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2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)最新文献

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Microstructure, joint strength and failure mechanism of Sn-Ag, Sn-Ag-Cu versus Sn-Pb-Ag solders in BGA packages BGA封装中Sn-Ag、Sn-Ag- cu与Sn-Pb-Ag钎料的微观结构、接头强度及破坏机理
Ka Yau Lee, Ming Li, D. Olsen, W.T. Chen, B.T.C. Tan, S. Mhaisalkar
The microstructure, joint strength and failure mechanisms of Sn-Ag and Sn-Ag-Cu versus Sn-Pb-Ag systems on Cu/Ni/Au BGA pad metallization have been investigated after multiple reflow and high temperature storage. Sn-Pb-Ag system gave rise to a two-layer structure, i.e. Ni/sub 3/Sn/sub 4/ and (Au,Ni)Sn/sub 4/, at the interface after aging at 150/spl deg/C. However, such a structure was not detected in both lead-free systems. Only a layer of Ni/sub 3/Sn/sub 4/ phase in the Sn-Ag system and a layer of Cu-Sn-Ni-Au intermetallic compound in Sn-Ag-Cu system were found at the interfaces, even after 1000 hours at the afore-mentioned temperature. The formation of the (Au,Ni)Sn/sub 4/ ternary compound was due to re-settlement of Au at the interface which led to severe brittle failure in the Sn-Pb-Ag system. In contrast, Sn-Ag and Sn-Ag-Cu systems failed exclusively inside the solder after aging at 150/spl deg/C up to 1000 hours. The solder ball joint strength of the three systems and failure modes were also evaluated. Both lead-free systems showed good resistance to thermal aging with a solder ball joint strength maintained at about 1.60 to 1.70 kgf. The Sn-Pb-Ag system, on the other hand, degraded in mechanical performance over aging time, reaching a strength as low as 1.20 kgf. The growth rates of intermetallic layers at 125, 150, and 175/spl deg/C, and the activation energy were also determined in this study.
研究了Cu/Ni/Au BGA焊盘金属化过程中Sn-Ag、Sn-Ag-Cu和Sn-Pb-Ag体系的微观结构、结合强度和破坏机制。在150℃时效后,Sn- pb - ag体系在界面处形成Ni/sub 3/Sn/sub 4/和(Au,Ni)Sn/sub 4/两层结构。然而,在两种无铅体系中都没有检测到这种结构。在上述温度下1000小时后,在界面处仅发现Sn- ag体系中存在一层Ni/sub 3/Sn/sub 4/相,Sn- ag - cu体系中存在一层Cu-Sn-Ni-Au金属间化合物。(Au,Ni)Sn/sub / 4三元化合物的形成是由于Au在界面处的重新沉降导致Sn- pb - ag体系的严重脆性破坏。相比之下,Sn-Ag和Sn-Ag- cu体系在150/spl度/C老化1000小时后,只在焊料内部失效。并对三种体系的焊球接头强度和失效模式进行了评价。两种无铅体系均表现出良好的抗热老化性能,焊球接头强度保持在1.60至1.70 kgf左右。另一方面,随着老化时间的推移,Sn-Pb-Ag体系的机械性能下降,强度低至1.20 kgf。测定了金属间层在125、150和175℃时的生长速率和活化能。
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引用次数: 49
Highly alignment tolerant InGaAs inverted MSM photodetector heterogeneously integrated on a differential Si CMOS receiver operating at 1 Gbps 高准直度InGaAs倒置MSM光电探测器异质集成在差分Si CMOS接收器上,工作速度为1gbps
M. Vrazel, Jae J. Chang, In-Dal Song, K. Chung, M. Brooke, N. Jokerst, A. Brown, D. Wills
The increasing demand for high bandwidth, low latency I/O in gigascale systems is challenging current packaging technology. Optoelectronic I/O offers needed performance, but presents new challenges in mixed signal (digital, analog, optical, RF) design and test. In addition, the integration of OE interconnect must be suitable for high volume, low cost manufacturing of digital systems. This paper explores the heterogeneous integration of very large area, highly alignment tolerant photodetectors onto Si CMOS differential analog receiver circuits to realize noise-tolerant receiver interfaces for high-density interconnection electrical substrates with integrated optical links as well as for fiber optic links. The realization of an optically interconnected microprocessor that employs such a photodetector will also be discussed.
