Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352076
Xiaowei Liu, Haifeng Zhang, Guangming Li, Weiping Chen, Xilian Wang
This paper describes a closed-loop micro-machined accelerometer implemented in a bulk-micromachining technology with integrated CMOS circuit. The operational principle of accelerometer is detailed. We establish a mathematical model of closed-loop system to compare the performance with the open accelerometer. Electrostatic force is served as a negative feedback in closed-loop operating mode to improve the bandwidth, linearity and dynamic range of micro-machined capacitive accelerometer. The noise source affected readout circuit is discussed to optimize circuit structure. The circuit is simulated using Hspice. The result of the circuit simulation shows good sensitivity and low power consumption. The sensor is designed to measure plusmn5g acceleration. Device sensitivity is larger than 15mV/g.
{"title":"Design of Readout Circuits Used for Micro-machined Capacitive Accelerometer","authors":"Xiaowei Liu, Haifeng Zhang, Guangming Li, Weiping Chen, Xilian Wang","doi":"10.1109/NEMS.2007.352076","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352076","url":null,"abstract":"This paper describes a closed-loop micro-machined accelerometer implemented in a bulk-micromachining technology with integrated CMOS circuit. The operational principle of accelerometer is detailed. We establish a mathematical model of closed-loop system to compare the performance with the open accelerometer. Electrostatic force is served as a negative feedback in closed-loop operating mode to improve the bandwidth, linearity and dynamic range of micro-machined capacitive accelerometer. The noise source affected readout circuit is discussed to optimize circuit structure. The circuit is simulated using Hspice. The result of the circuit simulation shows good sensitivity and low power consumption. The sensor is designed to measure plusmn5g acceleration. Device sensitivity is larger than 15mV/g.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115277310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352049
M. Bally, B. Stadler, D. Grieshaber, J. Voros
Microarrays play a key-role in life sciences and in diagnostics by providing a powerful tool for high throughput parallel analysis of complex samples. We present a novel approach to create heterogeneous vesicle arrays with optimized interface chemistry and low unspecific response. Here, complexes of biotinylated single-stranded DNA and streptavidin are spotted onto a non-fouling biotinylated polymer layer. The so-obtained DNA array is then transformed into a vesicle array after incubation with a solution of nanoobjects tagged with the complementary strands. Phospholipid vesicle arrays can potentially be transformed into membrane protein arrays.
{"title":"Heterogeneous Vesicle Arrays for Biosensing Applications","authors":"M. Bally, B. Stadler, D. Grieshaber, J. Voros","doi":"10.1109/NEMS.2007.352049","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352049","url":null,"abstract":"Microarrays play a key-role in life sciences and in diagnostics by providing a powerful tool for high throughput parallel analysis of complex samples. We present a novel approach to create heterogeneous vesicle arrays with optimized interface chemistry and low unspecific response. Here, complexes of biotinylated single-stranded DNA and streptavidin are spotted onto a non-fouling biotinylated polymer layer. The so-obtained DNA array is then transformed into a vesicle array after incubation with a solution of nanoobjects tagged with the complementary strands. Phospholipid vesicle arrays can potentially be transformed into membrane protein arrays.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124739934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352177
C. Dai, Mao-Chen Liu
The fabrication of a carbon monoxide (CO) micro gas sensor integrated with an inverting amplifier circuit and a micro heater on chip using the commercial 0.35mum complementary metal oxide semiconductor (CMOS) process and a post-process have been implemented. The gas sensor is composed of a polysilicon resistor and a CO gas sensing film. Tin dioxide prepared by the sol-gel method is adopted as the CO gas sensing film. The micro heater is used to provide the working temperature of the gas sensor. The gas sensor, which is a resistive type sensor, changes the resistance when the sensing film adsorbs CO gas. The inverting amplifier circuit is utilized to convert the resistance of the gas sensor into the voltage output. Experimental results show that the sensitivity of the CO gas sensor is about 1 mV/ppm.
