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2006 IEEE Conference on Emerging Technologies - Nanoelectronics最新文献

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Patterning of Functional Materials by Pulsed Laser Deposition through Nanostencils 脉冲激光沉积纳米模板功能材料的图案化研究
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609730
C. Cojocaru, C. Harnagea, A. Pignolet, F. Rosei
We present how various features drawn in a miniature shadow-mask (nanostencil) can be efficiently transferred to a surface in the form of 3D nanostructures of metals (Pt, Cr), semiconductors (Ge) or complex oxides (e.g. BaTiO3) by room temperature pulsed laser deposition (PLD) and stenciling. Using the proposed method, there is no aggressive interaction with the substrate, but selective deposition of the material by simply interposing a sieve with apertures down to 100 nm between the deposition source and the substrate. Nanostenciling allows organizing the structures in given architectures, with high accuracy, while reducing drastically the number of processes present in resist-based lithography. The material deposited through the stencil mask conserves the desired functionality even at the level of the individual nanostructures. The patterning process is simple and rapid since it is not implying additional processing steps to the deposition process; it is also parallel, resist-less and without interfering with the structures natural growth dynamics. Nanostenciling can be performed in high or ultra high vacuum and is suitable for parallel prototyping of fragile or functionalized surfaces.
我们展示了如何通过室温脉冲激光沉积(PLD)和模印,以金属(Pt, Cr),半导体(Ge)或复杂氧化物(例如BaTiO3)的3D纳米结构的形式有效地将在微型阴影掩膜(纳米模板)中绘制的各种特征转移到表面。使用所提出的方法,没有与衬底的侵略性相互作用,而是通过简单地在沉积源和衬底之间插入孔径低至100 nm的筛子来选择性沉积材料。纳米网孔允许在给定的架构中组织结构,具有很高的精度,同时大大减少了电阻基光刻中存在的工艺数量。通过模板掩膜沉积的材料即使在单个纳米结构的水平上也保留了所需的功能。图案化过程是简单和快速的,因为它不意味着额外的处理步骤沉积过程;它也是平行的,无阻力的,不干扰结构的自然生长动态。纳米模板可以在高真空或超高真空中进行,适用于易碎或功能化表面的平行原型制作。
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引用次数: 0
Dynamic Study of Planar Focusing for a Microfluidic Cell Sorter 微流控电池分选机平面聚焦的动力学研究
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609743
Z. G. Wu, H. N. Cheang, D. Ghista, A. Liu
Planar focusing is widely used in lab-on-a-chip applications and devices. In the previous works, only the steady state was considered for the planar focusing. In this study, a dynamic response of planar focusing is studied using numerical simulation. From our simulation, the response time is various with different inlet velocity and focusing ratio. The results show that at small velocity, the response time is quit short and the velocity magnitude has small influence on response time. Interesting, we also found that the ratio of focusing ratio affect the response time stronger than velocity magnitude. It is useful to design and optimize planar focusing microfluidic cell sorters or other microfluidic devices.
平面聚焦广泛应用于芯片实验室应用和器件中。在以往的工作中,平面聚焦只考虑稳态。本文采用数值模拟方法研究了平面聚焦的动态响应。仿真结果表明,不同的进口速度和聚焦比对响应时间的影响是不同的。结果表明,在小速度下,响应时间较短,速度大小对响应时间的影响较小。有趣的是,我们还发现聚焦比比对响应时间的影响比速度量级更大。对平面聚焦微流控分选器或其他微流控装置的设计和优化具有指导意义。
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引用次数: 0
Effect of Super Saturation Level on the size and morphology of Hydroxyapatite precipitate 超饱和度对羟基磷灰石沉淀大小和形态的影响
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609744
K. Prakash, C. Ooi, R. Kumar, K. Khor, P. Cheang
Hydroxyapatite (HA) is synthesized through acid-base reaction by adding an aqueous solution of orthophosphoric acid to an aqueous solution of calcium hydroxide maintained at 40, 80 and 100°C. X-ray diffraction of the precipitate particles revealed HA as the predominant phase in all the temperatures and that the morphology of the particles changed from needle-shaped at 40°C to spheroid at 100°C. The changes in the morphology with temperature were analyzed taking into account the driving force for the HA precipitation and the super saturation level of Ca2+and PO43-ions with respect to HA. It appears that the effect of temperature on morphology is less pronounced compared to that of super saturation level. The analysis also indicated that the super saturation level of the reactants, especially the concentration of Ca2+ions, played a predominant role on the precipitate morphology for this classical acid-base reaction.
