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2008 58th Electronic Components and Technology Conference最新文献

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A novel methodology (Low Temperature Laminated Organics) for 3D integration using multilayer organics 一种利用多层有机物进行三维集成的新方法(低温层压有机物)
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549947
G. White, S. Dalmia, L. Carastro, C. Russell, V. Sundaram, M. Swaminathan
This paper presents for the first time a new paradigm in the construction of multilayer RF, digital and mixed signal circuits using conventional low-loss organic laminates. The new process termed low temperature laminated organics, LTLOtrade [1], is a multilayer parallel process where individual layers are circuitized, tested and co-laminated at temperatures below 280degC to form a multilayer structure. Both stacked and staggered via structures have been realized with LTLO, thereby allowing for the realization of any layer, and any via interconnection schemes. The LTLO technology also facilitates the introduction of embedded active and passive components allowing for true 3D package integration. To date up to 24 metal layers have been demonstrated using LTLO.
本文首次提出了一种利用传统低损耗有机层压板构建多层射频、数字和混合信号电路的新范例。这种新工艺被称为低温层压有机物,LTLOtrade[1],是一种多层平行工艺,其中单个层在低于280摄氏度的温度下进行电路化、测试和共层压,以形成多层结构。LTLO实现了堆叠和交错通孔结构,从而允许实现任何层和任何通孔互连方案。LTLO技术还有助于引入嵌入式有源和无源组件,从而实现真正的3D封装集成。迄今为止,已经使用LTLO演示了多达24个金属层。
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引用次数: 0
Parylene N as a dielectric material for through silicon vias 聚对二甲苯N作为硅通孔的介电材料
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550183
B. Majeed, N. Pham, D. Tezcan, E. Beyne
This paper reports on the feasibility of parylene N as a dielectric material for through silicon vias (TSV). TSV are the key enabling technology for 3D wafer laver packaging. Parylene is used as an insulating material in one of the approaches adopted for realizing 3D wafer level packaging at IMEC. This paper discusses main issues regarding the processing of parylene N for the TSV application. First, the thickness uniformity of as-deposited parylene across the wafer and inside the via is investigated. The results show that for 200 mm wafers, within-wafer and wafer-to-wafer thickness is sufficiently uniform. The 1-sigma thickness variation of less than 4 percent for both cases is measured. 1 sigma thickness variation of less than 5 percent is observed from batch to batch. Second, the effect of substrate, temporary glue layer and carrier wafer for thinned device wafers on the dry etching of parylene is analyzed. The experiments show that the etching was sufficiently uniform across the wafer; and the uniformity across the surface is recorded to be greater than 95 percent. There is no considerable effect of substrate or bonding layer thickness, however carrier wafer influence the etching rate.
本文报道了聚对二甲苯N作为硅通孔(TSV)介质材料的可行性。TSV是3D晶圆封装的关键使能技术。在IMEC实现3D晶圆级封装的方法之一中,使用聚对二甲苯作为绝缘材料。本文讨论了用于TSV的聚对二甲苯N的主要加工问题。首先,研究了沉积的聚对二甲苯在晶圆上和孔内的厚度均匀性。结果表明:对于200mm的晶圆,片内厚度和片间厚度是均匀的;测量了两种情况下小于4%的1西格玛厚度变化。批与批之间的厚度变化小于5%。其次,分析了衬底、临时胶层和薄化器件晶圆载体对聚对二甲苯干刻蚀的影响。实验表明,在晶圆片上刻蚀是均匀的;据记录,整个表面的均匀度大于95%。衬底和键合层厚度对刻蚀速率影响不大,而载流子晶片对刻蚀速率影响较大。
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引用次数: 26
Reducing the electrodeposition time for filling microvias with copper for 3D technology 减少电沉积时间,以填补微孔与铜的3D技术
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550078
O. Lühn, A. Radisic, P. Vereecken, B. Swinnen, C. Hoof, W. Ruythooren, J. Celis
We present two approaches to reduce the process time needed for filling vias of 5 mum diameter and 25 mum depth with copper by electrodeposition. In the first approach, the effect of model additives on the filling of vias with electroplated copper was investigated as well as the influence of the applied current density on the filling process. The variation of the concentration of leveler and accelerator additives was investigated. Their influence on the void-free filling of such vias was determined. A high leveler concentration allowed to achieve a void-free fill. The copper deposited on the top surface was in the range of 2.5 mum. The filling was completed within 45 minutes. The filling time could even be further reduced to 25 minutes by introducing a waveform with two galvanostatic steps. The second approach demonstrates void-free via filling with copper electrodeposition at the top of the wafer surface blocked with self-assembled monolayers of octadecanethiol. With thin Ta-films deposited at the top surface before electrodeposition is started, almost no copper was deposited at the top surface as well. The vias were filled within 30 minutes when the top surface was completely blocked.