{"title":"Nanoparticle SnO2 Gas Sensor with Circuit and Micro Heater on Chip Fabricated Using CMOS-MEMS Technique","authors":"C. Dai, Mao-Chen Liu","doi":"10.1109/NEMS.2007.352177","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352177","url":null,"abstract":"The fabrication of a carbon monoxide (CO) micro gas sensor integrated with an inverting amplifier circuit and a micro heater on chip using the commercial 0.35mum complementary metal oxide semiconductor (CMOS) process and a post-process have been implemented. The gas sensor is composed of a polysilicon resistor and a CO gas sensing film. Tin dioxide prepared by the sol-gel method is adopted as the CO gas sensing film. The micro heater is used to provide the working temperature of the gas sensor. The gas sensor, which is a resistive type sensor, changes the resistance when the sensing film adsorbs CO gas. The inverting amplifier circuit is utilized to convert the resistance of the gas sensor into the voltage output. Experimental results show that the sensitivity of the CO gas sensor is about 1 mV/ppm.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124768583","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352059
Y. Jin, K. Kasuya, K. Nagato, H. Morii, T. Ooi, M. Nakao
Single-walled carbon nanotubes (SWNTs) have been locally synthesized on zeolite-covered silicon substrates by laser-heating chemical vapor deposition (CVD). We used laser irradiation as a heat source, Fe/Co nanoparticles supported on zeolite as catalysts, and ethanol vapor as a carbon source. We heated the zeolite catalysts using a Nd:YAG laser at 50 mW with a spot size of about 5mum diameter and synthesized SWNTs in a local area of about 20mum diameter at the irradiation point. We also synthesized SWNTs in a line by scanning the laser irradiation at 800mW at an average speed of 10mum/s. The synthesized SWNTs were characterized by scanning electron microscopy and Raman spectroscopy. To investigate the effect of heating SWNTs by the laser, we irradiated pure SWNTs synthesized by standard CVD in a vacuum furnace using the laser. Furthermore, we succeeded in bridging zeolite islands using SWNTs by laser-irradiating one side of the islands.
{"title":"Local Synthesis of Single-walled Carbon Nanotubes on Zeolite-covered Silicon Substrate by Laser-heating Chemical Vapor Depositon","authors":"Y. Jin, K. Kasuya, K. Nagato, H. Morii, T. Ooi, M. Nakao","doi":"10.1109/NEMS.2007.352059","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352059","url":null,"abstract":"Single-walled carbon nanotubes (SWNTs) have been locally synthesized on zeolite-covered silicon substrates by laser-heating chemical vapor deposition (CVD). We used laser irradiation as a heat source, Fe/Co nanoparticles supported on zeolite as catalysts, and ethanol vapor as a carbon source. We heated the zeolite catalysts using a Nd:YAG laser at 50 mW with a spot size of about 5mum diameter and synthesized SWNTs in a local area of about 20mum diameter at the irradiation point. We also synthesized SWNTs in a line by scanning the laser irradiation at 800mW at an average speed of 10mum/s. The synthesized SWNTs were characterized by scanning electron microscopy and Raman spectroscopy. To investigate the effect of heating SWNTs by the laser, we irradiated pure SWNTs synthesized by standard CVD in a vacuum furnace using the laser. Furthermore, we succeeded in bridging zeolite islands using SWNTs by laser-irradiating one side of the islands.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130252678","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352137
Juhee Hong, Jinseok Kim, Jeongeun Baek, M. Cha, Junghoon Lee, Sukho Park
This paper reports the migration of cells along the gradient of mechanical stiffness when the cells are cultured on a flexible substrate with variable rigidity. The thickness difference of PDMS layer was used to create a stiffness gradient between a stiff (7 mum) and a soft (2 mum) region. A fabrication process was developed to minimize the effect of other factors such as height difference and surface chemistry variation that can affect the pattern of cell migration. A cultured embryonic carcinoma cells on the flexible substrate coated with fibronectin, and observed that most of cells were accumulated on the stiffer region. Patterns in various shapes and sizes with stiffness difference were tested to investigate the migratory behavior of the cells. The results suggest that our approach provides a key technology to study the mechanism of cell migration by durotaxis.
