Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)最新文献
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.352008
M. Horie, N. Fujiwara, M. Kokubo, N. Kondo
Accurate film thickness controls are indispensable for manufacturing defect-free semiconductor devices. Moreover, recent high integration requires simultaneous measurement of each film thickness and optical constants in multi-layers. This paper explains a microspectroscopic film thickness measurement system that measures film thickness at a very small spot (several micrometers in diameter) in several angstrom increments. This system also enables you to measure film thickness on bulk wafers and SOI wafers, and determine optical constants of unknown films.<>
{"title":"Spectroscopic thin film thickness measurement system for semiconductor industries","authors":"M. Horie, N. Fujiwara, M. Kokubo, N. Kondo","doi":"10.1109/IMTC.1994.352008","DOIUrl":"https://doi.org/10.1109/IMTC.1994.352008","url":null,"abstract":"Accurate film thickness controls are indispensable for manufacturing defect-free semiconductor devices. Moreover, recent high integration requires simultaneous measurement of each film thickness and optical constants in multi-layers. This paper explains a microspectroscopic film thickness measurement system that measures film thickness at a very small spot (several micrometers in diameter) in several angstrom increments. This system also enables you to measure film thickness on bulk wafers and SOI wafers, and determine optical constants of unknown films.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130041585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.352106
N. Pathak, M. Shrivastava
The analysis of an annular ring microstrip antenna covered with lossy dielectrics is presented in this paper. It has been reported in the literature that due to dielectric loading the resonant frequency in the rectangular microstrip antenna changes. The absolute value of the change increases with operating frequency, the relative permittivity and the thickness of dielectric layer. This change may cause degradation in performance due to inherent narrow bandwidth of microstrip antennas if the effect of loading is not considered in the design. Using variational method fractional change in the resonant frequency has been calculated for annular ring microstrip antenna and stacked annular ring microstrip antenna. Experimental results are compared with numerical results and also with the rectangular microstrip antenna. Eventually results are simulated on computer.<>
{"title":"Measurement and computer simulation of resonant frequency for TM/sub g/ mode of annular ring microstrip antenna covered with lossy dielectrics","authors":"N. Pathak, M. Shrivastava","doi":"10.1109/IMTC.1994.352106","DOIUrl":"https://doi.org/10.1109/IMTC.1994.352106","url":null,"abstract":"The analysis of an annular ring microstrip antenna covered with lossy dielectrics is presented in this paper. It has been reported in the literature that due to dielectric loading the resonant frequency in the rectangular microstrip antenna changes. The absolute value of the change increases with operating frequency, the relative permittivity and the thickness of dielectric layer. This change may cause degradation in performance due to inherent narrow bandwidth of microstrip antennas if the effect of loading is not considered in the design. Using variational method fractional change in the resonant frequency has been calculated for annular ring microstrip antenna and stacked annular ring microstrip antenna. Experimental results are compared with numerical results and also with the rectangular microstrip antenna. Eventually results are simulated on computer.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131029787","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.351797
T. Wolinski, M. Muszkowski
A new approach to strain measurement based on Fourier analysis of strain-induced polarization and intermodal coupling in HB two-mode elliptical-core fibers is presented. We have applied the Fourier method to analyze different types of polarization and intermodal couplings occurring in a highly birefringent elliptical-core fiber (UMCS, Lublin). The results obtained indicate that Fourier spectra of sin-like strain-dependent characteristics can create a very important tool in projecting practical devices which will measure longitudinal strain in specific applications.<>
{"title":"Fourier analysis of strain measurement using highly birefringent two-mode optical fibers","authors":"T. Wolinski, M. Muszkowski","doi":"10.1109/IMTC.1994.351797","DOIUrl":"https://doi.org/10.1109/IMTC.1994.351797","url":null,"abstract":"A new approach to strain measurement based on Fourier analysis of strain-induced polarization and intermodal coupling in HB two-mode elliptical-core fibers is presented. We have applied the Fourier method to analyze different types of polarization and intermodal couplings occurring in a highly birefringent elliptical-core fiber (UMCS, Lublin). The results obtained indicate that Fourier spectra of sin-like strain-dependent characteristics can create a very important tool in projecting practical devices which will measure longitudinal strain in specific applications.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132872353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.351804
H. Wang, M. Baba, T. Konishi