我们提出了两种方法来减少用电沉积方法填充直径为5微米、深度为25微米的通孔所需的工艺时间。在第一种方法中,研究了模型添加剂对镀铜过孔填充的影响,以及外加电流密度对填充过程的影响。研究了匀平剂和促进剂浓度的变化规律。确定了它们对这种通孔无空隙填充的影响。允许实现无空隙填充的高水平浓度。上表面沉积的铜含量为2.5 μ m。填充在45分钟内完成。通过引入具有两个恒流步骤的波形,填充时间甚至可以进一步减少到25分钟。第二种方法通过在晶圆表面顶部填充铜电沉积,并用自组装的十八烷硫醇单层阻挡,证明了无空洞。在电沉积开始之前,在顶部表面沉积了薄的ta膜,在顶部表面几乎没有铜沉积。当顶面完全堵塞后,孔在30分钟内被填充。
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引用次数: 2
10-Gb/s × 12-ch downsized optical modules with electrical conductive film connector 10gb /s × 12ch小尺寸光模块,带导电膜连接器
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549978
A. Suzuki, T. Ishikawa, Y. Wakazono, D. Nagao, T. Hino, Y. Hashimoto, H. Masuda, S. Suzuki, M. Tamura, T.-i. Suzuki, K. Kikuchi, Y. Okada, H. Nakagawa, M. Aoyaghi, T. Mikawa
We demonstrate 10-Gb/s/ch operations of high-density, low-cost 12-channel optical modules for optical interconnections. These optical modules that we developed are designed to be pluggable into cards with an electrical connector. These pluggable modules will enable cards to be manufactured much more easily since they allow the manufacturing processes of optical modules and cards to be separated. An electrical connector with a clamp spring is used to connect a ceramic substrate with a printed circuit board (PCB). An anisotropic conductive film (ACF) is used to transmit electrical signals between the ceramic substrate and the PCB. To achieve optical coupling, optical fibers are butt-coupled with optical devices mounted in a cavity on the ceramic substrate. Alignment between the twelve optical fibers and the 12-channel optical device is achieved using guide pins fabricated in the ceramic substrate and guide holes fabricated in the optical connector.
我们演示了用于光互连的高密度、低成本12通道光模块的10gb /s/ch操作。我们开发的这些光模块被设计成可插入带有电连接器的卡片。这些可插拔模块将使卡的制造更加容易,因为它们允许光模块和卡的制造过程分开。带夹簧的电连接器用于将陶瓷基板与印刷电路板(PCB)连接起来。各向异性导电膜(ACF)用于在陶瓷基板和PCB之间传输电信号。为了实现光耦合,光纤与安装在陶瓷基板上的空腔中的光学器件对接耦合。使用在陶瓷基板中制造的导针和在光学连接器中制造的导孔来实现十二根光纤与12通道光学器件之间的对准。
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引用次数: 7
Optimization of reliability of copper-low-k flip chip package with variable interconnect compliance 可变互连遵从性的低k铜倒装芯片封装可靠性优化
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550103
J. Ong, A. Tay, X. Zhang, V. Kripesh, Y. K. Lim, J.B. Tan, D. Sohn
The trend toward finer pitch and higher performance integrated circuits (ICs) devices has driven the semiconductor industry to incorporate copper and low-k dielectric materials. However, the low-k materials have lower modulus and poorer adhesion compared to the common dielectric materials. Thus, thermo-mechanical failure is one of the major bottlenecks for development of fine-pitch, large-die Cu/low-k flip chip packages. In this paper, 3D finite element analyses were performed to investigate the reliability of 65 nm, 21times21 mm 9metal Cu/ low-k, chips with 150 mum interconnect pitch in a FCBGA package with a 750 mum die thickness and 1.0 mm substrate thickness. Three parametric cases involving different geometries of solder joints were analyze: (A) All 20 rows with spherical solder joints, (B) 10 hourglass joints followed by 10 spherical joints, and (C) 10 spherical joints followed by 10 hourglass joints. The spherical joints are stiffer than the hourglass joints. It was found that Case C gave the lowest inelastic energy dissipation (DeltaW) for the critical solder joint implying that Case C will have the longest fatigue life. It was also found that Case C gave the lowest maximum stress in the low-k material and it was further shown that reliability will be enhanced with decrease in die thickness and substrate thickness.
