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Investigation of defects in GaN HFET structures by electroluminescence 电致发光法研究氮化镓HFET结构缺陷
J. Priesol, A. Šatka, L. Sladek, M. Bernat, D. Donoval
This contribution deals with the detection and analysis of electroluminescence emitted by depletion mode (normally-on) InAlN/GaN heterostructure field effect transistors (HFETs) at room temperature and drain-source voltages ranging from 20 to 30 V. Collected electroluminescence maps are used to reveal and localize strong electrically stressed and critical regions of GaN HFETs influencing their functionality and reliability. Such defective regions have been observed along gate fingers as well as at the edges of the drain contact pad expanded outside the transistor structure itself. Identification of observed HFET imperfections provides a valuable feedback towards the optimization of HFET's technology with positive impact on the quality and overall electronic performance of such advanced electronic devices.
该贡献涉及在室温和漏源电压范围为20至30 V的耗尽模式(正常导通)InAlN/GaN异质结构场效应晶体管(hfet)发出的电致发光的检测和分析。收集的电致发光图用于揭示和定位影响其功能和可靠性的GaN hfet的强电应力和关键区域。这种缺陷区域沿着栅极指以及在晶体管结构本身外扩展的漏极接触垫的边缘被观察到。对观察到的HFET缺陷的识别为优化HFET技术提供了有价值的反馈,对此类先进电子器件的质量和整体电子性能具有积极影响。
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引用次数: 0
Spectral analysis of InXGa1−xN/GaN quantum well structures for III-nitride based solar cells iii -氮化物基太阳能电池InXGa1−xN/GaN量子阱结构的光谱分析
D. O'Mahony, P. Parbrook, B. Corbett, J. Kovác, M. Florovič, A. Vincze
This paper reports on the optical and electrical characteristics of III-nitride epi-structures for visible wavelength absorption. Structures, incorporating InxGa1-xN/GaN (0.20<;x<;0.35) quantum well active regions have been analysed by photocurrent spectroscopy, optical transmission and electro/photo-luminescence techniques to identify the key spectral absorption characteristics of the structures. In addition the influence of indium composition and number of quantum wells on the spectral response of such structures was investigated. In order to demonstrate the effect of different indium compositions on the photovoltaic performance of an InGaN solar cell, an active silicon solar cell was stacked under two InGaN structures with differing indium composition. For higher indium composition, a lower spectral response is observed at zero bias and correspondingly lower quantum efficiency by a factor of approximately two. The obtained results provide insight how multi-junction solar cells incorporating III-nitride solar cells might be designed in a multi-junction configuration in order to boost the overall efficiency of conventional cell materials such as silicon.
本文报道了iii -氮化物外延结构可见光吸收的光学和电学特性。结合InxGa1-xN/GaN (0.20<;x<;0.35)量子阱活性区的结构通过光电流光谱、光学传输和电/光致发光技术进行了分析,以确定结构的关键光谱吸收特性。此外,还研究了铟的组成和量子阱数对这类结构的光谱响应的影响。为了证明不同铟成分对InGaN太阳能电池光伏性能的影响,将一个有源硅太阳能电池堆叠在两个不同铟成分的InGaN结构下。对于较高的铟成分,在零偏置下观察到较低的光谱响应,相应的量子效率降低了约两倍。所获得的结果提供了如何在多结配置中设计包含iii -氮化物太阳能电池的多结太阳能电池,以提高传统电池材料(如硅)的整体效率。
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引用次数: 0
Templates for highly ordered SiGe-QD arrays for single photon detection 用于单光子检测的高有序SiGe-QD阵列模板
J. Moers, N. P. Stcpina, S. Trellenkamp, D. Grutzmacher
Two and three dimensional SiGe-QD-arrays can be regarded as a test-system for artificial crystals, as they also can be utilized as single photon detectors. While arrays with randomly distributed SiGe-QD can easily be grown on plain silicon surfaces, the fabrication of ordered arrays with pitches done to a few 10 nm is challenging: to facilitate Template Assisted Self Assembled growth of SiGe-QD in MBE, ordered arrays of seed holes have to be etched into the silicon substrate. EUV-interference lithography can be employed, but here no spatial relation to previous or later process steps is possible. In this work contrast and resolution of ZEP 520A-7 is investigated in terms of development temperature, duration and acceleration voltage during e-beam exposure to obtain laterally ordered well localized SiGe-QD-arrays. By increasing acceleration voltage from 50 kV to 100 kV contrast can be improved by a factor of 1.9, shifting the resolution from 40 nm pitch seed hole arrays etched in silicon to 30 nm.
