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2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)最新文献

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A Relative-Prime Rotation Based Fully On-Chip Background Skew Calibration for Time-Interleaved ADCs 基于相对素数旋转的时间交错adc全片上背景偏斜校准
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830416
Dong-Jin Chang, S. Ryu
An on-chip background skew calibration technique for time-interleaved (TI) ADCs with relative-prime rotation (RPR) based autocorrelation computation is presented, with which more flexible choice of number of channels and no residual skew accumulation are realized. An 8 × TI 10b 1.4GS/s prototype ADC with fully on-chip calibration achieves an SNDR of 48.2dB at over Nyquist input and a FoM of 33 fJ/c-s in 28-nm FDSOI. The on-chip calibration circuitry takes only 24% of the ADC-core power consumption.
提出了一种基于相对素旋转(RPR)自相关计算的时间交错(TI) adc的片上背景偏度校准技术,该技术可以更灵活地选择通道数,且不存在残余偏度积累。采用全片上校准的8 × TI 10b 1.4GS/s原型ADC在Nyquist输入下的SNDR为48.2dB,在28纳米FDSOI中FoM为33 fJ/c-s。片上校准电路仅占adc核心功耗的24%。
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引用次数: 0
Interfacial-Layer Design for Hf1-xZrxO2-Based FTJ Devices: From Atom to Array 基于hf1 - xzrxo2的FTJ器件的接口层设计:从原子到阵列
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830462
H. Chiang, J. Wang, Kuan‐Heng Lin, C. Nien, J. Wu, K.-Y. Hsiang, Chih-Piao Chuu, Y.-W. Chen, X. W. Zhang, C. Liu, Tahui Wang, C. -. Wang, M. Lee, M. Chang, C. Chang, T. C. Chen
For the first time, we demonstrate Ferroelectric Tunneling Junctions (FTJs) with both (a) 10-year retention time projected from measured data and (b) robust endurance (> 108 cycles) with the on-off ratio >10× by inserting a 1.8nm Al2O3 interfacial layer (IL) into the FTJs. Compared with Metal-Ferroelectric-Metal (MFM) FTJs, higher orthorhombic phase (~6×) was verified by physical analyses and first-principles calculations in our proposed Metal-Ferroelectric-IL-Metal (MFIM) FTJs, resulting in the remanent polarization (2Pr) which improves the retention and the on-off ratio significantly.
通过在铁电隧道结(ftj)中插入1.8nm的Al2O3界面层(IL),我们首次展示了铁电隧道结(ftj)具有(a)根据测量数据预测的10年保留时间和(b)稳健的耐久性(> 108次循环)和>10倍的通断比。通过物理分析和第一性原理计算,与金属-铁电-铁电-金属(MFM) ftj相比,我们提出的金属-铁电-铁电- il -金属(MFIM) ftj具有更高的正交相(~ 6x),导致剩余极化(2Pr),显著提高了保持率和通断比。
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引用次数: 2
The Rise of Memory in the Ever-Changing AI Era – From Memory to More-Than-Memory 日新月异的人工智能时代中记忆的崛起——从记忆到超越记忆
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830265
Seok-Hee Lee
Innovation in the memory semiconductor industry has continued to provide a number of key solutions to address the challenges of ever-changing, data-driven computing. However, besides the demand for high performance, low power, low cost, and high capacity, there is also an increasing demand for more smart functionalities in or near memory to minimize the data movement.In this paper, we will share our vision of memory innovation. First, we begin the journey with memory extension, in which the conventional scaling in both DRAM and NAND can be pushed further to defy the device scaling limits. Then, the journey will ultimately lead to the memory-centric transformation. The memory-centric transformation has just begun with PIM (Processing-In-Memory) and is expected to evolve by bringing memory and logic closer together with advanced packaging techniques in order to achieve optimal system performance.In addition, new solutions enabled by new interfaces such as CXL (Compute Express Link) will be introduced to enhance the current value proposition of the memory technology.Last but not least, our endeavors as a responsible member of the global community will be introduced. Our ongoing efforts are focused on reducing carbon emissions, water usage, and power consumption in all our products and manufacturing processes.SK hynix truly believes that the journey of Memory would only be possible when the ICT industry as a whole embraces open innovation to create a better and more sustainable world.
