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Proceedings of 8th International Conference on Indium Phosphide and Related Materials最新文献

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Meander type LPE-new approach to growth InP and GaInAsP layers 曲径型lpe - p和GaInAsP层生长的新方法
D. Nohavica, P. Gladkov, M. Lourenço, Z. Yang, K. Homewood, D. Ehrentraut
The meander type technique of liquid phase epitaxy (LPE) is used for preparation of quaternary solid solution in GaInAsP/InP material system. Surface morphology of the layers prepared by meander type LPE has been compared with ones prepared by conventional LPE. Quaternary strained layers with composition near to Ga/sub .21/In/sub .79/As/sub .75/P/sub .25/ were grown with perpendicular lattice mismatch up to 1.6% in compression, on the InP substrates of (100) orientation. The used epitaxial technique has been modified for perspective attempt to heal the growth interfaces. Modification was tested by InP growth.
采用曲径型液相外延技术在GaInAsP/InP材料体系中制备季系固溶体。比较了曲流型LPE与常规LPE制备的层的表面形貌。在(100)取向的InP衬底上生长出成分接近Ga/sub .21/In/sub .79/As/sub .75/P/sub .25/的四元应变层,其垂直晶格失配在压缩条件下高达1.6%。为了修复生长界面,对外延技术进行了改进。用InP生长法检验改性效果。
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引用次数: 0
GaInAs/AlInAs-HEMTs grown on optical waveguide layers for photonic integrated circuits 在光子集成电路的光波导层上生长GaInAs/ alinas - hemt
W. Schlaak, W. Passenberg, C. Schramm, G. Mekonnen, A. Umbach, W. Ebert, H. Bach
For optical networks in the 40 Gbit/s regime as well as in fiber-fed cellular microwave mobile communication systems high-speed optical receivers with high sensitivity are required. This work describes the development of GaInAs-AlInAs high-electron mobility transistors (HEMTs) grown by molecular beam epitaxy (MBE) on metal-organic vapour phase epitaxy (MOVPE) layers. These devices are to be used in low-noise amplifier circuits as part of an optical receiver.
对于40gbit /s速率的光网络以及光纤馈入蜂窝微波移动通信系统,需要高灵敏度的高速光接收机。本文描述了在金属-有机气相外延(MOVPE)层上通过分子束外延(MBE)生长的GaInAs-AlInAs高电子迁移率晶体管(hemt)的发展。这些设备用于低噪声放大器电路作为光接收机的一部分。
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引用次数: 3
Growth and application of group III-antimonides by MOVPE MOVPE法制备iii族锑化物及其应用
P. Klipstein, M. Lakrimi, S. Lyapin, N. Mason, R. Nicholas, P. Walker
There are a number of important considerations in common in the growth of InP/InGaAs and InAs/GaSb superlattices. These include: the uniformity of the periodicity within the superlattice, the type of interfaces and their arrangement within the superlattice and the abruptness of those interfaces. InAs/GaSb superlattices are a small sub-set of antimonide based semiconductors which are of interest to those studying solid state physics and designing devices with infrared applications. This paper will highlight the growth, by MOVPE, of some InAs/GaSb superlattices, and compare this with published results from the growth of InGaAs/InP superlattices, particularly with respect to the issues mentioned above.
在InP/InGaAs和InAs/GaSb超晶格的生长中,有许多重要的共同考虑因素。这包括:超晶格内周期的均匀性,界面的类型及其在超晶格内的排列,以及这些界面的突然性。InAs/GaSb超晶格是锑基半导体的一个小分支,是研究固体物理和设计红外应用器件的兴趣所在。本文将重点介绍一些InAs/GaSb超晶格的MOVPE生长,并将其与已发表的InGaAs/InP超晶格的生长结果进行比较,特别是关于上面提到的问题。
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引用次数: 0
Strain-compensated MBE grown AlGaInAs/AlGaInAs/InP QWs for photonic devices 用于光子器件的应变补偿MBE生长AlGaInAs/AlGaInAs/InP量子阱
H. Hillmer, R. Losch, W. Schlapp, F. Steinhagen, H. Burkhard
Strain compensated QW samples with compressively strained wells and tensile strained barriers have been grown by MBE and studied by low temperature photoluminescence. The PL linewidths are narrow, decrease with growing well widths, and increase only weakly with rising number of wells.
