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2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)最新文献

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Buckling driven interface delamination between a thin metal layer and a ceramic substrate 屈曲驱动薄金属层与陶瓷基板之间的界面分层
C. Liu, G.Q. Zhang, L. Ernst, M. Vervoort, G. Wisse
Interface delamination failure caused by thermomechanical loading and mismatch of thermal expansion coefficients is one of the important failure modes occurring in electronic packages, thus a threat for package reliability. To solve this problem, both academic institutions and industry have been spending tremendous research effort in order to understand the inherent failure mechanisms and to develop advanced and reliable experimental and simulation methodologies, thus to be able to predict and to avoid interface delamination before physical prototyping. Various damage mechanisms can be involved and can result into interface delamination phenomena. These are not all sufficiently addressed and/or reported so far, probably because of the complexities caused by the occurrence of strong geometric- and material nonlinearities. One of the phenomena being insufficiently understood so far is the so-called buckling driven delamination of thin metallic layers on ceramic substrates. This phenomena is discussed in the present paper.
由热载荷和热膨胀系数失配引起的界面分层失效是电子封装中常见的重要失效模式之一,对封装可靠性构成威胁。为了解决这一问题,学术界和工业界都投入了大量的研究工作,以了解其固有的失效机制,并开发先进可靠的实验和仿真方法,从而能够在物理原型制作之前预测和避免界面分层。可涉及多种损伤机制,并可导致界面分层现象。到目前为止,这些问题还没有得到充分的解决和/或报道,可能是因为强烈的几何和材料非线性的出现造成了复杂性。迄今为止,人们尚未充分了解的现象之一是所谓的屈曲驱动的陶瓷基板上薄金属层的分层。本文对这一现象进行了讨论。
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引用次数: 1
Microwave frequency model of wafer level package and increased loading effect on Rambus memory module 晶圆级封装的微波频率模型及Rambus记忆体模组的增加负载效应
Junwoo Lee, Baekkyu Choi, Seungyoung Ahn, Woonghwan Ryu, Jae Myun Kim, K. Choi, J. Hong, H. Chun, Joungho Kim
A wafer level package (WLP) has been developed as a cost effective packaging method compared to the /spl mu/BGA package, and especially applied to the Rambus DRAM (RDRAM) package. The maximum allowable thickness of the stress buffer layer on the WLP is limited to about 20 /spl mu/m, due to the limitation of the present spin coating process technology. Hence, the thickness of the stress buffer layer is much smaller than that of the elastomer (175 pm) used as a dielectric layer in the /spl mu/BGA package. Consequently, due to this extremely small distance between the metal traces on the WLP and the silicon substrate, the capacitive loading of the WLP on the RIMM (Rambus in-line memory module) is significantly increased. The increased capacitive loading by the WLP results in a decrease in the effective line impedance and an increase in the propagation delay on the RIMM, while the target line impedance on the RIMM is 28 /spl Omega//spl plusmn/10%. Therefore, careful design considerations are required at the package design level and at the module design level, to compensate for the increased capacitive loading by the WLP. In this paper, we firstly introduce the equivalent circuit model of the WLP interconnection lines using the S-parameter measurement in the microwave frequency region up to 5 GHz. Then, we suggest the electrical design methodology of the WLP and the module to compensate for the increased loading capacitance of the WLP.
