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Hydrofluoroethane plasma etching of SiN, SiO2, and poly-Si films with CHF2CF3, CF3CH3, and CHF2CH3 用 CHF2CF3、CF3CH3 和 CHF2CH3 对 SiN、SiO2 和多晶硅薄膜进行氢氟乙烷等离子刻蚀
IF 6.7 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-15 DOI: 10.1016/j.apsusc.2024.161815
Tran Trung Nguyen, Toshio Hayashi, Hiroshi Iwayama, Makoto Sekine, Masaru Hori, Kenji Ishikawa
Plasmas containing hydrofluorocarbon gases (CHF2CF3, CF3CH3, and CHF2CH3) are used for the selective removal of SiN, SiO2, and poly-Si films when manufacturing large-scale integrated circuits. Understanding the plasma chemistry of hydrofluorocarbons is important for gaining insight into the mechanisms of these selective-etching processes. The fragmental reactants produced by the reactive plasma are essential for evaluating and controlling highly accurate selective etching. This study examined such fragments using a primary dissociation ionization threshold quadrupole mass spectrometer at an electron energy of 20 eV. Their primary dissociative ionization thresholds were identified using photoelectron-photoion coincidence spectroscopy, with photon energies ranging from 10 to 28 eV. The results showed the following: (i) the CHF2CF3 molecule dissociated into ions such as CHF2+ and C2HF4+, which formed secondary ions, such as CF3+ and CF2+. The F-rich reactants effectively enhanced the etching of both SiO2 and SiN; (ii) the CF3CH3 molecule dissociated into ions such as C2H2F+ and C2H2F2+, while the dominant CF3+ remained as a crucial fragment for the primary etching of SiO2; (iii) the CHF2CH3 molecule predominantly yielded ions such as CHF2+, CF2CH3+ and CxHy+, promoting polymer film deposition on the surfaces of SiO2 and poly-Si.
在制造大规模集成电路时,含有氢氟碳气体(CHF2CF3、CF3CH3 和 CHF2CH3)的等离子体被用于选择性去除 SiN、SiO2 和聚硅薄膜。了解氢氟碳化合物的等离子体化学性质对于深入了解这些选择性蚀刻过程的机理非常重要。反应等离子体产生的碎片反应物对于评估和控制高精度选择性蚀刻至关重要。本研究使用电子能量为 20 eV 的初级离解电离阈值四极杆质谱仪对这些碎片进行了检测。它们的初级离解电离阈值是通过光电子-光子巧合光谱确定的,光子能量范围为 10 至 28 eV。结果表明(i) CHF2CF3 分子离解成 CHF2+ 和 C2HF4+ 等离子,形成 CF3+ 和 CF2+ 等次级离子。富含 F 的反应物有效地增强了对 SiO2 和 SiN 的刻蚀;(ii) CF3CH3 分子离解成 C2H2F+ 和 C2H2F2+ 等离子,而占主导地位的 CF3+ 仍是对 SiO2 进行初级刻蚀的关键片段;(iii) CHF2CH3 分子主要产生 CHF2+、CF2CH3+ 和 CxHy+ 等离子,促进了聚合物薄膜在 SiO2 和多晶硅表面的沉积。
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引用次数: 0
Microenvironment Regulation of the electronic structure of bismuth oxychloride via rare-earth element Samarium doping for remarkable Visible-Light-Responsive oxygen evolution 通过掺杂稀土元素钐调节氧氯化铋电子结构的微环境,实现显著的可见光响应性氧演化
IF 6.7 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-15 DOI: 10.1016/j.apsusc.2024.161740
Zheng Gao, Yang Xu, Yu Qi, Zhaochi Feng, Beibei Dong
Bismuth-based oxyhalides have attracted considerable research interest for visible-light-responsive oxygen evolution reaction, however, their ineffective light absorption and charge separation efficiencies remain a challenge. Herein, a novel visible-light-responsive 2D Bi2SmO4Cl nanosheet photocatalyst was designed by introducing rare-earth element Sm into BiOCl and thus its electronic structure microenvironment is commendably tailored to promote the light absorption and charge separation. Moreover, iodine doping and IrO2 cocatalyst are employed to give rise to IrO2-Bi2SmO4Cl1-xIx with a remarkable O2-evolving rate of 151.2 μmol·h−1 under visible light irradiation, which is more than 500-fold of pristine BiOCl. Both the Sm introduction and I doping significantly shorten the band gap and increase the charge separation efficiency. The density functional theory (DFT) calculation demonstrated that Sm can give electrons to other atoms, benefits the charge separation process and decreases the work function of oxygen evolution reaction. This work can offer new insights into the design and structure modulation of bismuth-based oxyhalides.
