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2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)最新文献

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Geometric optimization of high performance interconnect of Rigid/Flexible/Rigid substrate for Wafer Level Packaging in Solid State Lighting applications by numerical simulations 基于数值模拟的固态照明晶圆级封装中刚性/柔性/刚性基板的高性能互连几何优化
P. Liu, J. Zhang, R. Sokolovskij, H. V. van Zeijl, B. Mimoun, G. Zhang
Wafer Level Packaging (WLP) technology for Solid State Lighting application is regarded as great potential for cost reduction. Rigid/Flexible/Rigid (RFR) substrate that is capable of transforming WLP devices from 2-dimentional into 3-dimentional devices is of enormous interest in SSL industry. In this work, numerical simulations were performed to discover the optimized geometry of interconnects in the newly developed RFR substrate to meet the harsh requirements set for SSL products. The relations of maximum temperatures in the substrate as a function of interconnect geometry and bending angle at different current levels were derived. Moreover, by using the derived relations, geometric effects on electromigration behaviours of interconnect were investigated. Suggestions were given for optimizing the geometry of interconnects and avoiding over-bending of the substrate.
晶圆级封装(WLP)技术被认为是降低固态照明成本的巨大潜力。刚性/柔性/刚性(RFR)基板能够将WLP器件从二维转换为三维器件,这在SSL行业引起了极大的兴趣。在这项工作中,进行了数值模拟,以发现新开发的RFR衬底中互连的优化几何形状,以满足SSL产品的苛刻要求。推导了不同电流水平下衬底内最高温度与互连几何形状和弯曲角度的关系。此外,利用推导出的关系,研究了几何效应对互连体电迁移行为的影响。提出了优化互连几何结构和避免衬底过度弯曲的建议。
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引用次数: 1
Measuring techniques for deformation and stress analysis in micro-dimensions 微尺度变形和应力分析的测量技术
D. Vogel, E. Auerswald, J. Auersperg, S. Rzepka, B. Michel
The paper reviews some of the currently used strain / stress measurement tools developed for rather local application - deformation and stress measurement by Digital Image Correlation (DIC) techniques, microRaman, and electron diffraction for stress measurement. The selected methods possess spatial measurement resolutions of 1 μm or better, which makes them ideal to meet typical demands for strain and stress analyses on objects with high gradients, like e.g. advanced MEMS, semiconductor devices, and components of 3D IC integration. DIC methods applied to stress measurement, which have been seized past years by different labs, are described in more detail. Examples of stress determination on TSVs by DIC and microRaman approaches illustrate the utilization of these methods to analyze stresses in electronics components of current interest. Finally, a brief comparison between the DIC, microRaman and electron diffraction techniques (EBSD) is given.
本文综述了目前用于局部应用的应变/应力测量工具-数字图像相关(DIC)技术的变形和应力测量,微罗曼和电子衍射的应力测量。所选择的方法具有1 μm或更高的空间测量分辨率,这使得它们非常适合满足高梯度物体的应变和应力分析的典型需求,例如先进的MEMS,半导体器件和3D集成电路组件。DIC方法应用于应力测量,这已经抓住了过去几年的不同实验室,更详细地描述。通过DIC和microroraman方法确定tsv应力的例子说明了这些方法在当前感兴趣的电子元件应力分析中的应用。最后,对DIC技术、微罗曼技术和电子衍射技术(EBSD)进行了简要比较。
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引用次数: 5
Advanced mixed-mode bending test Experimental-numerical characterization of the critical energy release rate Gc including Mixed-Mode-Angle Ψ in interfaces under independent external loads 独立外载荷作用下界面临界能量释放率Gc(含混模角Ψ)的实验-数值表征
M. Schulz, M. Springborn, J. Keller, B. Michel, B. Wunderle
In this paper, the Advanced Mixed-Mode Bending Test (AMB) is presented. The AMB is an experimental method to determine the effects on the critical crack propagation in bi-material interfaces that exist in electronic packages. Target in the development of this test rig was a quick and cost-effective data collection in addition to easier handling of samples. By two independent load components, shearing and opening of the boundary layer, a large range of the mode-angle can be determined. The test rig is designed for bimaterial beams, which are industrially manufactured, e.g. produced through laser cutting. Another preparation of the test-specimen is not necessary. It can also be used cutouts from actual products. Thus it is possible to examine influences of the production line.
