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2008 58th Electronic Components and Technology Conference最新文献

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Development of micro fuel cells with organic substrates and electronics manufacturing technologies 有机基板微型燃料电池及电子制造技术的发展
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550147
R. Hahn, S. Wagner, S. Krumbholz, H. Reichl
A PEM micro fuel cell system is described which is based on self-breathing PEM micro fuel cells in the power range between 1 mW and 1 W. Micro patterned substrates were used as micro flow fields and replacement of gas diffusion layers (GDL). An analytical model was developed to estimate the losses in such structures and optimize channel design and current collector metallization. A detailed comparison was made between two different designs: pin structures and channel structures. A variety of micro fuel cells with variations of design parameters were tested to verify the model. As a result, micro fuel cell fabrication can be optimized in terms of cell performance and production costs. A maximum power density of 160 mW/cm2 has been achieved with the GDL-less design and a current collector pitch of 400 mum with commercial membrane electrode assemblies.
介绍了一种功率在1mw ~ 1w的自呼吸PEM微型燃料电池的PEM微型燃料电池系统。采用微图案化基底作为微流场,替代气体扩散层。建立了一个分析模型来估计这种结构中的损耗,并优化通道设计和集流金属化。对两种不同的设计进行了详细的比较:销结构和通道结构。对不同设计参数的微型燃料电池进行了试验验证。因此,微型燃料电池的制造可以在电池性能和生产成本方面进行优化。采用无gdl设计,集电极间距为400 mum,采用商用膜电极组件,最大功率密度达到160 mW/cm2。
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引用次数: 3
Time and frequency domain memory channel characterization and correlation methodology 时域和频域记忆信道表征和相关方法
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550229
E. Mintarno, S. Ji
First, this paper discusses a robust and efficient de- embedding technique that can be used for TDR-PNA- simulation correlation in time or frequency domain. Employing the de-embedding technique, TDR-PNA was shown to correlate very well with 2 mV resolution in time- domain, when TDR repeatability is 2 mV. Next, a systematic analysis of memory channel TDR-simulation correlation was detailed. Time domain correlation served as an efficient and straightforward way of capturing impedance discontinuities and crosstalk level. Finally, some design, modeling, and measurement guidelines for platform memory interconnect development were recommended.
首先,本文讨论了一种鲁棒和高效的去嵌入技术,该技术可用于时域和频域的TDR-PNA仿真相关。采用去嵌入技术,当TDR重复性为2 mV时,TDR- pna在时域上与2 mV分辨率有很好的相关性。其次,系统分析了存储器通道tdr -仿真的相关性。时域相关是捕获阻抗不连续和串扰电平的一种有效而直接的方法。最后,对平台存储器互连开发提出了一些设计、建模和测量指南。
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引用次数: 0
Fast broadband macromodeling technique of sampled time/frequency data using z-domain vector-fitting method 基于z域矢量拟合的采样时间/频率数据快速宽带宏观建模技术
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550132
Y. Mekonnen, J. Schutt-Ainé
The vector-fitting algorithm has been used as the main macromodeling tool for approximating frequency domain responses of complex interconnects and electrical packages (Gustavsen, 1999). In this paper, a new methodology is proposed to fit transfer functions of frequency response data obtained from numerical electromagnetic simulation or measured frequency-domain or time-domain response data. This new method, z-domain vector-fitting (ZDVF), is a formulation of vector- fitting method in the z domain; it has an advantage of faster convergence and better numerical stability compared to the s-domain vector-fitting method(VF). The fast convergence of the method reduces the overall macromodel generation time. The accuracy, numerical stability and convergence speed of VF and ZDVF are compared. Examples are provided to demonstrate the advantage of the ZDVF.
