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2008 58th Electronic Components and Technology Conference最新文献

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A numerical analysis of crack growth and morphology evolution in chip-to-packages nano-interconnections 芯片-封装纳米互连中裂纹扩展和形貌演化的数值分析
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550194
S. Koh, R. Tummala, A. Saxena, P. Selvam
The International Technology Roadmap for semiconductors (ITRS) has predicted that by the year 2007, integrated chip (IC) packages will contain feature sizes of 65 nm and an I/O pitch for the die-to-package interconnects approaching 80 mum. These will reduce even further in the next five years. The current approach of using surface mount technology and flip chip are mainly solder based and the lead and lead-free solder interconnects are known to fail mechanically as the pitch is reduced from 200 mum down to lower levels due to the thermal mismatch between the substrate and the chip. Although compliant interconnection could solve some of the mechanical issues, it is done at the expense of the electric performance. The PRC at Georgia Institute of Technology is proposing re-workable copper based nano-interconnections as a new interconnection paradigm as the next step beyond lead-free solders for future low-cost, high performance and high reliability packages. However, very limited data is published about the fatigue life of nano-crystalline materials and specifically those of nano-crystalline copper. It is important to predict crack growth as it can aid the understanding of the useful life of the IC-packages' interconnections. Multiple mechanisms may be responsible for crack initiation, but eventually most dominant fatigue cracks form a surface crack, which often have a semi-elliptical shape. Hence, the fatigue crack growth life predictions in this study are based on the assumption of elliptical and semi-elliptical cracks being initiated in the nano-interconnections. In this study, numerical analysis using the J-integral stress intensity parameter, in conjunction with experimental fatigue crack growth data, has been employed to study semi-elliptical crack growth and morphology evolution in nano-interconnection subject to uniaxial fatigue loading in linear-elastic conditions. The results indicate that a J-integral finite element analysis, using the loading portion of the fatigue cycle, in conjunction with known rates of fatigue crack growth can approximate surface crack morphology evolution. This study also predicts that the long crack growth is a relatively small portion of the total fatigue life of the material for the experimental LCF conditions. Hence, initiation of the cracks in the interconnection is the main criterion used to predict its fatigue life.
国际半导体技术路线图(ITRS)预测,到2007年,集成芯片(IC)封装的特征尺寸将达到65纳米,用于芯片到封装互连的I/O间距将接近80微米。在未来五年内,这一数字将进一步减少。目前使用表面贴装技术和倒装芯片的方法主要是基于焊料的,并且由于基板和芯片之间的热不匹配,当间距从200 μ m降低到更低的水平时,已知铅和无铅焊料互连在机械上失败。尽管兼容互连可以解决一些机械问题,但它是以牺牲电气性能为代价的。乔治亚理工学院的PRC正在提出可重新工作的铜基纳米互连,作为一种新的互连范例,作为未来低成本,高性能和高可靠性封装的下一步无铅焊料。然而,关于纳米晶材料,特别是纳米晶铜的疲劳寿命的数据非常有限。预测裂纹扩展是很重要的,因为它可以帮助理解ic封装互连的使用寿命。裂纹萌生可能有多种机制,但最终大多数主要疲劳裂纹形成表面裂纹,通常具有半椭圆形状。因此,本研究的疲劳裂纹扩展寿命预测是基于在纳米连接点中产生椭圆和半椭圆裂纹的假设。本研究采用j积分应力强度参数,结合实验疲劳裂纹扩展数据,对线弹性条件下单轴疲劳载荷作用下纳米互连材料的半椭圆裂纹扩展和形态演化进行了数值分析。结果表明,结合已知的疲劳裂纹扩展速率,利用疲劳循环加载部分的j积分有限元分析可以近似地描述表面裂纹的形态演变。该研究还预测,在实验LCF条件下,长裂纹扩展在材料总疲劳寿命中所占的比例相对较小。因此,连接中裂纹的萌生是预测其疲劳寿命的主要依据。
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引用次数: 2
Mechanical shock robustness of different WLCSP types 不同类型WLCSP的机械冲击稳健性
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550252
P. Nummila, M. Johansson, S. Puro
WLCSP, real wafer size package, usage has grown heavily during last years and volume is expected still to grow a lot. Main drivers for WLCSP usage are size and thickness reduction in portable devices and in some applications also price reduction by simplifying packaging structure. The main factor affecting these is reduction of component IO pitch. Growing usage volume has also increased the amount of WLCSP manufacturers, giving large variation of different package structures to the markets. As a consequence field of reliability is large, since different structures are behaving very differently especially under mechanical shock, which is considered to be most critical behavior of WLCSP packages in portable devices. However thermo-mechanical reliability should not be compromised either. Today there are many studies showing comparison of reliability test results between some factors, like dimensions. However from WLCSP end-user point of view whole system is more complex; there are several factors effecting to the overall mechanical and thermo-mechanical robustness of WLCSP packages, especially metallurgical factors play very remarkable role, including different underbump material and solder ball combinations. From WLCSP user point of view it is important to understand the variety of structures in the field and the complexity of factors effecting reliability in the area. Aim of the study is to increase knowledge of complexity of this area and factors effecting reliability of various WLCSP structures. As an introduction, data from last years WLCSP volumes in Nokia portable devices will be shown, together with an estimate of further usage volume. Overview of most common WLCSP structures will be presented, to give an overview of variety of different structures in the field. Reliability test results of mechanical shock will be presented and different package types and bump pitches will be compared. Also "weak links" between different package types will be compared, in terms of failure analysis results. As a conclusion there will be discussion of pros and cons of different package types, there is also not only one correct type to be used but several possibly good ones, defined also by electrical design.
