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2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)最新文献

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Microstructure, joint strength and failure mechanism of Sn-Ag, Sn-Ag-Cu versus Sn-Pb-Ag solders in BGA packages BGA封装中Sn-Ag、Sn-Ag- cu与Sn-Pb-Ag钎料的微观结构、接头强度及破坏机理
Ka Yau Lee, Ming Li, D. Olsen, W.T. Chen, B.T.C. Tan, S. Mhaisalkar
The microstructure, joint strength and failure mechanisms of Sn-Ag and Sn-Ag-Cu versus Sn-Pb-Ag systems on Cu/Ni/Au BGA pad metallization have been investigated after multiple reflow and high temperature storage. Sn-Pb-Ag system gave rise to a two-layer structure, i.e. Ni/sub 3/Sn/sub 4/ and (Au,Ni)Sn/sub 4/, at the interface after aging at 150/spl deg/C. However, such a structure was not detected in both lead-free systems. Only a layer of Ni/sub 3/Sn/sub 4/ phase in the Sn-Ag system and a layer of Cu-Sn-Ni-Au intermetallic compound in Sn-Ag-Cu system were found at the interfaces, even after 1000 hours at the afore-mentioned temperature. The formation of the (Au,Ni)Sn/sub 4/ ternary compound was due to re-settlement of Au at the interface which led to severe brittle failure in the Sn-Pb-Ag system. In contrast, Sn-Ag and Sn-Ag-Cu systems failed exclusively inside the solder after aging at 150/spl deg/C up to 1000 hours. The solder ball joint strength of the three systems and failure modes were also evaluated. Both lead-free systems showed good resistance to thermal aging with a solder ball joint strength maintained at about 1.60 to 1.70 kgf. The Sn-Pb-Ag system, on the other hand, degraded in mechanical performance over aging time, reaching a strength as low as 1.20 kgf. The growth rates of intermetallic layers at 125, 150, and 175/spl deg/C, and the activation energy were also determined in this study.
研究了Cu/Ni/Au BGA焊盘金属化过程中Sn-Ag、Sn-Ag-Cu和Sn-Pb-Ag体系的微观结构、结合强度和破坏机制。在150℃时效后,Sn- pb - ag体系在界面处形成Ni/sub 3/Sn/sub 4/和(Au,Ni)Sn/sub 4/两层结构。然而,在两种无铅体系中都没有检测到这种结构。在上述温度下1000小时后,在界面处仅发现Sn- ag体系中存在一层Ni/sub 3/Sn/sub 4/相,Sn- ag - cu体系中存在一层Cu-Sn-Ni-Au金属间化合物。(Au,Ni)Sn/sub / 4三元化合物的形成是由于Au在界面处的重新沉降导致Sn- pb - ag体系的严重脆性破坏。相比之下,Sn-Ag和Sn-Ag- cu体系在150/spl度/C老化1000小时后,只在焊料内部失效。并对三种体系的焊球接头强度和失效模式进行了评价。两种无铅体系均表现出良好的抗热老化性能,焊球接头强度保持在1.60至1.70 kgf左右。另一方面,随着老化时间的推移,Sn-Pb-Ag体系的机械性能下降,强度低至1.20 kgf。测定了金属间层在125、150和175℃时的生长速率和活化能。
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引用次数: 49
Highly alignment tolerant InGaAs inverted MSM photodetector heterogeneously integrated on a differential Si CMOS receiver operating at 1 Gbps 高准直度InGaAs倒置MSM光电探测器异质集成在差分Si CMOS接收器上,工作速度为1gbps
M. Vrazel, Jae J. Chang, In-Dal Song, K. Chung, M. Brooke, N. Jokerst, A. Brown, D. Wills
The increasing demand for high bandwidth, low latency I/O in gigascale systems is challenging current packaging technology. Optoelectronic I/O offers needed performance, but presents new challenges in mixed signal (digital, analog, optical, RF) design and test. In addition, the integration of OE interconnect must be suitable for high volume, low cost manufacturing of digital systems. This paper explores the heterogeneous integration of very large area, highly alignment tolerant photodetectors onto Si CMOS differential analog receiver circuits to realize noise-tolerant receiver interfaces for high-density interconnection electrical substrates with integrated optical links as well as for fiber optic links. The realization of an optically interconnected microprocessor that employs such a photodetector will also be discussed.
