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2008 58th Electronic Components and Technology Conference最新文献

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120 Gb/s-level VCSEL array optical subassembly using passive alignment technique 采用无源对准技术的120gb /s级VCSEL阵列光学组件
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550193
S. Hwang, J. Lim, B. Rho
Our suggested VCSEL array optical subassembly (OSA) for 120 Gb/s-level parallel optical interconnect modules was composed of a 12 channel VCSEL array chip, a SiOB, two silicon spacers, and a molded microlens with accurate guide pin holes. For high speed operation above 10 Gb/s per a channel, we carefully designed transmission lines on the SiOB. The results of the transmission lines were measured as large bandwidth more than 26 GHz and low channel crosstalk less than -30 dB. And, to achieve high coupling efficiency, the planar-convex microlens was adopted. The average coupling efficiency coupled to 62.5 mum multi-mode fiber (MMF) ribbon was approximately 85%, the value of which means nothing but material loss itself. In this paper, the fabrication process of the VCSEL OSA is emphasized on low cost packaging. In particular, a suggested passive alignment technique is described in detail to align both the VCSEL and the microlens array. An accurate assembly in this work was carried out through vision alignment using 2-sight camera of a precise pick-and-place machine, Suss MicroTec TRIAD 05 flip-chip bonder. To evaluate the DC and AC characteristics of the completely fabricated VCSEL array OSA, we measured optical output powers (L-I-V curve) and 4.25 Gb/s, 6 Gb/s, 10.31 Gb/s eye-diagrams on condition of setting-up with MT ferrule terminated 12 channel 62.5 mum MMF and a G-S-G probe. We successfully demonstrated high speed and high efficient VCSEL array OSA with clear 10.31 Gb/s eye diagrams and low coupling loss.
我们提出的用于120 Gb/s级并行光互连模块的VCSEL阵列光学组件(OSA)由一个12通道VCSEL阵列芯片、一个SiOB、两个硅间隔片和一个带精确导脚孔的模制微透镜组成。对于每通道10gb /s以上的高速运行,我们在SiOB上精心设计了传输线。传输线的测量结果是大于26 GHz的大带宽和小于-30 dB的低通道串扰。为了实现高耦合效率,采用了平面凸微透镜。62.5 μ m多模光纤(MMF)带的平均耦合效率约为85%,其数值仅代表材料损耗本身。本文着重从低成本封装的角度研究了VCSEL OSA的制造工艺。特别地,我们详细地描述了一种建议的被动对准技术来对准VCSEL和微透镜阵列。在这项工作中,通过使用精密拾取机(Suss MicroTec TRIAD 05倒装芯片键合机)的双视线相机进行视觉校准,实现了精确的组装。为了评估完全制作的VCSEL阵列OSA的直流和交流特性,我们在MT卡套端接12通道62.5 μ m MMF和G-S-G探针的条件下测量了光输出功率(L-I-V曲线)和4.25 Gb/s、6 Gb/s和10.31 Gb/s的眼图。我们成功地展示了高速高效的VCSEL阵列OSA,具有清晰的10.31 Gb/s眼图和低耦合损耗。
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引用次数: 4
Flexible opto-electronic circuit board for in-device interconnection 用于器件内互连的柔性光电电路板
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549980
T. Shibata, A. Takahashi
We propose a flexible opto-electronic circuit board (FOECB) for in-device interconnection, which is combined with a flexible printed circuit (FPC) with flexible optical waveguides having 45deg mirrors for 90deg beam turning using adhesive film. The fabricated prototype shows total optical loss of 3.7 dB, and the prototype, which mounted a 4-ch vertical-cavity surface-emitting laser (VCSEL) array and a 4-ch photodiode (PD) array, successfully demonstrated optical signal transmission at a data rate of 10 Gbps/ch. These results show that the proposed prototype has considerable potential to realize practical FOECB for in-device interconnection.
