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2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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“Low-temperature sintering of nanosilver paste for lead-free chip attach” 低温烧结无铅贴片用纳米银浆料
G. Lu
European power module manufacturers pioneered the development of a silver sintering technology, called low-temperature joining technology (LTJT) for lead-free chip attach. Sintered chips on substrate are shown to have better performance and significantly higher reliability at chip junction temperature over 175°C. However, the European process is complex requiring pressure of 20 to 40 MPa to lower the sintering temperature of micron-size silver flakes/powder down to around 250°C. A nanomaterial technology involving the use of silver nanoparticles is described to achieve low-temperature sintering without any applied pressure. The nanosilver paste can be readily stencil-printed or dispensed on substrate for die-attach in air or controlled atmosphere at temperature below 260°C and under zero pressure with small power chips or low pressure of 3 MPa with large IGBT (Insulated Gate Bipolar Transistor) chips. Findings on the sintering behavior of the nanosilver paste and properties of the sintered joints are presented to demonstrate the nanosilver-enabled LTJT as a promising lead-free chip-attach solution with improved thermal and electrical performance and thermo-mechanical reliability of power devices and modules. As a specific application example, the nanosilver-enabled LTJT was used to make planar power modules in which both sides of the IGBT chips were bonded by the sintered nanosilver joint. The planar power modules have low parasitic inductances thus less ringing noises from the device-switching action and can be cooled from both sides of the devices to improve heat dissipation. Details on the design and processing of the double-side cooled power modules and test results on their electrical and thermal performance will be presented.
欧洲电源模块制造商率先开发了一种银烧结技术,称为低温连接技术(LTJT),用于无铅芯片连接。在晶片结温超过175°C时,基板上的烧结晶片表现出更好的性能和更高的可靠性。然而,欧洲的工艺很复杂,需要20到40 MPa的压力才能将微米级银片/银粉的烧结温度降低到250°C左右。描述了一种纳米材料技术,涉及使用银纳米颗粒来实现低温烧结,而无需任何施加压力。纳米银膏体可以很容易地在空气或受控气氛中印刷或涂敷在基板上,温度低于260°C,在零压力下使用小功率芯片或低压3 MPa使用大型IGBT(绝缘栅双极晶体管)芯片。通过对纳米银浆料的烧结行为和烧结接头性能的研究,证明了纳米银LTJT是一种很有前途的无铅贴片解决方案,可以提高功率器件和模块的热电性能和热机械可靠性。作为一个具体的应用实例,利用纳米银使能的LTJT制作平面功率模块,其中IGBT芯片的两侧通过烧结的纳米银接头连接。平面功率模块具有较低的寄生电感,因此较少来自器件开关动作的振铃噪声,并且可以从器件的两侧冷却以改善散热。介绍了双面冷却电源模块的设计和工艺,以及其电气和热性能的测试结果。
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引用次数: 0
Effect of Nickel addition into Sn-3Ag-0.5Cu on intermetallic compound formation during Soldering on copper Sn-3Ag-0.5Cu中添加镍对铜焊接过程中金属间化合物形成的影响
A. Ourdjini, I. Aisha, Y. T. Chin
Doping lead-free solders with minor additions of alloying and impurity elements such as Ni, Bi or Zn appears to have major effects on the growth of intermetallics (IMC) in solder joints during reflow soldering between the Sn-Ag-Cu lead-free solders and the surface finish metallurgy. In this paper, the results of the effect of small Nickel additions (0.05 and 0.1 wt%) on intermetallic formation during soldering with Sn-3Ag-0.5Cu (SAC305) are presented. The Ø500μm solder alloys of Sn-3Ag-0.5Cu, Sn-3Ag-0.5Cu-0.05Ni and Sn-3Ag-0.5Cu-0.1Ni were investigated in detail after reflow soldering at 250°C on copper finish and isothermally aged at 150°C for up to 2000 hours. The results show that after reflow soldering, scallop-type Cu6Sn5/ (Cu, Ni)6Sn5 was the only reaction product formed. A strong influence of Ni addition on the growth rate and thickness of the Cu3Sn layer was also observed. Addition of as little as 0.05wt% Ni to SAC305 solder effectively slows down the growth of this Cu3Sn phase while growth of the Cu6Sn5 continued to increase with increasing in aging time.
