Applied Surface Science Advances最新文献

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Oxidation behavior of Ge-modified Nb-Si alloys at 1250 °C: Self-generated NbGe2 layer with enhanced oxidation resistance 1250℃时ge改性Nb-Si合金的氧化行为：自生NbGe2层抗氧化性增强

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-10-10 DOI: 10.1016/j.apsadv.2025.100874

Dezhi Chen, Wotai Gong, Chao Xu, Yijie Zhang, Ren Hao, Zhenbo Yang, Ruirun Chen, Hengzhi Fu

The effects of Ge on the microstructure, oxidation kinetics, and oxidation behavior of Nb-Si alloy were systematically investigated. Although Ge has no effect on the constituent phases of the alloy, it reduces the Si content at which the eutectic reaction occurs in Nb-Si system and promotes forming coarse silicides. Experimental results indicate that Ge significantly decreases oxidation rate at 1250 °C of Nb-Si alloy and enhances both the adherence and density of the scale. The Nb-16Si-20Ti-1.5Zr-1B-1C-12Ge demonstrates superior oxidation resistance, with a weight gain of merely 82.2 mg/cm² after oxidation at 1250 °C/50 h, representing a 64.9 % reduction compared to the base alloy (234.06 mg/cm²). This enhancement can be ascribed to the generation of an in-situ formed NbGe₂ layer with enhanced oxidation resistance between the matrix and the scale in Ge-containing alloys. The NbGe₂ layer substitutes the originally porous transition layer, which significantly impedes the inward diffusion of oxygen. For alloys containing a low Ge concentration (≤3 at.%), a non-continuous NbGe₂ layer is generated, which reduces the depth of the internal oxide layer. In contrast, alloys with higher Ge content (≥6 at.%) develop a uniform and continuous NbGe₂ layer that entirely coats the matrix, completely preventing oxygen penetration, and eliminating the internal oxide layer. Furthermore, as oxidation progresses, NbGe₂ layer becomes thicker, offering sustained and reliable protection to the alloy. These findings offer valuable insights for designing advanced Nb-Si alloys with enhanced high-temperature and oxidation resistance.

系统研究了Ge对铌硅合金显微组织、氧化动力学和氧化行为的影响。Ge对合金的组成相没有影响，但降低了Nb-Si体系中发生共晶反应的Si含量，促进了粗硅化物的形成。实验结果表明，在1250℃时，Ge显著降低了Nb-Si合金的氧化速率，提高了结垢的附着力和密度。Nb-16Si-20Ti-1.5Zr-1B-1C-12Ge表现出优异的抗氧化性，在1250°C/50 h氧化后，重量增加仅为82.2 mg/cm²，与母合金（234.06 mg/cm²）相比减少了64.9%。这种增强可以归因于在含锗合金中，在基体和结垢之间生成了一层原位形成的NbGe 2层，其抗氧化性增强。NbGe 2层取代了原来多孔的过渡层，显著阻碍了氧向内扩散。对于含低锗浓度（≤3 at）的合金。%)，生成不连续的NbGe 2层，减小了内部氧化层的深度。相比之下，高Ge含量(≥6 at。%)形成均匀连续的NbGe 2层，完全覆盖基体，完全防止氧气渗透，消除内部氧化层。此外，随着氧化的进行，NbGe 2层变得更厚，为合金提供持续可靠的保护。这些发现为设计具有增强高温和抗氧化性能的先进铌硅合金提供了有价值的见解。

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引用次数: 0

Spectral characterization for the evaluation of a protective coating on dolomite by visible and near infrared spectroscopy 用可见光和近红外光谱法评价白云岩保护层的光谱表征

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-09-26 DOI: 10.1016/j.apsadv.2025.100864

David González-Campelo , Víctor Calvo , Indira Rodríguez , Gabriel Búrdalo-Salcedo , José Miguel González-Domínguez , María Fernández-Raga

Calcareous heritage stones are essential to the European cultural heritage but vulnerable to weathering that compromises their structural and aesthetic integrity. Graphene oxide (GO) emerges a promising protective coating, enhancing resistance to climatic aggressions while preserving the stone’s appearance and reducing restoration costs. To ensure effective application and to monitor durability, rapid and consistent on-site analytical methods are needed. This study evaluates infrared spectroscopy as a non-destructive and reliable tool for the characterization and quantification of GO coatings applied to dolomite stones coming from two different Spanish quarries. Using a partial least squares regression, spectral data enabled accurate assessment of the coating presence, concentration (which was tested in the range from 0 to 16.5 µg·cm⁻²), and uniformity. This work establishes vibrational spectroscopy as a powerful in situ technique for monitoring protective coatings on heritage stones, providing a measurable and reliable framework to safeguard cultural assets against environmental degradation.

