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2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)最新文献

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Wafer test probe burn modeling and characterization 晶圆测试探针燃烧建模和表征
B. Zafer, M. H. Vishkasougheh, B. Tunaboylu
This study investigates the wafer probe temperature distribution along a probe body in order to model probe burn phenomenon by using computational mechanics techniques. The finite volume software is used to study the effects of different materials and different geometrical factors on the temperature along a special design vertical/spring and cantilever probe. The computation shows higher temperatures towards the probe tip region as a result of Joule heating. The probe burn is also observed at the tip region of spring and cantilever probes in wafer testing. This is believed to be due to very low heat dissipation rates resulting from very small sizes compared to the probe body.
本文利用计算力学方法研究了圆片探针沿探针体的温度分布,以模拟探针燃烧现象。利用有限体积软件研究了不同材料和不同几何因素对特殊设计的垂直/弹簧和悬臂探头温度的影响。计算结果表明,焦耳加热导致探针尖端区域温度升高。在圆片测试中,在弹簧探针和悬臂探针的尖端区域也观察到探针烧蚀现象。这被认为是由于与探针体相比,非常小的尺寸导致的非常低的散热率。
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引用次数: 1
Optical design and characterization of micro-fabricated light reflector for 3D multi-chip LED module 三维多芯片LED模组微加工光反射器的光学设计与表征
S. Leung, L. Zhong, Jia Wei, Zhenlei Xu, C. Yuan, G. Zhang
LED module with multiple chips on silicon substrate becomes one of the mainstream light engine designs. Compared to conventional discrete LED package, which based on single die, module design with multi LED dies is necessary to fulfill the high luminous requirement for various lighting applications. Fabrication of the silicon based substrate can take the advantages of wafer level processes, which is a cost effective solution in massively parallel high throughput manufacturing and having the flexibility of scalability. Furthermore, the advances of silicon MEMS processing technologies open up the novel 3D module design consideration. The fabrication of 3D structure on silicon wafer can be realized by anisotropic etching based crystal direction and etchant selection. 3D cavities to embrace the LED dies, such as V-groove or trapezoidal basin, can be fabricated in by proper control of mask design and etch process. The fabricated cavities can then be coated with a reflective metal layer to become light reflectors. In this study, enhanced light extraction module design based on 3D reflector cavities is design and fabricated. The new design make used of the bulk micromachining process for tuning the reflector cup structure in order to effectively guiding the light emitted from the lateral surfaces of the LED dies. The optical performance related to the reflector geometries is examined by ray trace simulation. The light extraction can be improved by tuning the reflector placement and the depth of the reflector. The LED modules were fabricated and their optical performances were measured. The measured optical performance is presented and the design consideration is discussed.
硅衬底上多芯片LED模组成为主流光引擎设计之一。与传统的基于单芯片的分立LED封装相比,为了满足各种照明应用的高亮度要求,需要采用多芯片的模块设计。硅基衬底的制造可以利用晶圆级工艺的优势,在大规模并行高通量制造中是一种经济有效的解决方案,并且具有可扩展性的灵活性。此外,硅MEMS加工技术的进步开辟了新的3D模块设计思路。基于晶体方向和蚀刻剂选择的各向异性蚀刻可以在硅片上实现三维结构的制备。通过适当控制掩模设计和蚀刻工艺,可以制造出容纳LED芯片的三维腔体,如v型槽或梯形槽。然后,制造的空腔可以涂上一层反射金属层,成为光反射器。本研究设计并制作了基于三维反射腔的增强光提取模块设计。新设计利用大量的微加工工艺来调整反射杯结构,以便有效地引导从LED芯片侧面发出的光。光迹模拟研究了反射镜几何形状对光学性能的影响。光提取可以通过调整反射镜的位置和反射镜的深度来改善。制作了LED模块,并对其光学性能进行了测试。给出了测量的光学性能,并讨论了设计考虑。
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引用次数: 2
Simulation of an aluminum thick wire bond fatigue crack by means of the cohesive zone method 用黏聚区法模拟铝粗丝结合疲劳裂纹
A. Grams, T. Prewitz, O. Wittler, J. Kripfgans, S. Schmitz, A. Middendorf, W. Muller, K. Lang
In this study possibilities are investigated to use the cohesive zone method for numerical calculation of fatigue crack growth through the interface area of aluminum thick wire bond joints. For that purpose a detailed three-dimensional model of a wire bond joint is built. Two approaches are investigated to describe the fatigue crack growth: explicit calculation of a large number of cycles and crack growth prediction using a crack growth law like the Paris' law. Both methods are shown to be theoretically feasible and challenges and limits of the cohesive zone method are described.
