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52nd Electronic Components and Technology Conference 2002. (Cat. No.02CH37345)最新文献

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Heat transfer and thermal stress analysis in the new generation quasi-monolithic integration technology (QMIT) 新一代准单片集成技术(QMIT)中的传热与热应力分析
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008155
M. Joodaki, T. Senyildiz, G. Kompa
Static heat transfer and thermal stress analysis for the new generation quasi-monolithic integration technology (QMIT) have been performed using a three-dimensional finite element simulator. To confirm the simulation results, white-light interferometry measurement along with a Peltier element and a Pt-temperature sensor have been used. It has been shown that thermal resistances of 11/spl deg/C/W and 8.5/spl deg/C/W are possible using 200 /spl mu/m electroplated gold heat-spreader and diamond-filled polyimide on the backside of the active device, respectively. This promises successful realization of the high frequency circuits containing power active devices using the novel QMIT. Simulation and measurement results demonstrate a great decrease of thermal stress in the new generation QMIT in comparison to the earlier concept which extremely improves life-time of the packaging. A remarkable agreement between calculated and measured results was found.
利用三维有限元模拟器对新一代准单片集成技术(QMIT)进行了静态传热和热应力分析。为了验证仿真结果,使用了白光干涉测量以及珀尔帖元件和铂温度传感器。结果表明,在有源器件背面电镀200 /spl μ m的镀金散热器和填充金刚石的聚酰亚胺分别可以达到11/spl°/C/W和8.5/spl°/C/W的热阻。这为利用新型QMIT成功实现含功率有源器件的高频电路提供了可能。模拟和测量结果表明,与早期的概念相比,新一代QMIT的热应力大大降低,极大地提高了封装的使用寿命。计算结果与实测结果非常吻合。
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引用次数: 4
Prediction of solder interconnects wetting and experimental evaluation 焊料互连润湿预测及实验评价
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008328
S. Kang, D. Baldwin
A new analysis methodology to predict solder interconnect wetting is developed to reveal the causes of poor wetting during flip chip assembly and to provide solutions. The analysis methodology characterizes solder wetting as two different processes: the wetting dynamics of the solder contact line and the generation of the minimum energy surface of the molten solder. Surface Evolver is implemented to generate the surface shape of solder during wetting. Since there are no quantified dynamics models for solder materials, a solder wetting dynamics model is developed based on former wetting models proposed for other materials. The contact angle relaxation of spreading over time is measured in specially designed experimental setup for model development. As a result of experiment and model evaluation, a best wetting dynamics model is developed and the development of analysis methodology is completed. The study of reflow process parameter effects is ongoing.
开发了一种新的分析方法来预测焊料互连润湿,以揭示倒装芯片组装过程中润湿不良的原因并提供解决方案。分析方法将焊料润湿描述为两个不同的过程:焊料接触线的润湿动态和熔融焊料的最小能量表面的产生。实现了表面演化器来生成润湿过程中焊料的表面形状。由于目前还没有定量的钎料润湿动力学模型,本文在前人提出的其他材料润湿模型的基础上,建立了钎料润湿动力学模型。在为模型开发而专门设计的实验装置中,测量了接触角随时间扩散的松弛。通过实验和模型评价,建立了最佳润湿动力学模型,完成了分析方法的开发。对回流工艺参数影响的研究正在进行中。
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引用次数: 0
Alternative Z-axis connector technologies for high-density 3-D packaging 用于高密度3d封装的替代z轴连接器技术
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008240
S. Spiesshoefer, L. Schaper, K. Maner, E. Porter, F. Barlow, M. Glover, W. Marsh, G. Bates, M. Lucas
This paper addresses the result of research on Z-axis interconnects suitable for 3-D processor modules. We discuss the advantages and disadvantages for the intended system. One selected interconnection medium, which is manufactured by Shin-Etsu, is based on metal wires embedded in a matrix of polymeric material. The wires protrude from the surface of the polymer film. By compressing this material between substrates, contact is made between metallized gold pads on the substrates via the embedded wires. The Shin-Etsu connector allows connections among multiple substrates at 0.5-mm pitch without the need for precision connector alignment because it contains redundant wires at very fine pitch. The second interconnection method, which is manufactured by FormFactor, uses a wire bonder to create gold wires with spring-like geometries on an array of metallized pads, fabricated on a test socket or interposer. This paper describes the testing program to determine connector performance and reliability.