钙质遗产石是欧洲文化遗产的重要组成部分，但易受风化影响，影响其结构和美学完整性。氧化石墨烯（GO）是一种很有前途的保护涂层，可以增强对气候侵蚀的抵抗力，同时保持石材的外观并降低修复成本。为了确保有效的应用和监测耐久性，需要快速和一致的现场分析方法。本研究评估了红外光谱作为一种无损且可靠的工具，用于表征和定量来自两个不同西班牙采石场的白云石的氧化石墨烯涂层。使用偏最小二乘回归，光谱数据可以准确评估涂层的存在，浓度（测试范围从0到16.5µg·cm⁻²）和均匀性。这项工作建立了振动光谱作为一种强大的原位技术，用于监测遗产石头的保护涂层，为保护文化资产免受环境退化提供了可测量和可靠的框架。

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引用次数: 0

Enhancing hydrophilic properties of spherical C(sp2)-hybridized carbon nanostructures through the targeted oxidation of their outer layer 通过对球形C（sp2）杂化碳纳米结构外层的定向氧化，增强其亲水性

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-11-27 DOI: 10.1016/j.apsadv.2025.100906

Marta E. Plonska-Brzezinska , Joanna Breczko , Damian Pawelski , Julio César Zuaznabar Gardona , Alex Fragoso , Krzysztof Brzezinski , Artur P. Terzyk

Oxidation processes affect the structural integrity of carbon nanostructure (CN), leading to changes its physico-chemical properties, as a result of oxidation of sp²-hybridized carbon atoms, and formation of appropriate functional groups, further determining the surface properties of CNs. This work used several oxidation methods to develop effective procedures for the selective modification of the carbon nano-onion (CNO). Hydrogen peroxide, urea hydrogen peroxide complex, acetic chloride or anhydride, and trifluoroacetic acid were used as the primary reagents in various configurations for the functionalization of CNOs, which resulted in the formation of oxygen-containing groups, mainly carbonyls, phenolic, carboxyl, ethers, and esters. The dispersion of functionalized CNOs was tested in a series of protic, aprotic polar, and nonpolar solvents that were used to determine the Hansen Solubility Parameters. The dispersion of oxidized CNOs was determined experimentally in water, by designating the zeta potential of dispersed CNOs and their diameters using dynamic light scattering. The formation of oxygen-containing groups ensures high dispersion of CNs in polar solvents and provides high stability in water for more than two months. It is the first work describing such effective methods of functionalizing spherical nanostructures containing C(sp²)-hybridized carbon atoms, where the dispersion stability in water is so significant.

氧化过程影响碳纳米结构（CN）的结构完整性，导致其物理化学性质的改变，这是由于sp2杂化碳原子被氧化，并形成适当的官能团，从而进一步决定了cnns的表面性质。本工作采用几种氧化方法，开发了碳纳米洋葱（CNO）选择性改性的有效程序。过氧化氢、尿素过氧化氢络合物、氯乙酸或酸酐、三氟乙酸作为主要试剂，以不同的构型对CNOs进行功能化，形成含氧基团，主要是羰基、酚基、羧基、醚和酯。功能化的CNOs在一系列质子、非质子极性和非极性溶剂中的分散测试，用于确定汉森溶解度参数。用动态光散射法测定了氧化CNOs的zeta电位及其直径，从而测定了氧化CNOs在水中的分散性。含氧基团的形成确保了CNs在极性溶剂中的高度分散，并在水中提供了超过两个月的高稳定性。这是第一次描述这种有效的方法来功能化含有C（sp2）杂化碳原子的球形纳米结构，其中在水中的分散稳定性是如此重要。

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引用次数: 0

Smart material surface science and their emerging applications: Investigation and implementation for real time activities in industry 5.0 智能材料表面科学及其新兴应用：工业5.0中实时活动的调查和实施

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-11-13 DOI: 10.1016/j.apsadv.2025.100897

Ajit Behera

引用次数: 0

Corrigendum to “Enhancing corrosion resistance and bioactive behavior of porous metallic scaffolds through electrochemical coatings” [Applied Surface Science Advances 26 (2025) 100723] “通过电化学涂层增强多孔金属支架的耐腐蚀性和生物活性”的勘误表[应用表面科学进展26 (2025)100723]

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-11-14 DOI: 10.1016/j.apsadv.2025.100899

Julio E. de la Rosa , Cristina García-Cabezon , Celia García-Hernandez , Ernesto J. Delgado-Pujol , Francisco J. García-García , Aldo R. Boccaccini , Fernando Martín-Pedrosa , Yadir Torres