在Sn-Ag-Cu无铅钎料与表面冶金工艺之间的回流焊接过程中,少量添加合金和Ni、Bi或Zn等杂质元素的掺杂无铅钎料对焊点内金属间化合物(IMC)的生长有重要影响。本文介绍了添加少量镍(0.05 wt%和0.1 wt%)对Sn-3Ag-0.5Cu (SAC305)焊接过程中金属间形成的影响。对Sn-3Ag-0.5Cu、Sn-3Ag-0.5Cu-0.05 ni和Sn-3Ag-0.5Cu-0.1 ni的Ø500μm钎料合金进行了250℃回流焊和150℃等温时效2000小时的研究。结果表明:回流焊后的反应产物只有扇贝型Cu6Sn5/ (Cu, Ni)6Sn5;Ni的加入对Cu3Sn层的生长速度和厚度也有很大的影响。在SAC305钎料中添加0.05wt%的Ni可以有效地减缓Cu3Sn相的生长,而随着时效时间的延长,Cu6Sn5相的生长继续增加。
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引用次数: 2
Transparent molding compound study and leadframe design improvement for ambient light and proximity sensor packaging 用于环境光和接近传感器封装的透明成型复合材料研究和引线框架设计改进
S. Chin, E. Erfe
This paper discusses the material selection of a transfer moldable clear compound to be used for packaging Ambient Light Sensors and Proximity Sensors. Several grades of clear molding compound were characterized for their relevant material properties. Carsem's in-house materials lab was utilized to test the different clear compounds and generate data on glass transition temperature (Tg), coefficient of thermal expansion (CTE), saturated moisture concentration (CSAT) and the coefficient of moisture expansion (CME) - a critical material property not usually found in supplier data sheets. After material characterization, stress modeling using Finite Element Analysis was used to study the shear stress versus adhesion strength at the critical interfaces which are prone to delamination. The stress modeling was also extended to study the effect of different leadframe features on the package robustness after MSL before eventually finalizing the leadframe design. Finally, some reliability data is shared towards the end of the paper. This paper demonstrates how material characterization coupled with stress modeling can greatly accelerate the introduction of new products in an ever-changing and dynamic market place.
本文讨论了用于环境光传感器和接近传感器封装的可转移模压透明化合物的材料选择。对不同等级的透明模塑复合材料进行了材料性能表征。Carsem的内部材料实验室被用来测试不同的透明化合物,并生成玻璃化转变温度(Tg)、热膨胀系数(CTE)、饱和水分浓度(CSAT)和水分膨胀系数(CME)的数据——这是供应商数据表中通常找不到的关键材料特性。在对材料进行表征后,采用有限元方法进行应力建模,研究易发生分层的关键界面处的剪切应力与粘附强度的关系。在最终确定引线架设计之前,将应力建模扩展到研究不同引线架特征对MSL后封装鲁棒性的影响。最后,在文章的最后部分给出了一些可靠性数据。本文演示了材料表征与应力建模如何在不断变化和动态的市场中大大加快新产品的推出。
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引用次数: 0
Signal sensitivity to supply noise on high-speed I/O 在高速I/O上对供应噪声的信号灵敏度
S. R. Chan, F. Tan, R. Mohd-Mokhtar
Power Distribution Network (PDN) is optimized based on conventional AC and DC noise target specification. Large supply noise occurs due to increase in speed and number of I/O running simultaneously. In this paper, an alternate means to quantify supply noise to signal performance is discussed. Discussion focuses on signal performance impact caused by supply noise with different frequency content. Simulation is carried out using transistor model and findings are then correlated through lab measurements. Using USB I/O as a test case, findings conclude that the USB transmitter performance is less sensitive to supply noise at circuit operating frequency (480 MHz) and its harmonic. Hence, excessive AC noise at its less sensitive region will not cause signal eye diagram to fail.