羟基磷灰石(HA)是在40℃、80℃和100℃的氢氧化钙水溶液中加入正磷酸水溶液,通过酸碱反应合成的。x射线衍射结果表明,在所有温度下析出相均以羟基磷灰石为主,颗粒形貌由40℃时的针状变为100℃时的球形。考虑了HA析出的驱动力以及Ca2+和po43离子相对于HA的超饱和水平,分析了形貌随温度的变化。与过饱和水平相比,温度对形貌的影响似乎不那么明显。分析还表明,反应物的过饱和水平,特别是Ca2+离子的浓度,对这一经典酸碱反应的沉淀形态起主导作用。
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引用次数: 11
Sintering of Nano-sized Zirconia Powder Processed by Powder Injection Moulding 粉末注射成型纳米氧化锆粉体的烧结研究
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609700
P. C. Yu, Q.F. Li, J. Fuh
The nano-sized Yttria Stabilized Zirconia (Nano YSZ) powder with an average particles size of 50nm is initially heat treated and then mixed with wax-based binder system. The prepared feedstock is then formed into a shape by powder injection moulding process. The green parts are then thermally debound and sintered. The sintering behavior of the nano-sized particles is presented and compared with those of BASF feedstock. It is found that Nano YSZ can achieve 98% of its theoretical density. Homogenous microstructure is obtained with an average grain size of 500nm. The hardness value of the sintered Nano YSZ is similar to those obtained from BASF feedstock.
对平均粒径为50nm的纳米氧化钇稳定氧化锆(Nano YSZ)粉体进行热处理,然后与蜡基粘结剂体系混合。然后通过粉末注射成型工艺将制备好的原料成形。然后将绿色部分热分解并烧结。介绍了纳米颗粒的烧结性能,并与巴斯夫原料的烧结性能进行了比较。结果表明,纳米YSZ可以达到理论密度的98%。得到均匀的微观组织,平均晶粒尺寸为500nm。烧结后的纳米YSZ硬度值与从巴斯夫原料中获得的硬度值相似。
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引用次数: 3
On the roles of multilayered metal catalysts in the synthesis of high-quality single-walled carbon nanotubes 多层金属催化剂在高质量单壁碳纳米管合成中的作用
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609699
H. Su, K. Shin, K. Leou, C. Tsai
In this paper, high quality single-walled carbon nanotubes (SWNTs) were synthesized by multilayered metal catalysts on silicon or silicon oxide substrate using thermal chemical vapor deposition method. The roles of multilayered metal catalyst were investigated by systematically varying the combinations of multilayered structure. Scanning electron microscopy, Atomic force microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy were used to examine the evolution of the morphology and the oxidation state of each constituent of the multilayered structure in the thermal processes and their roles in controlling the formation of SWNTs.
本文采用热化学气相沉积法,在硅或氧化硅衬底上制备了多层金属催化剂,制备了高质量的单壁碳纳米管。通过系统地改变多层结构的组合,研究了多层金属催化剂的作用。利用扫描电子显微镜、原子力显微镜、俄歇电子能谱和x射线光电子能谱研究了多层结构在热过程中各组分的形貌和氧化态的演变及其在控制单壁碳纳米管形成中的作用。
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引用次数: 0
Phase stability of nanosystems : the thermodynamical approach 纳米系统的相稳定性:热力学方法
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609682
M. Wautelet, A. Shirinyan
The phase diagram of nanoparticles is known to be a function of their size and shape. The variation with temperature depends on the surface tensions involved in the phase transitions. Moreover, when looking at the nucleation process in nanoparticles, it turns out that it is necessary to take into account the fact that the reservoir of matter is limited. This gives rise to three possibilities: phase separation, prohibition of decomposition, formation of metastable phases. It is also shown theoretically that the usual concept of phase diagram has to be reformulated when dealing with nanoparticles.