存储半导体行业的创新不断提供许多关键解决方案,以应对不断变化的数据驱动计算的挑战。然而,除了对高性能、低功耗、低成本和高容量的需求之外,对内存或内存附近的更智能功能的需求也在不断增加,以最大限度地减少数据移动。在本文中,我们将分享我们对内存创新的看法。首先,我们从内存扩展开始,其中DRAM和NAND的传统扩展可以进一步推动,以突破设备扩展限制。然后,这段旅程将最终导致以记忆为中心的转变。以内存为中心的转变刚刚开始于PIM(内存中处理),并有望通过将内存和逻辑与先进的封装技术紧密结合在一起,以实现最佳的系统性能。此外,将引入由CXL (Compute Express Link)等新接口支持的新解决方案,以增强内存技术的当前价值主张。最后,我将介绍我们作为国际社会负责任一员的努力。我们持续努力的重点是减少所有产品和制造过程中的碳排放、用水和电力消耗。SK海力士坚信,只有整个信息通信技术(ICT)产业以开放创新的方式创造一个更美好、更可持续的世界,记忆之旅才有可能实现。
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引用次数: 1
300 mm Wafer-scale In-situ CVD Growth Achieving 5.1×10-10 Ω-cm2 P-Type Contact Resistivity: Record 2.5×1021 cm-3 Active Doping and Demonstration on Highly-Scaled 3D Structures 300 mm晶圆级原位CVD生长实现5.1×10-10 Ω-cm2 p型接触电阻率:记录2.5×1021 cm-3活性掺杂和高尺度三维结构的演示
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830220
Haiwen Xu, R. Khazaka, Jishen Zhang, Zijie Zheng, Yue Chen, Xiao Gong
For the first time, we have developed a novel growth technique of Si1-xGex having active boron (B) doping concentration (NA) higher than 2×1021 cm-3. We achieve (1) uniform B doping and Ge composition in the epi-growth direction, (2) excellent uniformities in Si1-xGex thickness and resistivity across the entire 300 mm wafer, (3) an ultra-low as-deposited specific contact resistivity (ρc) of 5.1×10-10 Ω-cm2 on the sample with the highest NA of 2.5×1021 cm-3, and (4) successful selective growth on the advanced 3D structures with excellent conformality and thickness controllability.
我们首次开发了一种活性硼(B)掺杂浓度(NA)高于2×1021 cm-3的Si1-xGex生长新技术。我们在外延生长方向上实现了(1)均匀的B掺杂和Ge组成,(2)在整个300 mm晶圆上Si1-xGex厚度和电阻率具有优异的均匀性,(3)在最高NA为2.5×1021 cm-3的样品上获得了超低的沉积比接触电阻率(ρc) 5.1×10-10 Ω-cm2,(4)在具有优异的共形性和厚度可控性的先进3D结构上成功选择生长。
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引用次数: 1
Perspective on Low-dimensional Channel Materials for Extremely Scaled CMOS 极尺度CMOS低维通道材料研究进展
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830447
S. Su, E. Chen, T. Hung, Mengyao Li, G. Pitner, Chao-Ching Cheng, Han Wang, J. Cai, H. P. Wong, I. Radu
Low-dimensional materials (LDMs) such as two-dimensional transition metal dichalcogenides (2D TMDs) and carbon nanotubes (CNTs) have the potential to be the channel material in extremely scaled CMOS transistors. Based on current hardware data, the design space for contacted-gate pitch (CGP) scaled transistors is explored for these materials. The ON current, sources of leakage which limit OFF current, and CGP scaling potential are analyzed by separately considering effects from shrinking the gate length, contact length, and extension length. Doping of LDM is the main challenge to reduce contact and extension resistance for scaled transistors. Experimental control of p-type doping of 2D is reported as an example of doping impact.