本文介绍了先进混模弯曲试验(AMB)。AMB是一种测定电子封装中双材料界面对临界裂纹扩展影响的实验方法。除了更容易处理样品外,该试验台开发的目标是快速和经济有效的数据收集。通过边界层的剪切和打开两个独立的荷载分量,可以确定较大范围的模态角。该试验台是为工业制造的双材料光束设计的,例如通过激光切割生产。不需要对试样进行另一次制备。它也可以使用实际产品的切割。因此,可以检查生产线的影响。
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引用次数: 3
On the crack and delamination risk optimization of a Si-interposer for LED packaging LED封装用硅中间层的裂纹与分层风险优化研究
J. Auersperg, R. Dudek, R. Jordan, O. Bochow-Neß, S. Rzepka, B. Michel
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引用次数: 7
Analysis and simulation of cracks and micro cracks in PV cells 光伏电池裂纹及微裂纹的分析与仿真
J. Al Ahmar, S. Wiese
The goal in this analysis is to undestand more about the progressing of preexisting cracks in silicon solar cells under different enviromental loads. This enables to estimate critical crack sizes and reduce the losses and to improve realibility. In this work we present a 2D finite element model of encapsulated silicon solar cells containing cracks on critical positions. Cracks were modelled using special elements in ANSYS and the enviromental load caused by the thermal cycle is applied. In order to execute the evaluation of crack propagation on critical areas in the cross section of the solar cell the fracture mechanic theory is used and corresponding parameters are calculated.
本分析的目的是更多地了解硅太阳能电池中预先存在的裂纹在不同环境载荷下的进展。这样可以估计临界裂纹尺寸,减少损失,提高可靠性。在这项工作中,我们提出了一个包含临界位置裂纹的封装硅太阳能电池的二维有限元模型。在ANSYS中采用特殊单元对裂纹进行建模,并采用热循环引起的环境载荷。为了对太阳能电池截面上临界区域的裂纹扩展进行评估,运用断裂力学理论并计算了相应的参数。
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引用次数: 2
FEM simulations of back contact solar modules during temperature cycling 温度循环过程中背接触太阳能组件的有限元模拟
F. Kraemer, S. Wiese
This paper is focused on the reliability performance of novel back contact solar modules. Tn this study the mechanical integrity of the interconnect structures of back contact modules is analyzed by FEM-simulations. The solar module lifetime is limited by mechanical stresses which arise from temperature cycles. These temperature cycles are caused by day to night shifts. The reliability of photovoltaic modules under these load conditions is tested by the IEC standard 61215. The according temperature profile is created for the FEM simulations and tested with the novel back contact solar modules. A classic module assembly applying H-patterned cells is taken as reference case. The result evaluation shows high localized stresses in the interconnection structures of both module assemblies. However, these localized stresses do not cause ultimate cracks of the interconnection structures and thus may help to reduce the stress in adjacent sections of the assembly. The goal of the study is to compare the mechanical behavior of these two types of photovoltaic modules. The results of this investigation figure out, where are critical structural elements in the photovoltaic modules.
本文主要研究了新型背接触太阳能组件的可靠性性能。本研究通过有限元模拟分析了后接触模块互连结构的力学完整性。太阳能组件的寿命受到温度循环产生的机械应力的限制。这些温度循环是由白天和夜班引起的。光伏组件在这些负载条件下的可靠性通过IEC标准61215进行测试。建立了相应的温度分布,并对新型后接触太阳能组件进行了有限元模拟和试验。以典型的h型单元装配为例。结果表明,在两个模块组件的连接结构中存在较高的局部应力。然而,这些局部应力不会导致互连结构的最终裂缝,因此可能有助于降低组件相邻部分的应力。这项研究的目的是比较这两种光伏组件的力学性能。调查结果表明,光伏组件中的关键结构元件在哪里。
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引用次数: 1
Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments 压阻式力传感器和热致动器在纳米系统操作中的应用:设计、模拟、技术和实验
G. Schondelmaier, S. Hartmann, D. May, A. Shaporin, S. Voigt, R. D. Rodriguez, O. Gordan, D. Zahn, J. Mehner, K. Hiller, B. Wunderle
For properties characterization of nanostructured materials and simultaneously to predict their reliability a tensile testing system consisting of a thermal actuator and a lateral nano-Newton force piezoresistive sensor is presented. The implementation of a piezoresistive load sensor in a MEMS-based tensile testing system can be regarded as an innovative and ultrasensitive method to continuously observe the specimen deformation while simultaneously measuring the applied load electronically with nano-Newton resolution. The primary technique that we have used for the fabrication of these systems is Bonding and Deep Reactive Ion Etching (BDRIE) applied on SOI wafers.