WLCSP,实际晶圆尺寸封装,使用量在过去几年中大幅增长,预计数量仍将大幅增长。WLCSP使用的主要驱动因素是便携设备的尺寸和厚度的减小,以及在某些应用中通过简化包装结构来降低价格。影响这些的主要因素是元件IO节距的减小。不断增长的使用量也增加了WLCSP制造商的数量,为市场提供了不同包装结构的巨大变化。因此,可靠性的范围很大,因为不同的结构表现非常不同,特别是在机械冲击下,这被认为是便携式设备中WLCSP封装最关键的行为。然而,热机械可靠性也不应受到损害。今天,有许多研究显示了一些因素(如维度)之间的可靠性测试结果的比较。然而,从WLCSP终端用户的角度来看,整个系统更为复杂;影响WLCSP封装整体机械和热机械鲁棒性的因素有很多,其中冶金因素的影响尤为显著,包括不同的凹凸下材料和焊料球组合。从WLCSP用户的角度来看,了解现场结构的多样性和影响该地区可靠性因素的复杂性是很重要的。研究的目的是增加对这一领域的复杂性和影响各种WLCSP结构可靠性的因素的认识。作为介绍,数据从去年WLCSP在诺基亚便携式设备的数量将显示,连同进一步的使用量估计。将介绍最常见的WLCSP结构的概述,以概述该领域的各种不同结构。将展示机械冲击可靠性试验结果,并对不同包装类型和碰撞间距进行比较。在失效分析结果方面,还将比较不同封装类型之间的“薄弱环节”。作为结论,将讨论不同封装类型的优点和缺点,也不仅有一种正确的类型可以使用,而且有几种可能的好类型,也由电气设计定义。
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引用次数: 9
Size effect on electromigration reliability of pb-free flip chip solder bump 尺寸对无铅倒装片凸点电迁移可靠性的影响
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550263
Jang-Hee Lee, Gi-Tae Lim, Young-Bae Park, Seungtaek Yang, M. Suh, Q. Chung, Kwang-yoo Byun
To understand for size effect on electromigration behavior in flip chip Pb-free solder bump, electromigration tests were performed with change of pad open size and solder bump height at 140degC, 4.6times104 A/cm2. Electromigration lifetime increases with pad open size and bump height decreasing. In pad open size change, electromigration lifetime increase with pad open size increasing because applied current decrease with pad open size decreasing. In bump height change, electromigration resistance increase with bump height decreasing due to thermal gradient induced thermomigration effect decreasing. It seems to that electromigration resistance increase with size of solder bump decreasing.
为了了解尺寸对倒装芯片无铅凸点电迁移行为的影响,在140℃、4.6次104 A/cm2下,通过改变焊盘开孔尺寸和凸点高度进行了电迁移试验。电迁移寿命随着垫块开口尺寸和凸块高度的减小而增大。在衬垫开度变化时,由于外加电流随衬垫开度减小而减小,电迁移寿命随衬垫开度增大而增大。在凹凸高度变化时,由于热梯度诱导的热迁移效应减弱,电迁移电阻随凹凸高度的减小而增大。电迁移电阻随凸点尺寸的减小而增大。
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引用次数: 6
Real-time protein detection using ZnO nanowire/thin film bio-sensor integrated with microfluidic system 结合微流控系统的ZnO纳米线/薄膜生物传感器实时蛋白质检测
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550146
Jin Liu, J. Goud, P. Raj, M. Iyer, Z. Wang, R. Tummala
A nanoscale semiconducting ZnO based biosensor with integrated microfluidics is designed, fabricated and tested to demonstrate the detection of streptavidin, a commonly used protein. Amperometric (I-t) measurement is utilized to detect the change of conductivity over time. By comparing with the control experiment, the specific binding event between biotin and streptavidin is detected. The data indicates a conductivity change by more than 20% after the protein hybridization. The second part of the papers presents a ZnO thin film based biosensor which is integated with a microfluidic system. Same experiment protocols are carried and similar change in I-t characteristics is observed. This is the first demonstration of real time biosensing with ZnO nanowires and thin films that are integrated with microfluidic systems. This can be further extended to fabricate bio-sensors which can potentially detect any protein in real time. Amperometric sensing results in a label-free detection system as it detects the protein hybridization events electrically. when integrated on the system-on-package (SOP) platform, this technology can lead to portable, reliable and cost effective biosensors with applications in many areas.
