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Study on the Quantum Efficiency Enhancement in AlInN Nanowire Light-Emitting Diodes Grown by Molecular Beam Epitaxy 分子束外延生长AlInN纳米线发光二极管量子效率增强研究
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930404
R. Velpula, B. Jain, H. Nguyen
We report on the demonstration of electron blocking layer free AlInN nanowire light-emitting diodes (LEDs) operating in the 280–365 nm wavelength region. The molecular beam epitaxial grown AlInN nanowires have a relatively high internal quantum efficiency of > 52%. Moreover, we show that the light extraction efficiency of the nanowires could reach ~ 63% for hexagonal photonic crystal nanowire structures which is significantly higher compared to that of the random nanowire arrays. This study provides significant insights into the design and fabrication of a new type of high-performance AlInN nanowire ultraviolet light-emitters.
我们报道了在280-365 nm波长范围内工作的无电子阻挡层的AlInN纳米线发光二极管(led)的演示。分子束外延生长的AlInN纳米线具有较高的内量子效率(> 52%)。此外,我们还表明,对于六方光子晶体纳米线结构,纳米线的光提取效率可以达到~ 63%,明显高于随机纳米线阵列。本研究为新型高性能AlInN纳米线紫外光发射器的设计和制造提供了重要的见解。
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引用次数: 0
SLCFET Technology: Current Progress and Future Directions for Monolithically Integrated Low Loss Switches with High Performance Amplifiers SLCFET技术:带高性能放大器的单片集成低损耗开关的进展与未来方向
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930440
R. Howell
Next generation RF systems require RF components capable of maintaining their performance across increasingly wide, multiple octave frequency bandwidths, supporting the operational flexibility and adaptability that is a primary feature of the direct signal conversion based digital back-ends of these architectures. The Superlattice Castellated Feld Effect Transistor (SLCFET) uses stacked AlGaN/GaN heterojunctions that have been etched into parallel nanoribbons between source and drain, in combination with a three dimensional gate structure providing control of the resulting transistor by simultaneously addressing the charge in each individual 2DEG layer of the stacked heterostructures through the sidewalls of the nanoribbons. The device structure of the SLCFET was specifically engineered as a solution to the limits of RF switch performance in FETs that inhibits wideband RF switch based circuit performance, due to the SLCFET topology’s inherent capability of decoupling the transistor’s ON resistance from its OFF capacitance [1] . Since this technology’s first appearance in publication [2] , the process has matured and been extended, with both 6-channel and 10 channel heterostructure based transistors and RF switch MMICs demonstrated [3] , and the 6-channel RF switch process having been qualified and productized, Fig. 1 [4] . The flexibility and broad capabilities of the SLCFET technology as both a high power switch and a low loss, high linearity, fast switching technology have subsequently been demonstrated using this production RF switch process. The high power handling and switching capability of the SLCFET was demonstrated, with a low loss and high isolation 0.1–4 GHz 100W SPDT switch [5] , while the fast switching, high linearity capabilities of the SLCFET were highlighted by the demonstration of a 0.4–2 GHz reconfigurable bandpass filter [6] . The 100W SPDT design demonstrated 10x greater isolation along with ~10% improvement in loss while requiring a ~37% smaller MMIC size than a GaN SPDT designed for the same frequency and power level built using a commercial conventional device process, Fig. 2 . The reconfigurable filter provides over 500 different filter channels, with variable bandwidth and center frequencies, Fig. 3 , all integrated into a single integrated circuit, providing an average of 2 dB improvement for each filter channel in NF and insertion loss, along with ~40x more power handling and ~20x greater linearity than an identical filter built using a state-of-the-art GaAs pHEMT process.
