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2006 IEEE Conference on Emerging Technologies - Nanoelectronics最新文献

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KrF Lithography for Si based 2D honey comb lattice pillars 硅基二维蜂窝状晶格柱的KrF光刻技术
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609749
S. S. Mehta, B. Murthy, N. Singh
We report 248 nm KrF lithography techniques to fabricate two dimensional (2D) honey comb lattice photonic crystal on 8-inch silicon substrate . Through R-soft simulation we find maximum transverse magnetic (TM) band gap at normalized frequency of 0.322 and pillar diameter of 0.210 um for a lattice constant of 0.5 um . Experimental results show 0.214 um pillar diameter at pitch 0.5 um with good process latitude which is very close to R-soft simulation result
我们报道了248 nm KrF光刻技术在8英寸硅衬底上制备二维蜂窝状晶格光子晶体。通过R-soft仿真,我们发现当晶格常数为0.5 um时,在归一化频率为0.322、柱径为0.210 um时,横磁(TM)带隙最大。实验结果表明,柱径为0.214 um,节距为0.5 um,工艺纬度较好,与R-soft仿真结果非常接近
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引用次数: 0
Optical properties of Zn1-xMgxO nano-particles obtained by low temperature method 低温法制备Zn1-xMgxO纳米粒子的光学性质
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609726
M. Ghosh, A. Raychaudhuri
In this paper we report synthesis of Magnesium substituted Zinc Oxide (Zn1-xMgxO) nano-particles (~8-10nm) by low temperature solution route. We could reach upto x=0.075 without MgO getting segregated. Rietveld analysis of the XRD data confirms the Wurzite structure and a continuous compaction of the lattice as x increases. The bandgap also gets enhanced as x is increased and reaches a value of 4eV for x=0.075. The absorption also shows persistence of the excitoinc absorption on Mg substitution. The nanoparticles show near band edge photo luminescence (PL) at room temperature which shows blue shift on Mg incorporation.
本文报道了低温溶液法合成镁取代氧化锌(Zn1-xMgxO)纳米颗粒(~8 ~ 10nm)。我们可以达到x=0.075而不分离MgO。XRD数据的Rietveld分析证实了纤锌矿结构,并且随着x的增加,晶格连续压实。带隙也随着x的增加而增强,并在x=0.075时达到4eV的值。吸收也显示了对Mg取代的激发吸收的持久性。纳米颗粒在室温下表现出近带边光发光(PL),在Mg掺入时表现出蓝移。
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引用次数: 3
Nanotube based Vertical Nano-devices for High Integration Density 基于纳米管的高集成度垂直纳米器件
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609695
J. Jang, S. Cha, Y. Choi, D. Kang, T. Butler, D. Hasko, J.E. Jung, J.M. Kim, G. Amaratunga
Various nano-devices based on vertical nanotubes were developed. Carbon nanotubes (CNTs) were employed as a functional part or a nano structure of a nanoelectromechanical (NEM) switch, nano-capacitor, and NEM-dynamic random access memory (DRAM). The unique vertical structure of nanotubes allows high integration density for devices.
