪和第一个聚光镜之间的脉冲门组成。在脉冲门的设计中避免了对皮秒区脉宽的影响。脉冲的最短半宽为0.2 ps,通常脉冲操作(几个ps -几个ns)的光斑尺寸小于0.1µm。二维电压对比图像的例子显示在1 GHz的Gunn二极管和一个简单的8 MHz IC的情况下。
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引用次数: 3
Planar GaAs integrated circuits fabricated by ion implantation 离子注入制备平面砷化镓集成电路
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189206
B. Welch, R. Eden
A unique fabrication technology is described for planar ion implanted GaAs integrated circuits. The planar processing techniques presented are compatible with any GaAs IC logic approach and promise fabrication yields compatible with the long-term goals of LSI circuit complexities. Planar depletion-mode GaAs ICs have been fabricated using multiple localized implantations directly into semi-insulating GaAs substrates. Fabrication techniques for the fine-line circuit lithography include the utilization of a 4× projection mask aligner. Performance of planar GaAs NOR gates exhibit excellent switching characteristics and low power levels.
介绍了一种独特的平面离子注入砷化镓集成电路的制备工艺。提出的平面处理技术与任何GaAs集成电路逻辑方法兼容,并且保证了与LSI电路复杂性的长期目标兼容的制造产量。在半绝缘的GaAs衬底上直接植入多个局域植入,制备了平面耗尽模式GaAs集成电路。细线电路光刻的制造技术包括使用4×投影掩模对准器。平面GaAs NOR门具有优良的开关特性和低功率水平。
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引用次数: 25
Novel double-heterostructure lasers 新型双异质结构激光器
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189323
A. Springthorpe, M. Rider
In this paper we describe the preparation and characterization of two novel kinds of double-heterostructure (DH) lasers which combine both the Burrus LED and oxide-stripe laser technologies. Laser emission from one of the devices (Type I) emerges from a pair of holes which are etched through the substrate to expose the n-GaAlAs first confining layer. The n-GaAlAs/air interface forms the mirrors of the resonant optical cavity and the laser emission is perpendicular to the gain region, (active layer of the DH). In the second device (Type II) the resonant cavity is formed between the n-GaAlAs/air interface and a
本文描述了两种新型双异质结构(DH)激光器的制备和表征,这两种激光器结合了Burrus LED和氧化条纹激光技术。其中一个器件(I型)的激光发射从一对通过衬底蚀刻的孔中出现,以暴露n-GaAlAs第一限制层。n-GaAlAs/空气界面形成谐振光学腔的反射镜,激光发射垂直于增益区(DH的有源层)。在第二种器件(类型II)中,谐振腔在n-GaAlAs/空气界面和a
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引用次数: 1
A short channel MOSFET model 一个短沟道MOSFET模型
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189306
E. Valsamakis
The MOSFET equivalent circuit model described incorporates short channel and temperature effects. It includes expressions for the device current in the subthreshold, triode and saturation regions and uses a field dependent mobility and a drain voltage dependent threshold voltage. The drain current-voltage characteristic and its first derivative are continuous in all regions. Relationships for the gate-source and gate-drain capacitances are derived as a function of the device potentials using a field dependent mobility. Using the closed form expressions of this model, simulations were performed for micron long devices having uniform and ion-implanted channel profiles and compared with data at room, above room and liquid nitrogen temperature.
所描述的MOSFET等效电路模型包含了短通道和温度效应。它包括亚阈值、三极管和饱和区域的器件电流表达式,并使用依赖于场的迁移率和依赖于漏极电压的阈值电压。漏极电流-电压特性及其一阶导数在所有区域都是连续的。栅极-源和栅极-漏电容的关系是利用场相关迁移率作为器件电位的函数推导出来的。利用该模型的封闭形式表达式,对具有均匀通道和离子注入通道的微米长器件进行了模拟,并与室温、室温以上和液氮温度下的数据进行了比较。
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引用次数: 5
Fabrication and characterization of a VMOS EPROM VMOS EPROM的制造与表征
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189231
D. Draper, J. Barnes, F. Jenne
This paper presents experimental results for the performance of the VMOS EPROM device. The fabrication of the device is presented, followed by data for programmability and data retention. The device programs with lower applied voltages than other EPROM devices, and its projected data retention characteristic predicts a threshold drop of less than 1 volt in 40 years at 150°C junction temperature. EPROM device modeling for use in circuit simulation is also presented. Methods to calculate the capacitors associated with the device are shown for the VMOS geometry, and it is shown that no weak-inversion current exists due to drain coupling.
