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2008 58th Electronic Components and Technology Conference最新文献

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High RF performance TSV silicon carrier for high frequency application 高频应用的高射频性能TSV硅载体
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550249
S. W. Ho, S. Yoon, Qiaoer Zhou, K. Pasad, V. Kripesh, J. Lau
Three dimensional system-in-package (3D SiP) based on silicon carriers or interposer is a fast emerging technology that offers system design flexibility and integration of heterogeneous technologies. One of the key technologies enabler for silicon carrier is through silicon via (TSV). The development of 3D SiP will require the devices with different functionality operating at high frequency to be densely packed on the silicon substrate. However, silicon substrate is usually of low resistivity, when a high frequency signal is transmitted vertically through the substrate via, significant signal attenuation can occur that leads to poor RF performance. In this paper, a coaxial TSV structure in silicon carrier is presented for high frequency applications. The coaxial TSV is able to suppress undesirable substrate loss as well as provide good impedance matching. Electrical modeling of coaxial TSV structure was carried out to obtain the required geometries for impedance matching. Three different types of test vehicles were fabricated; Cu-plug TSV in both low (~10 Omega-cm) and high resistivity (~4000 Omega-cm) silicon substrate, and coaxial TSV in low resistivity silicon substrate. The S-parameters of the via structure of the test vehicles were measured from 100 MHz to 10 GHz. The measured results show that the coaxial TSV structure is able to suppress silicon substrate loss and provide good RF performance compared to Cu-plug TSV structure.
基于硅载体或中间体的三维系统级封装(3D SiP)技术是一种快速发展的新兴技术,它提供了系统设计的灵活性和异构技术的集成。硅载体的关键技术之一是硅通孔(TSV)技术。3D SiP的开发将需要在硅衬底上密集地封装具有不同功能的高频工作器件。然而,硅衬底的电阻率通常较低,当高频信号通过衬底垂直传输时,会发生明显的信号衰减,导致射频性能差。本文提出了一种用于高频应用的硅载流子同轴TSV结构。同轴TSV能够抑制不良的衬底损耗,并提供良好的阻抗匹配。为了获得阻抗匹配所需的几何形状,对同轴TSV结构进行了电气建模。制造了三种不同类型的试验车辆;低电阻率(~10 ω -cm)和高电阻率(~4000 ω -cm)硅衬底中的cu插头TSV,以及低电阻率硅衬底中的同轴TSV。测试车辆的通孔结构s参数在100 MHz ~ 10 GHz范围内进行了测量。测量结果表明,与cu插头TSV结构相比,同轴TSV结构能够抑制硅衬底损耗,提供良好的射频性能。
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引用次数: 132
Effect of microstructure on electrical and mechanical properties: Impurities of inkjet-printed Ag and Cu interconnects 微观结构对电气和机械性能的影响:喷墨印刷银和铜互连的杂质
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550139
Seol-Min Yi, Jung-Kyu Jung, S. Choi, Inyoung Kim, Hyunchul Jung, J. Joung, Young‐Chang Joo
Inkjet printing technology is a pattern-on-demand technology which has numerous advantages. However, this technology needs an additional thermal treatment, i.e., drying process. This treatment results in microstructure evolution which is expected to relate to properties of film. The microstructure, electrical and mechanical properties of the inkjet printed Ag and Cu films were characterized as drying process. Model study on electrical resistivity of Ag film shows that the decomposition of capping molecule plays a key role in microstructure evolution and electrical resistivity. The effect of ambient in thermal treatment of inkjet printed Cu film also investigated in this purport. The adhesion strength as a mechanical property was measured by 4 point bend test using sandwiched structure. Strengthening of adhesion was observed as densification of inkjet printed film.