为了表征纳米结构材料的性能,同时预测其可靠性,提出了一种由热致动器和横向纳米牛顿压阻力传感器组成的拉伸测试系统。在基于mems的拉伸测试系统中实现压阻式负载传感器是一种创新的超灵敏的方法,可以连续观察试样的变形,同时以纳米牛顿分辨率电子测量施加的载荷。我们用于制造这些系统的主要技术是应用于SOI晶圆上的键合和深度反应离子蚀刻(BDRIE)。
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引用次数: 5
Reliability investigation of system in package devices toward aeronautic requirements: Methodology and application 面向航空要求的封装装置系统可靠性研究:方法与应用
A. Renault, F. Molière, C. Munier
System in Package components (SiP) are nowadays widely used in commercial telecommunication applications. Based on More than Moore approach, SiP components consists in increasing the number of integrated circuits/packages enclosed in a single module. The main advantage of those technologies remains the possibility to densify the number of Commercial Off-The-Shelf (COTS) subsystems at component level rather than at board level. However, if the asset of SiP components seems to be obvious in term of equipment design, their reliability is still questioning regarding aeronautic environments, which are characterized by harsh and long term stresses. Furthermore, due to their quite novelty, there is no feedback about SiP devices. As a consequence, it becomes mandatory for aeronautic end users to assess in phase lead, the reliability of those devices prior to use them in electronic equipment. On this view, the goal of this paper is based on two pillars. First of all, a general methodology devoted to the component selection as a function of the mission profile and the technology will be presented. In order to underline the method, two configurations of SiP components will be studied according to two aeronautic mission profiles. Those profiles typically concern airplane and helicopter applications and will be described by the means of thermo-mechanical and vibration stresses. Then, some finite element modelling and simulations will be performed at the 2nd reliability level in order to evaluate the impact of SiP architectures on the solder joints integrity. The targeted parameters investigated in this study will be the equivalent stress, the strain and deformation. Next, either the number of cycles or the time to failure will be determined for all SiP configurations and compared to the aeronautic reliability specifications at 2nd reliability level. This approach enables an end-user component to select a suitable SiP device for his application if reliability results got by simulations successfully passes the aeronautic specifications. However, reliability results are strongly linked to the design and process parameters such as solder joints, packaging dimensions and board design or the choice of process assembly for instance. Considering both the lack of design standards and the high number of SiP configurations available on market, guidelines do not exist for end user to evaluate the reliability of commercial SiP. Based on the studied configurations, this paper will supply some design rules of SiP ball grid array architectures at 2nd level of reliability in order to fulfil the reliability specifications. This study has been performed in the framework of the ENIAC project entitled ESiP and is a result of a European collaboration between EADS, Siemens and Murata Electronics Oy.