低维材料(ldm)如二维过渡金属二硫族化合物(2D TMDs)和碳纳米管(CNTs)具有成为极规模化CMOS晶体管沟道材料的潜力。基于现有的硬件数据,探索了这些材料的接触栅极间距(CGP)缩放晶体管的设计空间。分别考虑栅极长度、触点长度和延伸长度的收缩效应,分析了导通电流、限制关断电流的泄漏源和CGP标度电位。LDM掺杂是降低微缩晶体管接触电阻和延伸电阻的主要挑战。本文报道了二维p型掺杂的实验控制,作为掺杂影响的一个例子。
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引用次数: 5
A 17–95.6 TOPS/W Deep Learning Inference Accelerator with Per-Vector Scaled 4-bit Quantization for Transformers in 5nm 一种17-95.6 TOPS/W深度学习推理加速器,用于5nm变压器的逐向量缩放4位量化
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830277
Ben Keller, Rangharajan Venkatesan, Steve Dai, S. Tell, B. Zimmer, W. Dally, C. T. Gray, Brucek Khailany
We present a deep neural network (DNN) accelerator designed for efficient execution of transformer-based DNNs, which have become ubiquitous for natural language processing tasks. DNN inference accelerators often employ specialized hardware techniques such as reduced precision to improve energy efficiency, but many of these techniques result in catastrophic accuracy loss on transformers. The proposed accelerator supports per-vector scaled quantization and approximate softmax to enable the use of 4-bit arithmetic with little accuracy loss. The 5nm prototype achieves 95.6 TOPS/W in benchmarking and 1711 inferences/s/W with only 0.7% accuracy loss on BERT, demonstrating a practical accelerator design for energy-efficient inference with transformers.
我们提出了一个深度神经网络(DNN)加速器,设计用于有效执行基于变压器的DNN,这在自然语言处理任务中已经无处不在。DNN推理加速器通常采用专门的硬件技术,例如降低精度以提高能源效率,但这些技术中的许多会导致变压器的灾难性精度损失。所提出的加速器支持逐向量缩放量化和近似softmax,使使用4位算术具有很小的精度损失。5nm原型在基准测试中达到95.6 TOPS/W,在BERT上达到1711 inference /s/W,精度损失仅为0.7%,展示了一种实用的加速器设计,用于变压器的节能推理。
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引用次数: 11
PPAC of sheet-based CFET configurations for 4 track design with 16nm metal pitch PPAC基于薄片的cfeet配置,采用16nm金属间距的4轨设计
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830492
P. Schuddinck, F. M. Bufler, Y. Xiang, A. Farokhnejad, G. Mirabelli, A. Vandooren, B. Chehab, A. Gupta, C. Neve, G. Hellings, J. Ryckaert
We evaluate Power-Performance-Area & Cost (PPAC) for nanosheet (NS), forksheet (FS), monolithic & sequential Complementary FET (CFET) at 5 & 4 track (T) designs with tight gate pitch (CPP) & metal pitch (MP). While NS & FS prove unsuitable for 4T designs, CFETs provide a performant & cost-effective 4T solution.
我们评估了纳米片(NS),叉片(FS),单片和顺序互补FET (cet)在5和4磁道(T)设计下的功率-性能-面积和成本(PPAC),具有紧密的栅极间距(CPP)和金属间距(MP)。虽然NS和FS被证明不适合4T设计,但cfet提供了高性能且具有成本效益的4T解决方案。
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引用次数: 12
Demonstration of 3D sequential FD-SOI on CMOS FinFET stacking featuring low temperature Si layer transfer and top tier device fabrication with tier interconnections 3D顺序FD-SOI在CMOS FinFET堆叠上的演示,具有低温Si层转移和层互连的顶层器件制造
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830400
A. Vandooren, N. Parihar, J. Franco, R. Loo, H. Arimura, R. Rodriguez, F. Sebaai, S. Iacovo, K. Vandersmissen, W. Li, G. Mannaert, D. Radisic, E. Rosseel, A. Hikavyy, A. Jourdain, O. Mourey, G. Gaudin, S. Reboh, L. Van-Jodin, G. Besnard, C. Neve, Bich-Yen Nguyen, I. Radu, E. Litta, N. Horiguchi
3D sequential stacking is demonstrated using top tier FDSOI devices on bottom tier bulk finFETs. 3D integration and top-bottom layer interconnectivity is validated through functional 3D via chains, 3D CMOS single inverters and inverter chain with transistors built in the top and bottom layers. Three different Si layer transfer flows, including a low temperature Smart Cut™, are investigated and compared electrically for top tier planar devices. Transfer of bi-axial tensile strained silicon is demonstrated with a 60-80% performance boost of the top tier nMOS device over the unstrained silicon devices. Further process optimization of the low temperature Smart Cut™ transfer provided significant electron and hole mobility recovery of the top tier devices. Impact of the stacking on bottom tier finFET devices is also studied for various bottom gate stacks.