引用次数: 0

Improving HER and OER reactions by tailoring oxidation reactions during pulsed laser deposition of TiON thin films 通过调整脉冲激光沉积过程中的氧化反应来改善HER和OER反应

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-10-27 DOI: 10.1016/j.apsadv.2025.100877

Stefan Andrei Irimiciuc , Sergii Chertopalov , Martin Vondráček , Joris More-Chevalier , Ladislav Fekete , Elena Miliutina , Oleksiy Lyutakov , Ján Lančok

Control over the gas-phase oxidation reaction during pulsed laser deposition (PLD) of 150 nm TiN films under varying O₂ atmospheres was achieved by tailoring surface oxidation states which showed a good potential for rare-metal-free water splitting. An optimum for the nitrogen occupation was found at 0.1 Pa O₂, which corresponds to the highest deposition energies during film growth. Additionally, the increase in deposition temperature up to allows a better incorporation of nitrogen up to a value of 2.5. The deposition process was monitored via angle- and time-resolved Langmuir probe measurements combined with optical emission spectroscopy. Under residual atmosphere conditions, high kinetic ion energy which reached 1.8 keV facilitated both gas‒phase oxidation and thermal oxidation of the films. In the intermediate pressure regime, where energies where in the range of hundreds of eV, the formation of suboxides and fractional nitrides was observed, with the transition towards TiO₂ driven by increased plasma ion acceleration and increased ion density by a factor of 1.2. The integration of advanced plasma diagnostics with thin-film analysis provides a deeper understanding of the oxidation dynamics in PLD, offering valuable insights for tailoring the properties of oxynitride thin films.

通过调整表面氧化态，实现了脉冲激光沉积（PLD） 150 nm TiN薄膜在不同O₂气氛下气相氧化反应的控制，显示了无稀有金属水分解的良好潜力。在0.1 Pa O2时氮的最优占用，对应于膜生长过程中的最高沉积能量。此外，沉积温度的增加可使氮更好地结合，最高可达2.5。通过角分辨和时间分辨朗缪尔探针测量结合光学发射光谱来监测沉积过程。在残余气氛条件下，离子动能高达1.8 keV，有利于膜的气相氧化和热氧化。在中压状态下，能量在数百eV范围内，观察到亚氧化物和分数氮化物的形成，并由等离子体离子加速和离子密度增加1.2倍驱动向TiO 2的转变。将先进的等离子体诊断与薄膜分析相结合，可以更深入地了解PLD中的氧化动力学，为定制氮化氧薄膜的特性提供有价值的见解。

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引用次数: 0

Nano-safety guardians: Surface engineering strategies for building hemocompatible shields 纳米安全守护者：构建血液相容护盾的表面工程策略

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-11-11 DOI: 10.1016/j.apsadv.2025.100891

Xiangyang Cai , Heyue Chen , Zihan Peng , Yuan Li , Shuang Tan , Dingyang Li , Tianxiang Dai , Hua Qiu , Manfred F. Maitz , Xiangyang Li

Nanoparticles are extensively investigated due to their enhanced solubility, pharmacokinetics, and biodistribution. However, hemolysis caused by nanomedicine delivery systems poses a significant challenge. Nanoparticle-induced hemolysis can result in elevated levels of pro-inflammatory cytokines, complement activation, granulocyte activation, and impaired phagocytic function. Additionally, parameters such as nanoparticle surface charge, size, structure, morphology, and concentration significantly influence the hemolysis rate. To reduce hemolysis rate, biocompatible coatings (such as liposomes, proteins, or polymers) are applied to the nanoparticle surface, and the dosage of nanoparticles is carefully controlled. In this review, we summarize the mechanisms of nanoparticle-induced hemolysis, including direct interaction with red blood cells and membrane disruption. Then we systematically analyze these surface properties and their interactions with blood components to elucidate their impact on hemolysis, emphasize that nanoparticle hemolytic activity is influenced by multiple surface characteristics rather than a single factor. Moreover, physiological environment exhibits a complex and nonlinear relationship with hemolytic activity, potentially affecting it indirectly through changes in nanoparticle surface properties. Finally, we provide an in-depth overview of biocompatible coatings and recommend optimal surface properties and concentrations of nanoparticles to guide material selection. We believe that these insights will contribute to the development of safer and more effective nanomedicine delivery systems.