本文介绍了适用于三维处理器模块的z轴互连的研究结果。我们讨论了预期系统的优点和缺点。其中一种选择的互连介质是由信越制造的,它基于嵌入聚合物材料基体中的金属线。电线从聚合物薄膜的表面伸出来。通过在衬底之间压缩这种材料,通过嵌入的导线在衬底上的金属化金衬垫之间进行接触。Shin-Etsu连接器允许在0.5 mm间距的多个基板之间连接,而不需要精确的连接器校准,因为它包含非常细间距的冗余导线。第二种互连方法是由FormFactor公司制造的,它使用金属键合机在一系列金属化衬垫上制造出具有弹簧形状的金线,这些金属衬垫是在测试插座或中间层上制造的。本文介绍了确定连接器性能和可靠性的测试程序。
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引用次数: 3
Effect of adhesive layer properties on interfacial fracture in thin-film high-density interconnects 粘接层性能对薄膜高密度互连界面断裂的影响
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008199
M. Modi, S. Sitaraman
Delamination of intrinsically stressed films is commonly encountered in microelectronic systems. Thin films deposited through physical vapor deposition processes typically accrue intrinsic stresses through the micro structural variations caused by deposition or through thermally induced stresses imposed during cool-down from deposition temperatures. These intrinsic stresses can have a peak magnitude upwards of I GPa. To help prevent delamination, Ti or Cr "adhesive" layers, with microscale or nanoscale thickness, are used to increase the adhesion between the thin film and substrate. This study applies the Finite Element Method (FEM) to study the resistance to delamination of an innovative, stress-engineered, thin film interconnect. Adhesive layer parameters such as thickness, deposition-induced intrinsic stress, and material properties are examined. Fracture criteria (energy release rate and mode mixity) are used to quantify the effect of varying adhesive layer properties on interfacial fracture. The finite element study results are compared to a previously developed plate theory model, which does not account for the large deflection present in highly stressed film delamination. To determine whether a delamination will propagate, it is imperative that the interfacial fracture toughness be experimentally measured for the interface under study. Experimental measurement of interfacial fracture toughness and the associated mode mixity is currently a challenge for thin film interfaces. In addition to the numerical simulation, this paper discusses modifications to the decohesion test that yields a method that can tightly bound the interfacial fracture toughness using a single test wafer. Further it is a method that uses common IC fabrication techniques, can achieve low mode mixities easily and efficiently, and can be used with titanium interfaces. Results for Ti/Alumina interfacial fracture toughness are discussed and applied to the numerical study.
在微电子系统中,经常会遇到本征应力薄膜的分层。通过物理气相沉积工艺沉积的薄膜通常通过沉积引起的微观结构变化或在沉积温度冷却期间施加的热诱导应力而产生本征应力。这些内在应力的峰值可以超过1gpa。为了防止分层,使用微米级或纳米级厚度的Ti或Cr“粘合剂”层来增加薄膜和衬底之间的附着力。本研究应用有限元法(FEM)来研究一种创新的应力工程薄膜互连的抗分层性。胶粘剂层参数,如厚度,沉积诱发的本征应力和材料性能进行了检查。断裂准则(能量释放率和模态混合)用于量化不同粘结层性能对界面断裂的影响。有限元研究结果与先前开发的板理论模型进行了比较,该模型没有考虑到在高应力薄膜分层中存在的大挠度。为了确定分层是否会扩展,必须对所研究的界面进行断裂韧性的实验测量。界面断裂韧性和相关模态混合的实验测量是目前薄膜界面研究的一个挑战。除了数值模拟外,本文还讨论了对脱黏试验的改进,从而产生了一种可以使用单个测试晶片紧密结合界面断裂韧性的方法。此外,它是一种使用普通IC制造技术的方法,可以轻松有效地实现低模式混合,并且可以与钛接口一起使用。讨论了Ti/氧化铝界面断裂韧性的研究结果,并将其应用于数值研究。
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引用次数: 7
Experimental investigation on the progressive failure mechanism of solder balls during ball shear test 球剪试验中焊锡球渐进破坏机理的实验研究
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008218
Xingjia Huang, S. Lee, C. Yan
The present study is aimed at establishing the mechanics foundation of solder ball shear tests for evaluating the solder ball attachment strength of BGA packages. In particular, the emphasis is placed on understanding the progressive failure mechanism during the ball shear test. In this paper, an experimental investigation is presented. Specimens with BGA solder balls are fabricated and a series of ball shear tests is conducted. The shear ram is stopped at various stages during the ball shear test. The specimens are cross-sectioned for SEM inspection. The observed failure modes are characterized and correlated to the corresponding shear loading curves. The current experimental results can lead to a profound understanding in the failure mechanism of solder balls under mechanical shear loading. Furthermore, the outcome of the present study may provide a valuable database for the validation of computational modeling.