相对于/spl mu/BGA封装,晶圆级封装(WLP)已经成为一种具有成本效益的封装方法,尤其适用于Rambus DRAM (RDRAM)封装。由于目前旋涂工艺技术的限制,WLP上应力缓冲层的最大允许厚度限制在20 /spl mu/m左右。因此,应力缓冲层的厚度远小于/spl mu/BGA封装中用作介电层的弹性体(175 pm)的厚度。因此,由于WLP上的金属走线与硅衬底之间的距离非常小,因此WLP在RIMM (Rambus直列存储器模块)上的容性负载显着增加。WLP增加的容性负载导致RIMM上的有效线阻抗降低,传播延迟增加,而RIMM上的目标线阻抗为28 /spl ω //spl plusmn/10%。因此,需要在封装设计层面和模块设计层面进行仔细的设计考虑,以补偿WLP增加的容性负载。本文首先介绍了WLP互连线的等效电路模型,并利用s参数在高达5 GHz的微波频率区域进行了测量。然后,我们提出了WLP和模块的电气设计方法,以补偿WLP增加的负载电容。
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引用次数: 3
Evaluation of commercially available, thick, photosensitive films as a stress compensation layer for wafer level packaging 评价市售的厚感光薄膜作为晶圆级封装的应力补偿层
Beth Keser, E. R. Prack, T. Fang
Commercially available, photosensitive dielectrics for use as a bump encapsulation or "stress compensation layer" (SCL) for wafer level chip-scale packaging (WL-CSP) were evaluated. Four materials were identified as potential SCL's. Filled and unfilled photosensitive materials were evaluated. To be successful as a SCL in WL-CSP, the commercially available material must be at least 125 /spl mu/m thick, be photosensitive, have 1:1 via and saw street resolution, have a total process time of less than 4 hours, have a cure process that does not effect the under-bump metallurgy, adhere to underlying passivation, and have a radius of curvature greater than 1.25 m. One commercially available unfilled photosensitive material had a glass transition temperature of 285/spl deg/C, a CTE of 55 ppm//spl deg/C, and a E of 2.5 Gpa. Since the company supplying this material had significant experience in thick, photosensitive film development and processing, they had excellent potential as a partner for evaluation. Another unfilled, photosensitive material supplied for this study had a glass transition temperature of 330/spl deg/C, a CTE of 80 ppm//spl deg/C, and an elastic modulus of 1.0 GPa. A filled, photosensitive material evaluated had a glass transition temperature of 130-150/spl deg/C, a CTE of 45 ppm//spl deg/C, and an elongation at break of 2.5%. Of the four materials evaluated, all types of materials showed potential.
对用于晶圆级芯片级封装(WL-CSP)的凹凸封装或“应力补偿层”(SCL)的商用光敏电介质进行了评估。四种材料被确定为潜在的SCL。对填充和未填充的光敏材料进行评价。要想在WL-CSP中成为成功的SCL,市上可用的材料必须至少有125 /spl mu/m厚,具有光敏性,通过和锯街分辨率为1:1,总工艺时间小于4小时,固化过程不影响凹凸下冶金,坚持下层钝化,曲率半径大于1.25 m。一种市售的未填充光敏材料的玻璃化转变温度为285/spl℃,CTE为55 ppm//spl℃,E为2.5 Gpa。由于供应这种材料的公司在厚感光薄膜的开发和加工方面具有丰富的经验,因此他们作为评估合作伙伴具有极好的潜力。本研究提供的另一种未填充的光敏材料的玻璃化转变温度为330/spl℃,CTE为80 ppm//spl℃,弹性模量为1.0 GPa。所评估的填充光敏材料的玻璃化转变温度为130-150/spl℃,CTE为45 ppm//spl℃,断裂伸长率为2.5%。在评估的四种材料中,所有类型的材料都显示出潜力。
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引用次数: 3
Viscosity of a no-flow underfill during reflow and its relationship to solder wetting 无流底填料在回流过程中的粘度及其与焊料润湿的关系
P. Morganelli, B. Wheelock
There is much interest in understanding viscosity changes of a no-flow underfill during reflow. Viscosity changes that result from the onset of cure provide resistance to the formation of solder interconnections, and can result in a decrease in yield. The difficulty has been tracking viscosity changes during temperature profiles that vary as much as 4 degrees/second. We used microdielectrometry to make real-time ion viscosity measurements of various no-flow underfill formulations during a standard reflow temperature profile. The results clearly show the initial viscosity drop as temperature ramps up, and the point at which the effect of cure dominates and causes viscosity to rise. The data are related to DSC analysis and to solder joint yield. Overall, the results show how viscosity changes during the reflow process can potentially have a dramatic effect on assembly yield rates. The information gained is useful for developing a reflow process to form reliable solder joints.