In this paper, we propose a new automatic dimension and displacement measuring method for high resolution by using the principle of vernier caliper. In this method, the main scale and the vernier scale are replaced with two different pitch CCD linear image sensors, respectively. The system detects number of the pixel at which the main scale coincides with the vernier scale and can measure in higher resolution than the original CCD pitch. Consequently, the proposed method is effective for precise dimension and displacement measurement.<>
{"title":"An automatic vernier scale method by CCD linear sensor","authors":"H. Wang, M. Baba, T. Konishi","doi":"10.1109/IMTC.1994.351804","DOIUrl":"https://doi.org/10.1109/IMTC.1994.351804","url":null,"abstract":"In this paper, we propose a new automatic dimension and displacement measuring method for high resolution by using the principle of vernier caliper. In this method, the main scale and the vernier scale are replaced with two different pitch CCD linear image sensors, respectively. The system detects number of the pixel at which the main scale coincides with the vernier scale and can measure in higher resolution than the original CCD pitch. Consequently, the proposed method is effective for precise dimension and displacement measurement.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127890600","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.352044
G. Bucci, A. Germanò, C. Landi, N. Rotondale
This paper deals with the problem of tile characterization of linear induction motors (LIMs) and specifically with the on-line measurement of some quantities, such as thrust, current density in the sheet and air-gap flux. In this paper we propose a solution based on the indirect estimation of these quantities, starting from the measurement of the supply voltages. The proposed measurement system can be also advantageously adopted to solve the problem of the dynamical response of the transducers, such as those adopted for the measurement of the strain.<>
{"title":"Indirect measurements for the on-line characterization of linear induction motors","authors":"G. Bucci, A. Germanò, C. Landi, N. Rotondale","doi":"10.1109/IMTC.1994.352044","DOIUrl":"https://doi.org/10.1109/IMTC.1994.352044","url":null,"abstract":"This paper deals with the problem of tile characterization of linear induction motors (LIMs) and specifically with the on-line measurement of some quantities, such as thrust, current density in the sheet and air-gap flux. In this paper we propose a solution based on the indirect estimation of these quantities, starting from the measurement of the supply voltages. The proposed measurement system can be also advantageously adopted to solve the problem of the dynamical response of the transducers, such as those adopted for the measurement of the strain.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129001754","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.351932
Jong-Hoon Lee, M. Devaney
A new technique for the accurate measurement of the frequency of sinusoidal signals in the presence of noise using time-domain data is proposed. This software-based method is based upon an estimation of the zero crossings and measures the elapsed time between an even number of the estimated zero crossings with smoothing. The method is iterative in that the sample rate is adjusted, in so far as its resolution permits, to be a multiple of the estimated frequency and this permits a progressive refinement of the frequency measurement.<>
{"title":"Accurate measurement of line frequency in the presence of noise using time domain data","authors":"Jong-Hoon Lee, M. Devaney","doi":"10.1109/IMTC.1994.351932","DOIUrl":"https://doi.org/10.1109/IMTC.1994.351932","url":null,"abstract":"A new technique for the accurate measurement of the frequency of sinusoidal signals in the presence of noise using time-domain data is proposed. This software-based method is based upon an estimation of the zero crossings and measures the elapsed time between an even number of the estimated zero crossings with smoothing. The method is iterative in that the sample rate is adjusted, in so far as its resolution permits, to be a multiple of the estimated frequency and this permits a progressive refinement of the frequency measurement.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123281342","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.352072
C.C. Fung, H. Eren, Y. Nakazato
In this paper, a position sensing system based on infrared techniques for multiple robots operating within a structured environment is introduced. Unlike many existing multiple robot systems, the proposed sensing mechanism enables each robot to determine its position and path of movement without the need of a central coordinator. The robots communicate with each other with a radio link passing information about their intentions, positions and the performed tasks. The system is simple and it does not require complicated vision and communication capabilities, thus, a minimum computing power is needed for the operation. Clearly defined objectives, robust position sensing capabilities and efficient inter-robot communications enable each robot with self-autonomy to determine its own task to be executed. The main objective of the position sensing system is to enable a number of robots to operate in a cooperative manner as members of a team.<>