千兆级系统对高带宽、低延迟I/O的需求日益增长,这对当前的封装技术构成了挑战。光电I/O提供了所需的性能,但在混合信号(数字、模拟、光学、射频)设计和测试中提出了新的挑战。此外,OE互连的集成必须适合大批量、低成本的数字系统制造。本文探讨了在Si CMOS差分模拟接收电路上的超大面积、高准直容忍度光电探测器的异构集成,以实现具有集成光链路和光纤链路的高密度互连电基板的耐噪声接收接口。本文还将讨论采用这种光电探测器的光互连微处理器的实现。
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引用次数: 9
High reliable and environmental friendly molding compound for CABGA(R) packages 用于CABGA(R)封装的高可靠性和环保型成型化合物
Byung-Seon Kong, Hyo-Chang Yun, Jong-Chan Lim, Y. Jung, Dong-Young Kim, Kwan-Seek Chung
In this study, four kind of epoxy resins (biphenyl, naphthol, multi-functional, and OCN type) have applied to molding compound for CABGA packages. Basic, thermal, and mechanical properties of all molding compounds were measured and compared with moldability (coplanarity and wire sweep) and reliability (moisture sensitivity level) in the CABGA packages. From factor study, it was clear that molding compound which had high Tg and low shrinkage represents low coplanarity of CABGA packages. Coplanarity of MAP-type CABGA package decreased with increasing Tg and decreasing shrinkage of molding compound. Especially, coplanarity of the said package was found to be linearly proportional to the difference of shrinkage between PCB substrate and molding compound at room temperature. In case of reliability, the amount of absorbed moisture and flexural modulus of molding compounds affected on moisture sensitivity level. Low moisture absorption and flexural modulus are profitable for high reliability-JEDEC Level 3, 30/spl deg/C/60%RH/192 hours at reflow temperature 260/spl deg/C.
本研究将四种环氧树脂(联苯型、萘酚型、多功能型和OCN型)应用于CABGA封装的成型复合材料中。测量了所有成型化合物的基本性能、热学性能和机械性能,并将其与CABGA封装中的可塑性(共面性和钢丝扫描)和可靠性(湿度敏感性水平)进行了比较。从因子分析可知,高Tg、低收缩率的模塑复合材料代表了CABGA封装的低共面性。map型CABGA封装的共面性随着成型材料Tg的增加和收缩率的降低而降低。特别是,在所述封装的共面性发现与PCB基板和成型化合物在室温下的收缩率差成线性比例。在可靠性的情况下,模塑复合材料的吸湿量和弯曲模量对水分敏感程度有影响。低吸湿和弯曲模量有利于高可靠性- jedec级别3,30 /spl°C/60%RH/192小时回流温度260/spl°C。
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引用次数: 1
The effect of variations in nickel/gold surface finish on the assembly quality and attachment reliability of a plastic ball grid array 镍/金表面光洁度的变化对塑料球栅阵列装配质量和连接可靠性的影响
R. Coyle, G. Wenger, D. E. Hodges, A. Mawer, D. Cullen, P. Solan
Electrolytic and electroless Ni/Au are common pad surface finishes on area array (BGA or CSP) packages and printed wiring boards (PWB). The electroless nickel/immersion gold (ENIG) process often is implemented when there is insufficient space to allow bussing for the more common electrolytic Ni/Au plating. The ENIG process continues to be used despite evidence that it may cause or contribute to catastrophic, brittle, interfacial solder joint fractures. In this investigation a plastic ball grid array (PBGA) test vehicle is used to compare quality and reliability of four variations of the ENIG surface finish. The standard electrolytic Ni/Au surface finish is used as the control cell for the experiment. Ball shear tests and optical and scanning electron microscopy are performed on as-received and thermally preconditioned packages to evaluate package quality prior to assembly. Accelerated temperature cycling (0/+100/spl deg/C and -40/+125/spl deg/C) is used to evaluate solder joint attachment reliability. Detailed failure mode analysis is used to compare the fracture modes in the ball shear and thermal cycled samples in the electroless and electrolytic packages. The results are discussed in terms of the failure modes and the characteristics of the different Ni/Au surface finishes.