喷墨打印技术是一种按需打印技术,具有许多优点。然而,这项技术需要额外的热处理,即干燥过程。这种处理导致微观结构的演变,这与薄膜的性能有关。采用干燥工艺对银、铜喷墨印刷薄膜的微观结构、电学性能和力学性能进行了表征。Ag膜的电阻率模型研究表明,盖层分子的分解对Ag膜的微观结构演化和电阻率起着关键作用。本文还研究了环境对喷墨印刷铜膜热处理的影响。采用夹芯结构进行4点弯曲试验,测定粘接强度作为力学性能。随着喷墨印刷膜的致密化,附着力增强。
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引用次数: 12
Interrogation of system state for damage assessment in lead-free electronics subjected to thermo-mechanical loads 热机械载荷下无铅电子元件损伤评估系统状态的研究
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550086
P. Lall, C. Bhat, M. Hande, V. More, R. Vaidya, R. Pandher, J. Suhling, K. Goebel
Requirements for system availability for ultra-high reliability electronic systems such as airborne and space electronic systems are driving the need for advanced heath monitoring techniques for early detection of the onset of damage. Aerospace-electronic systems usually face a very harsh environment, requiring them to survive the high strain rates, e.g. during launch and re-entry and thermal environments including extreme low and high temperatures. Traditional health monitoring methodologies have relied on reactive methods of failure detection often providing little on no insight into the remaining useful life of the system. Detection of system-state significantly prior to catastrophic failure can significantly impact the reliability and availability of electronic systems. Previously, Lall, et. al. [2004, 2005, 2006, 2007] have developed methodologies for health management and interrogation of system state of electronic systems based on leading indicators. Examples of damage pre-cursors include micro-structural evolution, intermetallics, stress and stress gradients. Pre-cursors have been developed for both eutectic 63Sn37Pb and Sn4Ag0.5Cu alloy systems on a variety of area-array architectures. In this paper, a mathematical approach for interrogation of system state under cyclic thermo-mechanical stresses has been developed for 6-different leadfree solder alloy systems. Thermal cycles may be experienced by electronics due to power cycling or environmental cycling. Data has been collected for leading indicators of failure for alloy systems including, Sn3Ag0.5Cu, Sn3Ag0.7Cu, SnlAg0.5Cu, Sn0.3Ag0.5Cu0.1Bi, Sn0.2Ag0.5Cu0.1Bi0.1Ni, 96.5Sn3.5Ag second-level interconnects under the application of cyclic thermo-mechanical loads. Methodology presented resides in the pre-failure space of the system in which no macro-indicators such as cracks or delamination exist. Systems subjected to thermo-mechanical damage have been interrogated for system state and the computed damage state correlated with known imposed damage. The approach involves the use of condition monitoring devices which can be interrogated for damage proxies at finite time-intervals. Interrogation techniques are based on derivation of damage proxies, and system prior damage based non-linear least-squares methods including the Levenberg-Marquardt Algorithm. The system's residual life is computed based on residual-life computation algorithms.
对超高可靠性电子系统(如机载和空间电子系统)系统可用性的要求,推动了对先进健康监测技术的需求,以便及早发现损害的发生。航空航天电子系统通常面临非常恶劣的环境,要求它们在高应变率下存活,例如在发射和再入以及热环境(包括极低和高温)期间。传统的健康监测方法依赖于故障检测的反应性方法,通常对系统的剩余使用寿命几乎没有任何了解。在灾难性故障发生前对系统状态进行检测,对电子系统的可靠性和可用性有重要影响。此前,Lall等人[2004,2005,2006,2007]开发了基于领先指标的电子系统健康管理和系统状态询问方法。损伤前体的例子包括微观结构演化、金属间化合物、应力和应力梯度。在不同的面阵结构上,已经开发出用于共晶63Sn37Pb和Sn4Ag0.5Cu合金体系的前驱体。本文针对6种不同的无铅焊料合金体系,建立了循环热-机械应力作用下系统状态的数学分析方法。由于电源循环或环境循环,电子产品可能会经历热循环。在循环热机械载荷作用下,对Sn3Ag0.5Cu、Sn3Ag0.7Cu、SnlAg0.5Cu、Sn0.3Ag0.5Cu0.1Bi、Sn0.2Ag0.5Cu0.1Bi0.1Ni、96.5Sn3.5Ag秒级互连等合金系统的主要失效指标进行了数据采集。所提出的方法存在于系统的失效前空间,其中不存在裂纹或分层等宏观指标。系统受到热-机械损伤询问系统状态和计算损伤状态与已知的施加损伤。该方法涉及使用状态监测设备,可以在有限的时间间隔内询问损坏代理。询问技术是基于损伤代理的推导和基于系统先验损伤的非线性最小二乘方法,包括Levenberg-Marquardt算法。根据剩余寿命计算算法计算系统的剩余寿命。
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引用次数: 49
Ternary lead-free SnAgCu micro-bumps for ultra-fine pitch chip-to-chip interconnection 用于超细间距芯片对芯片互连的三元无铅SnAgCu微凸点
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549950
Tsung-Fu Tsai, Jing-Yao Chang, Chien-Wei Chien, J. Juang, Li-Cheng Shen
Immersion solder bumping, a mask-less and low cost processing, brings feasibility to the ultra-fine pitch chip-to- chip interconnection; however, how to make the uniform micro-bump is still a great challenge. In this paper, the uniform micro-bumps with very thin Sn-3.0Ag-0.5Cu (SAC305) solder layer on electroless nickel under bump metallization (UBM) are achieved. The test chips we used have 6,507 SAC305 solder micro-bumps with a pitch of 30 um. Two test chips are bonded to each other, and the optimum bonding conditions for a sufficient bonding quality are determined. The interfacial microstructure of the bonded samples before and after aging at 150degC for 168 hours is also investigated. The present results shows that the rapid phase growth at the solder/UBM interface would have a great impact on solder joint reliability.