{"title":"Position sensing of mobile robots for team operations","authors":"C.C. Fung, H. Eren, Y. Nakazato","doi":"10.1109/IMTC.1994.352072","DOIUrl":"https://doi.org/10.1109/IMTC.1994.352072","url":null,"abstract":"In this paper, a position sensing system based on infrared techniques for multiple robots operating within a structured environment is introduced. Unlike many existing multiple robot systems, the proposed sensing mechanism enables each robot to determine its position and path of movement without the need of a central coordinator. The robots communicate with each other with a radio link passing information about their intentions, positions and the performed tasks. The system is simple and it does not require complicated vision and communication capabilities, thus, a minimum computing power is needed for the operation. Clearly defined objectives, robust position sensing capabilities and efficient inter-robot communications enable each robot with self-autonomy to determine its own task to be executed. The main objective of the position sensing system is to enable a number of robots to operate in a cooperative manner as members of a team.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121427172","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.351849
Pei Wuhuan
The feature of Chinese character and its information treatment is described and a new method of Chinese word processing is proposed in this paper. Application of the new method will provide the processing of Chinese word with higher speed and precision and offer much greater convenience for the mechanical translation of language.<>
{"title":"A new method of Chinese word processing","authors":"Pei Wuhuan","doi":"10.1109/IMTC.1994.351849","DOIUrl":"https://doi.org/10.1109/IMTC.1994.351849","url":null,"abstract":"The feature of Chinese character and its information treatment is described and a new method of Chinese word processing is proposed in this paper. Application of the new method will provide the processing of Chinese word with higher speed and precision and offer much greater convenience for the mechanical translation of language.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122335490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.352041
Xinghong Li
A microprocessor-based fault monitor for rotating rectifiers of brushless ac exciters using a pattern-recognition approach is presented in this paper. The features of the frequency spectrum of the voltage waveform induced in a search coil plated in the stator slots of the brushless ac exciter are used in pattern recognition. Based on these features a classifier is designed using the nearest-neighbour rules. A prototype of the microprocessor-based fault monitor has been built. Studies show that the fault monitor can accurately recognize the various classes of faults of the rotating rectifier of the brushless ac exciter.<>
{"title":"A microprocessor-based fault monitor for rotating rectifiers of brushless ac exciters using a pattern-recognition approach","authors":"Xinghong Li","doi":"10.1109/IMTC.1994.352041","DOIUrl":"https://doi.org/10.1109/IMTC.1994.352041","url":null,"abstract":"A microprocessor-based fault monitor for rotating rectifiers of brushless ac exciters using a pattern-recognition approach is presented in this paper. The features of the frequency spectrum of the voltage waveform induced in a search coil plated in the stator slots of the brushless ac exciter are used in pattern recognition. Based on these features a classifier is designed using the nearest-neighbour rules. A prototype of the microprocessor-based fault monitor has been built. Studies show that the fault monitor can accurately recognize the various classes of faults of the rotating rectifier of the brushless ac exciter.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126035045","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1994-05-10DOI: 10.1109/IMTC.1994.352086
Y. Wu, H. Ikeda, H. Kodera, H. Yoshida, S. Shinohara
Presented is a new type of optical fiber parallel data transmission system utilizing the multifrequency parallel signals. The multifrequency parallel signals are used to modulate the squarewave carrier by squarewave frequency modulation (SWFM) scheme, and then transmitted through a single optical fiber. The system can send 8-bit parallel data with a low speed of 5 kbps, but in a long distance of 2 km through a multi-mode optical fiber. In addition, because of the excellent stability against EMI, the proposed system can be used in inferior environment to transmit the statuses or the manual control signals between sensors and monitors in both directions for various industrial uses.<>
{"title":"Optical fiber multifrequency SWFM transmission system for sending low-speed parallel data","authors":"Y. Wu, H. Ikeda, H. Kodera, H. Yoshida, S. Shinohara","doi":"10.1109/IMTC.1994.352086","DOIUrl":"https://doi.org/10.1109/IMTC.1994.352086","url":null,"abstract":"Presented is a new type of optical fiber parallel data transmission system utilizing the multifrequency parallel signals. The multifrequency parallel signals are used to modulate the squarewave carrier by squarewave frequency modulation (SWFM) scheme, and then transmitted through a single optical fiber. The system can send 8-bit parallel data with a low speed of 5 kbps, but in a long distance of 2 km through a multi-mode optical fiber. In addition, because of the excellent stability against EMI, the proposed system can be used in inferior environment to transmit the statuses or the manual control signals between sensors and monitors in both directions for various industrial uses.<<ETX>>","PeriodicalId":231484,"journal":{"name":"Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126063135","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9)
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