电解和化学Ni/Au是区域阵列(BGA或CSP)封装和印刷线路板(PWB)上常见的衬垫表面处理。化学镀镍/浸金(ENIG)工艺通常在没有足够的空间允许更常见的电解镀镍/镀金的情况下实施。尽管有证据表明ENIG工艺可能导致或促成灾难性的、脆性的界面焊点断裂,但仍继续使用。在这项研究中,使用塑料球网格阵列(PBGA)测试车来比较四种不同的ENIG表面光洁度的质量和可靠性。采用标准电解镍/金表面处理剂作为实验的控制电池。球剪切测试和光学和扫描电子显微镜在收到和热预处理包装上进行,以评估组装前的包装质量。加速温度循环(0/+100/spl℃和-40/+125/spl℃)用于评估焊点连接的可靠性。通过详细的破坏模式分析,比较了化学封装和电解封装中球剪试样和热循环试样的破坏模式。讨论了不同的Ni/Au表面处理的失效模式和特性。
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引用次数: 5
A new wafer-bonder of ultra-high precision using surface activated bonding (SAB) concept 一种采用表面活化键合(SAB)概念的超高精度晶圆键合机
T. Suga, M. Howlader, T. Itoh, C. Inaka, Y. Arai, A. Yamauchi
A robot-controlled wafer bonding machine was developed for the bonding of different sizes of wafers ranging up to 8 inches diameter. The features of this equipment are such that: (1) After the automatic parallel adjustment for 8-inch wafers to a margin of error within /spl plusmn/1 /spl mu/m, the X, Y, and /spl theta/ axis alignments are performed, allowing a margin of error within /spl plusmn/0.5 /spl mu/m in bonding accuracy; and (2) Room-temperature bonding is enabled using the surface activated (SAB) bonding concept. 8-inch diameter silicon wafers ware successfully bonded by the SAB process at room temperature for the first time. Preliminary investigations across the interface using an Infrared camera show that no bubbles are visibly present in the bonding region.
研制了一种机器人控制的晶圆键合机,可实现直径达8英寸的不同尺寸晶圆的键合。该设备的特点是:(1)在对8英寸晶圆进行自动平行调整至误差范围在/spl plusmn/1 /spl mu/m内后,进行X, Y和/spl theta/轴对齐,使粘合精度的误差范围在/spl plusmn/0.5 /spl mu/m内;(2)使用表面活化(SAB)键合概念实现室温键合。首次在室温下成功地结合了直径为8英寸的硅片。利用红外摄像机对界面进行初步调查,发现在键合区没有明显的气泡存在。
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引用次数: 14
Bump-less interconnect for next generation system packaging 用于下一代系统封装的无碰撞互连
T. Suga, K. Otsuka
A concept of bump-less interconnect for the next generation system packaging was proposed previously. Here the bump-less interconnect is defined as an interconnect of a size below 10 /spl mu/m pitch between chip and substrate, or between chip and chip. Such ultra-fine pitch interconnection will be necessary to realize high speed systems such as chip on chip or 3-D configuration for highly integrated multi-chip system in packaging. Two requirements are considered: Firstly, a transmission structure called stacked-pair line will be adopted in the bus-line in boards, and secondly, the surface activated bonding, SAB, is used to enable such ultra-high dense interconnection. A model, which is called IMSI-model 2000, is presented as an example of high speed CPU-memory.