我们提出了一种用于器件内互连的柔性光电电路板(FOECB),它与柔性印刷电路(FPC)相结合,柔性光波导具有45度反射镜,可使用胶膜进行90度光束旋转。制作的原型机显示总光损耗为3.7 dB,并且原型机安装了4-ch垂直腔面发射激光器(VCSEL)阵列和4-ch光电二极管(PD)阵列,成功地以10 Gbps/ch的数据速率传输了光信号。这些结果表明,该原型具有实现器件内互连的FOECB的巨大潜力。
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引用次数: 36
Impact of wedge wire bonding and thermal mechanical stress on reliability of BPSG/poly layer of a silicon die 楔丝键合和热机械应力对硅模BPSG/多晶硅层可靠性的影响
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550211
Y. Liu, S. Irving, T. Luk, M. Rioux, Qiuxiao Qian
In this paper, the impact from both mechanical and thermal effects, with different parameters on BPSG of a power package is studied. The impact parameters include wedge wire bonding force, clamping force from the spring clip, wave soldering process and power dissipation from the die. An advanced 3D FEA model framework with a global model and local sub-model is developed. Major modeling work includes two areas: One is to evaluate the impact of the wire bonding force during the wedge bonding assembly process and the clamping force from the spring clip. Another area is to study the thermal stress due to thermal expansion mismatch which includes the wave soldering process and power dissipation. Both the global and sub-model simulation results have shown that the stress distribution in BPSG due to the wire bonding process, spring clip clamping force, wave soldering and power dissipation. The modeling has disclosed that the impact of thermal stress is greater than that of wedge wire bonding process and spring clip clamping force.
本文研究了在不同参数下,机械效应和热效应对动力封装BPSG的影响。冲击参数包括楔形丝的结合力、弹簧夹的夹紧力、波峰焊工艺和模具的功耗。提出了一种具有全局模型和局部子模型的先进三维有限元模型框架。主要的建模工作包括两个方面:一是评估楔焊装配过程中金属丝粘接力和弹簧夹紧力的影响。另一个领域是研究由热膨胀失配引起的热应力,包括波峰焊工艺和功耗。整体和子模型仿真结果表明,BPSG内部的应力分布受焊线工艺、弹簧夹紧力、波峰焊和功耗的影响。模拟结果表明,热应力的影响大于楔丝键合过程和弹簧夹紧力的影响。
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引用次数: 7
50μm pitch Pb-free micro-bumps by C4NP technology 采用C4NP技术制备的50μm间距无铅微凸点
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550175
B. Dang, D. Shih, Stephen Buchwalter, Cornelia Tsang, Chirag S. Patel, J. Knickerbocker, P. Gruber, Sarah Knickerbocker, J. Garant, Krystyna Semkow, K. Ruhmer, E. Hughlett
Controlled collapse chip connection new process (C4NP) is currently used in IBM manufacturing for all 300 mm Pb-free wafer bumping for flip chip packages. In this study, the extendibility of C4NP technology to ultra fine pitch applications has been explored. Reusable C4NP glass molds were fabricated and characterized for 50 mum pitch application. Mold fill and wafer transfer with Pb-free solders have been demonstrated using both 200 mm and 300 mm wafers in a manufacturing environment. Significant improvement in bump yield was achieved for these early demonstrations of fine pitch interconnections through process optimization and contamination control. Challenge in wafer inspection metrology is discussed for the 50 mum pitch micro-bumps. Mechanical strength of the C4NP micro-bumps has been characterized using test dies with a full area array of micro-bumps.
控制折叠芯片连接新工艺(C4NP)目前在IBM制造中用于倒装芯片封装的所有300 mm无铅晶圆碰撞。本研究探讨了C4NP技术在超细间距应用中的可扩展性。制备了可重复使用的C4NP玻璃模具,并对其进行了表征。在制造环境中,使用200毫米和300毫米晶圆演示了无铅焊料填充模具和晶圆转移。通过工艺优化和污染控制,这些小间距互连的早期演示实现了凸点产量的显著提高。讨论了50 μ m节距微凸点在晶圆检测计量方面面临的挑战。C4NP微凸点的机械强度已经用带有微凸点全面积阵列的测试模具进行了表征。
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引用次数: 28
An efficient method for power integrity and EMI Analysis of advanced packages 先进封装电源完整性和电磁干扰分析的有效方法
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550041
E. Liu, Xingchang Wei, Z. Oo, E. Li
A two-dimensional full-wave method is presented in this paper for efficient power integrity and EMI Analysis of highspeed electronic packages. The power/ground planes in electronic packages form a parallel-plate structure, which is solved by a 2D finite-different time domain (2D FDTD) method. Both the conductor loss and the substrate loss are modeled by the 2D method. Besides the parallel-plate structure, electronic packages also comprise of many transmission lines including microstrip- and stripline-type structures. Those two types of structures are also resolved by the 2D method. So a unified solver may be developed in the context of 2D method for the signal and power integrity analysis of electronic packages. The electromagnetic interference (EMI) issue of electronic packages is also touched in this paper, which is mainly focused on the radiation due to the edge effect of the parallel plate structure in a package. Numerical examples are given to demonstrate the method.