研究无流下填料在回流过程中的粘度变化具有重要意义。固化开始时产生的粘度变化会阻碍焊料互连的形成,并可能导致产量下降。在温度变化高达4度/秒的情况下,跟踪粘度的变化是困难的。在标准回流温度剖面下,我们使用显微介电法对各种无流底填配方进行了实时离子粘度测量。结果清楚地表明,随着温度的升高,初始粘度下降,而在这一点上,固化的影响起主导作用,导致粘度上升。这些数据与DSC分析和焊点良率有关。总体而言,结果表明,在回流过程中粘度的变化可能对装配成品率产生巨大影响。所获得的信息对开发回流工艺以形成可靠的焊点是有用的。
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引用次数: 10
Study on the effect of toughening of no-flow underfill on fillet cracking 无流底填料增韧对圆角开裂影响的研究
K. Moon, L. Fan, C. Wong
Fillet cracking of no-flow underfill in flip-chip device during reliability test such as thermal shock or thermal cycling has been a serious reliability problem. The effect of toughening agents and modification of epoxy on fillet cracking of no-flow underfill was investigated. The base epoxy formulation and the appropriate loading level of toughening agent were found regarding the anti-fillet cracking performance. In case where the epoxy was modified with polysiloxanes, the 2nd phase with fine particle size was formed and the size of the particle depended on the toughening agent. The morphology was observed by scanning electron microscopy (SEM) and confirmed by dynamic mechanical measurement (DMA) measurement. The physical properties such as the fracture toughness, flexural modulus, coefficient of thermal expansion (CTE), and adhesion were measured and the liquid-liquid thermal shock (LLTS) test under -55-125/spl deg/C were performed with different formulations. One of the formulations toughened by amine/epoxy terminated polysiloxane, which has higher die shear strength, lower modulus, and higher toughness, passed 1000 cycles of the LLTS test. As such, in order to obtain high reliable no-flow underfill, the physical properties of the no-flow underfill should be well controlled and balanced. Finally correlation between physical properties of no-flow underfill and anti-fillet cracking capability for those approaches was discussed.
在热冲击或热循环等可靠性试验过程中,倒装芯片无流底填料的倒角开裂是一个严重的可靠性问题。研究了增韧剂和环氧改性剂对无流底填料圆角开裂的影响。在抗圆角开裂性能方面,找到了合适的环氧基配方和增韧剂的掺量。用聚硅氧烷对环氧树脂进行改性时,形成粒径较小的第二相,其粒径大小取决于增韧剂。用扫描电镜(SEM)观察其形貌,用动态力学测量(DMA)证实其形貌。测试了材料的断裂韧性、弯曲模量、热膨胀系数(CTE)、粘附力等物理性能,并在-55 ~ 125℃/spl℃条件下进行了液-液热冲击(LLTS)试验。其中一种用胺/环氧端部聚硅氧烷增韧的配方具有较高的模剪强度、较低的模量和较高的韧性,通过了1000次的LLTS试验。因此,为了获得高可靠的无流充填体,必须对无流充填体的物理性质进行良好的控制和平衡。最后讨论了两种方法下填料的物理性质与抗圆角开裂能力之间的关系。
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引用次数: 3
Effects of O/sub 2//C/sub 2/F/sub 6/ plasma descum with RF cleaning on via formation in MCM-D substrate using photosensitive BCB O/sub 2/ C/sub 2/F/sub 6/等离子体沉降对光敏BCB MCM-D衬底通孔形成的影响
Chul-Won Ju, Seong-Su Park, S. Kim, Kyu-Ha Pack, H. Lee, Min-Kyu Song
In this paper, we present the effect of plasma descum by O/sub 2//C/sub 2/F/sub 6/ gas mixture on the via formation of photosensitive BCB layer and compare it with that of RF cleaning. Test vehicle was fabricated on Si wafer with Cu/photosensitive BCB layer structure and ECR-CVD system was used to descum the via. Residues at via bottom after the descum process were investigated by AES (auger electron microscope) and SEM (scanning electron microscope). It is shown in this work that O/sub 2//C/sub 2/F/sub 6/ plasma etching and the RF cleaning are effective for organic C, native C respectively, therefore the via descum by a combination of plasma etching with O/sub 2//C/sub 2/F/sub 6/ gas mixture and RF cleaning can efficiently remove the via residues.