铋基氧卤化物在可见光响应氧进化反应方面引起了广泛的研究兴趣,然而,其无效的光吸收和电荷分离效率仍然是一个挑战。本文通过在 BiOCl 中引入稀土元素 Sm,设计了一种新型可见光响应二维 Bi2SmO4Cl 纳米片状光催化剂,从而对其电子结构微环境进行了定制,以促进光吸收和电荷分离。此外,通过碘掺杂和IrO2共催化剂,IrO2-Bi2SmO4Cl1-xIx在可见光照射下的O2挥发率达到151.2 μmol-h-1,是原始BiOCl的500倍以上。Sm 的引入和 I 的掺杂都大大缩短了带隙,提高了电荷分离效率。密度泛函理论(DFT)计算表明,Sm 能给其他原子提供电子,有利于电荷分离过程,并降低氧进化反应的功函数。这项工作可为铋基氧卤化物的设计和结构调控提供新的见解。
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引用次数: 0
Engineered SnO2-based thin films for efficient CO2 gas sensing at room temperature 用于室温下高效二氧化碳气体传感的二氧化硒基工程薄膜
IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-15 DOI: 10.1016/j.apsusc.2024.161795
Eleonora Bolli , Alessandro Bellucci , Matteo Mastellone , Alessio Mezzi , Stefano Orlando , Riccardo Polini , Raffaella Salerno , Antonio Santagata , Veronica Valentini , Daniele Maria Trucchi
Tin oxide (SnO2)-based thin films were deposited on alumina printed circuit boards via electron beam evaporation to fabricate CO2 gas sensors operating at room temperature. Femtosecond laser surface nanotexturing was applied as a novel approach to optimize key gas sensitivity parameters, including surface roughness and grain size. Raman and X-ray photoelectron spectroscopy revealed that the sensitive layer consists of a 1 µm SnO film with a non-stoichiometric SnO2 upper layer for the as-deposited film. The electronic disparity between these layers forms a native SnO-SnO2 interface, creating a p-n junction that enhances sensor sensitivity. This sensor shows a sensing response ranging from 7 % to 20 % for CO2 concentrations of 1000 to 2000 ppm, and up to 40 % at 5000 ppm. Laser irradiation introduced periodic surface structures (∼ 800 nm), increasing the roughness and the number of active sites for the gas sensing. Although no significant improvements were observed in terms of sensitivity, the fs-laser treated sensor exhibited enhanced stability and reproducibility, indicating its potential for low-energy consumption gas sensing platforms for indoor air quality applications.
通过电子束蒸发将基于氧化锡(SnO2)的薄膜沉积在氧化铝印刷电路板上,以制造在室温下工作的二氧化碳气体传感器。飞秒激光表面纳米挤压是一种优化关键气体灵敏度参数(包括表面粗糙度和晶粒尺寸)的新方法。拉曼光谱和 X 射线光电子能谱显示,敏感层由 1 µm 的氧化锡薄膜和非均一的二氧化锡上层组成。这些层之间的电子差异形成了一个原生的氧化锡-二氧化锡界面,形成了一个 p-n 结,从而提高了传感器的灵敏度。当二氧化碳浓度为 1000 至 2000 ppm 时,该传感器的传感响应为 7% 至 20%,当浓度为 5000 ppm 时,传感响应高达 40%。激光照射引入了周期性表面结构(∼ 800 nm),增加了粗糙度和气体传感活性位点的数量。虽然在灵敏度方面没有观察到明显改善,但经过缂丝激光处理的传感器表现出更高的稳定性和可重复性,这表明它有潜力成为室内空气质量应用领域的低能耗气体传感平台。
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引用次数: 0
Formation of 2H and 1T/2H MoSe2 via thermal selenization of electrodeposited Mo thin films and nanowires 通过电沉积钼薄膜和纳米线的热硒化形成 2H 和 1T/2H MoSe2
IF 6.7 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-15 DOI: 10.1016/j.apsusc.2024.161801
Daniel Piecha, Mateusz Szczerba, Renata Palowska, Mateusz M. Marzec, Krystian Sokołowski, Tomasz Uchacz, Lifeng Liu, Grzegorz D. Sulka, Agnieszka Brzózka