本文提出了一种二维全波方法,用于高速电子封装的高效功率完整性和电磁干扰分析。电子封装中的电源/地平面形成平行板结构,采用二维时域有限差分(2D FDTD)方法求解。导体损耗和衬底损耗均采用二维方法建模。除了平行板结构外,电子封装还包括许多传输线,包括微带和带状线结构。这两种结构也可以用二维方法进行解析。因此,在二维方法的背景下,可以建立一个统一的求解器,用于电子封装的信号和功率完整性分析。本文还讨论了电子封装的电磁干扰问题,主要集中在封装内平行板结构的边缘效应所产生的辐射。最后给出了数值算例。
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引用次数: 2
Noise induced jitter in differential signaling 差分信号中噪声引起的抖动
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550218
J. Chandrasekhar, E. Engin, M. Swaminathan, K. Uriu, T. Yamada
Differential lines are extensively used in high-speed digital circuits due to their ability to improve signal integrity by rejecting common-mode noise. However noise is injected into differential signals when there are irregularities in the signaling setup. These anomalies may be via transitions of differential lines through power planes in power distribution systems, via stubs, asymmetric lengths of differential lines, different transition points for each of the differential vias etc. This paper quantifies noise due to irregular differential structures in frequency domain. Presence of noise in differential signaling is verified through a set of test vehicles. The effect of signal to power coupling from differential lines on signal jitter is also investigated.
差分线被广泛应用于高速数字电路中,因为它们能够通过抑制共模噪声来提高信号的完整性。然而,当信号设置中存在不规范时,噪声被注入差分信号中。这些异常可能是由于配电系统中差动线通过电源平面的过渡,通过存根,差动线的不对称长度,每个差动过孔的不同过渡点等。本文在频域对不规则微分结构引起的噪声进行量化。通过一组测试车辆验证了差分信号中噪声的存在。研究了差分线的信功率耦合对信号抖动的影响。
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引用次数: 11
Effect of thermal interface materials on manufacturing and reliability of Flip Chip PBGA and SiP packages 热界面材料对倒装PBGA和SiP封装制造和可靠性的影响
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550094
Li Li, M. Nagar, J. Xue
Power and power density increase in microelectronics is a major challenge for packaging high performance ASIC and microprocessor devices. The thermal interface material (TIM) used between the chip and the heat spreader of the Flip Chip Plastic Ball Grid Array (FC-PBGA) package plays a very important role in the package thermal performance. Not only does it affect package thermal performance, it can also affect assembly yield and package reliability during manufacturing and normal operation. In this study attention has been focused on improving thermal performance, manufacturing yield and reliability of the flip-chip PBGA single chip packages and the System in Package (SiP) modules. Computational Fluid Dynamics (CFD) software was used to investigate the effect of TIM on FC-PBGA thermal performance. The effect of thermal interface material was then studied for controlling the interaction between the heat spreader and the FC-PBGA SiP module to reduce module warpage and to improve module assembly yield. Qualification of TIM for FC-PBGA at both the component level and the system level was discussed. Component level testing data showed that the thermal characteristics and mechanical integrity of the TIM selected can be evaluated by using the same stress conditions used in package reliability qualification. Finally, system level non- operational humidity test results showed that good mechanical reliability at the thermal interface of the FC-PBGA can be achieved by optimizing the heat spreader attaching process.