本文研究了O/sub - 2//C/sub - 2/F/sub - 6/混合气体对光敏BCB层通孔形成的影响,并与射频清洗的影响进行了比较。试验载具采用Cu/光敏BCB层结构在硅片上制作,采用ECR-CVD系统对通孔进行解耦。用俄歇电子显微镜(AES)和扫描电子显微镜(SEM)对脱蜡后孔底残留物进行了研究。研究表明,O/sub 2//C/sub 2/F/sub 6/等离子体刻蚀和射频清洗分别对有机C和天然C有效,因此,等离子体刻蚀与O/sub 2//C/sub 2/F/sub 6/混合气体相结合的通孔去除和射频清洗可以有效地去除通孔残留物。
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引用次数: 7
RF micromechanical switches that can be post processed on commercial MMICs 可在商用mmic上后处理的射频微机械开关
L. R. Sloan, C. Sullivan, C. Tigges, C. Sandoval, D. Palmer, S. Hietala, T. Christenson, C. Dyck, T. A. Plut, G. R. Schuster
The application need for and specification of RF micro-electro-mechanical (MEM) switches are discussed. The design, low temperature processing, and RF characteristics of a coplanar waveguide MEMs switch are presented. This switch can be integrated onto previously fabricated MMICs or transistor chips. These switches demonstrate 0.2 dB loss while in the "on" state (closed), need approximately 10 volts to operate, and can carry more than 200 mW RF.
讨论了射频微机电开关的应用需求和规格。介绍了一种共面波导MEMs开关的设计、低温加工和射频特性。这种开关可以集成到以前制造的mmic或晶体管芯片上。这些开关在“开”状态(关闭)时显示0.2 dB损耗,需要大约10伏才能运行,并且可以承载超过200 mW的RF。
{"title":"RF micromechanical switches that can be post processed on commercial MMICs","authors":"L. R. Sloan, C. Sullivan, C. Tigges, C. Sandoval, D. Palmer, S. Hietala, T. Christenson, C. Dyck, T. A. Plut, G. R. Schuster","doi":"10.1109/ECTC.2001.927743","DOIUrl":"https://doi.org/10.1109/ECTC.2001.927743","url":null,"abstract":"The application need for and specification of RF micro-electro-mechanical (MEM) switches are discussed. The design, low temperature processing, and RF characteristics of a coplanar waveguide MEMs switch are presented. This switch can be integrated onto previously fabricated MMICs or transistor chips. These switches demonstrate 0.2 dB loss while in the \"on\" state (closed), need approximately 10 volts to operate, and can carry more than 200 mW RF.","PeriodicalId":340217,"journal":{"name":"2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125162298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Studies on a novel flip-chip interconnect structure. Pillar bump 一种新型倒装芯片互连结构的研究。柱子撞
T. Wang, F. Tung, L. Foo, V. Dutta
Pillar bump is a novel interconnect structure, including non-reflowable base and a reflowable cap like a pillar shape. In this study, pillar bump with copper base and Sn63/Pb37 eutectic solder cap is processed via electrolytic plating. Based on whether flat eutectic cap is reflowed prior to assembly, pillar bump is further split into two categories, namely pre-reflowed and non-reflowed, respectively. Assembly feasibility assessment as well as bump integrity evaluation are carried out. Bump shear test is conducted for both before and after reliability and failure mode is characterized via SEM and EDX. Furthermore, a 10 mm/spl times/10 mm test chip having 180 Cu/eutectic solder pillar bumps with 0.2 mm pitch is assembled onto BT substrate via no clean flux and subsequently underfilled. The results show that pillar shape is still maintained after assembly that can meet fine pitch requirement. No shear strength deterioration after moisture sensitivity preconditioning and 1000 thermal cycle test (TCT, -40/spl deg/C/spl sim/125/spl deg/C) has been observed. EDX spectra indicate fracture has occurred in the interfacial region between Al and silicon, not arising from bumping process. Furthermore, bump integrity is intact after package level reliability test under the same conditions as above. Stress simulation results lead to conclusion that maximum shear stress occurs in copper pillar portion with average range of 40/spl sim/50 MPa that is much below the shear strength of copper.