二维和三维sige - qd阵列可以被视为人工晶体的测试系统,因为它们也可以用作单光子探测器。虽然具有随机分布的SiGe-QD阵列可以很容易地在平坦的硅表面上生长,但具有10nm间距的有序阵列的制造是具有挑战性的:为了促进模板辅助自组装SiGe-QD在MBE中的生长,必须在硅衬底上蚀刻有序的种子孔阵列。可以使用euv干涉光刻,但这里不可能与之前或之后的工艺步骤有空间关系。在这项工作中,研究了ZEP 520A-7在电子束暴露期间的发展温度,持续时间和加速电压的对比度和分辨率,以获得横向有序的良好定位的sige - qd阵列。通过将加速电压从50 kV增加到100 kV,对比度可以提高1.9倍,将硅蚀刻的40 nm间距种子孔阵列的分辨率提高到30 nm。
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引用次数: 0
Electrical characterization of diamond films deposited in nitrogen and oxygen containing gas mixture 氮氧混合气体中沉积金刚石薄膜的电学特性
M. Mikolasek, M. Vojs, M. Varga, O. Babchenko, T. Ižák, M. Marton, A. Kromka, L. Harmatha
The paper deals with electrical characterization of nanocrystalline diamond / p- type crystalline silicon heterostructures. The diamond films were prepared with and without nitrogen addition into CH4/CO2/H2 gas mixture during the deposition. The introduced nitrogen promoted amorphization instead of creating sp2 domains. The structure with nitrogen exhibits shallow donor state with energy of 0.28 eV. It is suggested that origin of such a state is related to nitrogen atoms trapped at the vacancies.
本文研究了纳米晶金刚石/ p型晶硅异质结构的电学特性。在沉积过程中,在CH4/CO2/H2混合气中分别添加氮和不添加氮制备了金刚石薄膜。引入的氮促进了非晶化,而不是形成sp2结构域。含氮结构呈现浅层供体态,能量为0.28 eV。认为这种状态的产生与空位处捕获的氮原子有关。
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引用次数: 0
Electrical properties of semi-insulating GaAs irradiated with 5 MeV electrons 5 MeV电子辐照半绝缘砷化镓的电学特性
P. Boháček, B. Zat’ko, A. Šagátová, P. Hybler, M. Sekáčová
The resistivity, Hall coefficient, Hall mobility, and Hall concentration in undoped semi-insulating GaAs samples irradiated by 5 MeV electrons of various cumulative doses ranging from 1kGy to 24 kGy and different dose rate were measured and analysed at the temperature 400 K and 300 K. The resistivity and the electron Hall concentration decrease while Hall coefficient and the electron Hall mobility increase with increasing cumulative electron dose. The electron Hall mobility increased from 6950 cm2/Vs to about 7680 cm2/Vs at 300 K both samples irradiated with the cumulative electron dose of 24 kGy.
在400 K和300 K温度下,测量了5 MeV电子在1kGy ~ 24kgy不同累积剂量和不同剂量率下辐照的未掺杂半绝缘GaAs样品的电阻率、霍尔系数、霍尔迁移率和霍尔浓度。随着累积电子剂量的增加,电阻率和电子霍尔浓度降低,霍尔系数和电子霍尔迁移率增加。在24 kGy的累积电子剂量照射下,300 K时电子霍尔迁移率从6950 cm2/Vs增加到7680 cm2/Vs。
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引用次数: 1
Technology of conductive polymer PEDOT:PSS films 导电聚合物PEDOT:PSS薄膜技术
J. Nevrela, M. Micjan, M. Novota, S. Flickyngerová, J. Kováč, M. Pavúk, P. Juhasz, J. Jakabovic, M. Weis
The structural, optical, and electrical properties of copolymer poly(3, 4-ethylenedioxythiophene):(styrenesulfonic acid) (PEDOT:PSS) thin films deposited from aqueous solution have been investigated. To increase the conductivity three different dopants have been used: dimethyl sulfoxide (DMSO), sorbitol, and ethylene glycol. Even though the dopants increase the conductivity by three orders, the surface morphology and optical properties do not change significantly. The discussion on secondary doping effect is carried out to explain the observations.
研究了在水溶液中沉积的共聚物聚(3,4 -乙烯二氧噻吩):(苯乙烯磺酸)(PEDOT:PSS)薄膜的结构、光学和电学性能。为了提高电导率,使用了三种不同的掺杂剂:二甲基亚砜(DMSO)、山梨醇和乙二醇。尽管掺杂剂使电导率提高了3个数量级,但表面形貌和光学性质没有明显变化。对二次掺杂效应进行了讨论,以解释观察结果。
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引用次数: 3
Analysis on carrier trapping mechanism in organic diodes by charge modulation spectroscopy and electric field optical second harmonic generation measurement 利用电荷调制光谱和电场光二次谐波测量分析有机二极管的载流子捕获机理
E. Lim, M. Bok, D. Taguchi, M. Iwamoto
We studied electric field distribution changes induced in the active layer of ITO/PI/TIPS-pentacene/Au diodes by carrier injection. Upon application of a step voltage to the diodes, the electric field change across the TIPS-pentacene layer was measured. Significant electric field distribution change was suggested due to the carrier injection, and a simple model that accounts for the I-V characteristics of the diodes was proposed, on the basis of the Maxwell-Wagner model. By using charge modulation spectroscopy (CMS) and time-resolved electric field induced optical second harmonic generation (TR-EFISHG) measurements, we studied the carrier trapping mechanism in ITO/PI/TIPS-pentacene/Au diodes. Using TR-EFISHG in combination with CMS is a very effective way to study carrier behaviors in diodes, and stress-biasing effect induced in TIPS-pentacene active layer can be well identified, in terms of carrier injection and interfacial carrier accumulation.