本研究旨在为评价BGA封装焊锡球附着强度的焊锡球剪切试验奠定力学基础。特别是,重点放在理解的渐进破坏机制,在球剪试验。本文进行了实验研究。制作了BGA焊料球试样,并进行了一系列的球剪试验。剪切柱塞在球剪试验的不同阶段停止。将试样横截面进行扫描电镜检查。观察到的破坏模式具有特征,并与相应的剪切加载曲线相关联。目前的实验结果可以使我们对锡球在机械剪切载荷作用下的破坏机理有更深刻的认识。此外,本研究的结果可能为计算模型的验证提供有价值的数据库。
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引用次数: 14
Gold-tin solder electroplating of photo-resist laminated AlN ceramics 光阻层压AlN陶瓷的金锡焊料电镀
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008085
S. Akhlaghi, J. Broughton, D. Ivey
The eutectic gold-tin solder has been widely used in the optoelectronics/electronics industry. The prominent characteristics of this solder include high thermal fatigue resistance in addition to excellent thermal properties. An electroplating process was used in this study to deposit Au-30Sn (at%) solder on photoresist laminated substrates, based on previous successful attempts at depositing this alloy on unpatterned, metallized substrates. Difficulties were encountered in the course of electroplating photoresist patterned substrates. The problems were resolved by changing the chemistry of the electroplating solution through decreasing the gold:tin ratio. The problems arose because of penetration of the electroplating solution through pinholes in the photoresist, thus increasing the actual opening area for electroplating.
金锡共晶焊料在光电子工业中得到了广泛的应用。除了优异的热性能外,这种焊料的突出特性还包括高热疲劳抗力。本研究采用电镀工艺在光刻胶层压基底上沉积Au-30Sn (at%)焊料,这是基于之前在无图案金属化基底上沉积这种合金的成功尝试。在电镀光刻胶图案化基板的过程中遇到了一些困难。通过降低金锡比来改变电镀液的化学性质,解决了上述问题。问题的出现是因为电镀溶液通过光刻胶的针孔渗透,从而增加了电镀的实际开口面积。
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引用次数: 0
New qualification approaches for opto-electronic devices 光电器件鉴定新方法
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008149
P. Berthier, D. Laffitte, J. Périnet, J. Goudard, X. Boddaert, P. Chazan
Qualification of opto-electronic devices is a mandatory but complex activity to perform in a fast changing technical environment and under a strong market pressure. In this paper, we analyze the advantages and drawbacks of the traditional qualification approach based on both end-development tests defined by international standards and statistical reliability calculations. We explain how we are adapting our qualification practices towards risk assessment methods and design for reliability process. Looking at the future trends or telecom opto-electronic devices, possible challenges that qualification activity will have to face are finally discussed.
在快速变化的技术环境和强大的市场压力下,光电器件的鉴定是一项强制性但复杂的活动。本文分析了基于国际标准定义的末端开发试验和统计可靠性计算的传统定性方法的优缺点。我们解释了我们如何将我们的认证实践适应于风险评估方法和可靠性过程的设计。展望电信光电器件的未来发展趋势,最后讨论了资质认证活动可能面临的挑战。
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引用次数: 2
Understanding modulus trends in ultra low K dielectric materials through the use of molecular modeling 通过使用分子模型了解超低K介电材料的模量趋势
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008276
N. Iwamoto, L. Moro, B. Bedwell, P. Apen
Molecular modeling has previously been used to study adhesion and surface energy effects of die attach, underfill and viafill formulations, and is currently being used to study the mechanical property trends of the new class of ultra low k nanoporous dielectric materials, NANOGLASS/spl reg/ porous spin-on-glass (SOG) and GX3-P/sup TM/ porous organic, being developed within Honeywell. The need to understand material performance from a molecular level is especially understandable when considering the target application in IC fabrication. With such small microstructures, the impact of the molecular mechanical properties imparted by the molecular structure and architecture become more and more important. In addition, we are finding that by understanding the effects of the formulation on the mechanical properties from the molecular level, formulation changes can be planned directly targeted at specific properties. Although we are using many aspects of molecular modeling to help us understand SOG and organic dielectric properties such as density, wetting, solubility and adhesion, for this paper we have concentrated on reporting our observations on modulus. Our studies have found that we can correlate the experimental modulus of these materials very simply with a molecularly derived modulus.