基于垂直纳米管的各种纳米器件被开发出来。碳纳米管(CNTs)被用作纳米机电(NEM)开关、纳米电容器和NEM动态随机存取存储器(DRAM)的功能部件或纳米结构。纳米管独特的垂直结构使得器件具有较高的集成密度。
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引用次数: 1
Investigation of Nano-Scale Single Crystal Silicon Using the Atomistic-Continuum Mechanics with Stillinger-Weber Potential Function 基于Stillinger-Weber势函数的原子连续介质力学研究纳米单晶硅
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609680
Chun-Te Lin, K. Chiang
This research proposes a novel atomistic-continuum method (ACM) based on the finite element method (FEM) to investigation the mechanical behavior of nano-scale single crystal silicon under uniaxial tensile loading. The FEM is widely used to model and simulate the mechanical behaviors of solid structure, it is a mature technology after decades of development. The ACM could be reduced efficiently the computational time and maintained the simulation accuracy. Since, the ACM developed the bonding force between the two silicon atoms to the two kinds of the nonlinear spring element. Moreover, due to the FEM considered the minimization of the total potential energy, which includes strain energy and the potential energy possessed by applied loads of SCS, a robust FEM is applied to solve the numerical model based on ACM. Therefore, this study combines FEM and interatomic potential function to explore the mechanical properties of nano-scale single crystal silicon. A general form of Stillinger-Weber potential function was used for interaction between the silicon atoms in the simulations. Simulation results showed that the Young’s modulus of single crystal silicon were 121.8, 153 and 174.6 GPa along the
本研究提出了一种基于有限元法的原子连续介质方法(ACM)来研究纳米单晶硅在单轴拉伸载荷下的力学行为。有限元法广泛应用于实体结构的力学行为建模和模拟,是经过几十年发展的一项成熟技术。该方法可以有效地减少计算时间,保持仿真精度。因此,ACM将两个硅原子之间的结合力发展为两种非线性弹簧元件。此外,由于有限元法考虑了SCS的总势能(包括应变能和外加荷载所具有的势能)的最小化,因此采用基于ACM的鲁棒有限元法求解数值模型。因此,本研究将有限元法与原子间势函数相结合,探讨纳米单晶硅的力学性能。模拟中硅原子间的相互作用采用了一般形式的Stillinger-Weber势函数。模拟结果表明,单晶硅的杨氏模量分别为121.8、153和174.6 GPa
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引用次数: 1
Enhanced Control of Morphology in Thin Film Nanostructure Arrays 薄膜纳米结构阵列中形貌的强化控制
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609768
D. Gish, M. Summers, M. Jensen, M. Brett
Glancing angle deposition (GLAD) was used to grow thin films of silicon and titanium dioxide slanted post nanostructures onto periodically patterned substrates. The patterned substrates consisted of tetragonal arrays of small hillocks with periodicities of 100, 200, and 300 nm. An advanced substrate rotation algorithm called PhiSweep was used during the deposition. The PhiSweep algorithm consists of rotating the substrate back and forth such that the arriving vapour flux direction alternates from either side of desired column tilt direction. This reduces the anisotropy of the shadowing conditions, which diminishes column fanning. The tilt angle of the columns is affected by the PhiSweep parameters, which is important in applications such as square spiral photonic crystals. This relation is derived and confirmed with tilt angle measurements of the slanted post films. The films grown using the PhiSweep method were compared with similar films grown using traditional GLAD. The PhiSweep technique produced films which conformed to the initial periodic pattern much better than the films grown with traditional GLAD, enabling the growth of nanostructure arrays with smaller periodicities.
掠角沉积(GLAD)是一种在周期性图案衬底上生长硅和二氧化钛倾斜柱纳米结构薄膜的方法。图案衬底由周期性为100、200和300 nm的小丘组成的四边形阵列组成。在沉积过程中使用了一种称为PhiSweep的先进基板旋转算法。PhiSweep算法包括来回旋转基板,使得到达的蒸汽通量方向在所需柱倾斜方向的两侧交替。这减少了阴影条件的各向异性,从而减少了柱扇。柱的倾斜角度受phissweep参数的影响,这在方形螺旋光子晶体等应用中很重要。通过对倾斜柱膜的倾斜角测量,推导并证实了这一关系。使用PhiSweep方法生长的薄膜与使用传统GLAD方法生长的类似薄膜进行了比较。与传统的GLAD相比,PhiSweep技术生成的薄膜更符合初始周期模式,从而可以生长具有更小周期的纳米结构阵列。
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引用次数: 2