下一代RF系统要求RF组件能够在越来越宽的多个倍频频带中保持其性能,支持操作灵活性和适应性,这是这些架构中基于直接信号转换的数字后端的主要特征。超晶格Castellated场效应晶体管(SLCFET)使用堆叠的AlGaN/GaN异质结,这些异质结被蚀刻成源极和漏极之间的平行纳米带,结合三维栅极结构,通过纳米带的侧壁同时处理堆叠异质结构中每个单独的2DEG层中的电荷,从而控制所产生的晶体管。由于SLCFET拓扑结构具有将晶体管的ON电阻与其OFF电容解耦的固有能力,因此SLCFET的器件结构被专门设计为解决fet中射频开关性能限制的解决方案,这种限制抑制了基于宽带射频开关的电路性能[1]。自该技术首次出现在出版物中[2]以来,该工艺已经成熟并得到了扩展,已经展示了6通道和10通道异质结构晶体管和射频开关mmic[3],并且6通道射频开关工艺已经得到了认证和产品化,如图1[4]。SLCFET技术作为高功率开关和低损耗、高线性度、快速开关技术的灵活性和广泛能力随后通过这种生产RF开关工艺得到了证明。通过低损耗、高隔离的0.1-4 GHz 100W SPDT开关[5],展示了SLCFET的高功率处理和开关能力,而通过展示0.4-2 GHz可重构带通滤波器[6],突出了SLCFET的快速开关、高线性能力。100W SPDT设计的隔离度提高了10倍,损耗降低了10%,而使用商业传统器件工艺构建的相同频率和功率水平的GaN SPDT所需的MMIC尺寸要小37%,如图2所示。可重构滤波器提供超过500个不同的滤波器通道,具有可变带宽和中心频率,如图3所示,所有这些都集成到一个集成电路中,在NF和插入损耗方面,每个滤波器通道平均提高2db,同时与使用最先进的GaAs pHEMT工艺构建的相同滤波器相比,功率处理能力提高约40倍,线性度提高约20倍。
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引用次数: 1
AlGaInAs Multi-Quantum Well Laser Array on Silicon Achieved by InP-Seed-Bonding and MOVPE Selective Area Growth 用inp -种子键合和MOVPE选择性面积生长实现硅上AlGaInAs多量子阱激光阵列
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930433
C. Besancon, N. Vaissière, D. Néel, H. Mehdi, G. Lefévre, V. Muffato, L. Sanchez, F. Fournel, C. Dupré, F. Bassani, J. Decobert
We present a selectively grown AlGaInAs Multi-Quantum Well laser array on silicon covering a 155 nm range over the C+L band achieved by InP seed bonding and MOVPE Selective Area Growth.
我们提出了一种选择性生长的AlGaInAs多量子阱激光阵列,通过InP种子键合和MOVPE选择性面积生长在硅上,覆盖了155 nm的C+L波段。
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引用次数: 0
Effect of Substrate Temperature on Te-doping Concentration in GaSb Matrix using GaTe Dopant Source in Molecular Beam Epitaxy 分子束外延中栅极掺杂源GaSb基质中te掺杂浓度对衬底温度的影响
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930435
Yu-Hsun Wu, Jenq-Shinn Wu, Sheng-Di Lin
GaTe has been used as an n-type dopant source in molecular beam epitaxy (MBE) to grow antimony-based materials. This research is the first to systematically investigate the substrate temperature and III-V flux ratio effects on Te-doping in GaSb matrix. We find that the growth temperature has a great times difference on Te concentration, while the V-III flux ratio does not. The Sb-based high-electron-mobility transistor (HEMT) with intrinsic InAs as the channel layer is grown and processed. Hall measurement gives reasonable electron mobility and sheet concentration at room temperature. Our experimental results show the feasibility of using GaTe as the n-type dopant source for MBE-grown InAs/Al(Ga)Sb HEMT devices.
在分子束外延(MBE)中,GaTe被用作n型掺杂源来生长锑基材料。本研究首次系统地研究了衬底温度和III-V通量比对te在GaSb基体中掺杂的影响。我们发现生长温度对Te浓度有很大的倍差,而V-III通量比则没有。制备了以本征InAs为沟道层的sb基高电子迁移率晶体管(HEMT)。霍尔测量在室温下给出了合理的电子迁移率和薄片浓度。实验结果表明,在mbe生长的InAs/Al(Ga)Sb HEMT器件中,使用GaTe作为n型掺杂源是可行的。
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引用次数: 0
Optimization of Violet Emitting Quantum Wells with Insertion of AlGaN Layers and Temperature Ramp-up 带AlGaN层插入和温度上升的紫色量子阱优化
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930413
Cheng Liu, M. Seitz, Matt Dwyer, J. Kirch, S. Pasayat, N. Tansu, Jing Zhang, L. Mawst
High-power InGaN-based violet laser diodes (LDs) have received great attention for their applications such as long-haul illuminations and material processing. 1 In order to achieve robust high-power devices, maintaining a high-quality multiple quantum well (MQW) active region is needed but challenging, since the laser structure requires a higher temperature growth for p-type (Al)GaN cladding layer. Some degree of degradation has been observed for InGaN/GaN quantum wells (QWs) after such high temperature growth. A concept of using an AlGaN cap layer to improve the thermal stability of InGaN/GaN MQWs has been developed and utilized in red-blue wavelength regime. 2 – 4 Besides the thermal stability, the insertion of the AlGaN cap also increases the quantum barrier height, reduces electron leakage, prevents indium out-diffusion from the QW. In this work, we extend such studies to the violet-emission regime for potential high-power laser applications.