采用MBE生长了具有压缩应变孔和拉伸应变势垒的应变补偿QW样品,并用低温光致发光对其进行了研究。PL线宽较窄,随井宽的增加而减小,随井数的增加而微弱增加。
{"title":"Strain-compensated MBE grown AlGaInAs/AlGaInAs/InP QWs for photonic devices","authors":"H. Hillmer, R. Losch, W. Schlapp, F. Steinhagen, H. Burkhard","doi":"10.1109/ICIPRM.1996.492310","DOIUrl":"https://doi.org/10.1109/ICIPRM.1996.492310","url":null,"abstract":"Strain compensated QW samples with compressively strained wells and tensile strained barriers have been grown by MBE and studied by low temperature photoluminescence. The PL linewidths are narrow, decrease with growing well widths, and increase only weakly with rising number of wells.","PeriodicalId":268278,"journal":{"name":"Proceedings of 8th International Conference on Indium Phosphide and Related Materials","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134543507","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Low noise performance of dry etched InGaAs/InAlAs HEMTs in comparison with wet recessed devices 干蚀刻InGaAs/InAlAs hemt的低噪声性能与湿凹槽器件的比较
H. Duran, B. Klepser, W. Patrick, M. Schefer, R. Cheung, W. Bachtold
Lattice-matched InAlAs/InGaAs HEMTs with selectively dry etched and wet etched gate recesses have been fabricated and both high-frequency and noise measurements have been carried out. The modelling of the noise source parameters shows only minor difference between the two transistor types. There is no evidence of detrimental effects caused by dry etching that reduce the noise performance of the device at high frequencies. To our knowledge, this is the first report of low-noise performance for dry etched InP HEMTs.
制备了具有选择性干蚀刻和湿蚀刻栅极凹槽的晶格匹配InAlAs/InGaAs hemt,并进行了高频和噪声测量。噪声源参数的建模显示两种晶体管类型之间只有微小的差异。没有证据表明干蚀刻会降低器件在高频下的噪声性能。据我们所知,这是第一次报道干蚀刻InP hemt的低噪声性能。
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引用次数: 1
Proton damage on InGaAs solar cells having a 3 /spl mu/m InP window layer 具有3 /spl μ m InP窗层的InGaAs太阳能电池的质子损伤
S. Messenger, H. Cotal, R. Walters, G. Summers
As part of a continuing program to determine the space radiation resistance of InP/In/sub 0.53/Ga/sub 0.47/As tandem solar cells on Ge substrates, n/p In/sub 0.53/Ga/sub 0.47/As solar cells fabricated by Research Triangle Institute (RTI) were irradiated with protons of various energy. The cells were grown with a 3 /spl mu/m n-InP window layer to mimic the top cell in the tandem cell configuration for both 1 sun, AMO solar absorption and radiation effects. The results have been plotted against proton fluence and "displacement damage dose" which is the product of the nonionizing energy loss (NIEL) and the particle fluence. A characteristic radiation damage curve is then obtained for predicting the effect of irradiation by any particle of any energy on these cells.
作为测定锗衬底上InP/In/sub 0.53/Ga/sub 0.47/As串联太阳能电池的空间抗辐射能力的持续项目的一部分,用不同能量的质子照射了RTI制造的n/p In/sub 0.53/Ga/sub 0.47/As太阳能电池。在3 /spl mu/m的n-InP窗口层中生长,模拟顶部电池的串联电池结构,以获得1太阳,AMO太阳吸收和辐射效应。结果与质子通量和非电离能损失(NIEL)与粒子通量的乘积“位移损伤剂量”作了对比。然后得到一个特征辐射损伤曲线,用于预测任何能量的任何粒子辐照对这些细胞的影响。
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引用次数: 0
Picosecond lifetimes and exciton quenching induced by metallic precipitation in InP:Cu InP:Cu中金属析出引起的皮秒寿命和激子猝灭
S. Marcinkevičius, A. Krotkus, R. Leon, C. Jagadish, N. Welham, M. Gal
The effects of metallic precipitation in undoped InP on its lifetime and luminescence have been studied in samples with a gradually increasing concentration of metallic precipitates. It was found that the nonequilibrium carrier decay in this material occurs on picosecond time scale and is of a qualitatively different shape than in materials where deep level traps act as the main recombination centres.