支柱凸起是一种新型的互连结构,包括不可回流底座和类似支柱形状的可回流帽。本研究采用电解镀的方法制备了铜基底和Sn63/Pb37共晶焊锡帽的凸柱。根据装配前是否对扁平共晶帽进行回流处理,将凸柱进一步分为预回流处理和未回流处理两类。进行了装配可行性评估和碰撞完整性评估。对可靠性前后进行了碰剪试验,并通过SEM和EDX对其破坏模式进行了表征。此外,一个10 mm/spl倍/10 mm的测试芯片,具有180个铜/共晶焊料柱凸起,间距为0.2 mm,通过不清洁的焊剂组装在BT基板上,随后进行欠填充。结果表明,装配后的柱形仍保持不变,满足细节距要求。经湿敏预处理和1000热循环试验(TCT, -40/spl℃/spl sim/125/spl℃)后,抗剪强度未见下降。EDX谱分析表明,断裂发生在Al与硅的界面区域,而非碰撞过程。此外,在相同的条件下,经过包级可靠性测试后,凸包的完整性是完整的。应力模拟结果表明,最大剪应力出现在铜柱部分,平均剪应力范围为40/spl sim/50 MPa,远低于铜的抗剪强度。
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引用次数: 41
Over GHz low-power RF clock distribution for a multiprocessor digital system 多处理器数字系统的GHz以上低功耗射频时钟分配
Woonghwan Ryu, A. Wai, Fan Wei, Wai Lai Lai, Joungho Kim
Conventional digital clock distribution interconnection causes a severe power consumption problem for GHz clock distribution because of transmission line losses, and it exhibits difficult signal integrity problems due to clock skew, clock jitter and signal reflection. To overcome these conventional digital clock distribution limitations, optical clock distribution techniques, based on guided-wave optics and free-space optics, have been proposed. However, the optical clock distribution is found to be bulky, hard to fabricate, and expensive, even though it has lower power consumption and excellent signal integrity properties. Therefore, we have proposed an RF clock distribution (RCD) scheme for high-speed digital applications, especially multi-processor systems using global clocking. In this paper, we firstly report signal integrity analysis including power, skew, jitter, crosstalk, reflection, and noise in the RF clock distribution system. Based on this analysis, we propose a novel signal integrity design methodology for the RF clock distribution. The system comprises an RF clock transmitter as a clock generator, an H clock tree with junction couplers as a clock distributing network and an RF receiver as a digital clock-recovering module. We assume solder-ball flip chip interconnects for the chip-to-substrate assembly and 0.35 /spl mu/m TSMC CMOS technology for the RF clock receiver. The clock skew and the clock jitter created by process parameter variations or modeled and predicted. Finally, we demonstrate the RCD as a low-power and high-performance clocking method using HP Advanced Design System (ADS) simulation considering the microwave frequency interconnection models and the process parameter variations.