本文探讨了用内聚区法数值计算铝粗丝结合头界面区疲劳裂纹扩展的可能性。为此,建立了一个详细的三维金属丝连接模型。研究了描述疲劳裂纹扩展的两种方法:显式计算大量循环数和利用Paris定律等裂纹扩展规律进行裂纹扩展预测。这两种方法在理论上都是可行的,并描述了内聚区方法的挑战和局限性。
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引用次数: 11
μ-Raman spectroscopy and FE-analysis of thermo-mechanical stresses in TSV periphery TSV外围热机械应力的μ-拉曼光谱和fe分析
P. Saettler, M. Boettcher, K. Wolter
In this paper the thermo-mechanical behavior of Through Silicon Vias (TSVs) is in the center of interest. Therefore a Finite Element model was developed, which calculates emerging stresses and strains in TSV periphery during annealing. For validation of the simulation results μ-Raman measurements on according test samples were carried out. Samples underwent annealing at 250 °C for 2 h. Warpage and Raman shifts were measured subsequently. Because of the complex stress distribution in TSV periphery a linear relation between stress and Raman shift cannot be presumed. For this reason an evaluation routine is introduced, that enables comparison of Raman measurements and simulation. Thereby, not only the calculation of Raman shifts out of FE data is executed. Further physical effects like penetration depth and laser spot size are taken into account. This procedure enables to move from the evaluation of single node results to a constrained section containing the laser excited region. In summary our paper succeeds in developing a new evaluation algorithm for the transformation of calculated mechanical strains in TSV periphery into Raman shifts. First comparisons of measurements and FE-results deliver much better fitting of data.
本文对硅通孔的热力学行为进行了研究。因此,建立了一个有限元模型来计算TSV外围退火过程中出现的应力和应变。为了验证仿真结果,在相应的测试样品上进行了μ-拉曼测量。样品在250℃下退火2小时。随后测量翘曲和拉曼位移。由于TSV外围复杂的应力分布,不能假定应力与拉曼位移之间存在线性关系。为此,介绍了一种评估程序,可以将拉曼测量值与仿真值进行比较。因此,不仅执行了有限元数据的拉曼位移计算。进一步的物理效应,如穿透深度和激光光斑尺寸被考虑在内。这一过程使得从单个节点结果的评估转移到包含激光激发区域的受限部分。总之,本文成功地开发了一种新的将TSV外围计算的力学应变转换为拉曼位移的评估算法。首先对测量结果和fe结果进行比较,可以更好地拟合数据。
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引用次数: 5
Characterization of a new designed octahedron slotted metal track by simulations 新型八面体开槽金属轨道的仿真表征
J. Kludt, K. Weide-Zaage, M. Ackermann, V. Hein
Highly robust metallizations in ICs for high temperature and high current applications are needed. Special thick metal layers often known as “power metals” are added to achieve a higher current capability. But these metallizations suffer from reliability limitations as well. Therefore a new design for “power metals” was created for a 0.35μm aluminium CMOS process. The reliability of a new power metal structure is investigated in this article. A determination of the thermal-electrical and thermo-mechanical behaviour is carried out by simulations.
在高温和高电流应用的集成电路中需要高度坚固的金属化。通常被称为“动力金属”的特殊厚金属层被添加以实现更高的电流能力。但是这些金属化也受到可靠性的限制。因此,为0.35μm铝CMOS工艺创建了一种新的“动力金属”设计。本文研究了一种新型电力金属结构的可靠性问题。通过模拟确定了热电和热机械行为。
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引用次数: 4
Molecularly derived mesoscale modeling of an epoxy/Cu interface (Part IV): The effect of Filler 环氧/Cu界面的分子衍生中尺度模拟(第四部分):填料的影响
N. Iwamoto
Mesoscale models (parameterized from molecular models) have been previously reported [1-2] which simulate interfacial failure of both flat and rough epoxy-copper oxide interfaces, and demonstrate how coarsegrained models could be used to predict interfacial properties and mechanical failure. The work was targeted at understand molding compound failure [3-4]; however, all molding compounds are highly filled and the aspect of the filler had not yet been addressed. The current paper reports the continued efforts to explore the use of mesoscale models by adding in the effect of the filler on the mechanical response of the epoxy. This work was supported in part by the NanoInterface Consortium funded from the Seventh Framework Program for Research and Technological Development (FP7) of the European Union (NMP3-SL-20080214371).