矢量拟合算法已被用作主要的宏观建模工具,用于逼近复杂互连和电气封装的频域响应(Gustavsen, 1999)。本文提出了一种新的方法来拟合从数值电磁仿真或测量频域或时域响应数据中获得的频响数据的传递函数。z域矢量拟合(z-domain vector-fitting, ZDVF)是z域矢量拟合方法的一种表述;与s域向量拟合方法(VF)相比,具有收敛速度快、数值稳定性好等优点。该方法的快速收敛性减少了总体宏模型生成时间。比较了VF和ZDVF的精度、数值稳定性和收敛速度。举例说明了ZDVF的优点。
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引用次数: 6
Advanced viscoelastic material model for predicting warpage of a QFN panel 预测QFN板翘曲的先进粘弹性材料模型
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550196
J. de Vreugd, K. Jansen, A. Xiao, L. Ernst, C. Bohm, A. Kessler, H. Preu, M. Stecher
Warpage is a critical issue for a QFN panel molding process. Much work is done in the past to predict the warpage of a package during cooling down from molding temperature. However, until now, warpage could not always be predicted well, even if the viscoelastic behavior of the molding compound is taken into account. It was for example observed that the cooling velocity affected the warpage after cooling down. Because of this reason, the mechanical behavior of the molding compound was investigated in more detail. In this research, the mechanical properties of the molding compound are determined. It turned out that the properties are highly dependent on time and temperature. A complete viscoelastic model of the model compound is achieved by combining DMA and dilatometric test results. The model is implemented in the finite element software ABAQUS. In this study, our advanced model is compared with elastic calculations which are normally done. A validation experiment is performed in which simulation results are compared with experimental warpage data of a double layered beam, consisting out of a layer of molding compound and a layer of silicon. This beam is cooled down from a temperature above Tg to room temperature with different cooling rates. In the meantime warpage is measured and compared to simulation results. Finally, the advanced material model is used for calculations on a QFN-panel.
翘曲是QFN面板成型过程中的一个关键问题。在过去做了很多工作来预测从成型温度冷却期间包装的翘曲。然而,到目前为止,即使考虑到成型化合物的粘弹性行为,翘曲也不能总是很好地预测。例如,观察到冷却速度对冷却后翘曲的影响。基于此,本文对复合材料的力学性能进行了较为详细的研究。在本研究中,确定了成型化合物的力学性能。结果表明,这些性质高度依赖于时间和温度。结合DMA和膨胀试验结果,得到了模型化合物的完整粘弹性模型。该模型在有限元软件ABAQUS中实现。在本研究中,我们的先进模型与通常所做的弹性计算进行了比较。进行了验证实验,并将模拟结果与由一层成型化合物和一层硅组成的双层梁的实验翘曲数据进行了比较。该光束以不同的冷却速率从高于Tg的温度冷却到室温。同时对翘曲量进行了测量,并与仿真结果进行了比较。最后,利用先进的材料模型对qfn面板进行了计算。
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引用次数: 24
Packaging of electronic modules through completely dry process 电子模块的封装完全通过干燥工艺
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550090
K. Maekawa, M. Mita, K. Yamasaki, T. Niizeki, Y. Matsuba, N. Terada, H. Saito
In order to establish technology of packaging electronic modules, we investigated conditions for laser sintering of Ag nanoparticles, and evaluated characteristics of the sintered film. First, we plotted minute patterns on a copper substrate by ink-jet printing, and then employed an NdYAG laser to metalize the nanopaste in a short time. The Ag nanoparticles (5 nm in average diameter) dispersed in organic solvents were solidified to form coarse agglomerates of about 0.05-0.5 mum with a pulsed laser, or about 0.05 mum by CW mode. We carried out a bend-peel test to find that no separation occurred at the interface between the sintered Ag film and the substrate. Adhesive strength of the laser-sintered pattern on the Cu substrate is higher or equal to than that obtained by furnace sintering. An SIM observation of FIBed cross-sections revealed that the laser-sintered film is as thin as less than 0.5 mum, and has a porous structure. As for wiring a polyimide substrate, the use of water-repellant is indispensable for ink-jet printing. Three-step laser sintering enables us to make Ag wires on the polyimide film at a low laser power, which leads to less thermal damage to the substrate.