本文给出了VMOS EPROM器件性能的实验结果。介绍了该器件的制作,然后给出了可编程性和数据保留的数据。该器件程序比其他EPROM器件具有更低的施加电压,其预测的数据保留特性预测在150°C结温下40年内阈值下降小于1伏。本文还介绍了用于电路仿真的EPROM器件建模。根据VMOS的几何结构,给出了与器件相关的电容的计算方法,结果表明,由于漏极耦合,不存在弱反转电流。
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引用次数: 1
A broadband high power EBS amplifier for VHF/UHF 用于VHF/UHF的宽带高功率EBS放大器
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189186
D.H. Smith, L. Roberts, R. Knight
This paper describes an EBS amplifier for high power, broadband operation in the VHF/UHF frequency bands. The wideband EBS uses a deflected beam configuration with the semiconductor target internally interconnected to provide Class B operation. The electrical and mechanical design of this amplifier are described as well as representative performance data. To date, over 500W CW has been achieved at 50 MHz, and a bandwidth of 30-350 MHz has been achieved at 300 W CW. Further improvements in these performance levels are expected in the next few months leading to devices capable of 500W CW output over a 400 MHz band. Overall efficiencies in excess of 50% have been demonstrated, and typical power gain is in excess of 20dB. Linearity, intermodulation distortion, and harmonic content are described as well as life test data which predicts a life expectancy well in excess of 20,000 hours.
本文介绍了一种用于VHF/UHF频段高功率宽带工作的EBS放大器。宽带EBS使用偏转波束配置,半导体目标内部互连以提供B级操作。介绍了该放大器的电气和机械设计,并给出了具有代表性的性能数据。到目前为止,在50 MHz下已经实现了超过500W的连续波,在300 W连续波下已经实现了30-350 MHz的带宽。这些性能水平的进一步改进预计将在未来几个月内导致能够在400mhz频段上输出500W连续波的设备。总体效率超过50%,典型功率增益超过20dB。线性,互调失真和谐波含量描述以及寿命测试数据,预测寿命超过20,000小时。
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引用次数: 0
Composite bipolar and field effect carrier domain devices 复合双极和场效应载波域器件
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189199
A. Ochoa, D. Hamilton
The distributed nature of devices has generally not been advantageously utilized by integrated circuit designers. Such effects have been regarded as parasitic and efforts to minimize their presence have allowed I.C. designers to proceed along design rules and philosophies little modified from those established for discrete circuits. One area that fully employs distributed properties of the device structure is that of Carrier Domain Devices (CDD's). The purpose of this paper is to present an analysis of CDD's based on Green's Functions, and to discuss some applications.
集成电路设计者通常没有很好地利用器件的分布式特性。这种影响被认为是寄生的,为了尽量减少它们的存在,集成电路的设计者们可以按照分立电路的设计规则和理念进行设计,而这些规则和理念几乎没有改变。载波域器件(CDD)是充分利用器件结构的分布式特性的一个领域。本文的目的是对基于格林函数的CDD进行分析,并讨论一些应用。
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引用次数: 0
Effects of interface states, tunneling, and metal in silicon MOS solar cells 硅基MOS太阳能电池中界面态、隧道效应和金属的影响
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1977.189160
S. Kar
An attempt has been made to present a comprehensive theory for silicon MOS solar cells. This theory indicates that an increase in silicon band-bending, i.e. the silicon barrier, along with the expected increase in the oxide potential barrier with increasing oxide thickness reduces the majority carrier diode current by many orders of magnitude. This enhances the open-circuit voltage. The minority carrier photocurrent is not disturbed so long as the rate of minority carrier tunneling through the oxide remains larger than their rate of arrival at the interface. Detailed investigations are in progress to obtain experimental data on the dependence of interface states, tunneling transmission factor silicon band-bending, and the oxide voltage on the oxide thickness and the front contact metal. The experimental results obtained so far support the theory described here.
试图提出一种硅MOS太阳能电池的综合理论。该理论表明,随着氧化物厚度的增加,硅带弯曲的增加,即硅势垒的增加,以及氧化势垒的预期增加,会使多数载流子二极管电流降低许多数量级。这提高了开路电压。只要少数载流子隧穿氧化物的速率大于它们到达界面的速率,少数载流子光电流就不会受到干扰。详细研究了界面态、隧道传输系数、硅带弯曲和氧化物电压对氧化物厚度和前接触金属的依赖关系的实验数据。到目前为止得到的实验结果支持这里所描述的理论。
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引用次数: 2
期刊
1977 International Electron Devices Meeting
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