配电网(PDN)是根据传统的交直流噪声指标进行优化的。由于同时运行I/O的速度和数量的增加,会产生较大的电源噪声。本文讨论了一种量化电源噪声对信号性能影响的替代方法。重点讨论了不同频率含量的电源噪声对信号性能的影响。使用晶体管模型进行仿真,然后通过实验室测量将结果相关联。使用USB I/O作为测试案例,研究结果表明USB发射机性能对电路工作频率(480 MHz)下的电源噪声及其谐波不太敏感。因此,在其较不敏感的区域过多的交流噪声不会导致信号眼图失效。
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引用次数: 0
Synthesis of CuO nanocomposites with various morphologies via pulsed wire explosion 脉冲爆丝法合成不同形貌的CuO纳米复合材料
S. Krishnan, A. Haseeb, M. Johan
Cu oxides are widely used in various aspects of electronic applications such as superconductor, gas sensor, ferroelectricity and magnetism. In this paper we report a novel method for energy efficient and eco friendly synthesis of CuO nanocomposites with various physical structures and chemical nature. The nanocomposites were produced by pulsed wire explosion in deionized water at 1°C, 10°C, 15°C, 25°C, 35°C, 45°C, 55°C and 60°C. CuO nanocomposites with different morphology were obtained by simply varying the exploding medium temperature. Needle-like CuO nanocrystals were successfully synthesized in deionized water at 60°C. The spherical nanoparticles were highly dispersed with an average size of 20nm while the needle-like nanocrystals were average 70nm in width and 650nm in length. Optical and electronic properties of the needle-like nanostructure were analyzed. The nanocrystals showed p-type semiconductor characteristics. This will enable cost effective large scale synthesis of CuO nanocomposites for various nanoelectronic applications.
铜氧化物广泛应用于超导体、气体传感器、铁电和磁性等电子应用的各个方面。本文报道了一种高效、环保地合成具有不同物理结构和化学性质的CuO纳米复合材料的新方法。采用脉冲线爆炸法制备纳米复合材料,分别在1℃、10℃、15℃、25℃、35℃、45℃、55℃和60℃的去离子水环境中制备纳米复合材料。通过改变爆炸介质温度,可以得到不同形貌的CuO纳米复合材料。在60℃的去离子水中成功合成了针状CuO纳米晶体。球形纳米粒子高度分散,平均尺寸为20nm,针状纳米晶体平均宽度为70nm,长度为650nm。分析了针状纳米结构的光学和电子特性。纳米晶体具有p型半导体特性。这将使经济有效地大规模合成CuO纳米复合材料,用于各种纳米电子应用。
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引用次数: 1
Extended cohesive zone model for simulation of solder/IMC interface cyclic damage process in Pb-free solder interconnects 无铅焊料互连中钎料/IMC界面循环损伤过程模拟的扩展粘结区模型
A. Yamin, N. Shaffiar, W. K. Loh, M. Tamin
The current formulation of stress- and energy-based cohesive zone model (CZM) is extended to account for load reversals. Cyclic degradation of solder/IMC interface properties, namely penalty stiffness, strengths and critical energy release rates follows power-law functions of fatigue cycles. Performance of the extended CZM is examined using finite element (FE) simulation of a single Sn-4Ag-0.5Cu (SAC405) solder interconnect specimen. Strain rate-dependent response of the solder is represented by unified inelastic strain equations (Anand's model) with optimized model parameters for SAC405 solders. The 3D FE model of the specimen is subjected to cyclic relative displacement (Δδ = 0.003 mm, R = 0) so as to induce shear-dominant fatigue loading. Results show that interface crack initiated at the leading edge of the solder/IMC interface on the tool side of the assembly after 22 cycles have elapsed. Bending stress component induced by the solder stand-off height dominates the interface damage process. A straight interface crack front is predicted indicating the relatively brittle nature of the SAC405/Cu6Sn5 interface. The extended formulation of the CZM to account for load reversals has demonstrated the ability to describe the progressive solder/IMC interface damage process consistent with the mechanics of relatively brittle interface fracture.
将目前基于应力和能量的黏聚区模型(CZM)扩展到考虑荷载逆转。焊料/IMC界面性能的循环退化,即惩罚刚度、强度和临界能量释放率遵循疲劳循环的幂律函数。通过对单个Sn-4Ag-0.5Cu (SAC405)焊料互连试件的有限元模拟,研究了扩展后的CZM的性能。采用统一的非弹性应变方程(Anand模型)表示随应变率变化的焊料响应,并对SAC405焊料优化了模型参数。试件的三维有限元模型受循环相对位移作用(Δδ = 0.003 mm, R = 0),从而诱发剪切为主的疲劳载荷。结果表明,经过22次循环后,在组件的工具侧焊料/IMC界面的前缘开始出现界面裂纹。由焊料隔离高度引起的弯曲应力分量主导了界面损伤过程。结果表明,SAC405/Cu6Sn5界面具有较脆的脆性。考虑载荷逆转的CZM扩展公式已经证明能够描述与相对脆性界面断裂力学一致的渐进焊料/IMC界面损伤过程。
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引用次数: 2
Tailored nanostructured titania grown on titanium micropillars with outstanding wicking properties for thermal management of microelectronics devices 纳米二氧化钛生长在钛微柱上,具有出色的排芯性能,用于微电子器件的热管理
A. S. Zuruzi, H. C. Gardner, N. MacDonald
This paper discusses a novel thermal management approach using nanostructured titania formed on high-aspect ratio micromachined titanium structures. A recently developed dry etching technology, with etch rates of more than 2 μm/min, enables bulk micromachining of titanium using an inductively coupled plasma to define high aspect ratio structures. This technology allows for the development of three-dimensional architectures through the successive stacking and bonding of through-etched titanium foils. Nanostructured titania was formed on high aspect ratio titanium structures using a simple technology involving oxidation in aqueous hydrogen peroxide followed by annealing. These high aspect ratio structures with nanostructured titania surface and titanium core have excellent hydrophilic properties which bodes well for thermal management applications. Compared to those using copper based wick materials, heat pipes using nanostructured titania/Ti ones have better capillary speed characteristics which decays at a slower rate.