微电子器件中功率和功率密度的增加是封装高性能ASIC和微处理器器件的主要挑战。倒装芯片塑料球栅阵列(FC-PBGA)封装中芯片与散热器之间的热界面材料(TIM)对封装的热性能起着非常重要的作用。它不仅会影响封装的热性能,还会影响制造和正常运行期间的组装良率和封装可靠性。本文主要研究如何提高倒装PBGA单芯片封装和系统级封装(SiP)模块的热性能、制造良率和可靠性。采用计算流体动力学(CFD)软件研究了TIM对FC-PBGA热性能的影响。研究了热界面材料对控制散热器与FC-PBGA SiP模块相互作用的影响,以减少模块翘曲,提高组件成品率。从元件级和系统级两个层面对FC-PBGA的TIM进行了定性分析。部件级测试数据表明,采用与封装可靠性鉴定相同的应力条件,可以评估所选TIM的热特性和机械完整性。最后,系统级非操作湿度测试结果表明,通过优化散热器的贴附工艺,FC-PBGA热界面处具有良好的机械可靠性。
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引用次数: 12
Development of 3D silicon module with TSV for system in packaging 封装系统用TSV三维硅模组的研制
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550027
N. Khan, V. S. Rao, S. Lim, H. We, V. Lee, Zhang Wu, Yang Rui, L. Ebin
Portable electronic products demand multifunctional module comprising digital, RF and memory functions. Through-silicon via technology provides a means of implementing complex, multi-functional integration with a higher packing density for a System in Package. A 3D silicon module with through silicon via has been developed in this work. Thermo-mechanical analysis has been performed and through silicon via interconnect design is optimized. Multiple chips representing different functional circuits are assembled using wirebond and flip chip interconnection methods. Silicon carrier is fabricated using via-first approach, the burrier copper via is exposed by special backgrinding process. A two-stack silicon module is developed and characterized in this work. Power distribution design for the silicon carrier suitable for 5 GHz digital application is studied and characterized. The module reliability has been evaluated under temperature cycling (- 40/125degC) and drop test. Samples with over-mold and underfill passed the JEDEC drop test of 1500 G & 0.5 ms pulse duration. Thermal cycle test results showed no solder joint failure.
便携式电子产品需要包含数字、射频和存储功能的多功能模块。通硅通孔技术为系统级封装提供了一种实现复杂、多功能集成和更高封装密度的方法。本文开发了一种具有通硅孔的三维硅模块。进行了热力学分析,优化了硅通孔互连设计。代表不同功能电路的多个芯片使用线键和倒装芯片互连方法组装。硅载体采用先过孔法制备,铜载体采用特殊的背磨工艺暴露。本文开发了一种两层硅模块,并对其进行了表征。研究了适用于5ghz数字应用的硅载波的功率分配设计。在温度循环(- 40/125摄氏度)和跌落测试下评估了模块的可靠性。上模和下填样品通过JEDEC 1500 G和0.5 ms脉冲持续时间的跌落测试。热循环试验结果显示无焊点失效。
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引用次数: 74
A numerical analysis of crack growth and morphology evolution in chip-to-packages nano-interconnections 芯片-封装纳米互连中裂纹扩展和形貌演化的数值分析
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550194
S. Koh, R. Tummala, A. Saxena, P. Selvam
The International Technology Roadmap for semiconductors (ITRS) has predicted that by the year 2007, integrated chip (IC) packages will contain feature sizes of 65 nm and an I/O pitch for the die-to-package interconnects approaching 80 mum. These will reduce even further in the next five years. The current approach of using surface mount technology and flip chip are mainly solder based and the lead and lead-free solder interconnects are known to fail mechanically as the pitch is reduced from 200 mum down to lower levels due to the thermal mismatch between the substrate and the chip. Although compliant interconnection could solve some of the mechanical issues, it is done at the expense of the electric performance. The PRC at Georgia Institute of Technology is proposing re-workable copper based nano-interconnections as a new interconnection paradigm as the next step beyond lead-free solders for future low-cost, high performance and high reliability packages. However, very limited data is published about the fatigue life of nano-crystalline materials and specifically those of nano-crystalline copper. It is important to predict crack growth as it can aid the understanding of the useful life of the IC-packages' interconnections. Multiple mechanisms may be responsible for crack initiation, but eventually most dominant fatigue cracks form a surface crack, which often have a semi-elliptical shape. Hence, the fatigue crack growth life predictions in this study are based on the assumption of elliptical and semi-elliptical cracks being initiated in the nano-interconnections. In this study, numerical analysis using the J-integral stress intensity parameter, in conjunction with experimental fatigue crack growth data, has been employed to study semi-elliptical crack growth and morphology evolution in nano-interconnection subject to uniaxial fatigue loading in linear-elastic conditions. The results indicate that a J-integral finite element analysis, using the loading portion of the fatigue cycle, in conjunction with known rates of fatigue crack growth can approximate surface crack morphology evolution. This study also predicts that the long crack growth is a relatively small portion of the total fatigue life of the material for the experimental LCF conditions. Hence, initiation of the cracks in the interconnection is the main criterion used to predict its fatigue life.