利用顶层FDSOI器件在底层体finfet上演示了3D顺序堆叠。通过功能性3D通孔链、3D CMOS单逆变器和顶部和底部内置晶体管的逆变器链,验证了3D集成和自上而下互连。研究了三种不同的硅层传输流,包括低温Smart Cut™,并对顶层平面器件进行了电性比较。双轴拉伸应变硅的转移证明了与非应变硅器件相比,顶层nMOS器件的性能提高了60-80%。对低温Smart Cut™转移的进一步工艺优化为顶层器件提供了显著的电子和空穴迁移率恢复。本文还研究了不同底栅堆叠对底层finFET器件的影响。
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引用次数: 2
Fully Integrated 2x2 MIMO Real Simultaneous Dual Band WiFi CMOS Power Amplifiers With a Single Inductor Multiple Output Supply Modulation Technique 全集成2x2 MIMO实时同步双频WiFi CMOS功率放大器,采用单电感多输出电源调制技术
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830469
Ji-Seon Paek, Jeongkwan Lee, Wan Kim, Jun-Suk Bang, Jongwoo Lee
This paper presents fully integrated 2x2 MIMO dual-band CMOS power amplifiers with a simultaneous multiple PA supply voltage modulation technique using a switched-capacitor (SC)-based single inductor multiple output (SIMO) DC-DC converter. For 802.11ax MCS11 160/40MHz signals, the designed A/G-band CMOS PAs using the proposed supply modulation scheme achieve -40dB EVM at 15.7/18.5dBm output power and save 340/334mW of dc power consumption compared to 3.3V fixed supply voltage PA, respectively.
本文介绍了采用基于开关电容(SC)的单电感多输出(SIMO) DC-DC转换器的全集成2x2 MIMO双带CMOS功率放大器,该放大器采用同步多PA电源电压调制技术。对于802.11ax MCS11 160/40MHz信号,采用本文提出的电源调制方案设计的A/ g波段CMOS放大器在15.7/18.5dBm输出功率下实现-40dB EVM,与3.3V固定电源电压放大器相比,分别节省340/334mW直流功耗。
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引用次数: 0
A Packaged 90-to-96GHz 16-Element Phased Array with 18.8/15.8dBm Psat/OP1dB, 14.8% TX PAE in 65nm CMOS Process and +51dBm Array EIRP 封装的90至96ghz 16元相控阵,Psat/OP1dB为18.8/15.8dBm, 65nm CMOS工艺的TX PAE为14.8%,阵列EIRP为+51dBm
Pub Date : 2022-06-12 DOI: 10.1109/vlsitechnologyandcir46769.2022.9830350
Wei Zhu, Jian Zhang, Jiawen Wang, Ruitao Wang, Chenguang Li, Kaiyang Wang, Yan Wang
This work presents a packaged 90-to-96GHz 16-Element transceiver phased array. It is constructed using 4-channel silicon beamformers in 65nm CMOS process, external power amplifiers (PAs) and low noise amplifiers in 100nm GaN process as well as Vivaldi antennas on a tsm-ds3 based printed circuit board (PCB). A transformer-and coupled-line-based 8-to-1 power combine technique is proposed in the silicon beamformer to achieve a measured Psat of +18.8dBm with an OP1dB of +15.8dBm and a peak PAE of 14.8% in CMOS. With external GaN PAs, the 16-Element transceiver phased array demonstrates a measured 26° 3-dB beamwidth, +51dBm peak EIRP at Psat and the ability to scan to ±30° in all planes.
本文提出了一种封装的90- 96ghz 16元收发器相控阵。它采用65nm CMOS工艺的4通道硅波束形成器,100nm GaN工艺的外部功率放大器(PAs)和低噪声放大器以及基于tsm-ds3的印刷电路板(PCB)上的Vivaldi天线构建。提出了一种基于变压器和耦合器线的8对1功率组合技术,在CMOS中实现了+18.8dBm的实测Psat, +15.8dBm的OP1dB和14.8%的峰值PAE。采用外部GaN PAs, 16元收发器相控阵的测量波束宽度为26°3db, Psat峰值EIRP为+51dBm,并且能够在所有平面扫描到±30°。
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引用次数: 1
期刊
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
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