为了建立电子组件封装技术,研究了激光烧结银纳米粒子的条件,并对烧结膜的特性进行了评价。首先,我们通过喷墨打印在铜基板上绘制了微小的图案,然后使用NdYAG激光在短时间内将纳米颗粒金属化。将分散在有机溶剂中的银纳米粒子(平均直径为5nm)用脉冲激光固化成0.05 ~ 0.5 μ m的粗团聚体,用连续波固化成0.05 μ m的粗团聚体。我们进行了弯曲剥离试验,发现在烧结银膜和衬底之间的界面上没有发生分离。激光烧结图案在铜基体上的粘接强度高于或等于炉烧结的粘接强度。光纤截面的SIM观察表明,激光烧结膜厚度小于0.5 μ m,具有多孔结构。至于在聚酰亚胺基板上布线,喷墨印刷时使用防水剂是必不可少的。三步激光烧结使我们能够以较低的激光功率在聚酰亚胺薄膜上制作银丝,从而减少了对衬底的热损伤。
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引用次数: 13
Through silicon via copper electrodeposition for 3D integration 通过硅经铜电沉积进行三维集成
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550031
R. Beica, C. Sharbono, T. Ritzdorf
Increasing demands for electronic devices with superior performance and functionality while reducing their sizes and weight has driven the semiconductor industry to develop more advanced packaging technologies. Among all different types of packaging technologies proposed, three-dimensional (3D) vertical integration using through silicon via (TSV) copper interconnect is currently considered one of the most advanced technologies in the semiconductor industry. This paper describes the different materials and processes applied for TSV, with focus on copper electrodeposition, the advantages as well as difficulties associated with this technology and approaches taken to overcome them. The effect of wafer design on process performance and throughput, including necessary process optimizations that are required for achieving void-free via filling while reducing the processing time, will be discussed.
在减小尺寸和重量的同时,对具有卓越性能和功能的电子器件的需求不断增加,这推动了半导体行业开发更先进的封装技术。在提出的所有不同类型的封装技术中,使用透硅通孔(TSV)铜互连的三维(3D)垂直集成技术目前被认为是半导体行业最先进的技术之一。本文介绍了用于TSV的不同材料和工艺,重点介绍了铜电沉积技术的优点和困难,以及克服这些问题的方法。晶圆设计对工艺性能和吞吐量的影响,包括必要的工艺优化,通过填充实现无空洞,同时减少加工时间,将被讨论。
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引用次数: 115
Prediction of drift in foil resistors 薄膜电阻器漂移的预测
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550258
J. Szwarc, R. Golombick, Y. Hernik
The reliable functioning of electronic devices which incorporate high precision resistors requires maintaining the specified precision over the full life of the device. As the precision and stability of foil resistors is expressed in parts per million, a precise prediction method of resistor's behavior under different loads and time periods is required. Based on test data gathered over 4 decades of production and testing, an equation based on Arrhenius Rate Law is derived for calculation of the standard deviation of the Gaussian distribution of resistance drifts. The Mean value of the drifts' distribution is evaluated and allows the calculation of the maximum drift for any requested confidence level.