传统的数字时钟分布互连由于传输线损耗导致GHz时钟分布存在严重的功耗问题,并且由于时钟倾斜、时钟抖动和信号反射等问题导致信号完整性问题。为了克服这些传统数字时钟分布的局限性,提出了基于导波光学和自由空间光学的光时钟分布技术。然而,尽管光时钟分布具有较低的功耗和良好的信号完整性,但其体积庞大,制造困难,价格昂贵。因此,我们提出了一种射频时钟分配(RCD)方案,用于高速数字应用,特别是使用全局时钟的多处理器系统。本文首先对射频时钟分配系统中的功率、偏斜、抖动、串扰、反射和噪声等信号完整性进行了分析。基于此分析,我们提出了一种新的射频时钟分布的信号完整性设计方法。该系统包括一个作为时钟发生器的射频时钟发射机,一个带结耦合器的H时钟树作为时钟分配网络,以及一个作为数字时钟恢复模块的射频接收器。我们假设用于芯片到衬底组件的焊球倒装芯片互连和用于射频时钟接收器的0.35 /spl mu/m TSMC CMOS技术。由工艺参数变化或建模和预测产生的时钟偏差和时钟抖动。最后,考虑到微波频率互连模型和工艺参数的变化,我们利用惠普高级设计系统(ADS)仿真验证了RCD作为一种低功耗、高性能的时钟方法。
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引用次数: 15
Reliability study of high-pin-count flip-chip BGA 高引脚数倒装BGA可靠性研究
Yuan Li, J. Xie, T. Verma, V. Wang
A family of 1.0-mm pitch full-array flip-chip BGAs were developed. These packages vary from 27 to 45 mm in package size, 15 to 25 mm in die size, and 672 to 1020 in ball count. With dies and packages so large, solder joint fatigue failure and underfill delamination, induced by thermal expansion mismatch, are a major concern. Finite element analysis was set up for efficient reliability analysis. Two substrates, hi-CTE ceramic (12/spl times/10/sup -6///spl deg/C) and BT (17/spl times/10/sup -6///spl deg/C), are compared. Hi-CTE ceramic substrate has a better CTE match with die (2.6/spl times/10/sup -6///spl deg/C), therefore, it was surmised that hi-CTE ceramic would improve component-level reliability yet with satisfactory board-level reliability. To validate it, several die and package combinations were modeled using both substrates. Both component-level stresses and board-level solder joint fatigue life were compared. In addition, design of experiment (DOE) was used to study the effect of properties and dimensions of underfill and heat spreader on solder joint fatigue life. The effect of pad opening size was also quantified. Finally, the effect of underfill on interface stress between underfill and die was investigated.
开发了一系列1.0 mm间距全阵列倒装芯片bga。这些封装从27到45毫米的封装尺寸,15到25毫米的模具尺寸,672到1020的球数不等。由于模具和封装如此之大,由热膨胀失配引起的焊点疲劳失效和填充层脱层是主要问题。为了有效地进行可靠性分析,建立了有限元分析方法。比较了两种衬底,高cte陶瓷(12/spl次/10/sup -6// spl度/C)和BT (17/spl次/10/sup -6// spl度/C)。Hi-CTE陶瓷衬底与模具具有更好的CTE匹配(2.6/spl次/10/sup -6// spl度/C),因此,推测Hi-CTE陶瓷将提高组件级可靠性,同时具有令人满意的板级可靠性。为了验证它,使用这两种基板对几个模具和封装组合进行了建模。对元件级应力和板级焊点疲劳寿命进行了比较。此外,采用试验设计法研究了下填料和导热片的性能和尺寸对焊点疲劳寿命的影响。定量分析了衬垫开口大小对其影响。最后,研究了充填体对充填体与模具界面应力的影响。
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引用次数: 15
期刊
2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)
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