Here, we present how thermal selenization can be used in tandem with electrodeposition to prepare MoSe2-based materials. Mo precursors (thin films or nanowire arrays) were prepared via electrodeposition and thermally selenized at 500/600 °C for 2/3h. Scanning electron microscopy (FE-SEM), X-ray powder diffraction (XRD), energy-dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy were used to determine the morphology, chemical and phase compositions of materials. The experimental results demonstrated changes in the morphology after selenization, like creation of circular grain domains in Mo films, and partial hollowing and coarsening of Mo nanowires. Selenization of both types of precursors resulted in phase-diverse MoSe2 products: hexagonal (2H) phase for Mo films, and mixture of trigonal and hexagonal (1T/2H) phases in the case of Mo nanowires. EDS measurements revealed that the Se content in Mo-Se films varied from 4.6 to 26.5 at.%, while in Mo-Se nanowires, it ranged from 54.7 to 61.4 at.%, which indicates that thermal selenization was more effective when the precursor was in the form of nanowires. This study suggests the potential to control parameters in the thermal selenization process such as substrate selection, temperature, and duration to develop innovative MoSe2-based electrodes for more efficient energy-related applications.
在此,我们介绍了如何将热硒化与电沉积同时用于制备基于 MoSe2 的材料。钼前驱体(薄膜或纳米线阵列)通过电沉积制备,并在 500/600 °C 下热硒化 2/3 小时。使用扫描电子显微镜(FE-SEM)、X 射线粉末衍射(XRD)、能量色散 X 射线光谱(EDS)、X 射线光电子能谱(XPS)和拉曼光谱测定材料的形态、化学成分和相组成。实验结果表明,硒化后的材料形态发生了变化,如 Mo 薄膜中产生了圆形晶域,Mo 纳米线部分空心化和粗化。对这两种前驱体进行硒化后,会产生相态多样的 MoSe2 产物:钼薄膜为六方(2H)相,而钼纳米线则为三方和六方(1T/2H)混合相。EDS 测量显示,钼-硒薄膜中的硒含量从 4.6% 到 26.5% 不等,而钼-硒纳米线中的硒含量则从 54.7% 到 61.4% 不等,这表明当前驱体为纳米线形式时,热硒化更为有效。这项研究表明,通过控制热硒化过程中的参数(如基底选择、温度和持续时间),有可能开发出基于 MoSe2 的创新电极,用于更高效的能源相关应用。
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引用次数: 0
Nitrogen-doped carbon-coating enables high-rate capability and long-cycle stability of NaCrO2 cathode for sodium-ion battery 掺氮碳涂层实现了钠离子电池 NaCrO2 正极的高倍率能力和长循环稳定性
IF 6.7 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-15 DOI: 10.1016/j.apsusc.2024.161804
Jingyao Cai, Yan Wei, Yanbing Zhu, Liyuan Tian, Jiandong Zhang, Yan Shen, Mingkui Wang
We report nitrogen-doped carbon-coating to increase rate capability and cycle stability of NaCrO2 cathode for sodium ion battery application. The nitrogen-doped carbon coating layer can effectively reduce electrode surface impedance and accelerate Na+ ion diffusion to allow high-rate performance. The coating layer can suppress the electrode/electrolyte side reactions and inhibit the degradation of NaCrO2, thereby markedly enhancing cathode cycling stability. Consequently, the NaCrO2 cathode exhibits a specific capacity of 95.6mAh/g at 50C and a capacity retention of 91.4 % after 1000 cycles at 10C.