国际半导体技术路线图(ITRS)预测,到2007年,集成芯片(IC)封装的特征尺寸将达到65纳米,用于芯片到封装互连的I/O间距将接近80微米。在未来五年内,这一数字将进一步减少。目前使用表面贴装技术和倒装芯片的方法主要是基于焊料的,并且由于基板和芯片之间的热不匹配,当间距从200 μ m降低到更低的水平时,已知铅和无铅焊料互连在机械上失败。尽管兼容互连可以解决一些机械问题,但它是以牺牲电气性能为代价的。乔治亚理工学院的PRC正在提出可重新工作的铜基纳米互连,作为一种新的互连范例,作为未来低成本,高性能和高可靠性封装的下一步无铅焊料。然而,关于纳米晶材料,特别是纳米晶铜的疲劳寿命的数据非常有限。预测裂纹扩展是很重要的,因为它可以帮助理解ic封装互连的使用寿命。裂纹萌生可能有多种机制,但最终大多数主要疲劳裂纹形成表面裂纹,通常具有半椭圆形状。因此,本研究的疲劳裂纹扩展寿命预测是基于在纳米连接点中产生椭圆和半椭圆裂纹的假设。本研究采用j积分应力强度参数,结合实验疲劳裂纹扩展数据,对线弹性条件下单轴疲劳载荷作用下纳米互连材料的半椭圆裂纹扩展和形态演化进行了数值分析。结果表明,结合已知的疲劳裂纹扩展速率,利用疲劳循环加载部分的j积分有限元分析可以近似地描述表面裂纹的形态演变。该研究还预测,在实验LCF条件下,长裂纹扩展在材料总疲劳寿命中所占的比例相对较小。因此,连接中裂纹的萌生是预测其疲劳寿命的主要依据。
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引用次数: 2
Application of through mold via (TMV) as PoP base package 通模通孔(TMV)作为PoP基包的应用
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550110
Jinseong Kim, Kiwook Lee, Dongjoo Park, Taekyung Hwang, Kwangho Kim, Daebyoung Kang, Jaedong Kim, Choonheung Lee, C. Scanlan, C. Berry, C. Zwenger, L. Smith, M. Dreiza, R. Darveaux
In recent years, package-on-package (PoP) has been rapidly adopted for 3D integration of logic and memory within mobile handsets and other portable multimedia devices. However, existing methods of making the PoP base package may not satisfy next generation applications that will require reduced memory interface pitches, higher memory interface pin-counts, reduced thickness, tight warpage control and higher levels of integration within the PoP base package. This paper introduces a new PoP base package structure that addresses the challenges of next generation applications. A PoP base package with through mold vias (TMV) will be described. Package flatness and package stacking results will be presented and advantages of TMV technology will be reviewed.
近年来,在移动电话和其他便携式多媒体设备中,封装对封装(PoP)被迅速应用于逻辑和存储器的3D集成。然而,现有的PoP基包制造方法可能无法满足下一代应用的需求,因为下一代应用需要更小的内存接口间距、更高的内存接口引脚数、更小的厚度、更严格的翘曲控制和更高水平的PoP基包集成。本文介绍了一种新的PoP基本包结构,以解决下一代应用的挑战。将介绍一种带有通模孔(TMV)的PoP基础封装。将介绍封装平整度和封装堆叠结果,并回顾TMV技术的优点。
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引用次数: 50
期刊
2008 58th Electronic Components and Technology Conference
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