在金属析出物浓度逐渐增加的样品中,研究了未掺杂InP中金属析出物对其寿命和发光性能的影响。研究发现,这种材料的非平衡载流子衰变发生在皮秒时间尺度上,其形状与以深层陷阱为主要复合中心的材料在质量上不同。
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引用次数: 0
Polymer diffusants in III-V semiconductor compounds technology 聚合物扩散剂在III-V半导体化合物技术中的应用
A. V. Kamanin, I. Mokina, N. Shmidt, L. A. Busygina, T. A. Yurre
A Zn diffusion technique into III-V compounds from polymer spin-on films has been devised that allows to retain the initial surface morphology without any additional operations. This essentially simplifies the process. Moreover, the method provides a high portion (about 100%) of the electrically active Zn at N/sub Zn/
设计了一种Zn从聚合物自旋膜扩散到III-V化合物的技术,该技术允许保留初始表面形态而无需任何额外的操作。这从本质上简化了过程。此外,该方法在N/sub Zn/
{"title":"Polymer diffusants in III-V semiconductor compounds technology","authors":"A. V. Kamanin, I. Mokina, N. Shmidt, L. A. Busygina, T. A. Yurre","doi":"10.1109/ICIPRM.1996.492047","DOIUrl":"https://doi.org/10.1109/ICIPRM.1996.492047","url":null,"abstract":"A Zn diffusion technique into III-V compounds from polymer spin-on films has been devised that allows to retain the initial surface morphology without any additional operations. This essentially simplifies the process. Moreover, the method provides a high portion (about 100%) of the electrically active Zn at N/sub Zn/<L(Zn). The technique shows promise for applying in the technology of III-V compound devices. The possibilities for the local diffusion through the windows of the SiO/sub 2/ mask with retention of dielectric properties of the mask is pointed out. During the Zn diffusion into Al/sub x/Ga/sub 1-x/As gettering of the Al atoms was observed that allowed to obtain the high Zn atoms concentration at their near-total activation. This process resulted in homogenization of the near-surface regions.","PeriodicalId":268278,"journal":{"name":"Proceedings of 8th International Conference on Indium Phosphide and Related Materials","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114677964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Solid source MBE for phosphide-based devices 磷化基器件的固体源MBE
M. Toivonen, A. Salokatve, K. Tappura, M. Jalonen, P. Savolainen, J. Nappi, M. Pessa, H. Asonen
Phosphorus-based materials are of great importance for many advanced optoelectronic and electronic devices. The most common techniques used for growing phosphorus containing epitaxial structures are MOCVD, GSMBE and CBE. All these growth methods use highly toxic hydrides as group-V sources. As environmental regulations, safety precautions and cost effectiveness are important issues in compound semiconductor business, there is an urge for a simpler and cheaper growth technique. Molecular beam epitaxy using solid sources for both phosphorus and arsenic (SSMBE) would be the simplest choice. However, the problematic physical properties of phosphorus have hampered the use of SSMBE until recently. The new valved cracker technology has overcome the problems associated with the use of solid phosphorus and SSMBE has matured to the level that state-of-the-art phosphorus-based materials and devices can be produced. In this paper, we review some of our results for SSMBE grown phosphide-based devices. These include strained-layer InGaAsP/InP SCH-MQW and strain-compensated InAsP/InGaP/InP MQW lasers emitting at 1.3 /spl mu/m, strained-layer InGaAs/InGaAsP/GaInP QW lasers for 980 nm and 905 nm, 680 nm strained-layer GaInP/AlGaInP QW lasers, and InGaAs/InP HBTs.