纳米颗粒由于其增强的溶解度、药代动力学和生物分布而被广泛研究。然而，由纳米药物递送系统引起的溶血是一个重大挑战。纳米颗粒诱导的溶血可导致促炎细胞因子水平升高、补体活化、粒细胞活化和吞噬功能受损。此外，纳米颗粒的表面电荷、大小、结构、形态和浓度等参数对溶血率有显著影响。为了降低溶血率，将生物相容性涂层（如脂质体、蛋白质或聚合物）涂在纳米颗粒表面，并仔细控制纳米颗粒的剂量。在这篇综述中，我们总结了纳米颗粒诱导溶血的机制，包括与红细胞的直接相互作用和膜破坏。然后，我们系统地分析了这些表面特性及其与血液成分的相互作用，以阐明它们对溶血的影响，强调纳米颗粒的溶血活性受到多种表面特性而不是单一因素的影响。此外，生理环境与溶血活性表现出复杂的非线性关系，可能通过纳米颗粒表面性质的变化间接影响溶血活性。最后，我们对生物相容性涂层进行了深入的概述，并推荐了最佳的表面特性和纳米颗粒浓度，以指导材料的选择。我们相信这些见解将有助于开发更安全、更有效的纳米药物输送系统。

{"title":"Nano-safety guardians: Surface engineering strategies for building hemocompatible shields","authors":"Xiangyang Cai , Heyue Chen , Zihan Peng , Yuan Li , Shuang Tan , Dingyang Li , Tianxiang Dai , Hua Qiu , Manfred F. Maitz , Xiangyang Li","doi":"10.1016/j.apsadv.2025.100891","DOIUrl":"10.1016/j.apsadv.2025.100891","url":null,"abstract":"<div><div>Nanoparticles are extensively investigated due to their enhanced solubility, pharmacokinetics, and biodistribution. However, hemolysis caused by nanomedicine delivery systems poses a significant challenge. Nanoparticle-induced hemolysis can result in elevated levels of pro-inflammatory cytokines, complement activation, granulocyte activation, and impaired phagocytic function. Additionally, parameters such as nanoparticle surface charge, size, structure, morphology, and concentration significantly influence the hemolysis rate. To reduce hemolysis rate, biocompatible coatings (such as liposomes, proteins, or polymers) are applied to the nanoparticle surface, and the dosage of nanoparticles is carefully controlled. In this review, we summarize the mechanisms of nanoparticle-induced hemolysis, including direct interaction with red blood cells and membrane disruption. Then we systematically analyze these surface properties and their interactions with blood components to elucidate their impact on hemolysis, emphasize that nanoparticle hemolytic activity is influenced by multiple surface characteristics rather than a single factor. Moreover, physiological environment exhibits a complex and nonlinear relationship with hemolytic activity, potentially affecting it indirectly through changes in nanoparticle surface properties. Finally, we provide an in-depth overview of biocompatible coatings and recommend optimal surface properties and concentrations of nanoparticles to guide material selection. We believe that these insights will contribute to the development of safer and more effective nanomedicine delivery systems.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"30 ","pages":"Article 100891"},"PeriodicalIF":8.7,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145525607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication of highly transparent rigid polyurethane with superhydrophobic and slippery liquid-infused porous surfaces 具有超疏水性和光滑液体注入多孔表面的高透明刚性聚氨酯的制造

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-10-22 DOI: 10.1016/j.apsadv.2025.100880

Hyun-Sung Kim, Eun-Jae Lee, Sung-Jun Lee, Jeong-Won Lee

Transparent rigid polymer materials are widely used in displays, optical sensors, and medical devices because of their excellent optical properties and durability. However, conventional transparent rigid polymer surfaces are not superhydrophobic (SHPo) and do not possess the characteristics of slippery liquid-infused porous surface (SLIPS), which limits their application. In this study, a novel surface processing method capable of imparting both SHPo and SLIPS properties to transparent rigid polyurethane (PU) was developed and characterized. Specifically, a SHPo structure was fabricated on aluminum via etching and functionalization and then replicated onto rigid, transparent PU through a polydimethylsiloxane mold. Moreover, a SLIPS was formed by infusing the SHPo PU with a lubricant. The transparency of SLIPS can be controlled through the difference in refractive index between the PU substrate and lubricant, and a SLIPS with high optical transmittance was successfully prepared using silicone oil. SLIPS fabricated using this new approach can simultaneously satisfy the durability and transparency requirements for various industrial applications of functional surfaces.