众所周知,纳米颗粒的相图是它们的大小和形状的函数。随温度的变化取决于相变所涉及的表面张力。此外,在观察纳米颗粒的成核过程时,事实证明有必要考虑到物质储存库是有限的这一事实。这就产生了三种可能性:相分离,禁止分解,形成亚稳相。理论还表明,在处理纳米颗粒时,通常的相图概念必须重新表述。
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引用次数: 0
Fabrication of Nanoscale Multilayer Device by Filtered Cathodic Vacuum Arc for Optical Application 滤波阴极真空电弧制备纳米多层光学器件
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609694
Zhiwei Zhao, B. Tay, D. McCulloch, J. Peng
Multilayer device with 8 nano-layers consisting of alternate TiO2thin films (high refractive index) and Al2O3thin films (low refractive index) have been successfully fabricated by filtered cathodic vacuum arc (FCVA) with two separate cathodic sources. Microstructure and element distribution of multilayer coatings were examined by TEM and electron energy loss spectroscopy (EELS), respectively. The results show that the interfaces of the layers are well defined and exhibit smooth, sharp and flat properties. Each layer with nano-thickness keeps amorphous structure as determined by the electron diffraction pattern and XRD. The bond nature in respective TiO2and Al2O3layers is Ti4+-O2-and Al3+-O2-and no atoms diffuse into the nearby layer as concluded by EELS measurements. Good homogeneity in microstructure and element distribution indicates the potential deposition of multilayer by FCVA for advanced performances including optical application.
采用过滤阴极真空电弧(FCVA)技术,成功制备了由高折射率tio2薄膜和低折射率al2o3薄膜交替组成的8纳米层多层器件。利用透射电镜(TEM)和电子能谱(EELS)分析了多层涂层的微观结构和元素分布。结果表明,层间界面清晰,具有光滑、锋利、平整的特点。电子衍射图和x射线衍射分析表明,每一层的纳米厚度都保持非晶结构。EELS测量结果表明,tio2和al2o3层的键性质分别为Ti4+- o2和Al3+- o2,没有原子扩散到附近的层中。在微观结构和元素分布上良好的均匀性预示着用FCVA沉积多层膜具有包括光学应用在内的先进性能的潜力。
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引用次数: 0
Ferroelectric copolymer P(VDF-TrFE) as gate dielectric in organic field effect transistors for memory application devices 铁电共聚物P(VDF-TrFE)作为存储器应用器件中有机场效应晶体管的栅极介质
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609707
A. Nguyen, P. Lee
Fabrication of ferroelectric memory field effect transistor (FEMFET) is presented with copolymer P(VDF-TrFE) as gate dielectric. Spin-coated copolymer film has semi-crystalline structure after annealing, in which the crystallites contains ferroelectric and paraelectric phase. Dipolar alignment in ferroelectric phase is controlled with the sweeping of transistor gate bias. Ferroelectric remanent polarization enables current retention in the transistor during OFF state that can be used in non-volatile memory application.