设计、制作并测试了一种集成微流体的纳米级半导体ZnO生物传感器,用于检测链霉亲和素,这是一种常用的蛋白质。安培(I-t)测量用于检测电导率随时间的变化。通过与对照实验比较,检测生物素与链霉亲和素的特异性结合事件。数据表明,蛋白质杂交后电导率变化超过20%。第二部分介绍了一种结合微流控系统的ZnO薄膜生物传感器。采用相同的实验方案,观察到相似的I-t特性变化。这是将ZnO纳米线和薄膜与微流体系统集成在一起的实时生物传感的首次演示。这可以进一步扩展到制造可以实时检测任何蛋白质的生物传感器。安培传感的结果是一个无标签的检测系统,因为它检测蛋白质杂交事件电。当集成在系统级封装(SOP)平台上时,该技术可以产生便携式,可靠且具有成本效益的生物传感器,可应用于许多领域。
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引用次数: 14
Finite element based three dimensional crack propagation simulation on interfaces in electronic packages 基于有限元的电子封装界面三维裂纹扩展模拟
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550191
U. Ozkan, H. F. Nied
Interface delamination phenomenon has been a great concern for semiconductor package reliability. In order to better understand the package failure mechanisms, crack initiation and propagation behavior of interface flaws have to be investigated in detail. In this paper, three dimensional interface crack propagation is examined using the enriched finite element method. A fatigue crack growth simulation technique, which has been widely studied in the literature to predict steady state crack growth behavior after crack initiation in homogeneous materials, is extended to three dimensional interface cracks. The method described uses a modified version of the classical fatigue crack growth rate "law" developed by Paris and Erdogan to simulate stable crack growth under cyclic loading conditions, with the crack constrained to the plane of the interface. The crack driving force, which is chosen as cyclic strain energy release rate, is calculated using the enriched finite element method. As a practical example in semiconductor package reliability analysis, the method is used to simulate the propagation of a three-dimensional interface crack on a silicon/epoxy interface under various loading conditions. Plots of advancement of the crack front and the changes in total strain energy release rates as the crack shape evolves during propagation are also given. Lastly, crack propagation simulation is demonstrated for a generic package model using a submodeling technique.
接口分层现象一直是影响半导体封装可靠性的重要问题。为了更好地理解封装破坏机制,必须对界面缺陷的裂纹萌生和扩展行为进行详细的研究。本文采用丰富有限元法对三维界面裂纹扩展进行了研究。疲劳裂纹扩展模拟技术已经在文献中得到了广泛的研究,用于预测均匀材料裂纹萌生后的稳态裂纹扩展行为,该技术将扩展到三维界面裂纹。所描述的方法使用了巴黎和埃尔多安提出的经典疲劳裂纹扩展速率“定律”的修正版本来模拟循环加载条件下裂纹的稳定扩展,裂纹约束在界面平面上。以循环应变能释放率作为裂纹驱动力,采用丰富有限元法计算裂纹驱动力。以半导体封装可靠性分析为例,用该方法模拟了硅/环氧树脂界面三维裂纹在不同载荷条件下的扩展过程。给出了裂纹前缘的推进曲线和裂纹扩展过程中总应变能释放率随裂纹形状的变化曲线。最后,利用子建模技术对通用包模型进行了裂纹扩展模拟。
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引用次数: 7
Directly synthesizing CNT-TIM on aluminum alloy heat sink for HB-LED thermal management 直接合成CNT-TIM铝合金散热器用于HB-LED热管理
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550200
Zhang Kai, M. Yuen, D. Xiao, Y. Fu, P. Chan
Vertically aligned carbon nanotube (VACNT) arrays were synthesized directly on aluminum alloy substrates by thermal chemical vapor deposition (CVD). Iron nitrate (Fe(NO3)3ldr9H2O) was used as the catalyst. Parameters influencing CNT synthesis were studied and optimized. Several surface treatment methods were proposed to improve the quality of CNTs synthesized on aluminum alloy substrates. The grown CNT arrays were used as thermal interface material (TIM) while the aluminum alloy substrate used as the heat sink in high brightness LED packages. The measured thermal resistance of the grown CNT-TIM was 38 mm2-K/W. The output light power testing demonstrated CNT-TIM is an attractive thermal management solution for HB- LED packages.