浸没式碰焊,一种无掩膜低成本的工艺,为超细间距芯片互连带来了可行性;然而,如何制作均匀的微凹凸仍然是一个很大的挑战。在凹凸金属化(UBM)条件下,在化学镀镍表面形成了具有极薄Sn-3.0Ag-0.5Cu (SAC305)焊料层的均匀微凸点。我们使用的测试芯片有6,507个SAC305焊料微凸点,间距为30微米。两个测试芯片相互粘接,并确定最佳的粘接条件,以获得足够的粘接质量。在150℃下时效168 h后,观察了粘结试样的界面微观结构。结果表明,钎料/UBM界面处的快速相生长将对焊点可靠性产生很大影响。
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引用次数: 1
Using novel materials to enhance the efficiency of conductive polymer 利用新型材料提高导电聚合物的效率
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549972
Cheng Yang, M. Yuen, Bing Xu
Conductive polymers have a vast market in integrated circuits (IC) and microsystems packaging to enhance mechanical, thermal, electrical performance, and cost effectiveness[1]. Isotropically conductive adhesives (ICAs) have been explored for attaching encapsulated surface mount components on rigid and flexible printed circuits [2]. However, the practical use of conductive adhesives in surface mount applications is limited because of the weak electric conductivity. Jiang et al [3] used nano-sized silver particles as a candidate for conducting filers in order to reduce the sintering temperature, but the contact resistance is still high. Some groups [4, 5] studied a series of methods such as using carboxylic acid group containing chemicals as surfactants to enhance the conductivity of ICAs in a variety of conditions, but because the micron-sized silver fillers have a high sintering temperature, the enhancement in conductivity is still limited. In order to further improve the conductivity of ICAs and minimize the cost, we experimented on a series of materials for silver surface pretreatment. We noticed an about 20 times improvement in conductivity of the modified ICA than the control sample (75% silver content in all samples). The volume resistivity of the optimum formulation reached the level of 10-6 Omegaldrcm. We also analyzed the adhesion strength and thermal property of the modified ICA material. The study indicated that both the electrical properties and the mechanical property were improved without negatively affecting the other physical properties, and they are both remain stable after subjecting to the 85degC and 85% relative humidity conditioning test.