以前提出了下一代系统封装的无碰撞互连概念。此处的无碰撞互连定义为芯片与衬底之间或芯片与芯片之间间距小于10 /spl μ m的互连。这种超细间距互连对于实现芯片上的高速系统或封装中高度集成的多芯片系统的3-D配置是必要的。考虑两个要求:一是在板内母线采用堆叠对线的传输结构,二是采用表面活化键合(SAB)实现这种超高密度互连。本文以高速cpu内存为例,介绍了IMSI-model 2000模型。
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引用次数: 27
Stacked thin dice packaging 叠层薄片包装
S. Pienimaa, J. Valtanen, R. Heikkila, E. Ristolainen
This paper reports on a developed stacking method to produce a small volume three-dimensional package. The first part of the 3/sup rd/ dimension is tackled by reducing package thickness and also the stand-off height. The steps came through thinning dice, using a thin interposer, and to stack the components. The thickness of the used ICs was 90 /spl mu/m, whereas typically thicknesses are around 250-300 /spl mu/m. Thin dice were connected through eutectic solder bumps on thin aramid epoxy substrates. The package was studied with the finite element method (FEM) using three-dimensional (3-D) models and the Ansys program. The average plastic work in the solder bump was used to define the reliability of the structure. Structures with one to four layers are compared. In current flip-chip assemblies, rigidity assists good electrical performance and reliability. Reducing the IC thickness below 100 /spl mu/m creates new challenges for handling, interconnecting, reliability and design. These tasks have been addressed in this study. The designed circuits for the above tests have been characterized and more details of the results are presented. Further progress in density increase has been achieved by stacking layers of flexible substrate and thin die on top of each other. For this work, the first level connection has been flip-chip bonding. The goal was to develop a method to produce modules on a small scale to verify the feasibility of various System-in-Package (SiP) solutions. The method has been tested using thin dice, mainly daisy chain. Devices are miniaturized to be more comfortable to carry; this size reduction desire, together with increased functionality, have become drivers, especially for wireless devices. Size reduction of electronics has set a challenge for packaging and provided the motivation to verify emerging technologies.
本文报道了一种制备小体积三维封装的堆垛方法。3/sup /尺寸的第一部分是通过减少包装厚度和高度来解决的。步骤是通过稀释骰子,使用薄中间层,并堆叠组件。所用集成电路的厚度为90 /spl mu/m,而典型厚度约为250-300 /spl mu/m。薄片通过在薄芳纶环氧基板上的共晶焊点连接。采用三维模型和Ansys软件对该包体进行有限元分析。用凸点的平均塑性功来确定结构的可靠性。将一层和四层的结构进行比较。在目前的倒装芯片组件中,刚性有助于良好的电气性能和可靠性。将IC厚度降低到100 /spl mu/m以下,为处理、互连、可靠性和设计带来了新的挑战。这些任务已在本研究中得到解决。对上述试验所设计的电路进行了表征,并给出了更详细的结果。在密度增加方面的进一步进展是通过将柔性衬底和薄晶片相互堆叠而实现的。对于这项工作,第一级连接一直是倒装芯片键合。目标是开发一种小规模生产模块的方法,以验证各种系统级封装(SiP)解决方案的可行性。该方法已经用薄骰子测试过,主要是菊花链。设备小型化,携带起来更舒适;这种缩小尺寸的愿望,加上增加的功能,已经成为驱动因素,特别是对于无线设备。电子产品的尺寸缩小对封装提出了挑战,并为验证新兴技术提供了动力。
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引用次数: 16
Mechanical bending fatigue reliability and its application to area array packaging 机械弯曲疲劳可靠性及其在面阵封装中的应用
A. Skipor, L. Leicht
The drive to finer pitch assemblies is in part due to smaller portable products. As these products reduce in size, the thickness of the printed circuit board must also reduce in thickness in proportion to the product size. These assemblies have become more flexible. Many of these products are assembled with area array packaging, which require numerous low-frequency mechanical deflections. The reliability emphasis has become more focused on isothermal bending fatigue. This paper will discuss a test method to evaluate bending fatigue reliability of 1.0 and 0.8 mm pitch area array packaging, the effect of printed circuit board (PCB) thickness, fatigue fracture morphology and its relation to solder joint location. Finite element results will also be presented to support and expand upon the findings in this study.