Self-assembled Molecular Magnets on Patterned Silicon Substrates 图案化硅衬底上自组装分子磁体
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609712
Chia‐Ching Chang, K. Sun, Shang-Fan Lee, L. Kan, C. Kuan
The paper reports the methods of preparing molecular magnets and pattering of the molecules on semiconductor surface. A highly magnetically aligned metallothionein containing Mn and Cd (Mn, Cd-MT-2) was first synthesized. Those molecules were then placed into nanopores prepared on silicon
本文报道了分子磁体的制备方法和分子在半导体表面的图案化。首次合成了一种含锰、镉的高磁排列金属硫蛋白(Mn, Cd- mt -2)。然后将这些分子放入在硅上制备的纳米孔中
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引用次数: 2
Selective Deposition of Hafnium Oxide Nano-Thin Films on OTS Patterned Si 氧化铪纳米薄膜在OTS图像化硅上的选择性沉积
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609763
B. Kang, J. Lee, D. Jung, J. Boo
The patterning of thin films is of considerable scientific and technological interest. Various ways to obtain micro/nano patterns of thin films have been thoroughly investigated. Soft lithography is the method to make micro/nano size patterns and structures simply using organic materials without involving high energy. In particular, microcontact printing (μCP) is a very convenient, nonphotolithographic technique that can generate patterned features of self-assembled monolayers (SAMs) on both planar and nonplanar surfaces. Moreover, the μCP technique shows that hydrophobic patterns with micro/nano dimensions can be formed on hydrophilic surfaces. In this study, we carried out the selective deposition of HfO2nano-thin films on Si
薄膜的图案化具有相当大的科学和技术意义。各种获得薄膜微纳图案的方法得到了深入的研究。软光刻技术是一种利用有机材料制作微/纳米尺寸的图案和结构而不涉及高能量的方法。特别是,微接触印刷(μCP)是一种非常方便的非光刻技术,可以在平面和非平面表面上生成自组装单层(sam)的图案特征。此外,μCP技术表明,在亲水表面上可以形成微纳尺寸的疏水图案。在本研究中,我们在Si上进行了hfo2纳米薄膜的选择性沉积
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引用次数: 0
Biotribological model systems for emerging nanometer scale technologies 新兴纳米尺度技术的生物摩擦学模型系统
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609757
I. Gebeshuber, A. Pauschitz, F. Franek
Technological devices such as pressure sensors, gyroscopes and accelerometers get smaller and smaller. This increases the necessity for the fundamental understanding of tribological phenomena at the micro- and nanometer scale. Biological systems excel also at this scale. The thesaurus that nature has developed during the last millions of years of evolution comprises self-cleaning surfaces, systems with friction coefficients smaller than any occurring in man-made systems and organisms that produce macromolecules with ice binding properties. Such systems with well adapted biotribological properties shall serve as inspiration for innovation in micro- and nanotechnology.
压力传感器、陀螺仪和加速度计等技术设备变得越来越小。这增加了在微观和纳米尺度上对摩擦学现象的基本理解的必要性。生物系统在这个尺度上也表现出色。在过去数百万年的进化过程中,大自然发展出的词典包括自清洁表面、摩擦系数比任何人造系统都小的系统,以及产生具有冰结合特性的大分子的有机体。这种具有良好的生物摩擦学特性的系统将为微纳米技术的创新提供灵感。
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引用次数: 7
Studies on nano silver oxide thin films for optical memories 光存储用纳米氧化银薄膜的研究
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609689
A. Subrahmanyam, P.S. Kumar
In the present work, a novel proof oc concept for rewritable ultra high density nano optical data storage devices has been discussed. Nano silver films are prepared on glass substrates by DC Magnetron sputtering technique at lower temperature (T= 150 K). When these films are oxidised and are irradiated with blue light (λ= 485 nm), a fluorescence emission is observed in the red region (μ ~ 650 nm) . These films are analysed by XRD and AFM. Emission spectrum was recorded using fluorometer. Films of thicknesses 50Å to 600Å are prepared and compared the fluorescence properties. It is observed that the fluorescence emission from the silver clusters depends on growth parameters in sputtering (like substrate temperature or deposition rate) and on the oxidation temperature.