更细间距和更高性能集成电路(ic)器件的趋势推动了半导体工业采用铜和低k介电材料。然而,与普通介电材料相比,低k材料具有较低的模量和较差的粘附性。因此,热机械故障是开发细间距、大芯片Cu/低k倒装芯片封装的主要瓶颈之一。本文采用三维有限元分析的方法,研究了在750 mm晶片厚度和1.0 mm衬底厚度的FCBGA封装中,采用150 mm互连间距的65 nm、21次21 mm金属Cu/ low-k芯片的可靠性。分析了3种不同几何形状焊点的参数化情况:(A) 20排均为球形焊点,(B) 10排为沙漏形焊点后10排为球形焊点,(C) 10排为球形焊点后10排为沙漏形焊点。球形接头比沙漏接头刚度大。结果表明,C种情况下临界焊点的非弹性能量耗散(DeltaW)最低,表明C种情况下具有最长的疲劳寿命。在低k材料中,Case C给出的最大应力最小,并且进一步表明,随着模具厚度和衬底厚度的减小,可靠性将得到增强。
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引用次数: 1
The development of the Fan-in Package-on-Package 扇入包对包的发展
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550091
F. Carson, S. Lee, I. Yoon
Package-on-package (PoP) has become the preferred means of stacking logic processors and memory for advanced mobile phones. The challenge is to reduce size, thickness, and cost of this PoP solution. The fan-in package-on-package (FiPoP) has been developed to address such concerns as well as enable more device integration while maintaining the desirable PoP business model. This paper will detail the development of the FiPoP to meet the size, thickness, flatness, and package level and board level reliability requirements of the typical handset application.
封装对封装(PoP)已经成为先进移动电话堆叠逻辑处理器和内存的首选方法。挑战在于减小PoP解决方案的尺寸、厚度和成本。扇形内包对包(FiPoP)的开发就是为了解决这些问题,并在保持理想的PoP业务模型的同时实现更多的设备集成。本文将详细介绍FiPoP的开发,以满足典型手机应用的尺寸、厚度、平面度、封装级和板级可靠性要求。
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引用次数: 10
Drop test reliability of lead-free chip scale packages 无铅芯片级封装的跌落测试可靠性
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550124
A. Farris, Jianbiao Pan, A. Liddicoat, B. Toleno, D. Maslyk, D. Shangguan, J. Bath, D. Willie, D. Geiger
This paper presents the drop test reliability of 0.5 mm pitch lead-free chip scale packages (CSPs). Fifteen 0.5 mm pitch CSPs were assembled on a standard JEDEC drop reliability test board with Sn3.0Ag0.5Cu lead-free solder. Eight boards were edge-bonded with a UV-cured acrylic; eight boards were edge- bonded with a thermal-cured epoxy; and twelve boards were assembled without edge bonding. Half of the edge-bonded test boards were subjected to drop tests at a peak acceleration of 1500 G with a pulse duration of 0.5 ms, and the other half subjected to drop tests at a peak acceleration of 2900 G with a pulse duration of 0.3 ms. Half of the test boards without edge bonding were subjected to drop tests at a peak acceleration of 900 G with a pulse duration of 0.7 ms, and the other half subjected to drop tests at a peak acceleration of 1500 G with a pulse duration of 0.5 ms. Two drop test failure detection systems were used in this study to monitor the failure of solder joints: a high-speed resistance measurement system and a post-drop static resistance measurement system. The high-speed resistance measurement system, which has a scan frequency of 50 KHz and a 16-bit signal width, is able to detect intermittent failures during the short drop impact duration. Statistics of the number of drops to failure for the 15 component locations on each test board are reported. The effect of component position on drop test reliability is discussed. The test results show that the drop test performance of edge-bonded CSPs is five to eight times better than the CSPs without edge bonding. However, the drop test reliability of edge-bonded CSPs with the thermal-cured epoxy is different from that with edge-bonded CSPs with the UV-cured acrylic. The solder crack location and crack area are characterized with the dye penetrant method. The fracture surfaces are studied using scanning electron microscopy (SEM).