大功率ingan基紫光激光二极管因其在远距离照明和材料加工等方面的应用而受到广泛关注。为了实现强大的高功率器件,保持高质量的多量子阱(MQW)有源区域是必要的,但具有挑战性,因为激光结构需要p型(Al)GaN包层的更高温度增长。在高温生长后,InGaN/GaN量子阱(QWs)出现了一定程度的退化。提出了一种使用AlGaN帽层来提高InGaN/GaN MQWs热稳定性的概念,并将其应用于红蓝波长范围。2 - 4除了热稳定性外,AlGaN帽的插入还增加了量子势垒高度,减少了电子泄漏,阻止了铟从量子阱向外扩散。在这项工作中,我们将这种研究扩展到潜在的高功率激光应用的紫外发射机制。
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引用次数: 0
GaN HEMT with superconducting Nb gates for low noise cryogenic applications 具有超导Nb栅极的低噪声低温应用GaN HEMT
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930458
M. Mebarki, Ragnar Ferrand-Drake del Castillo, Alexey Pavolotskiy, D. Meledin, E. Sundin, M. Thorsell, N. Rorsman, V. Belitsky, V. Desmaris
We report on the successful integration of superconducting Nb gate electrodes to AlGaN/GaN heterostructures and HEMTs for low noise cryogenic applications. First, a specific Nb-gate process was developed and implemented on stand-alone gate test structures. The latter were tested at cryogenic temperatures down to 4 K, using DC end-to-end measurements. The results show a clear transition to a superconducting state at Tc ~ 9.2 K. The superconducting nature of the Nb gates further verified on actual HEMTs, featuring 2 fingers design with gate length of 0.2 μm, through their S-parameters measurements at Tc. Finally, we demonstrate a significant reduction of the gate resistance with superconducting Nb compared to Au-gated transistor with the identical dimensions. The results confirm the potential of the GaN HEMTs with superconducting Nb-gate for low noise operation at cryogenic temperatures.
我们报道了超导Nb栅电极与AlGaN/GaN异质结构和hemt的成功集成,用于低噪声低温应用。首先,开发了一种特定的nb栅极工艺,并在独立栅极测试结构上实现。后者在低至4 K的低温下进行测试,使用直流端到端测量。结果表明,在Tc ~ 9.2 K时,材料明显转变为超导态。在实际的hemt上,通过在Tc下的s参数测量,进一步验证了Nb栅极的超导性,栅极长度为0.2 μm,采用2指设计。最后,我们证明了与具有相同尺寸的au门控晶体管相比,超导Nb的栅极电阻显着降低。结果证实了具有超导nb栅极的GaN hemt在低温下低噪声工作的潜力。
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引用次数: 0
p-GaN activation through oxygen-assisted annealing – What is the role of oxygen in activation of Mg-doping of GaN? 氧辅助退火活化p-GaN -氧在mg掺杂GaN活化中的作用是什么?
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930382
Ashutosh Kumar, M. Berg, Qin Wang, M. Salter, P. Ramvall
We present a systematic investigation of activation annealing of Mg as p-type doping in GaN. The diffusion of Mg and H by rapid thermal processing (RTP) at 700 °C to 975 °C together with the effect of the ambient gas are investigated by SIMS, XRD, AFM, and electrical measurements. The observed diffusion of H to the substrate emphasizes the importance of understanding the diffusion and reactions of ambient N, O, and H in the GaN layers.We conclude that optimization of the resulting hole density, except the Mg concentration and RTP temperature, the surface morphology, the thickness of the Mg-doped GaN and the thickness of any layer covering it must be considered.
本文对Mg作为p型掺杂在GaN中的活化退火进行了系统的研究。采用SIMS、XRD、AFM和电学测量等方法研究了快速热处理(RTP)在700 ~ 975℃下Mg和H的扩散以及环境气体的影响。观察到的氢向衬底的扩散强调了了解氮化镓层中环境氮、氧和氢的扩散和反应的重要性。我们得出结论,优化得到的空穴密度,除了Mg浓度和RTP温度外,表面形貌,Mg掺杂GaN的厚度以及覆盖它的任何层的厚度都必须考虑。
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引用次数: 0
Vacuum UV Emission Property of Zn-doped MgO films Grown by Mist Chemical Vapor Deposition Method 雾化学气相沉积法生长zn掺杂MgO薄膜的真空紫外发射特性
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930426
W. Kosaka, K. Ogawa, K. Kusaka, K. Kaneko, T. Yamaguchi, T. Honda, S. Fujita, T. Onuma
Rocksalt-structured (RS) Zn-doped MgO films were grown on (100) MgO substrates by the mist chemical vapor deposition method. MgO homoepitaxial film exhibited a near-band-edge (NBE) cathodoluminescence peak at 7.63 eV at 6 K. Zn-doping reduced the MgO NBE emission, and alternatively resulted in observation of NBE at around 7.2 eV as a shoulder. Further increase in Zn precursor source ratio drove observation of predominate NBE emission at 6.3 eV. The results ensure a potential to develop a vacuum UV emitter in 170 nm spectral range.