系统级封装组件(SiP)目前在商业电信应用中得到了广泛的应用。基于摩尔方法,SiP组件包括增加单个模块中封装的集成电路/封装的数量。这些技术的主要优势仍然是在组件级别而不是在板级别上增加商用现货(COTS)子系统数量的可能性。然而,如果SiP组件的资产在设备设计方面似乎是显而易见的,那么它们在以恶劣和长期应力为特征的航空环境中的可靠性仍然受到质疑。此外,由于SiP设备非常新颖,因此没有关于SiP设备的反馈。因此,航空终端用户在电子设备中使用这些设备之前,必须对其可靠性进行阶段性评估。从这个角度来看,本文的目标是基于两个支柱。首先,将介绍一种用于根据任务概况和技术选择部件的一般方法。为了强调该方法,将根据两个航空任务剖面研究SiP组件的两种配置。这些剖面通常涉及飞机和直升机应用,并将通过热机械和振动应力来描述。然后,为了评估SiP架构对焊点完整性的影响,将在第二可靠性级别执行一些有限元建模和仿真。本研究的目标参数为等效应力、应变和变形。接下来,将确定所有SiP配置的循环次数或故障时间,并将其与第二可靠性级别的航空可靠性规范进行比较。该方法使终端用户组件能够在可靠性仿真结果成功地通过航空规范的情况下,为其应用选择合适的SiP设备。然而,可靠性结果与设计和工艺参数密切相关,例如焊点、封装尺寸和电路板设计或工艺装配的选择。考虑到设计标准的缺乏和市场上SiP配置的大量可用性,最终用户评估商用SiP可靠性的指南并不存在。基于所研究的结构,本文将给出SiP球栅阵列在二级可靠性下的一些设计规则,以满足可靠性规范。这项研究是在ENIAC项目ESiP的框架内进行的,是EADS、西门子和村田电子公司之间欧洲合作的结果。
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引用次数: 1
Reliability of Cu-plated through encapsulant vias (TEV) for 3D-integration 用于3d集成的镀铜封装通孔(TEV)的可靠性
J. Heilmann, B. Wunderle, S. G. Kumar, O. Hoelck, H. Walter, O. Wittler, G. Engelmann, M. Wolf, G. Beer, K. Pressel
Through encapsulant vias (TEVs) are an interconnect technology which enables 3D stacking and double sided re-routing of packages encapsulated with epoxy molding compound. These interconnects are formed by Cu-plated holes through the encapsulant and can typically be routed by an RDL (redistribution layer). In order to enable prolonged function of these interconnects, thermomechanical reliability has to be assured. Dedicated stress tests have to be conducted to evaluate lifetime under relevant testing conditions, then failure mechanisms have to be identified, understood and quantitatively condensed into a lifetime model to predict reliability for future designs. In order to assure a short time to market, accelerated tests (and corresponding acceleration factors) are urgently needed by industry and are the holy grail of reliability as an academic discipline. The idea presented in this paper is to substitute lengthy thermal cycling tests by results obtained by rapid isothermal fatigue tests at different temperatures and establish a correlation between both of them. Based on physics of failure principles, the applicability and viability of such a concept then is evaluated and discussed.In conclusion, this work shows a consistent approach for acceleration of the design for reliability procedure in system integration. It is based on the now possible rapid generation of a lifetime model by thin metal layer samples which are easily manufacturable with the same technology as the TEVs. More data is needed to confirm the failure mechanisms in TEVs, reproducible samples for thermal cycling and to validate the applicability of the method also to other metal layers used in the electronic packaging industry.
通过封装通孔(tev)是一种互连技术,可以实现用环氧成型化合物封装的封装的3D堆叠和双面重新布线。这些互连是通过封装剂镀铜孔形成的,通常可以通过RDL(再分配层)路由。为了延长这些互连的功能,必须保证热机械的可靠性。必须进行专门的压力测试,以评估相关测试条件下的寿命,然后必须识别、理解失效机制,并将其定量浓缩为寿命模型,以预测未来设计的可靠性。为了确保短时间上市,加速测试(以及相应的加速系数)是工业界迫切需要的,也是可靠性作为一门学术学科的圣杯。本文提出的思想是用不同温度下的快速等温疲劳试验结果代替长时间的热循环试验,并建立两者之间的相关性。基于失效原理的物理学原理,对这一概念的适用性和可行性进行了评价和讨论。总之,本文为加快系统集成中可靠性流程的设计提供了一种一致的方法。它是基于现在可能通过薄金属层样品快速生成寿命模型,这些样品很容易用与tev相同的技术制造。需要更多的数据来确认tev的失效机制,热循环的可重复样品,并验证该方法对电子封装行业中使用的其他金属层的适用性。
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引用次数: 3
Multi-physics simulations for combined temperature/humidity cycling of potted electronic assemblies 罐式电子组件组合温度/湿度循环的多物理场模拟
E. Parsa, Hao Huang, A. Dasgupta
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引用次数: 7
期刊
2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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