中尺度模型(从分子模型参数化)之前已经报道过[1-2],它模拟了平坦和粗糙环氧树脂-氧化铜界面的界面破坏,并展示了粗粒度模型如何用于预测界面特性和机械破坏。这项工作的目标是了解成型复合材料的失效[3-4];然而,所有的成型化合物都是高度填充的,填充物的方面还没有得到解决。目前的论文报告了继续努力探索使用中尺度模型,加入填料对环氧树脂力学响应的影响。这项工作得到了欧盟研究与技术发展第七框架计划(FP7)资助的纳米接口联盟(NMP3-SL-20080214371)的部分支持。
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引用次数: 1
Maintenance of solder joints on the strength of simultaneously acting creep and fatigue phenomena by using microindentation technique 利用微压痕技术对焊点强度的维护同时作用于蠕变和疲劳现象
K. Jankowski, R. Świerczyński, K. Urbanski, A. Wymyslowski, D. Chicot, R. Dudek
Last decades in reliability prototyping of microelectronic devices show that from a long time there is no good solution to examine it in relatively short time and small expenditure of costs. Currently all thermo-mechanical reliability processes are long-lasting and costly. With using only the most dominating failure mode and cyclic loadings tests can last for a number of months. Companies, which produce their products very fast can't allow on such inconvenience, because this would lead to bankruptcy. To solve that kind of problem in this paper will be proposed new method of reliability investigating. Most of existing methods are concerned on only one failure mode which is dominating under selected loading conditions. Moreover all failure analysis are done under the simplified conditions what means that obtained results are not properly reliable. New presented method aim at using typical failure modes creep and fatigue at the same time while testing. That solution can have an important meaning in the standard Accelerated Thermal Cyclic test, which are based partly on experiment measurements and numerical analysis. Therefore appropriate understanding and development of analytical methods and experimental tools for multifailure criteria analysis could be very helpful. This work presents a methodology based on the use of well known indentation technique and second, innovative method with using new instrument called Failure And Reliability Investigation System created to study creep and fatigue phenomenon carried out on two lead-free alloys: SAC 405(S-SnAg4Cu0.5) and SAC 307(S-SnAg3Cu0.7).
近几十年来微电子器件可靠性原型的研究表明,长期以来一直没有较好的解决方案能够在较短的时间和较少的成本支出内对其进行检验。目前所有的热机械可靠性过程都是持久且昂贵的。仅使用最主要的失效模式和循环加载,测试可以持续几个月。生产速度很快的公司不能容忍这样的不便,因为这会导致破产。为了解决这类问题,本文将提出一种新的可靠性研究方法。现有的方法大多只考虑在选定载荷条件下占主导地位的一种失效模式。此外,所有的失效分析都是在简化的条件下进行的,这意味着得到的结果不是很可靠。新方法旨在同时使用蠕变和疲劳两种典型失效模式进行试验。该解决方案对于部分基于实验测量和数值分析的标准加速热循环试验具有重要意义。因此,正确理解和发展多失效准则分析的分析方法和实验工具是非常有益的。这项工作提出了一种基于使用众所周知的压痕技术的方法,第二种创新方法是使用名为失效和可靠性调查系统的新仪器来研究两种无铅合金:SAC 405(S-SnAg4Cu0.5)和SAC 307(S-SnAg3Cu0.7)的蠕变和疲劳现象。
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引用次数: 2
Investigation of interface delamination of EMC-copper interfaces in molded electronic packages 模压电子封装中电磁-铜接口分层研究
A. Yadur, P. Gromala, S. Green, K. Mat Daud
Electronic packages in automotive industry are prone to harsh environmental attacks such as extreme temperatures, high temperature variations, shocks, vibrations, humidity and hazarding liquids. Plastic encapsulation is introduced to protect the electronic part by molding a compound material around it. This has been proven as a powerful solution to these challenges. Interfacial delamination is one of the major concerns in reliability issues of electronic packages with molding. To fulfill the reliability challenges, these packages require accurate reliability models and tools for lifetime estimation during the product design and development stage. Hence it is aspired to address the study of adhesion between molding compound and leadframe interface as one aspect in reliability studies.