我们报告了掺氮碳涂层如何提高钠离子电池应用中 NaCrO2 阴极的速率能力和循环稳定性。掺氮碳涂层能有效降低电极表面阻抗,加速 Na+ 离子扩散,从而实现高倍率性能。涂层能抑制电极/电解质副反应,抑制 NaCrO2 的降解,从而显著提高阴极循环稳定性。因此,NaCrO2 阴极在 50C 下的比容量为 95.6mAh/g,在 10C 下循环 1000 次后的容量保持率为 91.4%。
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引用次数: 0
Graphitic N-C-P configuration of phosphorus and nitrogen co-doped carbon for boosting the oxygen electroreduction 磷氮共掺杂碳的石墨化 N-C-P 构型可促进氧气电还原
IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-14 DOI: 10.1016/j.apsusc.2024.161814
Xiaosong Li , Dan Wang , Hao Xu , Sujuan Zha , Wenchang Wang , Naotoshi Mitsuzaki , Zhidong Chen
The introduction of heteroatoms to carbon-based metal-free electrocatalysts has been verified to be a promising strategy for enhancing catalytic activity in the oxygen reduction reaction (ORR). Nevertheless, it remains a challenge to precisely identify the real active configuration of heteroatoms doped carbon, particularly for dual-heteroatom doping. Herein, a facile strategy is described to synthesize a phosphorus-nitrogen co-doped carbon (PNC) metal-free electrocatalyst. Benefiting from the abundant micropores/mesopores and large surface area of PNC cubes, it delivers a superb ORR activity with a half-wave potential (E1/2 ∼ 0.870 V). More importantly, the experiment results demonstrate the strong correlation between the content of Graphitic N-C-P structure and kinetic current density. The density functional theory (DFT) calculations further unveil that the Graphitic N-C-P structure is the real active configuration of PNC. Notably, the doping of P atom can make the carbon atom adjacent to the Graphitic N be more positive, thereby optimizing the adsorption/desorption of ORR intermediates. Moreover, the assembled Zn-air battery (ZAB) based on PNC delivers outstanding long-term cycling stability for 420 h without significant decay. This work provides a path for the development of green and low-cost energy storage devices.
在碳基无金属电催化剂中引入杂原子已被证实是一种提高氧还原反应(ORR)催化活性的有效策略。然而,如何精确识别掺杂杂原子的碳的真正活性构型,尤其是双杂原子掺杂,仍然是一项挑战。本文介绍了一种合成磷氮共掺杂碳(PNC)无金属电催化剂的简便策略。得益于 PNC 立方体丰富的微孔/网孔和较大的比表面积,它具有半波电位(E1/2 ∼ 0.870 V)的超强 ORR 活性。更重要的是,实验结果表明石墨 N-C-P 结构的含量与动力学电流密度之间存在很强的相关性。密度泛函理论(DFT)计算进一步揭示了石墨化 N-C-P 结构是 PNC 的真正活性构型。值得注意的是,P 原子的掺杂可以使石墨 N 相邻的碳原子更加正向,从而优化 ORR 中间体的吸附/解吸。此外,基于 PNC 组装的锌-空气电池(ZAB)具有出色的长期循环稳定性,可持续 420 小时而无明显衰减。这项研究为开发绿色、低成本的储能设备提供了一条途径。
{"title":"Graphitic N-C-P configuration of phosphorus and nitrogen co-doped carbon for boosting the oxygen electroreduction","authors":"Xiaosong Li ,&nbsp;Dan Wang ,&nbsp;Hao Xu ,&nbsp;Sujuan Zha ,&nbsp;Wenchang Wang ,&nbsp;Naotoshi Mitsuzaki ,&nbsp;Zhidong Chen","doi":"10.1016/j.apsusc.2024.161814","DOIUrl":"10.1016/j.apsusc.2024.161814","url":null,"abstract":"<div><div>The introduction of heteroatoms to carbon-based metal-free electrocatalysts has been verified to be a promising strategy for enhancing catalytic activity in the oxygen reduction reaction (ORR). Nevertheless, it remains a challenge to precisely identify the real active configuration of heteroatoms doped carbon, particularly for dual-heteroatom doping. Herein, a facile strategy is described to synthesize a phosphorus-nitrogen co-doped carbon (PNC) metal-free electrocatalyst. Benefiting from the abundant micropores/mesopores and large surface area of PNC cubes, it delivers a superb ORR activity with a half-wave potential (E<sub>1/2</sub> ∼ 0.870 V). More importantly, the experiment results demonstrate the strong correlation between the content of Graphitic N-C-P structure and kinetic current density. The density functional theory (DFT) calculations further unveil that the Graphitic N-C-P structure is the real active configuration of PNC. Notably, the doping of P atom can make the carbon atom adjacent to the Graphitic N be more positive, thereby optimizing the adsorption/desorption of ORR intermediates. Moreover, the assembled Zn-air battery (ZAB) based on PNC delivers outstanding long-term cycling stability for 420 h without significant decay. This work provides a path for the development of green and low-cost energy storage devices.