导电聚合物在集成电路(IC)和微系统封装中具有广阔的市场,以提高机械,热,电气性能和成本效益[1]。各向同性导电胶粘剂(ICAs)已被用于在刚性和柔性印刷电路上粘附封装的表面贴装元件[2]。然而,导电胶粘剂在表面贴装应用中的实际应用受到限制,因为其导电性弱。Jiang等[3]为了降低烧结温度,将纳米级银颗粒作为导电过滤器的候选材料,但接触电阻仍然很高。一些研究小组[4,5]研究了一系列方法,如在各种条件下使用含羧酸基团的化学物质作为表面活性剂来增强ICAs的电导率,但由于微米级的银填料烧结温度高,其电导率的增强仍然有限。为了进一步提高ica的导电性,降低成本,我们对银表面预处理的一系列材料进行了实验。我们注意到,与对照样品(所有样品中银含量为75%)相比,改性ICA的电导率提高了约20倍。最佳配方的体积电阻率达到10-6 ω - drcm。并对改性后的ICA材料的粘接强度和热性能进行了分析。研究表明,在不影响其他物理性能的情况下,电学性能和力学性能都得到了改善,并且经过85℃和85%相对湿度的调节试验后,两者都保持稳定。
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引用次数: 13
Dielectric performance enhancement of nanoparticle-based materials for embedded passive applications 嵌入式被动应用中纳米颗粒基材料介电性能的增强
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550055
Jiongxin Lu, C. Wong
Novel materials for embedded capacitor applications are in great demands, for which high dielectric constant (k), low dielectric loss and process compatibility with the printed circuit boards (PCBs) are the most important prerequisites. We have systematically investigated an efficient way to enhance the dielectric performance of the high-k nanocomposites by the selection of the appropriate filler, its size, size distribution, surface property and morphology (aggregation status). The effect of the size and size distribution of metal nanoparticles in the nanocomposite on the dielectric properties of the nanocompsite were studied on an in-situ formed silver (Ag) incorporated carbon black (CB)/polymer composites system. In-situ formed Ag nanoparticles in the Ag/CB/epoxy composites increased the dielectric constant (k) value and decreased dissipation factor (Df). The size and size distribution of metal nanoparticles in the nanocomposite were found to have significant influence on the dielectric properties of the nanocomposite system. Smaller size and narrower size distribution of Ag nanoparticles resulted in lower dielectric loss tangent. The investigation of the morphology in terms of the aggregation status of nanoparticles on the dielectric properties of the nanocomposite revealed that assembly of the nanoparticles impact the dielectric performance of the nanocomposite in terms of the interfacial polarization and conducting property. The Ag/epoxy nanocomposite containing Ag nanoparticle with more discrete morphology rendered much lower dielectric loss tangent compared to the nanocomposites with Ag nanoparticles of more aggregated morphology.
嵌入式电容器应用对新型材料的需求很大,而高介电常数(k)、低介电损耗和与印刷电路板(pcb)的工艺兼容性是最重要的先决条件。我们系统地研究了通过选择合适的填料、填料的尺寸、粒径分布、表面性质和形貌(聚集状态)来提高高k纳米复合材料介电性能的有效方法。在原位制备银炭黑/聚合物复合材料体系上,研究了纳米复合材料中金属纳米粒子的尺寸和粒径分布对其介电性能的影响。Ag/CB/环氧复合材料中原位形成的Ag纳米粒子增加了介电常数(k)值,降低了耗散因子(Df)。研究发现,纳米复合材料中金属纳米颗粒的尺寸和粒径分布对纳米复合材料的介电性能有显著影响。粒径越小,粒径分布越窄,介质损耗切线越小。研究了纳米粒子的聚集状态对纳米复合材料介电性能的影响,发现纳米粒子的聚集对纳米复合材料介电性能的影响主要表现在界面极化和导电性能方面。与具有聚集形态的银纳米颗粒的纳米复合材料相比,具有更离散形态的银纳米颗粒的银/环氧纳米复合材料具有更低的介电损耗正切线。
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引用次数: 2
Manufacturability and reliability of a high-speed CSP SRAM on an interposer package 中间层封装上高速CSP SRAM的可制造性和可靠性
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4549999
K. Liu, J. Priest, J. Xue, Jarsh Lin, C. Kao, T. Wang, Y. Lai
Manufacturability and reliability of a custom CSP SRAM mounted on an interposer is discussed in this paper. In order to provide a reliable device for high reliability applications, an SRAM interposer structure was designed to ensure high reliability on every level of solder joint interconnects. Finite element modeling method was used as a mean to evaluate the reliability of various configurations of the protection methods. Test vehicles were built to run reliability tests on selected configurations from FEA simulation to evaluate the integrity and robustness of the SRAM interposer. An under fill process was chosen to be the protection method in production because of its reliability performance. However, extra efforts are needed for implementation during production in order to address the manufacturability concern.