分子模型以前被用于研究模具附着、底填和内填配方的粘附力和表面能效应,目前被用于研究新型超低k纳米多孔介电材料的力学性能趋势,这些材料是霍尼韦尔正在开发的NANOGLASS/spl reg/多孔玻璃自旋(SOG)和GX3-P/sup TM/多孔有机材料。在考虑集成电路制造中的目标应用时,从分子水平理解材料性能的需求尤其可以理解。在这种微小的微观结构下,分子结构和体系结构对分子力学性能的影响变得越来越重要。此外,我们发现通过从分子水平了解配方对力学性能的影响,可以直接针对特定性能计划配方变化。虽然我们正在使用分子建模的许多方面来帮助我们理解SOG和有机介电性质,如密度、润湿性、溶解度和粘附性,但在本文中,我们集中报道了我们对模量的观察结果。我们的研究发现,我们可以很简单地将这些材料的实验模量与分子衍生模量联系起来。
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引用次数: 19
Package characterization and development of a flip chip QFN package: fcMLF 倒装QFN封装的封装特性和开发:fcMLF
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008122
D. Mccann, Su-Min Ha
Describes the performance of a low cost molded package using flip chip interconnections on a copper lead frame substrate. Two flip chip interconnect metallurgies were evaluated: High Pb bumps attached to the lead frame using eutectic Sn37Pb solder paste; Au bumps attached to the leadframe using eutectic Sn3.5Ag solder paste. This package format is identified as the flip chip MicroLeadframe (fcMLF) package family (QFN) in this presentation. Temperature cycle, HAST, storage, and MRT testing were performed. All reliability requirements were achieved. Level 1 260/spl deg/C J-STD-020A moisture classification was achieved. This fcMLF package was also evaluated with and without an exposed thermal pad. Electrical model simulations were completed showing the package was applicable for use up to 40 GHz, depending upon die to package size ratio. Thermal models were completed that demonstrated thermal dissipation of 35/spl deg/C/W theta JA for a 4.00 /spl times/ 4.00 mm body size with an exposed pad.
介绍在铜引线框架基板上使用倒装芯片互连的低成本模制封装的性能。对两种倒装芯片互连材料进行了评价:采用共晶Sn37Pb锡膏将高铅凸点附着在引线框架上;使用共晶Sn3.5Ag锡膏将Au凸起连接到引线框架上。这种封装格式在本报告中被确定为倒装芯片MicroLeadframe (fcMLF)封装家族(QFN)。进行温度循环、HAST、储存和MRT测试。所有的可靠性要求都达到了。达到1级260/spl℃J-STD-020A水分分级。该fcMLF封装也进行了评估,有无暴露的热垫。电气模型仿真已经完成,显示该封装适用于高达40 GHz的使用,具体取决于芯片与封装的尺寸比。完成的热模型显示,在4.00 /spl次/ 4.00 mm的外露垫尺寸下,35/spl度/C/W θ JA的散热。
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引用次数: 16
Hybrid integration of photonic subsystems 光子子系统的混合集成
Pub Date : 2002-08-07 DOI: 10.1109/ECTC.2002.1008153
P.S. Whitney
AXSUN Technologies has developed technology for hybrid integration of photonic components and subsystems based on a set of platform enablers which allow for rapid prototyping of new concepts for product development, and rapid realization of a wide range of functions required for optical networking. A description of the key technologies comprising the "toolbox" will be given along with a discussion of the hybrid assembly processes and comparisons to competing technologies.
AXSUN Technologies开发了基于一套平台的光子组件和子系统混合集成技术,该技术允许产品开发新概念的快速原型,并快速实现光网络所需的广泛功能。对组成“工具箱”的关键技术的描述将与混合装配过程的讨论以及与竞争技术的比较一起给出。
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引用次数: 2
期刊
52nd Electronic Components and Technology Conference 2002. (Cat. No.02CH37345)
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