</div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"683 ","pages":"Article 161814"},"PeriodicalIF":6.3,"publicationDate":"2024-11-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142610310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surface modification of TiO2 photoanode in dye-sensitized solar cells using reduced graphene oxide: A computational and experimental study 使用还原氧化石墨烯对染料敏化太阳能电池中的 TiO2 光阳极进行表面改性:计算与实验研究
IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-14 DOI: 10.1016/j.apsusc.2024.161783
Thuy Thanh Doan Nguyen , De Nguyen , Nguyet Nhu Thi Pham , Phuong Tuyet Nguyen
This study investigated the modification of TiO2 photoanodes using reduced graphene oxide (rGO) to enhance electron transport channels and prevent recombination processes, thereby improving the photovoltaic performance. Through the ultraviolet (UV)-assisted photoreduction of GO on TiO2 coated on a fluoride tin oxide substrate (FTO|TiO2), we demonstrated the successful integration of rGO. This was evidenced by the increased Csp2 content observed during X-ray photoelectron spectroscopy and reduced photogenerated electron–hole recombination observed during photoluminescence spectroscopy. The incorporation of rGO significantly improved the photocurrent density and power conversion efficiency (PCE). A 12 % increase was observed in the PCE, which reached 8.5 % when the UV irradiation time was optimized from 10 to 15 min compared with the 7.57 % in the standard cell (rGO-0 min). Electrochemical impedance spectroscopy confirmed that the optimized rGO content enhanced the electron lifetime and recombination resistance, attributable to the high conductivity and large specific surface area of rGO. DFT simulation further elucidated how improved charge separation and transport mechanisms of TiO2–rGO heterojunction. This study highlights the potential of TiO2–rGO materials as promising electrodes for improving the efficiency, capacity, and stability of dye-sensitized solar cells.
本研究探讨了利用还原氧化石墨烯(rGO)对二氧化钛光阳极进行改性,以增强电子传输通道和防止重组过程,从而提高光伏性能。通过在氟化锡氧化物衬底(FTO|TiO2)上涂覆的二氧化钛上进行紫外线(UV)辅助的 GO 光还原,我们证明了 rGO 的成功整合。在 X 射线光电子能谱中观察到的 Csp2 含量增加,以及在光致发光光谱中观察到的光生电子-空穴重组减少,都证明了这一点。rGO 的加入大大提高了光电流密度和功率转换效率(PCE)。与标准电池(rGO-0 分钟)的 7.57% 相比,当紫外线照射时间从 10 分钟优化到 15 分钟时,PCE 提高了 12%,达到 8.5%。电化学阻抗光谱证实,优化的 rGO 含量提高了电子寿命和抗重组能力,这归功于 rGO 的高导电性和大比表面积。DFT 模拟进一步阐明了 TiO2-rGO 异质结的电荷分离和传输机制是如何得到改善的。这项研究强调了 TiO2-rGO 材料作为电极在提高染料敏化太阳能电池的效率、容量和稳定性方面的潜力。
{"title":"Surface modification of TiO2 photoanode in dye-sensitized solar cells using reduced graphene oxide: A computational and experimental study","authors":"Thuy Thanh Doan Nguyen ,&nbsp;De Nguyen ,&nbsp;Nguyet Nhu Thi Pham ,&nbsp;Phuong Tuyet Nguyen","doi":"10.1016/j.apsusc.2024.161783","DOIUrl":"10.1016/j.apsusc.2024.161783","url":null,"abstract":"<div><div>This study investigated the modification of TiO<sub>2</sub> photoanodes using reduced graphene oxide (rGO) to enhance electron transport channels and prevent recombination processes, thereby improving the photovoltaic performance. Through the ultraviolet (UV)-assisted photoreduction of GO on TiO<sub>2</sub> coated on a fluoride tin oxide substrate (FTO|TiO<sub>2</sub>), we demonstrated the successful integration of rGO. This was evidenced by the increased Csp<sup>2</sup> content observed during X-ray photoelectron spectroscopy and reduced photogenerated electron–hole recombination observed during photoluminescence spectroscopy. The incorporation of rGO significantly improved the photocurrent density and power conversion efficiency (PCE). A 12 % increase was observed in the PCE, which reached 8.5 % when the UV irradiation time was optimized from 10 to 15 min compared with the 7.57 % in the standard cell (rGO-0 min). Electrochemical impedance spectroscopy confirmed that the optimized rGO content enhanced the electron lifetime and recombination resistance, attributable to the high conductivity and large specific surface area of rGO. DFT simulation further elucidated how improved charge separation and transport mechanisms of TiO<sub>2</sub>–rGO heterojunction. This study highlights the potential of TiO<sub>2</sub>–rGO materials as promising electrodes for improving the efficiency, capacity, and stability of dye-sensitized solar cells.