本文讨论了安装在中间层上的定制CSP SRAM的可制造性和可靠性。为了为高可靠性应用提供可靠的器件,设计了一种SRAM中间层结构,以确保每一级焊点互连的高可靠性。以有限元建模方法为手段,对各种保护方法配置的可靠性进行了评估。建立了测试车辆,对从有限元模拟中选择的配置进行可靠性测试,以评估SRAM中介器的完整性和鲁棒性。在实际生产中,考虑到欠充填料的可靠性,选择了欠充填料作为保护方法。然而,为了解决可制造性问题,在生产过程中需要额外的努力来实施。
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引用次数: 1
The hybrid curing adhesive for image sensor module 图像传感器模块用混合固化胶粘剂
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550267
Y. Abe, K. Iwaya
The production of the CMOS and CCD sensor packages for the cellular phone has been increasing rapidly. The CMOS and CCD sensor packages are composed with the holder, glass, lens, substrate, sensor and so on. The adhesive to seal up a holder and substrate is necessary. Heat curing adhesive is usually used, and it must have curability at low temperature and enough adhesion. The projection that was arranged by a retainer of a holder and the hole which was emptied into a substrate are used to fix the place, since the position or an axis gap occurs by vibration during transportation and curing. The position or axis gap is the serious problem for an image sensor module. The image sensor packages are becoming smaller and thinner, therefore it becomes difficult to arrange space for opening a hole on a substrate. In addition, it becomes little adhesion areas, too. We suggest that the temporary adhesion is possible by UV or heat in a short period of time. By prefixing, it is not necessary to arrange a projection, hole and an assembly jig for fix the place.
用于手机的CMOS和CCD传感器封装的产量一直在快速增长。CMOS和CCD传感器封装由支架、玻璃、镜头、基板、传感器等组成。胶粘剂密封支架和承印物是必要的。通常采用热固化胶粘剂,它必须具有低温固化性和足够的附着力。由于在运输和固化过程中由于振动而产生位置或轴间隙,因此使用由支架的保持器布置的凸起和空入基板的孔来固定位置。位置或轴间隙是图像传感器模块的一个严重问题。图像传感器封装变得越来越小,越来越薄,因此很难在基板上安排开孔的空间。此外,它也变成了很小的粘附区域。我们建议在短时间内通过紫外线或加热可以暂时粘附。通过前置,不需要安排投影,孔和装配夹具固定的地方。
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引用次数: 0
C4NP Cu-cored Pb-free flip chip interconnections C4NP铜芯无铅倒装芯片互连
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550151
J. Nah, S. Buchwalter, P. Gruber, D. Shih, B. Furman
We report here preliminary results on a new Cu-cored flip chip structure combining C4NP (Controlled Collapse Chip Connect New Process) with Cu spheres for high density interconnections. C4NP is a new wafer bumping technology developed by IBM in which molten solder is injected into a mold and then transferred to the UBM (Under Bump Metallurgy) pads on the wafer. This simple and parallel process has shown the capability to combine low cost attributes with high performance capabilities. C4NP allows a larger number of interconnections with finer pitch than screen printing methods because it eliminates the volume reduction problem of solder paste. Also, C4NP allows more freedom in selecting the composition of solder bumps when compared with the electroplating method. To make Cu-cored flip chip interconnections with C4NP, Cu spheres are arrayed in the cavities on a mold which matches the CTE of the wafer. The Cu spheres are then transferred from the Si mold to C4NP solder bumps on the wafer by using the same process used for C4NP solder transfer. Then, after dicing, the diced chip is flip chip assembled on the substrate which has been pre-soldered. This combination of C4NP and Cu spheres is a dry process with potential for low cost, because it does not need thick photoresist, lithography, or plating process steps. Our early laboratory demonstrations of Cu-cored bumping have processed individual chips rather than full wafers; but, based on our manufacturing experience with C4NP solder bumping, we expect the process to be readily extendible to wafer scale. The C4NP Cu-cored flip chip joints offer potential advantages in stress mitigation and electrical performance. The centered Cu sphere in the joint ensures greater stand-off for fine pitch, which facilitates the underfill process and improves fatigue resistance due to the taller bump. The low electrical resistivity of Cu enhances current carrying capacity. The small Sn/Cu ratio in the bump would decrease UBM consumption and solder depletion under high current stressing. The high thermal conductivity of Cu also enhances heat transfer from the chip to the substrate. Due to the high Cu/Sn ratio in the flip chip interconnections, the higher Young's modulus of Cu over solder could be a concern for stress concentration on the IC despite the higher stand-off height provided by the Cu-core bump. However, in the C4NP Cu-cored flip chip structure, since the transfer mold is used for inserting Cu spheres into the flip chip joints, Cu spheres can be selectively deployed only to the joints where the composite bumps are required, whereas the other, highly stressed joints can be electrically connected without Cu spheres. Therefore, the selective use of composite interconnects may allow stress to be minimized while optimizing electrical performance.