透明刚性高分子材料因其优异的光学性能和耐用性被广泛应用于显示器、光学传感器和医疗设备中。然而，传统的透明刚性聚合物表面不具有超疏水性（SHPo），也不具有注入液体的光滑多孔表面（SLIPS）的特性，这限制了它们的应用。在这项研究中，开发了一种新的表面处理方法，可以同时赋予透明硬质聚氨酯（PU） SHPo和SLIPS性能。具体来说，通过蚀刻和功能化在铝上制造SHPo结构，然后通过聚二甲基硅氧烷模具复制到刚性透明PU上。此外，通过向SHPo PU注入润滑剂形成了slip。通过聚氨酯衬底与润滑剂之间的折射率差异，可以控制滑移片的透明度，并利用硅油成功制备了高透光率的滑移片。使用这种新方法制造的slip可以同时满足各种功能表面工业应用的耐久性和透明度要求。

{"title":"Fabrication of highly transparent rigid polyurethane with superhydrophobic and slippery liquid-infused porous surfaces","authors":"Hyun-Sung Kim, Eun-Jae Lee, Sung-Jun Lee, Jeong-Won Lee","doi":"10.1016/j.apsadv.2025.100880","DOIUrl":"10.1016/j.apsadv.2025.100880","url":null,"abstract":"<div><div>Transparent rigid polymer materials are widely used in displays, optical sensors, and medical devices because of their excellent optical properties and durability. However, conventional transparent rigid polymer surfaces are not superhydrophobic (SHPo) and do not possess the characteristics of slippery liquid-infused porous surface (SLIPS), which limits their application. In this study, a novel surface processing method capable of imparting both SHPo and SLIPS properties to transparent rigid polyurethane (PU) was developed and characterized. Specifically, a SHPo structure was fabricated on aluminum via etching and functionalization and then replicated onto rigid, transparent PU through a polydimethylsiloxane mold. Moreover, a SLIPS was formed by infusing the SHPo PU with a lubricant. The transparency of SLIPS can be controlled through the difference in refractive index between the PU substrate and lubricant, and a SLIPS with high optical transmittance was successfully prepared using silicone oil. SLIPS fabricated using this new approach can simultaneously satisfy the durability and transparency requirements for various industrial applications of functional surfaces.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"30 ","pages":"Article 100880"},"PeriodicalIF":8.7,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145363289","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Corrigendum to “ZIF-8 coated flexible carbon cloth substrates for CO₂ sensing applications” [Appl. Surf. Sci. Adv. 18 (2023) 100490] “用于CO₂传感应用的ZIF-8涂层柔性碳布基材”的勘误表。冲浪。科学。ad18 (2023) 100490]

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-11-08 DOI: 10.1016/j.apsadv.2025.100895

Shamma Al Abdulla , Rana Sabouni , Mehdi Ghommem , Abdul Hai Alami

引用次数: 0

Evaluation methods for XPS depth profiling; A review XPS深度剖面评价方法研究回顾

IF 8.7 Q1 CHEMISTRY, PHYSICAL

Applied Surface Science Advances

Pub Date : 2025-12-01 Epub Date: 2025-10-09 DOI: 10.1016/j.apsadv.2025.100872

A.S. Racz, M. Menyhard

In recent years X-ray photoelectron spectroscopy (XPS) has become a widespread approach in modern material science to study numerous aspects (energy production, bio-interface analysis, catalysis etc.) of widely varied functional materials (metals, polymers, semiconductors). In the majority of these applications there is a need of the detailed knowledge of the surface and surface close chemistry. XPS with its excellent chemical sensitivity can directly be applied to the analysis of the surface layer in the range of some nms. In case of thicker regions, however, it has to be combined with various depth profiling techniques. The evaluation of depth profiles especially in case of ion etch techniques must be performed with special care due to the emergence of ion induced artefacts (mixing, preferential sputtering, roughening etc.). In this review we present the advantages and disadvantages of the techniques available for tackling these issues focusing especially on ion etching techniques: monoatomic and cluster argon sputtering. Evaluation problems are discussed through case studies aiming to provide a guide for choosing between the different methods, highlighting pitfalls and proposing solutions.

近年来，x射线光电子能谱（XPS）已成为现代材料科学中研究各种功能材料（金属、聚合物、半导体）的众多方面（能源生产、生物界面分析、催化等）的广泛方法。在大多数这些应用中，需要对表面和表面紧密化学有详细的了解。XPS具有优良的化学灵敏度，可直接应用于某些nm范围内的表层分析。然而，对于较厚的区域，它必须与各种深度剖面技术相结合。深度轮廓的评估，特别是在离子蚀刻技术的情况下，必须特别小心，因为会出现离子诱导的伪影（混合、优先溅射、粗化等）。在这篇综述中，我们介绍了可用于解决这些问题的技术的优点和缺点，特别是离子蚀刻技术：单原子和簇氩溅射。通过案例研究讨论评估问题，旨在为不同方法之间的选择提供指导，突出缺陷并提出解决方案。

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引用次数: 0

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