包含高精度电阻的电子设备的可靠功能要求在设备的整个使用寿命内保持规定的精度。由于箔式电阻器的精度和稳定性是以百万分之一来表示的,因此需要一种精确的方法来预测电阻器在不同负载和时间段下的性能。根据40多年的生产和试验数据,导出了基于Arrhenius速率定律的阻力漂移高斯分布标准差计算公式。对漂移分布的平均值进行评估,并允许计算任何要求的置信水平的最大漂移。
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引用次数: 1
Effect of thermal interface materials on manufacturing and reliability of Flip Chip PBGA and SiP packages 热界面材料对倒装PBGA和SiP封装制造和可靠性的影响
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550094
Li Li, M. Nagar, J. Xue
Power and power density increase in microelectronics is a major challenge for packaging high performance ASIC and microprocessor devices. The thermal interface material (TIM) used between the chip and the heat spreader of the Flip Chip Plastic Ball Grid Array (FC-PBGA) package plays a very important role in the package thermal performance. Not only does it affect package thermal performance, it can also affect assembly yield and package reliability during manufacturing and normal operation. In this study attention has been focused on improving thermal performance, manufacturing yield and reliability of the flip-chip PBGA single chip packages and the System in Package (SiP) modules. Computational Fluid Dynamics (CFD) software was used to investigate the effect of TIM on FC-PBGA thermal performance. The effect of thermal interface material was then studied for controlling the interaction between the heat spreader and the FC-PBGA SiP module to reduce module warpage and to improve module assembly yield. Qualification of TIM for FC-PBGA at both the component level and the system level was discussed. Component level testing data showed that the thermal characteristics and mechanical integrity of the TIM selected can be evaluated by using the same stress conditions used in package reliability qualification. Finally, system level non- operational humidity test results showed that good mechanical reliability at the thermal interface of the FC-PBGA can be achieved by optimizing the heat spreader attaching process.
微电子器件中功率和功率密度的增加是封装高性能ASIC和微处理器器件的主要挑战。倒装芯片塑料球栅阵列(FC-PBGA)封装中芯片与散热器之间的热界面材料(TIM)对封装的热性能起着非常重要的作用。它不仅会影响封装的热性能,还会影响制造和正常运行期间的组装良率和封装可靠性。本文主要研究如何提高倒装PBGA单芯片封装和系统级封装(SiP)模块的热性能、制造良率和可靠性。采用计算流体动力学(CFD)软件研究了TIM对FC-PBGA热性能的影响。研究了热界面材料对控制散热器与FC-PBGA SiP模块相互作用的影响,以减少模块翘曲,提高组件成品率。从元件级和系统级两个层面对FC-PBGA的TIM进行了定性分析。部件级测试数据表明,采用与封装可靠性鉴定相同的应力条件,可以评估所选TIM的热特性和机械完整性。最后,系统级非操作湿度测试结果表明,通过优化散热器的贴附工艺,FC-PBGA热界面处具有良好的机械可靠性。
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引用次数: 12
Reliability of flip chip packages with high thermal conductivity heat spreader attach 高导热散热器贴装倒装芯片封装的可靠性
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550260
Yuquan Li, R.W. Johnson, P. Thompson, T. Hooghan, J. Libres
Copper heat spreaders are often used in flip chip in package construction. While providing high thermal conductivity, Cu has a significantly higher coefficient of thermal expansion than Si. In this work, two heat spreader attachment materials, indium for high power and polymeric adhesive for medium power applications, have been investigated. For In solder based attach, the Cu heat spreader was metallized with Ni/Au. Two thin film metallizations, Ti/Ni/Au and Ti/Au, have been studied for the Si backside. A nearly void free heat spreader attach has been achieved with vacuum soldering. For Ti/Ni/Au backside metallized Si die, there was no significant shear strength change after 1000 hours aging at 120degC and there was no significant shear or pull strength variation after five lead free re flow cycles. The shear and pull failure mode was within the indium layer. For Ti/Au die backside metallization, the initial die pull strength and failure mode were a function of Au thickness. With 3000 A of Au, there is no significant variation for shear and pull strength after 600 hours aging at 120degC or after five lead free solder reflow cycles. Failure was in the indium layer. For both types of die metallization, 24 mm times 24 mm Cu heat spreaders assembled on 22 mm times 22 mm Si die, exhibited no delamination after two lead free solder reflow cycles followed by 500 air to air thermal shock cycles (-40degC to 85degC). At 1000 cycles, slight delamination was found at the edges of the assembly for both die metallurgies. For adhesive based flat heat spreader attachment, a thermally conductive adhesive was used as the thermal interface and a non-thermally conductive adhesive was applied at the substrate corners to provide mechanical reinforcement of the heat spreader. After pre-conditioning then aging at 100degC for 500 hours followed by 500 air-to-air thermal shock cycles (0degC to 100degC), no delamination was observed and there was no significant degradation in pull strength.