千兆级系统对高带宽、低延迟I/O的需求日益增长,这对当前的封装技术构成了挑战。光电I/O提供了所需的性能,但在混合信号(数字、模拟、光学、射频)设计和测试中提出了新的挑战。此外,OE互连的集成必须适合大批量、低成本的数字系统制造。本文探讨了在Si CMOS差分模拟接收电路上的超大面积、高准直容忍度光电探测器的异构集成,以实现具有集成光链路和光纤链路的高密度互连电基板的耐噪声接收接口。本文还将讨论采用这种光电探测器的光互连微处理器的实现。
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引用次数: 9
High reliable and environmental friendly molding compound for CABGA(R) packages 用于CABGA(R)封装的高可靠性和环保型成型化合物
Byung-Seon Kong, Hyo-Chang Yun, Jong-Chan Lim, Y. Jung, Dong-Young Kim, Kwan-Seek Chung
In this study, four kind of epoxy resins (biphenyl, naphthol, multi-functional, and OCN type) have applied to molding compound for CABGA packages. Basic, thermal, and mechanical properties of all molding compounds were measured and compared with moldability (coplanarity and wire sweep) and reliability (moisture sensitivity level) in the CABGA packages. From factor study, it was clear that molding compound which had high Tg and low shrinkage represents low coplanarity of CABGA packages. Coplanarity of MAP-type CABGA package decreased with increasing Tg and decreasing shrinkage of molding compound. Especially, coplanarity of the said package was found to be linearly proportional to the difference of shrinkage between PCB substrate and molding compound at room temperature. In case of reliability, the amount of absorbed moisture and flexural modulus of molding compounds affected on moisture sensitivity level. Low moisture absorption and flexural modulus are profitable for high reliability-JEDEC Level 3, 30/spl deg/C/60%RH/192 hours at reflow temperature 260/spl deg/C.
本研究将四种环氧树脂(联苯型、萘酚型、多功能型和OCN型)应用于CABGA封装的成型复合材料中。测量了所有成型化合物的基本性能、热学性能和机械性能,并将其与CABGA封装中的可塑性(共面性和钢丝扫描)和可靠性(湿度敏感性水平)进行了比较。从因子分析可知,高Tg、低收缩率的模塑复合材料代表了CABGA封装的低共面性。map型CABGA封装的共面性随着成型材料Tg的增加和收缩率的降低而降低。特别是,在所述封装的共面性发现与PCB基板和成型化合物在室温下的收缩率差成线性比例。在可靠性的情况下,模塑复合材料的吸湿量和弯曲模量对水分敏感程度有影响。低吸湿和弯曲模量有利于高可靠性- jedec级别3,30 /spl°C/60%RH/192小时回流温度260/spl°C。
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引用次数: 1
The effect of variations in nickel/gold surface finish on the assembly quality and attachment reliability of a plastic ball grid array 镍/金表面光洁度的变化对塑料球栅阵列装配质量和连接可靠性的影响
R. Coyle, G. Wenger, D. E. Hodges, A. Mawer, D. Cullen, P. Solan
Electrolytic and electroless Ni/Au are common pad surface finishes on area array (BGA or CSP) packages and printed wiring boards (PWB). The electroless nickel/immersion gold (ENIG) process often is implemented when there is insufficient space to allow bussing for the more common electrolytic Ni/Au plating. The ENIG process continues to be used despite evidence that it may cause or contribute to catastrophic, brittle, interfacial solder joint fractures. In this investigation a plastic ball grid array (PBGA) test vehicle is used to compare quality and reliability of four variations of the ENIG surface finish. The standard electrolytic Ni/Au surface finish is used as the control cell for the experiment. Ball shear tests and optical and scanning electron microscopy are performed on as-received and thermally preconditioned packages to evaluate package quality prior to assembly. Accelerated temperature cycling (0/+100/spl deg/C and -40/+125/spl deg/C) is used to evaluate solder joint attachment reliability. Detailed failure mode analysis is used to compare the fracture modes in the ball shear and thermal cycled samples in the electroless and electrolytic packages. The results are discussed in terms of the failure modes and the characteristics of the different Ni/Au surface finishes.