采用热化学气相沉积(CVD)技术在铝合金衬底上直接合成了垂直排列的碳纳米管(VACNT)阵列。以硝酸铁(Fe(NO3)3ldr9H2O)为催化剂。对影响碳纳米管合成的参数进行了研究和优化。提出了几种表面处理方法,以提高在铝合金基体上合成的碳纳米管的质量。生长的碳纳米管阵列用作热界面材料(TIM),而铝合金衬底用作高亮度LED封装的散热器。生长的CNT-TIM的热阻为38 mm2-K/W。输出光功率测试表明,CNT-TIM是HB- LED封装的一种有吸引力的热管理解决方案。
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引用次数: 14
System level approach for assessing and mitigating differential skew for 10+ Gbps SerDes applications 用于评估和减轻10+ Gbps SerDes应用的差分倾斜的系统级方法
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550021
M. Degerstrom, B. Buhrow, B. McCoy, P. Zabinski, B. Gilbert, E. Daniel
Weave-induced skew on printed wiring boards (PWB) for 10+ Gbps SerDes data rates can be very significant. In this paper, we not only investigate weave-induced skew but also look at other sources of skew. We show the weave skew results taken from measurements of three different test boards. Results from a fourth board are presented to examine PWB differential via skew. Measurements from a fifth board are analyzed to determine total channel skew. We propose a budget such that a certain amount of skew can be tolerated with a small increase in channel insertion loss. We then present a case study to project overall performance on PWB yield. We observe a number of anomalies with our test results and suggest additional studies to guard against unpredicted high skew.
在10+ Gbps SerDes数据速率下,印刷线路板(PWB)上的编织引起的倾斜可能非常显著。在本文中,我们不仅研究了编织引起的歪斜,而且还研究了歪斜的其他来源。我们展示了从三个不同测试板的测量中获得的编织斜度结果。从第四板的结果提出了检查压差通过斜。从第五板的测量结果进行分析,以确定总通道倾斜。我们提出了一种预算,使一定的偏斜可以容忍,而信道插入损耗的增加很小。然后,我们提出了一个案例研究,以项目的整体性能的印制板良率。我们观察到一些异常与我们的测试结果,并建议额外的研究,以防止不可预测的高偏度。
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引用次数: 11
Investigation of enhanced solder wetting in 63Sn/37Pb and Sn-Ag-Cu lead free alloy 63Sn/37Pb和Sn-Ag-Cu无铅合金中增强焊料润湿的研究
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550215
S. Anson, J.G. Slezak, K. Srihari
Enhanced or equivalent solder paste wetting on organic solderability preservative (OSP) circuit boards in 63Sn/37Pb and 96.5Sn/3.0Ag/0.5Cu at lower peak temperature and time above liquidus (TAL) has been published previously. These results are contrary to common belief and practice in microelectronics soldering. Microelectronics and general metal wetting literature will be reviewed to generate hypotheses about the cause of the enhanced or equivalent solder wetting. The former wetted area experiments were conducted using design of experiments (DOE) techniques and now analysis outside of the DOE will be conducted to test the new hypotheses and advance the knowledge of solder wetting. Industry relevant manufacturing equipment, materials and processes were used. After detailed analysis, the enhanced or equivalent wetting appears to be unique to the proprietary flux chemistry.