铜散热器常用于倒装芯片的封装结构中。在提供高导热系数的同时,Cu的热膨胀系数明显高于Si。本文主要研究了两种导热材料:用于大功率应用的铟和用于中功率应用的聚合物胶粘剂。对于In焊料,用Ni/Au对Cu散热器进行金属化处理。研究了Si背面的两种金属化薄膜,Ti/Ni/Au和Ti/Au。通过真空焊接实现了几乎无空隙的散热片连接。对于Ti/Ni/Au背面金属化Si模,在120℃时效1000小时后,剪切强度无明显变化,在5次无铅再流循环后,剪切强度和拉拔强度无明显变化。剪拉破坏模式主要发生在铟层内部。对于Ti/Au模背面金属化,初始模拉强度和失效模式是Au厚度的函数。当Au为3000 A时,在120℃下时效600小时或经过5次无铅焊料回流循环后,剪切和拉强度没有明显变化。失败是在铟层。对于两种类型的模具金属化,24mm × 24mm的Cu散热器组装在22mm × 22mm的Si模具上,经过两次无铅焊料回流循环和500次空气对空气热冲击循环(-40摄氏度到85摄氏度)后,没有出现分层。在1000次循环中,在两种模具冶金的装配边缘发现了轻微的分层。对于基于胶粘剂的平板式散热器附件,采用导热胶粘剂作为热界面,在基材角落处应用非导热胶粘剂对散热器进行机械加固。经过预处理,然后在100℃下老化500小时,然后进行500次空对空热冲击循环(0℃至100℃),没有观察到分层现象,拉强度也没有明显下降。
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引用次数: 7
Impact of wedge wire bonding and thermal mechanical stress on reliability of BPSG/poly layer of a silicon die 楔丝键合和热机械应力对硅模BPSG/多晶硅层可靠性的影响
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550211
Y. Liu, S. Irving, T. Luk, M. Rioux, Qiuxiao Qian
In this paper, the impact from both mechanical and thermal effects, with different parameters on BPSG of a power package is studied. The impact parameters include wedge wire bonding force, clamping force from the spring clip, wave soldering process and power dissipation from the die. An advanced 3D FEA model framework with a global model and local sub-model is developed. Major modeling work includes two areas: One is to evaluate the impact of the wire bonding force during the wedge bonding assembly process and the clamping force from the spring clip. Another area is to study the thermal stress due to thermal expansion mismatch which includes the wave soldering process and power dissipation. Both the global and sub-model simulation results have shown that the stress distribution in BPSG due to the wire bonding process, spring clip clamping force, wave soldering and power dissipation. The modeling has disclosed that the impact of thermal stress is greater than that of wedge wire bonding process and spring clip clamping force.
本文研究了在不同参数下,机械效应和热效应对动力封装BPSG的影响。冲击参数包括楔形丝的结合力、弹簧夹的夹紧力、波峰焊工艺和模具的功耗。提出了一种具有全局模型和局部子模型的先进三维有限元模型框架。主要的建模工作包括两个方面:一是评估楔焊装配过程中金属丝粘接力和弹簧夹紧力的影响。另一个领域是研究由热膨胀失配引起的热应力,包括波峰焊工艺和功耗。整体和子模型仿真结果表明,BPSG内部的应力分布受焊线工艺、弹簧夹紧力、波峰焊和功耗的影响。模拟结果表明,热应力的影响大于楔丝键合过程和弹簧夹紧力的影响。
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引用次数: 7
期刊
2008 58th Electronic Components and Technology Conference
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