电解和化学Ni/Au是区域阵列(BGA或CSP)封装和印刷线路板(PWB)上常见的衬垫表面处理。化学镀镍/浸金(ENIG)工艺通常在没有足够的空间允许更常见的电解镀镍/镀金的情况下实施。尽管有证据表明ENIG工艺可能导致或促成灾难性的、脆性的界面焊点断裂,但仍继续使用。在这项研究中,使用塑料球网格阵列(PBGA)测试车来比较四种不同的ENIG表面光洁度的质量和可靠性。采用标准电解镍/金表面处理剂作为实验的控制电池。球剪切测试和光学和扫描电子显微镜在收到和热预处理包装上进行,以评估组装前的包装质量。加速温度循环(0/+100/spl℃和-40/+125/spl℃)用于评估焊点连接的可靠性。通过详细的破坏模式分析,比较了化学封装和电解封装中球剪试样和热循环试样的破坏模式。讨论了不同的Ni/Au表面处理的失效模式和特性。
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引用次数: 5
A new wafer-bonder of ultra-high precision using surface activated bonding (SAB) concept 一种采用表面活化键合(SAB)概念的超高精度晶圆键合机
T. Suga, M. Howlader, T. Itoh, C. Inaka, Y. Arai, A. Yamauchi
A robot-controlled wafer bonding machine was developed for the bonding of different sizes of wafers ranging up to 8 inches diameter. The features of this equipment are such that: (1) After the automatic parallel adjustment for 8-inch wafers to a margin of error within /spl plusmn/1 /spl mu/m, the X, Y, and /spl theta/ axis alignments are performed, allowing a margin of error within /spl plusmn/0.5 /spl mu/m in bonding accuracy; and (2) Room-temperature bonding is enabled using the surface activated (SAB) bonding concept. 8-inch diameter silicon wafers ware successfully bonded by the SAB process at room temperature for the first time. Preliminary investigations across the interface using an Infrared camera show that no bubbles are visibly present in the bonding region.
研制了一种机器人控制的晶圆键合机,可实现直径达8英寸的不同尺寸晶圆的键合。该设备的特点是:(1)在对8英寸晶圆进行自动平行调整至误差范围在/spl plusmn/1 /spl mu/m内后,进行X, Y和/spl theta/轴对齐,使粘合精度的误差范围在/spl plusmn/0.5 /spl mu/m内;(2)使用表面活化(SAB)键合概念实现室温键合。首次在室温下成功地结合了直径为8英寸的硅片。利用红外摄像机对界面进行初步调查,发现在键合区没有明显的气泡存在。
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引用次数: 14
Bump-less interconnect for next generation system packaging 用于下一代系统封装的无碰撞互连
T. Suga, K. Otsuka
A concept of bump-less interconnect for the next generation system packaging was proposed previously. Here the bump-less interconnect is defined as an interconnect of a size below 10 /spl mu/m pitch between chip and substrate, or between chip and chip. Such ultra-fine pitch interconnection will be necessary to realize high speed systems such as chip on chip or 3-D configuration for highly integrated multi-chip system in packaging. Two requirements are considered: Firstly, a transmission structure called stacked-pair line will be adopted in the bus-line in boards, and secondly, the surface activated bonding, SAB, is used to enable such ultra-high dense interconnection. A model, which is called IMSI-model 2000, is presented as an example of high speed CPU-memory.