汽车工业中的电子封装容易受到恶劣环境的攻击,如极端温度、高温变化、冲击、振动、湿度和危险液体。采用塑料封装,通过在电子部件周围成型复合材料来保护电子部件。事实证明,这是应对这些挑战的有力解决方案。界面分层是电子封装成型可靠性问题的主要问题之一。为了满足可靠性挑战,这些封装需要精确的可靠性模型和工具,以便在产品设计和开发阶段进行寿命估计。因此,将成型复合材料与引线框界面之间的黏着性作为可靠性研究的一个方面是值得关注的。
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引用次数: 3
Influence of wirebond shape on its lifetime with application to frame connections 应用于框架连接时,焊丝形状对其寿命的影响
B. Czerny, I. Paul, G. Khatibi, M. Thoben
The subject of this study was to investigate the effect of different geometrical loop shapes on the reliability of 400 μm thick Al bond wires in IGBT modules by means of experimental and analytical methods. The experimental fatigue tests have been realized by linear cyclic displacements of 5-45 μm of the contact plates at 200 Hz and 20 kHz. Life time curves were obtained for bond wire connections with different loop heights, distances and angles with the main failure mechanism being wire bond heel cracking. Furthermore an analytical model was developed to calculate the effect of variation of geometrical shape parameters on the stress at different locations of the bond wire. This model can be used to make a preliminary geometry selection of the bond wire and to predict the force or stress at critical sites of the wire bond during stress tests. This model was validated with finite element analysis.
本文采用实验和分析相结合的方法,研究了不同几何回路形状对400 μm厚铝键合线IGBT模块可靠性的影响。在200 Hz和20 kHz下,对接触板进行5 ~ 45 μm的线性循环位移,实现了疲劳试验。得到了不同环高度、环距和环角的键合钢丝接头的寿命曲线,其主要失效机制为键合钢丝后跟开裂。此外,还建立了一个分析模型来计算几何形状参数的变化对焊丝不同位置应力的影响。该模型可用于粘结丝的初步几何形状选择,并在应力测试中预测粘结丝关键部位的力或应力。通过有限元分析对模型进行了验证。
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引用次数: 11
Internal stress state measurements of the large molded electronic control units 大型成型电子控制单元的内应力状态测量
P. Gromala, S. Fischer, T. Zoller, A. Andreescu, J. Duerr, M. Rapp, J. Wilde
In this paper internal stress state measurements in a large molded electronic control unit are discussed. Measurements were done during transfer molding process in a high volume production environment. In addition, the effect of the post mold cure (PMC) was investigated. Tests were done utilizing piezoresistive stress sensors and thin film strain gages. For some parts post mold cure was done in parallel to warpage measurements using TDM Insidix apparatus. In this case the stress and deformation measurements were conducted at the same time. It was observed that the initial warpage of the module before the PMC at room temperature was reduced by 40%. It is shown that the reduction of the deformation is caused by shifting of the glass transition temperature (Tg) to 180°C, which was for not fully cured sample at 125°C. As a result of increase of the Tg, the internal stresses at room temperature after the PMC were changed as well. Driven by the fact that the out-of-plane component of stress is affecting the measurement of the in-plane components of stress, numerical simulations were used in an iterative way to correlate the results of experiment. Presented algorithm improved results of the measurements.
本文讨论了某大型成型电子控制单元的内应力状态测量。测量是在高容量生产环境的传递成型过程中完成的。此外,还研究了模后固化(PMC)的效果。测试是利用压阻式应力传感器和薄膜应变片完成的。对于一些零件,模后固化与翘曲测量同时进行,使用TDM insidex设备。在这种情况下,应力和变形测量是同时进行的。观察到,在室温下,模组在PMC之前的初始翘曲减少了40%。结果表明,变形的减小是由于玻璃化转变温度(Tg)升高到180℃引起的,而在125℃下未完全固化的样品则是如此。由于Tg的增加,PMC后的室温内应力也发生了变化。考虑到面外应力分量会影响面内应力分量的测量,采用迭代法进行数值模拟,将实验结果进行关联。该算法改善了测量结果。
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引用次数: 21
期刊
2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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