介绍了0.5 mm间距无铅芯片级封装(csp)的跌落测试可靠性。15个0.5 mm间距的csp用Sn3.0Ag0.5Cu无铅焊料组装在标准JEDEC跌落可靠性测试板上。8块板用uv固化亚克力边粘接;8块板用热固化环氧树脂边缘粘合;把十二块木板拼在一起,没有边缝。其中一半进行峰值加速度为1500g、脉冲持续时间为0.5 ms的跌落试验,另一半进行峰值加速度为2900g、脉冲持续时间为0.3 ms的跌落试验。在未焊边的测试板中,一半进行峰值加速度为900 G、脉冲持续时间为0.7 ms的跌落试验,另一半进行峰值加速度为1500 G、脉冲持续时间为0.5 ms的跌落试验。本研究采用两种跌落试验失效检测系统来监测焊点的失效:一种是高速电阻测量系统,另一种是跌落后静态电阻测量系统。高速电阻测量系统的扫描频率为50 KHz,信号宽度为16位,能够在短时间内检测到间歇故障。统计每个测试板上15个组件位置的失败次数。讨论了构件位置对跌落试验可靠性的影响。试验结果表明,边接csp的跌落试验性能是未边接csp的5 ~ 8倍。然而,热固化环氧树脂与光固化丙烯酸树脂的边缘粘合CSPs的跌落试验可靠性不同。用染料渗透法对焊料的裂纹位置和裂纹面积进行了表征。采用扫描电子显微镜(SEM)对断口表面进行了研究。
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引用次数: 27
Full-wave, TwinAx, differential cable modeling 全波,TwinAx,差分电缆建模
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550205
D. de Araujo, G. Pitner, M. Commens, B. Mutnury, J. Diepenbrock
In modern data centers, rack mount equipment provides ease of planning, installation, and management due to the standardized form-factors that multiple vendors follow. Within a single server or a blade environment, the predominant form factor is the backplane where multiple cards communicate through connectors. Within a rack, one or multiple servers may be installed and communication between racks and within a rack is accomplished through cables. In order to guarantee system performance, designers need accurate models of the cable's electrical behavior. Shielded TwinAx differential pair based cables are commonly used for short to medium reach (less than 10-20 meters) in standards such as SAS, InfiniBand, SATA, PCI-Express. In TwinAx shielded differential pair construction where the shield is wrapped around the TwinAx pair, it often has a band stop filter, or 'suckout' characteristic that limits its performance. This paper models and characterizes this effect using a full-wave finite element method (FEM) solver implemented in Ansoft HFSS. In this paper, the wrap effect is captured using full 3D electromagnetic model for the shielded TwinAx construction. The physics behind the suckout effect is explained using both 2D and 3D models. Finally, this paper describes the methods and techniques that can mitigate the suckout effect as well as a novel cable construction with a helical shield wrap without any suckout effects.
在现代数据中心中,由于多个供应商遵循标准化的外形因素,机架安装设备提供了易于规划、安装和管理的功能。在单个服务器或刀片环境中,主要的形式因素是背板,其中多个卡通过连接器进行通信。在一个机架内,可以安装一台或多台服务器,机架之间和机架内的通信通过电缆完成。为了保证系统性能,设计人员需要精确的电缆电气性能模型。屏蔽型TwinAx差分对电缆主要用于SAS、ib、SATA、PCI-Express等标准的中短距离(小于10-20米)。在TwinAx屏蔽差分对结构中,屏蔽层包裹在TwinAx对周围,它通常具有带阻滤波器,或“吸出”特性,限制了其性能。本文使用Ansoft HFSS实现的全波有限元法求解器对这种影响进行了建模和表征。本文采用全三维电磁模型对屏蔽TwinAx结构进行了包裹效应捕获。利用2D和3D模型解释了吸出效应背后的物理原理。最后,本文介绍了减轻吸出效应的方法和技术,以及一种新型的无吸出效应的螺旋护套电缆结构。
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引用次数: 11
Effect of silver content and nickel dopant on mechanical properties of Sn-Ag-based solders 银含量和镍掺杂对锡银基钎料力学性能的影响
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550016
F. Che, J. Luan, X. Baraton
In this work, five solder materials of Sn-3.0Ag-0.5Cu (SAC305), Sn-2.0Ag-0.5Cu (SAC205), Sn-1.0Ag-0.5Cu (SAC105), Sn-1.0Ag-0.5Cu-0.05Ni (SAC105Ni0.05) and Sn-1.0Ag-0.5Cu-0.02Ni (SAC105M0.02) were tested using tensile loading at room temperature to investigate the Ag content and Ni dopant effect on solder mechanical properties, respectively. In addition, different testing temperature conditions including -35 deg.C, 25 deg.C, 75 deg.C and 125 deg.C were used for SAC105M0.02 solder to investigate the temperature effect on mechanical properties. Tensile test under different strain rates from 0.000011/s to 0.11/s was conducted to study the strain rate effect on material properties. Test results show that the material properties of modulus, UTS and yield stress increase with strain rate and Ag content, but decrease with temperature. The 500 ppm Ni dopant has the significant effect on material properties of Sn-Ag-based solder than 200 ppm Ni dopant. Lower modulus, yield stress and UTS, higher elongation can be achieved for SAC105M0.05 solder compared to SAC105M0.02 solder. The rate dependent and Ag content dependent material models were developed for Sn-Ag-Cu lead free solders. In addition, the temperature and rate dependent models were developed for SAC105M0.02 solder. The microstructures of different solder alloys were analyzed based on SEM images. It was found that Ag content affects the Ag3Sn intermetallic compound dispersion and Sn grain size. The microstructure of solder alloy has finely dispersed IMC and fine Sn grain size for the high Ag content solder, which make the solder exhibit high strength.