以前提出了下一代系统封装的无碰撞互连概念。此处的无碰撞互连定义为芯片与衬底之间或芯片与芯片之间间距小于10 /spl μ m的互连。这种超细间距互连对于实现芯片上的高速系统或封装中高度集成的多芯片系统的3-D配置是必要的。考虑两个要求:一是在板内母线采用堆叠对线的传输结构,二是采用表面活化键合(SAB)实现这种超高密度互连。本文以高速cpu内存为例,介绍了IMSI-model 2000模型。
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引用次数: 27
Thermal characterization of plastic ball grid array packages via infrared thermography 红外热成像技术表征塑料球栅阵列封装的热特性
L. Sweatlock, D. Lischner, J. Weiss
A methodology for performing characterization of Plastic Ball Grid Array (PBGA) packages via Infrared Thermography (IRT) was established. The thermal performance of various assemblies was characterized using IRT in conjunction with analytical methods to determine the individual contributions of the PBGA package and of the printed wiring board. Accuracy and repeatability of temperature measurements via IRT were found to be equal to those obtained by thermocouple techniques using standard IEDEC methods. Additionally, IRT was found to provide significant advantages relative to conventional measurement techniques including increased resolution, space and time domain profiling capability, ease of use, and reduced sample preparation and measurement time.
建立了一种利用红外热成像(IRT)对塑料球栅阵列(PBGA)封装进行表征的方法。利用IRT结合分析方法对各种组件的热性能进行了表征,以确定PBGA封装和印刷线路板的单独贡献。通过IRT测量温度的准确性和可重复性与使用标准IEDEC方法的热电偶技术获得的结果相同。此外,与传统测量技术相比,IRT具有显著的优势,包括提高分辨率、空间和时域分析能力、易用性、减少样品制备和测量时间。
{"title":"Thermal characterization of plastic ball grid array packages via infrared thermography","authors":"L. Sweatlock, D. Lischner, J. Weiss","doi":"10.1109/ECTC.2001.928010","DOIUrl":"https://doi.org/10.1109/ECTC.2001.928010","url":null,"abstract":"A methodology for performing characterization of Plastic Ball Grid Array (PBGA) packages via Infrared Thermography (IRT) was established. The thermal performance of various assemblies was characterized using IRT in conjunction with analytical methods to determine the individual contributions of the PBGA package and of the printed wiring board. Accuracy and repeatability of temperature measurements via IRT were found to be equal to those obtained by thermocouple techniques using standard IEDEC methods. Additionally, IRT was found to provide significant advantages relative to conventional measurement techniques including increased resolution, space and time domain profiling capability, ease of use, and reduced sample preparation and measurement time.","PeriodicalId":340217,"journal":{"name":"2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124402046","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A Wide Area Vertical Expansion (WAVE/sup TM/) packaging process development 广域垂直扩展(WAVE/sup TM/)包装工艺开发
Delin Li, D. Light, D. Castillo, M. Beroz, M. Nguyen, T. Wang
During the later 1990's, Tessera introduced a semiconductor packaging technology called WAVE (Wide Area Vertical Expansion) package to address the growing need for high pin count, high speed, high thermal dissipation, and high environmental reliability in advanced electronic packaging. The WAVE technology is an extension of Tessera's compliant packaging technologies that places a low modulus encapsulant between the silicon die and the package substrate to solve their CTE mismatch problem. The WAVE technology allows for compliant vertical interconnection links to be formed between the ICs and the substrate, with no need for a bond window. These interconnections are made simultaneously, in contrast to single point wire or lead bonding. The compliant interconnections and low modulus encapsulant enable the stress on BGA solder balls to be minimized. The WAVE package utilizes advanced materials and design to provide a unique combination of high electrical and thermal performance, high environmental reliability, and cost effective IC interconnection methodology. This paper presents one of the latest WAVE technology developments at Tessera.