本文讨论了一种利用高纵横比微加工钛结构形成纳米二氧化钛的新型热管理方法。最近开发的一种干式蚀刻技术,蚀刻速率超过2 μm/min,可以使用电感耦合等离子体对钛进行大规模微加工,以定义高纵横比结构。该技术允许通过连续堆叠和通过蚀刻钛箔的键合来开发三维结构。采用简单的双氧水氧化和退火工艺,在高纵横比钛结构上制备了纳米二氧化钛。这些高纵横比结构具有纳米结构的二氧化钛表面和钛芯,具有优异的亲水性,预示着热管理应用的良好前景。与使用铜基芯材料的热管相比,纳米结构钛/钛热管具有更好的毛细速度特性,衰减速度更慢。
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引用次数: 0
Dicing die attach challenges at multi die stack packages 在多模堆包中掷骰子模附加挑战
Tee Swee Xian, P. Nanthakumar
3D packaging provides a high level of functional integration in well established package families including BGAs and leadframe packages, by stacking die and using a mix of assembly technologies including wire bonding, flip chip, surface mounted components and passive cooling. Besides that, the package miniaturization has created challenges to a stacked die packages. With wafers thinned down to 100um, conventional die attach process using solder paste or epoxy may not be suitable in this case due to bleed out of paste and bond line thickness (BLT) consistency. Dicing Die Attach Film (DDAF) as alternative has been widely used with its good control of bleed, consistent bond line thickness and simplified operation. The wafer which is mounted with DDAF will be diced into the predetermined die size and the diced chip will be picked and placed directly to a substrate with adhesive at the back. This paper will discuss the major concerns that contribute by the DDAF which is the void at the interface between the DDAF, die and substrate for a BGA stacked die packages. The characteristics of DDAF void and its formation/reduction mechanism are also investigated. Simultaneously the factors such as substrate surface condition, die attach parameter and molding parameter had been evaluated to improve the overall DDAF void performance.
3D封装为成熟的封装家族(包括bga和引线框架封装)提供了高水平的功能集成,通过堆叠模具和使用包括线键合,倒装芯片,表面安装组件和被动冷却在内的组装技术组合。此外,封装的小型化也给堆叠封装带来了挑战。随着晶圆减薄至100um,使用锡膏或环氧树脂的传统模具贴附工艺可能不适合在这种情况下,因为膏体和粘合线厚度(BLT)一致性溢出。切模贴膜(DDAF)作为一种替代方法,因其排液控制好、粘接线厚度一致、操作简便而得到广泛应用。安装DDAF的晶圆将被切成预定的模具尺寸,切好的芯片将被采摘并直接放置在背面有粘合剂的基板上。本文将讨论由DDAF引起的主要问题,即DDAF、芯片和衬底之间的接口上的空隙。研究了DDAF空洞的性质及其形成/还原机理。同时对基材表面条件、模具附着参数和成型参数等因素进行了评价,以提高DDAF的整体性能。
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引用次数: 35
Numerical & experimental analysis of bond pad stack structure for wire bond interconnection 线键互连中键垫堆结构的数值与实验分析
A. Yeo, F. Che
This paper presents a Cu wire bond process simulation methodology, to model the mechanical response of the die bond pad stack structure, where different geometries, materials and designs are examined. Both contact and bonding (i.e. ultrasonic) stages are simulated to mimic the actual wire bond interconnection process. Different failure criteria such as maximum shear stress theory, maximum normal stress theory, and maximum distortion energy theory are discussed, and compared with the experimental failure observed. Simulation result reveals that maximum normal stress occurred after the contact force loading, while maximum shear stress occurred after the ultrasonic load with bond force. The high stress region calculated is consistent with the failure location observed in the experimental results, which is at the interface of Mx-1 to low-k dielectric layer. It is also found that top Cu metallization (i.e. Mx) with “array of metal via” design underneath the bond pad is detrimental to the pad structure. Increasing Al bond pad thickness, or/and implementing pad coating layer are an effective approach for increasing the bond pad stack strength, especially with increased Ni coating/plating thickness.