{"title":"Cell Migration Driven by a Mechanical Stiffness Gradient","authors":"Juhee Hong, Jinseok Kim, Jeongeun Baek, M. Cha, Junghoon Lee, Sukho Park","doi":"10.1109/NEMS.2007.352137","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352137","url":null,"abstract":"This paper reports the migration of cells along the gradient of mechanical stiffness when the cells are cultured on a flexible substrate with variable rigidity. The thickness difference of PDMS layer was used to create a stiffness gradient between a stiff (7 mum) and a soft (2 mum) region. A fabrication process was developed to minimize the effect of other factors such as height difference and surface chemistry variation that can affect the pattern of cell migration. A cultured embryonic carcinoma cells on the flexible substrate coated with fibronectin, and observed that most of cells were accumulated on the stiffer region. Patterns in various shapes and sizes with stiffness difference were tested to investigate the migratory behavior of the cells. The results suggest that our approach provides a key technology to study the mechanism of cell migration by durotaxis.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"186 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116422221","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352185
M.C. Liu, D. Ho, Y. Tai
We present an integrated method to fabricate 3D microfluidic networks and fabricated the first on-chip cell culture device with an integrated combinatorial mixer. The combinatorial mixer is designed for screening the combinatorial effects of different compounds on cells. The monolithic fabrication method with parylene C as the basic structural material allows us to avoid wafer bonding and achieves precise alignment between microfluidic channels. As a proof-of-concept, we fabricated a device with a three-input combinatorial mixer and demonstrated that the mixer can produce all the possible combinations. Also, we demonstrated the ability to culture cells on-chip and performed a simple cell assay on-chip using trypan blue to stain dead cells.
{"title":"A Monolithically Fabricated Combinatorial Mixer for Microchip-Based High-Throughput Cell Culturing Assays","authors":"M.C. Liu, D. Ho, Y. Tai","doi":"10.1109/NEMS.2007.352185","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352185","url":null,"abstract":"We present an integrated method to fabricate 3D microfluidic networks and fabricated the first on-chip cell culture device with an integrated combinatorial mixer. The combinatorial mixer is designed for screening the combinatorial effects of different compounds on cells. The monolithic fabrication method with parylene C as the basic structural material allows us to avoid wafer bonding and achieves precise alignment between microfluidic channels. As a proof-of-concept, we fabricated a device with a three-input combinatorial mixer and demonstrated that the mixer can produce all the possible combinations. Also, we demonstrated the ability to culture cells on-chip and performed a simple cell assay on-chip using trypan blue to stain dead cells.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121677053","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352089
J. Cho, H. Yoon, K. Jung, Sangsik Yang, K. Koh, Soonil Lee
Using micromachining techniques, a miniature time-of-flight mass spectrometer (TOF-MS) was fabricated which consisted of ion-source and ion-separator plates. The dimension of the assembled device was 11 mm times 11 mm times1.1 mm. The key part of the ion source was a triode electron emitter with a planar carbon-nanoparticle (CNP) cathode. CNP was one of the best cathode materials to build triode electron emitters because of the smooth surface morphology of CNP films in addition to their excellent emission characteristics which allowed low turn-on gate voltage and stable operation. The operation of each plate was confirmed successfully through separate tests. In particular, ion generation was verified via electron bombardment for ambient air and acetone molecules.
{"title":"Micro Mass Spectrometer Using Triode Electron Emitters with a Planar Carbon-Nanoparticle Cathode as Ion Source","authors":"J. Cho, H. Yoon, K. Jung, Sangsik Yang, K. Koh, Soonil Lee","doi":"10.1109/NEMS.2007.352089","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352089","url":null,"abstract":"Using micromachining techniques, a miniature time-of-flight mass spectrometer (TOF-MS) was fabricated which consisted of ion-source and ion-separator plates. The dimension of the assembled device was 11 mm times 11 mm times1.1 mm. The key part of the ion source was a triode electron emitter with a planar carbon-nanoparticle (CNP) cathode. CNP was one of the best cathode materials to build triode electron emitters because of the smooth surface morphology of CNP films in addition to their excellent emission characteristics which allowed low turn-on gate voltage and stable operation. The operation of each plate was confirmed successfully through separate tests. In particular, ion generation was verified via electron bombardment for ambient air and acetone molecules.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122579033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352218
N. C. Swe, S. Suraprapapich, C. Wissawinthanon, S. Panyakeow
The splitting and shifting of eigen-energy levels of coupled binary quantum dots was theoretically studied. The amount of splitting as a function of applied electric field strength, in particular, was investigated. The eigen-energy of the system was calculated from the time-independent Schrodinger equation using a finite-difference method. It was found that a larger electric field leads to a larger amount of eigen-energy splitting. Since the degree of linear polarization is related to the amount of splitting of the eigen-energies, we can expect that the binary quantum dots should exhibit a stronger degree of linear polarization with increasing applied electric field.