在20世纪90年代后期,Tessera推出了一种名为WAVE(广域垂直扩展)封装的半导体封装技术,以解决先进电子封装中对高引脚数、高速度、高散热和高环境可靠性日益增长的需求。WAVE技术是Tessera兼容封装技术的延伸,该技术在硅芯片和封装基板之间放置低模量封装剂,以解决CTE错配问题。WAVE技术允许在集成电路和基板之间形成兼容的垂直互连链路,而不需要键合窗口。与单点导线或引线连接不同,这些互连是同时进行的。柔性的互连和低模量的封装剂使BGA焊料球上的应力降到最低。WAVE封装采用先进的材料和设计,提供了高电气和热性能、高环境可靠性和低成本IC互连方法的独特组合。本文介绍了Tessera最新的WAVE技术发展。
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引用次数: 13
Flip chip interconnection method applied to small camera module 应用于小型相机模组的倒装芯片互连方法
J. Karasawa, M. Segawa, Y. Kishimoto, M. Aoki, T. Sasaki
Small cameras used as image storage devices have been rapidly applied to mobile information devices since the improvement of picture quality and the development of an easy picture processing method. The authors have developed a small camera module (3.6 cc, 30(W)/spl times/15(D)/spl times/8(H) mm/sup 3/; including lens unit) using two bare chip bonding methods. One is the CMOS image sensor packaging technique for fabrication on a flexible substrate by the ACP (anisotropic conductive paste) bonding method. The other is the flip chip bonding method which utilizes the advanced ACP method for a DSP (digital signal processor) chip. The new ACP enables a short resin curing time of less than six seconds. The ACP can also withstand the reflow soldering process, so that the bare chip IC and chip components can be mounted on the same substrate. By using these bare chip bonding techniques, the small camera module was realized. Regarding the ACP, its humidity absorption property was improved to obtain a high reliability. The filler content of the ACP was also controlled to obtain a high reliability. The flip chip bonding margin was confirmed to be applicable to mass production.
随着图像质量的提高和简单的图像处理方法的发展,作为图像存储设备的小型相机迅速应用于移动信息设备。作者开发了一种小型相机模块(3.6 cc, 30(W)/spl次/15(D)/spl次/8(H) mm/sup 3/;包括透镜单元)采用两种裸芯片粘接方法。一种是采用ACP(各向异性导电浆料)键合方法在柔性基板上制造CMOS图像传感器封装技术。另一种是利用DSP(数字信号处理器)芯片的先进ACP方法的倒装片键合方法。新的ACP使树脂固化时间短,不到6秒。ACP还可以承受回流焊工艺,使裸芯片IC和芯片组件可以安装在同一基板上。利用这些裸片键合技术,实现了小型相机模块。对ACP的吸湿性能进行了改进,获得了较高的可靠性。对ACP的填料含量进行了控制,获得了较高的可靠性。倒装芯片键合余量被证实适用于量产。
{"title":"Flip chip interconnection method applied to small camera module","authors":"J. Karasawa, M. Segawa, Y. Kishimoto, M. Aoki, T. Sasaki","doi":"10.1109/ECTC.2001.927938","DOIUrl":"https://doi.org/10.1109/ECTC.2001.927938","url":null,"abstract":"Small cameras used as image storage devices have been rapidly applied to mobile information devices since the improvement of picture quality and the development of an easy picture processing method. The authors have developed a small camera module (3.6 cc, 30(W)/spl times/15(D)/spl times/8(H) mm/sup 3/; including lens unit) using two bare chip bonding methods. One is the CMOS image sensor packaging technique for fabrication on a flexible substrate by the ACP (anisotropic conductive paste) bonding method. The other is the flip chip bonding method which utilizes the advanced ACP method for a DSP (digital signal processor) chip. The new ACP enables a short resin curing time of less than six seconds. The ACP can also withstand the reflow soldering process, so that the bare chip IC and chip components can be mounted on the same substrate. By using these bare chip bonding techniques, the small camera module was realized. Regarding the ACP, its humidity absorption property was improved to obtain a high reliability. The filler content of the ACP was also controlled to obtain a high reliability. The flip chip bonding margin was confirmed to be applicable to mass production.","PeriodicalId":340217,"journal":{"name":"2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134230842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Interfacial reaction studies on lead (Pb)-free solder alloys 无铅钎料合金的界面反应研究