在63Sn/37Pb和96.5Sn/3.0Ag/0.5Cu的有机可焊性防腐剂(OSP)电路板上,在较低的峰值温度和高于液相线(TAL)的时间(TAL)下,锡膏润湿增强或等效已经发表。这些结果与微电子焊接的普遍信念和实践相反。微电子和一般金属润湿文献将被审查,以产生关于增强或等效焊料润湿的原因的假设。以前的润湿区实验是使用实验设计(DOE)技术进行的,现在将在DOE之外进行分析,以测试新的假设并推进焊料润湿的知识。采用了行业相关的制造设备、材料和工艺。经过详细分析,增强或等效润湿似乎是专有的助熔剂化学所独有的。
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引用次数: 0
Resin coated copper capacitive (RC3) nanocomposites for multilayer embedded capacitors 多层嵌入式电容器用树脂包覆铜电容(RC3)纳米复合材料
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550054
R. Das, S. Rosser, K. Papathomas, M. Poliks, J. Lauffer, V. Markovich
This paper discusses thin film technology based on resin coated copper capacitive (RC3) nanocomposites. In particular, we highlight recent developments on high capacitance, large area, thin film passives, their integration in printed wiring boards (PWB), system in package (SiP) and chip package substrates and the reliability of the embedded capacitors. A variety of RC3 nanocomposite thin films ranging from 2 microns to 50 microns thick were processed on PWB substrates by liquid coating or printing processes. SEM micrographs showed uniform particle distribution in the coatings. The electrical performance of composites was characterized by dielectric constant (Dk), capacitance and dissipation factor (loss) measurements. Nanocomposites resulted in high capacitance density (7-500 nF/inch2) at 1 MHz. The manufacturability of these films and their reliability has been tested using large area (13 inch times 18 inch or 19.5 inch times24 inch) test vehicles. Reliability of the RC3 nanocomposite was ascertained by IR-reflow, PCT (pressure cooker test) and solder shock. As a case study, an example of RC3 based multilayer embedded capacitor construction for a flip-chip plastic ball grid array package with a 300 mum core via pitch is given. This effort is an integrated approach centering on three interrelated fronts: (1) materials development and characterization; (2) fabrication, and (3) integration at the device level.
本文讨论了树脂包覆铜电容(RC3)纳米复合材料的薄膜技术。我们特别强调了高电容,大面积,薄膜无源的最新发展,它们在印刷线路板(PWB),封装系统(SiP)和芯片封装基板中的集成以及嵌入式电容器的可靠性。采用液体涂布或印刷工艺,在PWB衬底上制备了厚度为2微米至50微米的多种RC3纳米复合薄膜。SEM显微图显示涂层中颗粒分布均匀。通过介电常数(Dk)、电容和耗散因子(损耗)测量表征了复合材料的电性能。纳米复合材料在1 MHz时产生高电容密度(7-500 nF/inch2)。这些薄膜的可制造性及其可靠性已经使用大面积(13英寸乘以18英寸或19.5英寸乘以24英寸)测试车辆进行了测试。通过ir -回流、PCT(压力锅试验)和焊料冲击等试验确定了复合材料的可靠性。作为案例研究,给出了一个基于RC3的多层嵌入式电容器结构的实例,该结构用于具有300毫安螺距的倒装芯片塑料球栅阵列封装。这一努力是一种以三个相互关联的方面为中心的综合方法:(1)材料开发和表征;(2)制造,(3)器件级集成。
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引用次数: 3
Delamination modeling of three-dimensional microelectronic systems 三维微电子系统的分层建模
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550189
O. van der Sluis, P. Timmermans, R. van Silfhout, W. V. van Driel, G.Q. Zhang
Thermo-mechanical reliability issues are major bottlenecks in the development of future microelectronic components. Numerical modeling can provide more fundamental understanding of these failure phenomena. As a results, predicting, and ultimately, preventing these phenomena will result in an increased reliability of current and future electronic products. In this paper, delamination phenomena occurring in Cu/low-k back-end structures, buckling-driven delamination in flexible electronics and peeling tests on stretchable electronics will be modeled and validated by experimental results. For the Cu/low-k back-end structures, failure sensitivity analysis is performed by the recently developed area release energy (ARE) method while transient delamination processes are described by cohesive zone elements in the critical regions. For the latter, a dedicated solver is applied that is able to deal with brittle interfaces. For the flexible and stretchable electronics applications, cohesive zones are used to characterize the interface properties by combining numerical results with experimental measurements.
热机械可靠性问题是未来微电子元件发展的主要瓶颈。数值模拟可以为这些破坏现象提供更基本的认识。因此,预测并最终防止这些现象将提高当前和未来电子产品的可靠性。本文将对Cu/低钾后端结构中的分层现象、柔性电子器件中的屈曲驱动分层现象以及可拉伸电子器件的剥离试验进行建模并通过实验结果进行验证。对于Cu/低k后端结构,采用最近发展的区域释放能量法(area release energy, ARE)进行失效灵敏度分析,并采用临界区域内聚区单元描述瞬态分层过程。对于后者,应用了能够处理脆性界面的专用求解器。对于柔性和可拉伸电子应用,通过将数值结果与实验测量相结合,使用内聚区来表征界面特性。
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引用次数: 4
期刊
2008 58th Electronic Components and Technology Conference
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