本文讨论了一种新型的可重写超高密度纳米光数据存储器件的证明概念。采用直流磁控溅射技术,在低温(T= 150 K)下在玻璃衬底上制备了纳米银薄膜,氧化后用蓝光(λ= 485 nm)照射,在红光区(μ ~ 650 nm)有荧光发射。用XRD和AFM对这些薄膜进行了分析。用荧光仪记录发射光谱。制备了厚度为50Å ~ 600Å的薄膜,并对其荧光特性进行了比较。观察到,银簇的荧光发射取决于溅射过程中的生长参数(如衬底温度或沉积速率)和氧化温度。
{"title":"Studies on nano silver oxide thin films for optical memories","authors":"A. Subrahmanyam, P.S. Kumar","doi":"10.1109/NANOEL.2006.1609689","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609689","url":null,"abstract":"In the present work, a novel proof oc concept for rewritable ultra high density nano optical data storage devices has been discussed. Nano silver films are prepared on glass substrates by DC Magnetron sputtering technique at lower temperature (T= 150 K). When these films are oxidised and are irradiated with blue light (λ= 485 nm), a fluorescence emission is observed in the red region (μ ~ 650 nm) . These films are analysed by XRD and AFM. Emission spectrum was recorded using fluorometer. Films of thicknesses 50Å to 600Å are prepared and compared the fluorescence properties. It is observed that the fluorescence emission from the silver clusters depends on growth parameters in sputtering (like substrate temperature or deposition rate) and on the oxidation temperature.","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124790679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nano-Forensics ---- Nanoparticles in Gun-Shot-Residue 纳米取证----枪击残留物中的纳米颗粒
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609727
J. Yang, A. Gunn, T. Palmbach, Dongguang Wei, S. Sinha
Analysis of Gun-Shot Residue (GSR) is a very critical step in Forensic studies of shooting and related criminal cases. However, the current techniques used for GSR analysis are not complete. Detailed information regarding the elemental and crystallographic signatures of the GSR are missing. Moreover the analysis requires a substantial amount of sample which is difficult to obtain and frequently might be contaminated. The current study on the GSR focuses on these deficiencies. Electron Microscopic studies of the metallic nanoparticles (10-100 nm in diameter) obtained from GSR at different target distances from a Winchester Super-X 9mm luger has been analyzed in detail. Perfectly spherical (diameter ~ 10 nm) and very crystalline Pb and Sb nanoparticles were observed. Theoretical studies explaining the formation of the nanoparticles is reported. The non-equilibrium thermodynamic processes leading to the synthesis of the nanoparticles was observed to be very similar to the artificial chemical synthesis methods (e. g. CVD, Laser Ablation etc.). A simplified model will be proposed to explain the nanoparticle synthesis process in the GSR. This additional information obtained from the nanoparticle synthesis model will provide valuable forensic evidence in solving criminal cases. Forensic benefits of this information will be discussed. This ingenious synthesis mechanism has been demonstrated in synthesizing pure crystalline form of other popular nanomaterials..
在枪击及相关刑事案件的法医学研究中,射击残留物分析是一个非常关键的环节。然而,目前用于GSR分析的技术并不完善。关于GSR的元素和晶体特征的详细信息缺失。此外,分析需要大量的样品,这些样品很难获得,而且经常可能被污染。目前对GSR的研究主要集中在这些缺陷上。本文详细分析了从温彻斯特Super-X 9mm鲁格机在不同目标距离上从GSR中获得的金属纳米颗粒(直径10- 100nm)的电镜研究。观察到完美球形(直径~ 10 nm)和非常结晶的Pb和Sb纳米颗粒。报道了解释纳米颗粒形成的理论研究。纳米颗粒合成的非平衡热力学过程与人工化学合成方法(如CVD、激光烧蚀等)非常相似。将提出一个简化的模型来解释纳米颗粒在GSR中的合成过程。从纳米粒子合成模型中获得的额外信息将为解决刑事案件提供有价值的法医证据。将讨论该信息的法医益处。这种巧妙的合成机制已被证明在合成纯晶体形式的其他流行的纳米材料。
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引用次数: 3
期刊
2006 IEEE Conference on Emerging Technologies - Nanoelectronics
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