本文采用室温拉伸加载法对Sn-3.0Ag-0.5Cu (SAC305)、Sn-2.0Ag-0.5Cu (SAC205)、Sn-1.0Ag-0.5Cu (SAC105)、Sn-1.0Ag-0.5Cu-0.05Ni (SAC105Ni0.05)和Sn-1.0Ag-0.5Cu-0.02Ni (SAC105M0.02) 5种钎料材料进行了拉伸加载试验,研究了Ag含量和Ni掺杂物对钎料力学性能的影响。此外,对SAC105M0.02焊料采用-35℃、25℃、75℃、125℃等不同的测试温度条件,考察温度对其力学性能的影响。在0.000011/s ~ 0.11/s不同应变速率下进行拉伸试验,研究应变速率对材料性能的影响。试验结果表明,材料的模量、UTS和屈服应力随应变速率和Ag含量的增加而增加,随温度的升高而降低。500 ppm的Ni掺杂剂比200 ppm的Ni掺杂剂对锡银基钎料材料性能的影响显著。与SAC105M0.02焊料相比,SAC105M0.05焊料可以获得更低的模量、屈服应力和UTS,更高的延伸率。建立了Sn-Ag-Cu无铅焊料的速率依赖模型和Ag含量依赖模型。此外,建立了SAC105M0.02焊料的温度和速率依赖模型。利用扫描电镜分析了不同钎料合金的显微组织。结果表明,Ag含量对Ag3Sn金属间化合物的分散性和Sn晶粒尺寸均有影响。高银含量钎料的钎料合金组织具有分散良好的IMC和细小的Sn晶粒,使钎料具有较高的强度。
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引用次数: 34
Electromigration of Cu-Sn-Cu micropads in 3D interconnect Cu-Sn-Cu微片在三维互连中的电迁移
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549943
Zhihong Huang, R. Chatterjee, P. Justison, R. Hernandez, S. Pozder, A. Jain, E. Acosta, D. Gajewski, V. Mathew, R.E. Jones
There is significant interest in 3D interconnect technology due to its capability to provide fast, efficient inter-die interconnects at a minimum package footprint. Intermetallic Cu-Sn bonding has been widely investigated for 3D interconnects. However, the electromigration (EM) intrinsic reliability of the 3D Cu-Sn die-to-die microconnects has not been reported. In this paper the EM performance of 3D Cu-Sn microconnects formed by thermo-compression bonding is investigated and the failure mechanisms are discussed. The 3D stacked dice were assembled in wire bond ceramic packages and EM tests were conducted in both air and nitrogen ambient at various temperatures. Microconnect chain and Kelvin structure's failure lifetime and the mean time to failure (MTTF) were measured. The failure analysis has been conducted and the possible failure mechanism has been proposed.
人们对3D互连技术非常感兴趣,因为它能够以最小的封装面积提供快速、高效的芯片间互连。金属间Cu-Sn键合已被广泛研究用于三维互连。然而,三维Cu-Sn模对模微连接的电迁移(EM)固有可靠性尚未见报道。本文研究了热压缩键合形成的三维Cu-Sn微连接的电磁性能,并对其破坏机制进行了讨论。将三维堆叠骰子组装在线键陶瓷封装中,并在空气和氮气环境中进行不同温度下的电磁测试。测量了微连接链和Kelvin结构的失效寿命和平均失效时间(MTTF)。对其进行了失效分析,并提出了可能的失效机理。
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引用次数: 29
期刊
2008 58th Electronic Components and Technology Conference
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