</div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"683 ","pages":"Article 161783"},"PeriodicalIF":6.3,"publicationDate":"2024-11-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142610302","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Relationship between particle interface structure and performance of cold sprayed CuCrZr deposit 颗粒界面结构与冷喷 CuCrZr 沉积物性能的关系
IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-14 DOI: 10.1016/j.apsusc.2024.161794
Min Yu, Yunzhe Zhang, Peiyuan Lv, Hui Chen
Cold spraying is considered as a promising technique for fabricating CuCrZr deposits attributed to its distinct plastic deformation feature. In the present study, the feasibility of this technique is validated through exploring correlations between the interface microstructure with mechanical and thermal properties. Assessment of structure–property correlations was attempted based on particle interface characteristics, together with Cr and Zr precipitates, and mechanical and thermal properties using electron backscatter diffraction, nanoindentation, adhesive shear strength and thermal conduction tests. Results show that annealing heat treatment reconstructs the particle interface through recovery and growth of ultrafine grains, leading to the reduction of porosity and enhancement of shear strength and toughness. Coupled with the re-crystallized fine grains and precipitation strengthening of the Cr oxide and CuxZry phase, the decrease in hardness due to the release of work hardening in the annealed deposits could be compensated, thereby demonstrating good thermal stability. Finally, the combination of decreased porosity and strengthened interface bonding causes the increased heat conductivity of the annealed deposits. Therefore, the combined technique of cold spraying and annealing heat treatment may be a potential solution for balancing the strength and thermal conductivity of CuCrZr.
冷喷技术具有明显的塑性变形特征,因此被认为是制造 CuCrZr 沉积物的一种有前途的技术。在本研究中,通过探索界面微观结构与机械性能和热性能之间的相关性,验证了这种技术的可行性。利用电子反向散射衍射、纳米压痕、粘合剪切强度和热传导测试,根据颗粒界面特征、铬和锆析出物以及机械和热性能,尝试评估结构与性能之间的相关性。结果表明,退火热处理通过超细晶粒的恢复和生长重建了颗粒界面,从而降低了孔隙率,提高了剪切强度和韧性。再加上细晶粒的再结晶以及氧化铬和 CuxZry 相的沉淀强化,退火沉积物中因加工硬化释放而导致的硬度下降可以得到补偿,从而表现出良好的热稳定性。最后,孔隙率的降低和界面结合力的增强共同导致了退火镀层导热率的提高。因此,冷喷涂和退火热处理相结合的技术可能是平衡 CuCrZr 强度和导热性的一种潜在解决方案。
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引用次数: 0
Study of molecular layer deposition of zinc-based hybrid film as photoresist 锌基混合薄膜作为光刻胶的分子层沉积研究
IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-13 DOI: 10.1016/j.apsusc.2024.161727
Yiyang Shan , Xingkun Wang , Xu Zheng , Xiang Zhao , Ze Feng , Weihua Wang , Yahui Cheng , Hui Liu , Kui Tan , Feng Luo , Hong Dong
Molecular layer deposition (MLD) of metal oxide and organic hybrid thin films has great potential to be utilized in extreme ultraviolet photoresist, thanks to its excellent uniformity on the nanometer scale thickness control. Zn has large photoelectron effect cross-section, resulting in lots of secondary electrons, which can break the organic bonds, causing changes in solubility upon the ultraviolet (UV) light exposure. In this work, Zn-based MLD thin films have been demonstrated for their potential to be used as photoresist for extreme ultraviolet (EUV) application. UV light exposure mechanisms have been proposed based on X-ray photoelectron spectroscopy (XPS) analysis.