我们在这里报告了一种新的铜芯倒装芯片结构的初步结果,该结构结合了C4NP(可控崩溃芯片连接新工艺)和Cu球,用于高密度互连。C4NP是IBM开发的一种新的晶圆碰撞技术,该技术将熔融焊料注入模具,然后转移到晶圆上的UBM (Under Bump Metallurgy)焊盘上。这个简单的并行过程显示了将低成本属性与高性能功能相结合的能力。与丝网印刷方法相比,C4NP允许更细间距的更多互连,因为它消除了锡膏的体积缩小问题。此外,与电镀方法相比,C4NP允许更自由地选择焊点的组成。为了使铜芯倒装芯片与C4NP互连,将铜球排列在与晶圆CTE匹配的模具上的空腔中。然后使用与C4NP焊料转移相同的工艺将Cu球体从Si模具转移到晶圆上的C4NP焊料凸起。然后,切片后,将切片后的芯片倒装在预焊好的基板上。这种C4NP和Cu球的组合是一种具有低成本潜力的干法工艺,因为它不需要厚厚的光刻胶、光刻或电镀工艺步骤。我们早期的铜芯碰撞实验室演示处理的是单个芯片,而不是整个晶圆;但是,根据我们在C4NP焊料碰撞方面的制造经验,我们希望该工艺可以很容易地扩展到晶圆规模。C4NP铜芯倒装芯片接头在应力缓解和电气性能方面具有潜在优势。接缝中心的铜球确保了更大的间距,这有利于下填过程,并且由于较高的凸起而提高了抗疲劳性。铜的低电阻率提高了载流能力。在高电流应力下,较小的Sn/Cu比可以降低UBM消耗和焊料损耗。铜的高导热性也增强了从芯片到衬底的热传递。由于倒装芯片互连中的高Cu/Sn比,尽管铜核凸起提供了更高的隔离高度,但较高的铜在焊料上的杨氏模量可能是IC上应力集中的一个问题。然而,在C4NP铜芯倒装芯片结构中,由于传递模具用于将Cu球插入倒装芯片接头中,因此Cu球可以选择性地部署到需要复合凸起的接头中,而其他高应力接头可以不使用Cu球进行电连接。因此,选择性地使用复合互连可以使应力最小化,同时优化电气性能。
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引用次数: 3
3D strip meander delay line structure for multilayer LTCC-based SiP applications 基于多层ltcc的SiP应用的三维带状弯曲延迟线结构
Pub Date : 2008-05-27 DOI: 10.1109/ECTC.2008.4550271
Gawon Kim, A. Lu, Fan Wei, L. L. Wai, Joungho Kim
Recently, the timing control of high-frequency signals is strongly demanded due to the high integration density in three-dimensional (3D) LTCC-based SiP applications. Therefore, to control the skew or timing delay, new 3D delay lines will be proposed. For frailty of the signal via, we adopt the concept of coaxial line and proposed an advanced signal via structure with quasi coaxial ground (QCOX-GND) vias. We will show the simulated results using EM and circuit simulator.
近年来,在基于ltcc的三维SiP应用中,由于高集成度,对高频信号的定时控制提出了强烈的要求。因此,为了控制倾斜或时间延迟,将提出新的三维延迟线。针对信号通孔的脆弱性,我们采用同轴线路的概念,提出了一种先进的准同轴接地通孔(QCOX-GND)信号通孔结构。我们将使用电磁和电路模拟器展示仿真结果。
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引用次数: 15
期刊
2008 58th Electronic Components and Technology Conference
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