本文提出了一种铜丝键合过程仿真方法,以模拟模具键合垫堆结构的机械响应,其中检查了不同的几何形状,材料和设计。模拟了接触和键合(即超声波)阶段,以模拟实际的导线键合互连过程。讨论了最大剪应力理论、最大正应力理论和最大变形能理论等不同的破坏准则,并与实验观察到的破坏结果进行了比较。仿真结果表明,接触力加载后的法向应力最大,结合力的超声加载后的剪切应力最大。计算得到的高应力区与实验结果中观察到的破坏位置一致,即在Mx-1与低k介电层的界面处。研究还发现,在键合焊盘下方采用“金属通孔阵列”设计的顶部Cu金属化(即Mx)对焊盘结构有害。增加Al焊盘厚度或/或实施焊盘涂层是提高焊盘堆垛强度的有效方法,特别是增加Ni涂层/镀层厚度。
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引用次数: 2
Solder extrusion solution and mold adhesion to die surface improvement with PI isolation design for FCOL exposed die technology 焊锡挤出解决方案和模具附着力,以改善模具表面与PI隔离设计的FCOL外露模具技术
Teck Siang Lim, C. Cheong, S. Tan
Due to rapid growth of the microelectronics industry, the packaged device with smaller, low cost and high power performance becomes a high demand in the market nowadays. To fulfill the market development rate, flip chip interconnection is the most promising packaging solution. In this environment, the National Semiconductor Sdn. Bhd. (a subsidiary of Texas Instruments) performed a qualification run on Thin Shrink Small Outline Package (TSSOP) with Flip Chip on lead frame (FCOL) exposed die back (eDIE) technology. It has been reported that the most detrimental effect on reliability come from solder extrusion and mold adhesion. The solder extrusion observed like a thin sliver “flake” that partially adhered on the polyimide (PI) layer surface. The solder extrusion can be observed from Scanning Acoustical Microscopy (CSAM) image and SEM cross section image which shows as the delamination. The PI layer with isolation, “Island” is designed as a barrier in between two bumps to prevent solder extruded that connect together. To have better barrier effect by optimizing the PI layer thickness and the width size were further evaluated. Preconditioning was performed to screen out the samples with solder extrusion by doing the electrical testing (ATE). The thermal cycling test was proceeded to assess the reliability up to 500 cycles. The results indicated that the samples with the PI isolation passed the ATE without solder extrusion and no solder joint reliability issue observed.
随着微电子工业的快速发展,小型化、低成本、高功率的封装器件成为当今市场的一大需求。为了满足市场的发展速度,倒装互连是最有前途的封装解决方案。在这种环境下,美国国家半导体公司(National Semiconductor Sdn. o:行情)有限公司(德州仪器的子公司)进行了薄收缩小轮廓封装(TSSOP)与引线框架上的倒装芯片(FCOL)暴露模背(eDIE)技术的资格运行。据报道,对可靠性最不利的影响来自焊料挤压和模具粘附。在聚酰亚胺(PI)层表面观察到的焊料挤压像一个薄的银色“薄片”。从扫描声显微镜(CSAM)图像和扫描电子显微镜(SEM)截面图像可以观察到焊料的挤压,表现为分层。具有隔离的PI层“岛”被设计为两个凸起之间的屏障,以防止焊料挤压连接在一起。进一步评价了通过优化PI层厚度和宽度尺寸来获得更好的阻隔效果。通过电测试(ATE)进行预处理,筛选出焊料挤压的样品。进行了热循环试验,以评估高达500次循环的可靠性。结果表明,采用PI隔离的样品通过了ATE测试,没有出现焊点挤压现象,也没有出现焊点可靠性问题。
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引用次数: 0
期刊
2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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