金属氧化物和有机杂化薄膜的分子层沉积(MLD)在纳米级厚度控制上具有极佳的均匀性,因此在极紫外光阻剂中具有巨大的应用潜力。Zn 具有较大的光电子效应截面,会产生大量的次级电子,这些次级电子会破坏有机键,从而在紫外线(UV)照射下导致溶解度发生变化。在这项研究中,Zn 基 MLD 薄膜被证明具有用作极紫外(EUV)光刻胶的潜力。根据 X 射线光电子能谱(XPS)分析提出了紫外线照射机制。
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引用次数: 0
Surface properties of PdAu and PdNi alloys under dynamic conditions: NAP-XPS study 动态条件下 PdAu 和 PdNi 合金的表面特性:NAP-XPS 研究
IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Pub Date : 2024-11-13 DOI: 10.1016/j.apsusc.2024.161789
A.M. Tarditi , A. Santa-Arango , G.E. Gonzalez , Y. Escalante , L. Cornaglia , C. Ostos
Electroless-deposited PdAu and PdNi alloy samples were analyzed using near-ambient X-ray photoelectron Spectroscopy (NAP-XPS) under H2, CO, and CO2-containing streams. Gold enrichment in the near-surface region was evidenced in the PdAu sample under all the analyzed conditions, while palladium increment to the surface was observed in the PdNi alloy. The appearance of a new contribution on the Pd 3d core-level region evidenced the formation of PdHx species on the surface. Competitive CO adsorption and the formation of CHx species at the surface led to the partial blocking of hydrogen adsorption sites, thereby decreasing the PdHx formation. Methane production was detected under CO/H2 and CO2/H2 mixtures in both PdAu and PdNi alloy samples. Our findings demonstrate that both competitive adsorption and the formation of CHx or carbide species on the surface of PdAu and PdNi alloys can negatively influence hydrogen permeation through Pd-based membranes.
在含 H2、CO 和 CO2 的气流条件下,使用近环境 X 射线光电子能谱(NAP-XPS)分析了无电解沉积 PdAu 和 PdNi 合金样品。在所有分析条件下,PdAu 样品的近表面区域都出现了金富集现象,而 PdNi 合金的表面则出现了钯增量现象。在 Pd 3d 核级区域出现的新贡献证明了表面 PdHx 物种的形成。竞争性 CO 吸附和表面 CHx 物种的形成导致氢吸附位点的部分阻断,从而减少了 PdHx 的形成。在 PdAu 和 PdNi 合金样品中的 CO/H2 和 CO2/H2 混合物中都检测到了甲烷的产生。我们的研究结果表明,PdAu 和 PdNi 合金表面的竞争吸附和 CHx 或碳化物的形成都会对钯基膜的氢气渗透产生负面影响。
{"title":"Surface properties of PdAu and PdNi alloys under dynamic conditions: NAP-XPS study","authors":"A.M. Tarditi ,&nbsp;A. Santa-Arango ,&nbsp;G.E. Gonzalez ,&nbsp;Y. Escalante ,&nbsp;L. Cornaglia ,&nbsp;C. Ostos","doi":"10.1016/j.apsusc.2024.161789","DOIUrl":"10.1016/j.apsusc.2024.161789","url":null,"abstract":"<div><div>Electroless-deposited PdAu and PdNi alloy samples were analyzed using near-ambient X-ray photoelectron Spectroscopy (NAP-XPS) under H<sub>2</sub>, CO, and CO<sub>2</sub>-containing streams. Gold enrichment in the near-surface region was evidenced in the PdAu sample under all the analyzed conditions, while palladium increment to the surface was observed in the PdNi alloy. The appearance of a new contribution on the Pd 3d core-level region evidenced the formation of PdHx species on the surface. Competitive CO adsorption and the formation of CH<sub>x</sub> species at the surface led to the partial blocking of hydrogen adsorption sites, thereby decreasing the PdH<sub>x</sub> formation. Methane production was detected under CO/H<sub>2</sub> and CO<sub>2</sub>/H<sub>2</sub> mixtures in both PdAu and PdNi alloy samples. Our findings demonstrate that both competitive adsorption and the formation of CH<sub>x</sub> or carbide species on the surface of PdAu and PdNi alloys can negatively influence hydrogen permeation through Pd-based membranes.</div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"683 ","pages":"Article 161789"},"PeriodicalIF":6.3,"publicationDate":"2024-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142601216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Applied Surface Science
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