S.K. Kang, D. Shih, K. Fogel, P. Lauro, M. Yim, G. Advocate, M. Griffin, C. Goldsmith, D. W. Henderson, T. Gosselin, D. King, J. Konrad, A. Sarkhel, K. Puttlitz
Recently, the research and development activities for replacing Pb-containing solders with Pb-free solders have been intensified due to both competitive market pressures and environmental issues. As a result of these activities, a few promising candidate solder alloys have been identified, mainly, Sn-based alloys. A key issue affecting the integrity and reliability of solder joints is the interfacial reactions between a molten solder and surface finishes in the solder joint structures. In this paper, a fundamental study of the interfacial reactions between several Pb-free candidate solders and surface finishes commonly used in printed-circuit cards is reported. The Pb-free solders investigated include Sn-3.5Ag, Sn-3.8Ag-0.7Cu, and Sn-3.5Ag-3.0Bi. The surface finishes investigated include Cu, Au/Ni(P), Au/Pd/Ni(P), and Au/Ni (electroplated). The reaction kinetics of the dissolution of surface finishes and intermetallic compound growth have been measured as a function of reflow temperature and time. The intermetallic compounds formed during reflow reactions have been identified by SEM with Energy Dispersive X-ray Spectroscopy.
近年来,由于市场竞争压力和环境问题,以无铅焊料替代含铅焊料的研究和开发活动不断加强。由于这些活动,已经确定了一些有前途的候选钎料合金,主要是锡基合金。影响焊点完整性和可靠性的关键问题是焊点结构中熔融焊料与表面光洁度之间的界面反应。本文报道了几种无铅候选焊料与印刷电路卡表面处理剂之间的界面反应的基本研究。所研究的无铅焊料包括Sn-3.5Ag、Sn-3.8Ag-0.7Cu和Sn-3.5Ag-3.0 bi。所研究的表面处理包括Cu、Au/Ni(P)、Au/Pd/Ni(P)和Au/Ni(电镀)。测定了表面处理剂溶解和金属间化合物生长的反应动力学与回流温度和时间的关系。用能量色散x射线能谱仪对回流反应中形成的金属间化合物进行了扫描电镜鉴定。
{"title":"Interfacial reaction studies on lead (Pb)-free solder alloys","authors":"S.K. Kang, D. Shih, K. Fogel, P. Lauro, M. Yim, G. Advocate, M. Griffin, C. Goldsmith, D. W. Henderson, T. Gosselin, D. King, J. Konrad, A. Sarkhel, K. Puttlitz","doi":"10.1109/ECTC.2001.927766","DOIUrl":"https://doi.org/10.1109/ECTC.2001.927766","url":null,"abstract":"Recently, the research and development activities for replacing Pb-containing solders with Pb-free solders have been intensified due to both competitive market pressures and environmental issues. As a result of these activities, a few promising candidate solder alloys have been identified, mainly, Sn-based alloys. A key issue affecting the integrity and reliability of solder joints is the interfacial reactions between a molten solder and surface finishes in the solder joint structures. In this paper, a fundamental study of the interfacial reactions between several Pb-free candidate solders and surface finishes commonly used in printed-circuit cards is reported. The Pb-free solders investigated include Sn-3.5Ag, Sn-3.8Ag-0.7Cu, and Sn-3.5Ag-3.0Bi. The surface finishes investigated include Cu, Au/Ni(P), Au/Pd/Ni(P), and Au/Ni (electroplated). The reaction kinetics of the dissolution of surface finishes and intermetallic compound growth have been measured as a function of reflow temperature and time. The intermetallic compounds formed during reflow reactions have been identified by SEM with Energy Dispersive X-ray Spectroscopy.","PeriodicalId":340217,"journal":{"name":"2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134595380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 80
期刊
2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)
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