{"title":"Effect of the electric field on the linear polarization property of binary quantum dots","authors":"N. C. Swe, S. Suraprapapich, C. Wissawinthanon, S. Panyakeow","doi":"10.1109/NEMS.2007.352218","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352218","url":null,"abstract":"The splitting and shifting of eigen-energy levels of coupled binary quantum dots was theoretically studied. The amount of splitting as a function of applied electric field strength, in particular, was investigated. The eigen-energy of the system was calculated from the time-independent Schrodinger equation using a finite-difference method. It was found that a larger electric field leads to a larger amount of eigen-energy splitting. Since the degree of linear polarization is related to the amount of splitting of the eigen-energies, we can expect that the binary quantum dots should exhibit a stronger degree of linear polarization with increasing applied electric field.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126331655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352138
Y. Gu, N. Miki
We present a novel microfilter used for solutes separation by diffusion. The microfilter is composed of two micro chambers made of PDMS and one layer of porous membrane formed by wet phase immersion method using PES (polyethersulfone). A theoretical equation for the description of the diffusion in the microfilter was derived and verified to be capable of predicting concentration distributions. Filtering capacity for molecules with various molecule sizes of this microfilter was evaluated using solution samples of sodium chloride (NaCl) and FITC (Fluorescein Isothiocyanate) Dextrans (MW 4k, 20k, 70k and 250k). This microfilter can be applied to artificial kidneys which can be implanted in human bodies.
{"title":"Microfilter Fabricated with PDMS and PES Membrane Applicable for Implantable Artificial Kidney","authors":"Y. Gu, N. Miki","doi":"10.1109/NEMS.2007.352138","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352138","url":null,"abstract":"We present a novel microfilter used for solutes separation by diffusion. The microfilter is composed of two micro chambers made of PDMS and one layer of porous membrane formed by wet phase immersion method using PES (polyethersulfone). A theoretical equation for the description of the diffusion in the microfilter was derived and verified to be capable of predicting concentration distributions. Filtering capacity for molecules with various molecule sizes of this microfilter was evaluated using solution samples of sodium chloride (NaCl) and FITC (Fluorescein Isothiocyanate) Dextrans (MW 4k, 20k, 70k and 250k). This microfilter can be applied to artificial kidneys which can be implanted in human bodies.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126907403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352118
Bingqiao Liu, Zewen Liu, Fan Zhao, Litian Liu, Zhijian Li
We presented a novel idea for the fabrication of nanomechanical structures using a combination of traditional lithography technology and gas isotropic etching. The process starts from a 4" p-type silicon wafer, then two SixNy and SiO2 layers are alternatively deposited. After the patterning using traditional lithography with 2-mum resolution, SixNy pattern is obtained which is then used as the hard mask for gas isotropic etching, and a narrowed nanoscale SiO2 pattern is realized. The obtained structures can be further used to form nanochannel or nanoresonant devices. The SEM images show a nano-channel with triangle section and a suspended nanoscale SixNy mechanical structure. The minimum structure size is in the range of 100 nm.
{"title":"Fabrication of SixNy Nanomechanical Structures Using Traditional Lithography and Gas Isotropic Etching","authors":"Bingqiao Liu, Zewen Liu, Fan Zhao, Litian Liu, Zhijian Li","doi":"10.1109/NEMS.2007.352118","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352118","url":null,"abstract":"We presented a novel idea for the fabrication of nanomechanical structures using a combination of traditional lithography technology and gas isotropic etching. The process starts from a 4\" p-type silicon wafer, then two S<sub>ix</sub>N<sub>y</sub> and SiO<sub>2</sub> layers are alternatively deposited. After the patterning using traditional lithography with 2-mum resolution, S<sub>ix</sub>N<sub>y</sub> pattern is obtained which is then used as the hard mask for gas isotropic etching, and a narrowed nanoscale SiO<sub>2</sub> pattern is realized. The obtained structures can be further used to form nanochannel or nanoresonant devices. The SEM images show a nano-channel with triangle section and a suspended nanoscale S<sub>ix</sub>N<sub>y</sub> mechanical structure. The minimum structure size is in the range of 100 nm.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126090199","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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