以共聚物P(VDF-TrFE)为栅极介质制备了铁电记忆场效应晶体管(FEMFET)。自旋包覆共聚物薄膜退火后具有半结晶结构,其中晶体中含有铁电相和准电相。利用晶体管栅极偏压的扫频控制铁电相的偶极对准。铁电剩余物极化使电流在关断状态下保持在晶体管中,可用于非易失性存储器应用。
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引用次数: 3
New Nanometric Opportunities with High Mobility Semiconductors such as InAs 高迁移率半导体(如InAs)的纳米技术新机遇
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609686
H. Hartnagel
One-dimensioned electron gas (1DEG) structures can be fabricated from suitable hetero-structure sandwiches by using nano-technology Schottky- or MOS lithography. We have grown by MBE InAs sandwiched nearly lattice matched between AlSb and GaSb layers and obtained for InAs thicknesses of around 15 nm a room temperature mobility of up to 32000cm2/Vs, provided that the heterojunction was of InSb type. At 77K the electron gas has a mobility of up to 225000 cm2/Vs. Si-Nanowires are found to have an interesting band structure, which is different from Si bulk material. The InAs 1DEG exhibits a quantum-physical behaviour at low temperatures of a reasonable well defined quantized staircase conductance of a ballistic electron wave with increasing applied voltage. InAs is a material where such behaviour is expected to occur at not too low temperature. If two such 1DEG structures of slightly different geometry in parallel are applied with a triangular voltage, the difference potential between each of these two 1DEG’s is a pulse sequence. The number of pulses obtained then depends on the amplitude of the triangular voltage. This can be considered as a basic unit for an Analogue-Digital Converter. These concepts were initially outlined by us at one of the European workshops, intended for discussion of new ideas. Such nano-conductance lines and zero-DEG quantum dot electronic structures can be interconnected in such a manner that various types of signal processing can be achieved.
利用纳米肖特基或MOS光刻技术,可以在合适的异质结构夹层上制备一维电子气体(1DEG)结构。我们已经在AlSb和GaSb层之间生长了几乎晶格匹配的MBE InAs,并且获得了厚度约为15 nm的InAs,室温迁移率高达32000cm2/Vs,前提是异质结为InSb型。在77K时,电子气体的迁移率高达225000 cm2/Vs。硅纳米线具有不同于硅块材料的有趣的带状结构。InAs 1DEG在低温下表现出一种量子物理行为,随着施加电压的增加,弹道电子波具有合理的、定义良好的量子化阶梯电导。InAs是一种材料,这种行为预计在不太低的温度下发生。如果两个几何形状稍有不同的1DEG结构并联在一个三角形电压上,这两个1DEG结构之间的差电位就是一个脉冲序列。然后得到的脉冲数取决于三角电压的幅值。这可以看作是模数转换器的基本单元。这些概念最初是由我们在一个欧洲研讨会上提出的,目的是讨论新的想法。这种纳米电导线和零度量子点电子结构可以相互连接,从而可以实现各种类型的信号处理。
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引用次数: 0
Size Dependent Surface Energy and Surface Tension 尺寸相关的表面能和表面张力
Pub Date : 2006-03-27 DOI: 10.1109/NANOEL.2006.1609683
H.M. Lu, Q. Jiang
A model for size-dependent surface energy of nanocrystals, γsv(D), has been established based on previous models for bulk surface energy γsv0and the size-dependent cohesive energy E(D). Since the structure and energy differences between solid and liquid are small in comparison with those between solid and gas or between liquid and gas, this model can be extended to describe the size dependence of surface tension γ1v(D). It is found that γsv(D) and γ1v(D) drop monotonically with size in the nanometer region while the surface energy ratio between different facets is size-independent and equals the corresponding bulk one. Moreover, size dependence of Tolman length is also discussed. Modeling predictions agree with the experimental and theoretical results of γsv(D) for beryllium, magnesium, sodium, aluminum and gold, and the computer simulations of γ1v(D) for sodium, and aluminum droplets.
在前人的体积表面能γsv0和内聚能E(D)模型的基础上,建立了纳米晶体尺寸相关表面能γsv(D)模型。由于固液之间的结构和能量差异相对于固气之间或液气之间的结构和能量差异较小,因此可以将该模型推广到描述表面张力γ1v(D)的尺寸依赖性。结果表明,γsv(D)和γ1v(D)在纳米区域随尺寸的增大而单调下降,而不同面间的表面能比与尺寸无关,等于相应的体能比。此外,还讨论了托尔曼长度的尺寸依赖性。模型预测与铍、镁、钠、铝和金的γsv(D)的实验和理论结果以及钠和铝液滴的γ1v(D)的计算机模拟结果一致。
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引用次数: 2
期刊
2006 IEEE Conference on Emerging Technologies - Nanoelectronics
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