研究了载流子注入对ITO/PI/ tips -并五烯/Au二极管活性层电场分布的影响。在对二极管施加阶跃电压后,测量了tips -五苯层上的电场变化。由于载流子注入,电场分布发生了明显的变化,并在Maxwell-Wagner模型的基础上,提出了一个解释二极管I-V特性的简单模型。通过电荷调制光谱(CMS)和时间分辨电场诱导光二次谐波(TR-EFISHG)测量,研究了ITO/PI/ tip -并五烯/Au二极管的载流子捕获机制。trf - efishg结合CMS是研究二极管中载流子行为的一种非常有效的方法,从载流子注入和界面载流子积累两方面可以很好地识别tips -并五苯活性层中诱导的应力偏置效应。
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引用次数: 0
Precise etching of AlGaN/GaN HEMT structures with Cl2/BCL3/Ar plasma 用Cl2/BCL3/Ar等离子体精确刻蚀AlGaN/GaN HEMT结构
J. Gryglewicz, R. Paszkiewicz, W. Macherzyński, A. Stafiniak, M. Wośko
The aim of work was to develop precise etching process of AlGaN/GaN heterostructures. The study was focused on surface parameters evolution and etch characteristics of etched layers. The surface parameters depended on selection of composition of Cl2:BCl3:Ar gas mixture, while the amount of boron trichloride in Cl2:BCl3:Ar was crucial in obtaining precise etch rate of thin AlGaN and thick uid-GaN layers. Changing of BCl3 amount in the Cl2:BCl3:Ar mixture in the range of 6% ÷ 60% resulted in increased AlGaN etch rate from 1 nm/min to 19 nm/min and uid-GaN etch rate from 11 nm/min to 55 nm/min. In case of AlGaN almost linear etch characteristic was observed. Surface morphology of uid-GaN was modified by different ratio of BCl3/Cl2.
本研究的目的是建立一种精确的AlGaN/GaN异质结构的刻蚀工艺。重点研究了刻蚀层的表面参数演变和刻蚀特性。表面参数取决于Cl2:BCl3:Ar气体混合物组成的选择,而Cl2:BCl3:Ar中三氯化硼的含量对获得精确的薄AlGaN和厚液态gan层的蚀刻速率至关重要。改变Cl2:BCl3:Ar混合物中BCl3的含量在6% / 60%的范围内,可使AlGaN的腐蚀速率从1 nm/min提高到19 nm/min,使ids - gan的腐蚀速率从11 nm/min提高到55 nm/min。在AlGaN的情况下,观察到几乎线性的蚀刻特性。不同BCl3/Cl2配比对液态氮化镓的表面形貌进行了修饰。
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引用次数: 1
Photonic and plasmonic structures for applications in solar cells 光子和等离子体结构在太阳能电池中的应用
M. Zeman, A. Ingenito, H. Tan, D. N. P. Linssen, R. Santbergen, A. Smets, O. Isabella
The effect of decoupled front/back textures and the application of photonic and plasmonic nanostructures on the performance of thin silicon solar cells was studied. New light trapping concepts based on diffraction on periodic photonic nanostructures and scattering using plasmonic structures have potential to outperform the currently used randomly textured structures. The study demonstrates that supporting layers of solar cells, such as transparent conductive oxides, doped layers and back reflectors, are responsible for significant parasitic absorption losses that prevent achieving 4n2 enhancement of light absorption in solar cells with silicon absorbers.
研究了去耦前后结构以及光子和等离子体纳米结构对薄硅太阳电池性能的影响。基于周期性光子纳米结构的衍射和等离子体结构的散射的新光捕获概念有可能超越目前使用的随机纹理结构。该研究表明,太阳能电池的支撑层,如透明导电氧化物、掺杂层和后反射器,是造成显著寄生吸收损失的原因,这阻碍了硅吸收器太阳能电池实现4n2光吸收增强。
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引用次数: 0
Advanced methodology for fast 3-D TCAD electrothermal simulation of power devices 电力器件快速三维TCAD电热仿真的先进方法
A. Chvála, D. Donoval, J. Marek, P. Pribytny, M. Molnar
In this paper the new methodology for fast 3-D electrothermal simulation of complex power devices including the package and cooling assemblies is proposed and illustrated. A power MOSFET under an unclamped inductive switching (UIS) test of the device robustness is used to perform validation of the designed electrothermal simulation. The presented simulation approach contributes to full analysis of complex structures at high speed of simulation and simplicity of implementation. The methodology is developed for co-simulation platform SMAC.
本文提出并说明了复杂功率器件(包括封装和冷却组件)快速三维电热模拟的新方法。在器件稳健性的非箝位电感开关(UIS)测试下,使用功率MOSFET对设计的电热模拟进行验证。所提出的仿真方法有利于对复杂结构进行全面分析,仿真速度快,实现简单。该方法是为联合仿真平台SMAC开发的。
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引用次数: 2
期刊
The Tenth International Conference on Advanced Semiconductor Devices and Microsystems
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