更细间距组件的驱动部分是由于更小的便携式产品。随着这些产品尺寸的减小,印刷电路板的厚度也必须与产品尺寸成比例地减小。这些组件变得更加灵活。这些产品中的许多都是用区域阵列封装组装的,这需要大量的低频机械偏转。可靠性的重点越来越集中在等温弯曲疲劳上。本文将讨论一种评估1.0和0.8 mm间距面积阵列封装弯曲疲劳可靠性的测试方法,以及印刷电路板(PCB)厚度、疲劳断裂形貌及其与焊点位置的关系。有限元结果也将被提出来支持和扩展本研究的发现。
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引用次数: 25
Optical solder effects of self-written waveguides in optical circuit devices coupling 自写波导在光电路器件耦合中的光焊料效应
N. Hirose, T. Yoshimura, O. Ibaragi
Easy, convenient and accurate optical component coupling methods have been proposed using self-written waveguides. The effect of this unique method is systematically studied here for two faced multi-mode optical fibers with various gaps. The optical fiber coupling is easily attained and the coupling loss significantly decreases after self-written waveguide formation even with a extended gap, more than 1000 /spl mu/m; the results clearly show that such self-written waveguide coupling is very effective; the waveguides act as "optical solder" in a gap between two optical components. All-solid type self-written waveguide formation and multichannel waveguide formation/connection are also successfully demonstrated; these results expand the application of self-written waveguides in future practical use. Unique, icicle shaped self-written waveguide formation is also described.
提出了一种简单、方便、精确的自写波导光学元件耦合方法。本文系统地研究了这种独特的方法在不同间隙的双面多模光纤中的应用效果。自写波导形成后,光纤耦合容易实现,即使间隙扩大,耦合损耗也显著降低,超过1000 /spl mu/m;结果清楚地表明,这种自写波导耦合是非常有效的;波导在两个光学元件之间的间隙中充当“光学焊料”。成功地实现了全固体型自写波导的形成和多通道波导的形成/连接;这些结果扩展了自写波导在未来实际应用中的应用。独特的,冰柱状的自写波导形成也被描述。
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引用次数: 16
Improvement of the reliability of the C4 for ultrahigh thermal conduction module with the direct solder-attached cooling system (DiSAC) 利用直焊冷却系统(DiSAC)提高超高导热模块C4的可靠性
O. Yamada, Y. Sawada, M. Harada, T. Yokozuka, A. Yasukawa, H. Moriya, N. Saito, K. Kasai, T. Uda, T. Netsu, K. Koyano
In the HITACHI MP6000 (HDS Skyline Trinium TM), the bipolar-CMOS processor dissipates about 600 W, and the new direct solder-attached cooling (named DiSAC) method has been developed for use with it. In this cooling method, the HDM is supported by the 97Sn/Ag C4 (or CCB; controlled collapse bonding) bumps, which are affected by almost all the deformation that occurs in the power on/off cycle. Hence, the fatigue life of the C4 bumps is most important in the application of this cooling method. In this paper, the causes of C4 bump strain are analyzed by the finite element method, and several techniques for reducing strain are simulated. A new method of estimating the fatigue life of the C4 connections, pseudo-elastic plastic creep analysis (EPC), is developed in order to improve the accuracy of fatigue life calculations, and is used to evaluate the creep strain in a 3D model. Using EPC and experimental C4 power cycle damage data, a new strain-fatigue life curve is defined. Process defects in the direct solder attachment are found to markedly shorten the fatigue life of the C4 connections, and the effects are estimated. All the technological developments presented are implemented in the DiSAC model, and the improvement in reliability is verified by experiment.
在日立MP6000 (HDS Skyline Trinium TM)中,双极cmos处理器的功耗约为600 W,并且已经开发了新的直接焊接冷却(称为DiSAC)方法。在这种冷却方法中,HDM由97Sn/Ag C4(或CCB;可控的坍塌键合)颠簸,这是几乎所有的变形,发生在电源开/关周期的影响。因此,在采用这种冷却方法时,C4凸起的疲劳寿命是最重要的。本文采用有限元方法分析了C4碰撞应变产生的原因,并对几种减小应变的方法进行了模拟。为了提高C4连接疲劳寿命计算的精度,提出了一种估算C4连接疲劳寿命的新方法——伪弹塑性蠕变分析(EPC),并将其用于三维模型的蠕变应变评估。利用EPC和C4功率循环损伤实验数据,定义了新的应变-疲劳寿命曲线。发现直接焊料连接的工艺缺陷会显著缩短C4连接的疲劳寿命,并对其影响进行了估计。提出的所有技术发展都在DiSAC模型中实现,并通过实验验证了可靠性的提高。
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引用次数: 4
期刊
2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)
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