磷基材料对许多先进的光电和电子器件具有重要意义。用于生长含磷外延结构的最常用技术是MOCVD、GSMBE和CBE。所有这些生长方法都使用剧毒的氢化物作为v族源。环境法规、安全措施、成本效益是化合物半导体事业的重要问题,因此迫切需要更简单、更便宜的成长技术。使用固体源的分子束外延(SSMBE)将是最简单的选择。然而,直到最近,磷的物理性质问题一直阻碍着SSMBE的使用。新的裂化技术克服了使用固体磷的问题,SSMBE已经成熟到可以生产最先进的磷基材料和装置的水平。在这篇文章中,我们回顾了一些我们在SSMBE生长的磷化基器件上的研究结果。其中包括应变层InGaAsP/InP schm -MQW和应变补偿InAsP/InGaP/InP MQW激光器,发射波长为1.3 /spl μ m /m,应变层InGaAs/InGaAsP/GaInP QW激光器,980 nm和905 nm, 680 nm应变层GaInP/AlGaInP QW激光器,InGaAs/InP HBTs。
{"title":"Solid source MBE for phosphide-based devices","authors":"M. Toivonen, A. Salokatve, K. Tappura, M. Jalonen, P. Savolainen, J. Nappi, M. Pessa, H. Asonen","doi":"10.1109/ICIPRM.1996.491939","DOIUrl":"https://doi.org/10.1109/ICIPRM.1996.491939","url":null,"abstract":"Phosphorus-based materials are of great importance for many advanced optoelectronic and electronic devices. The most common techniques used for growing phosphorus containing epitaxial structures are MOCVD, GSMBE and CBE. All these growth methods use highly toxic hydrides as group-V sources. As environmental regulations, safety precautions and cost effectiveness are important issues in compound semiconductor business, there is an urge for a simpler and cheaper growth technique. Molecular beam epitaxy using solid sources for both phosphorus and arsenic (SSMBE) would be the simplest choice. However, the problematic physical properties of phosphorus have hampered the use of SSMBE until recently. The new valved cracker technology has overcome the problems associated with the use of solid phosphorus and SSMBE has matured to the level that state-of-the-art phosphorus-based materials and devices can be produced. In this paper, we review some of our results for SSMBE grown phosphide-based devices. These include strained-layer InGaAsP/InP SCH-MQW and strain-compensated InAsP/InGaP/InP MQW lasers emitting at 1.3 /spl mu/m, strained-layer InGaAs/InGaAsP/GaInP QW lasers for 980 nm and 905 nm, 680 nm strained-layer GaInP/AlGaInP QW lasers, and InGaAs/InP HBTs.","PeriodicalId":268278,"journal":{"name":"Proceedings of 8th International Conference on Indium Phosphide and Related Materials","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1996-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114700303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Wannier-Stark effect in Ga/sub x/In/sub 1-x/As/sub z/P/sub 1-z//Ga/sub y/In/sub 1-y/As/sub z/P/sub 1-z/ superlattices on InP InP上Ga/sub x/ in /sub 1-x/As/sub z/P/sub 1-z//Ga/sub y/ in /sub 1-y/As/sub z/P/sub 1-z/超晶格中的Wannier-Stark效应
B. Opitz, A. Kohl, A. Behres, K. Mertens, K. Heime, H. Schmitt
We observed the Wannier-Stark effect in MOVPE-grown strain balanced Ga/sub x/In/sub 1-x/As/sub z/P/sub 1-z//Ga/sub y/In/sub 1-y/As/sub z/P/sub 1-z/ superlattices with constant As-content. The observed transitions could be well described by a simple theoretical model. By careful design of the shallow superlattice, the advantages of its weak carrier confinement can be combined with operation at room temperature. First measurements in waveguide configuration yield an electroabsorptive modulation ratio of 42 dB/(Vmm), which is comparable with current CBE-grown GaInAs/InP superlattice data.
在恒定As含量的movpe应变平衡Ga/sub x/ in /sub 1-x/As/sub z/P/sub 1-z//Ga/sub y/ in /sub 1-y/As/sub z/P/sub 1-z/超晶格中观察到Wannier-Stark效应。观测到的跃迁可以用一个简单的理论模型很好地描述。通过对浅超晶格的精心设计,可以将其弱载流子约束的优点与室温下的操作相结合。在波导结构中进行的首次测量产生了42 dB/(Vmm)的电吸收调制比,这与当前cbe生长的GaInAs/InP超晶格数据相当。
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Proceedings of 8th International Conference on Indium Phosphide and Related Materials
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