采用雾状化学气相沉积法在(100)MgO衬底上生长了岩盐结构(RS)掺锌MgO薄膜。MgO同外延薄膜在6 K时在7.63 eV处出现近带边阴极发光峰。zn掺杂降低了MgO的NBE发射,或者导致NBE在7.2 eV左右作为肩带出现。进一步增加Zn前驱体源比例,在6.3 eV处观察到主要的NBE发射。研究结果为研制170 nm光谱范围的真空紫外发射器奠定了基础。
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引用次数: 0
Luminescence properties of GaP1−xNx alloys grown on nominally (001)-oriented GaP-on-Si substrates by chemical beam epitaxy 化学束外延法在名义(001)取向GaP-on-Si衬底上生长的GaP1−xNx合金的发光特性
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930454
K. Ben Saddik, P. Álamo, J. Lähnemann, R. Volkov, N. Borgardt, T. Flissikowski, O. Brandt, B. J. García, S. Fernández-Garrido
We investigate the optical properties of GaP1−xNx alloys, grown by chemical beam epitaxy (CBE) on (001)-oriented GaP-on-Si substrates, using cathodoluminescence and photoluminescence spectroscopy. In contrast to plasma-assisted molecular beam epitaxy, the optical properties of GaP1−xNx layers grown by CBE are found to be unaffected by ex situ rapid thermal annealing treatments. Regarding the effect of the N mole fraction, the luminescence intensity remains high for compositions up to the lattice match, then it decreases. Temperature-dependent measurements revealed the existence of two independent thermally activated quenching processes as well as the presence of localized states caused by compositional fluctuations. Upon extracting the long-range fluctuation energies, we derived a coupling coefficient value of 2.24 eV to describe the dependence of the band gap energy on x using the band anti-crossing model.
我们利用阴极发光和光致发光光谱研究了化学束外延(CBE)在(001)取向GaP-on-Si衬底上生长的GaP1−xNx合金的光学性质。与等离子体辅助分子束外延相比,CBE生长的GaP1−xNx层的光学性质不受非原位快速热退火处理的影响。对于N摩尔分数的影响,在晶格匹配之前,组合物的发光强度保持较高,然后减弱。温度相关的测量揭示了两个独立的热激活淬火过程的存在以及由成分波动引起的局部状态的存在。在提取长程涨落能量的基础上,利用带抗交叉模型推导出耦合系数为2.24 eV的值来描述带隙能量与x的依赖关系。
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引用次数: 0
Simulation analyses of carrier dynamics in npn-type GaN-HBTs with different-hole-concentration p-base layers 不同空穴浓度p基层npn型GaN-HBTs载流子动力学模拟分析
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930408
A. Mase, Yutaka Nikai, Yusuke Iida, Masaya Takimoto, T. Egawa, M. Miyoshi
The device operations of npn-type GaN-based heterojunction bipolar transistors (HBTs) with different-hole-concentration p-base layers were analyzed via the device simulation. The HBTs with a low-hole-concentration (3.0 × 1017 cm−3) p-base layer exhibited anomalous current behavior. The carrier dynamics analyses indicated that enormous hole currents generated via the following steps. First, even at a low base current injection, the depletion layer occupied most of the p-base layer and caused a kind of the punch-through phenomenon. Then, with the increase in the base current injection, large hole currents generated just around the underneath of the emitter layer. Furthermore, the above enormous hole currents were found to be enhanced with the increase in the energy bandgap offset between the emitter and the base layers.
通过器件仿真分析了具有不同空穴浓度p基层的npn型氮化镓异质结双极晶体管(hbt)的器件工作特性。具有低空穴浓度(3.0 × 1017 cm−3)p基层的HBTs表现出异常的电流行为。载流子动力学分析表明,通过以下步骤产生了巨大的空穴电流。首先,即使在低基极电流注入时,耗尽层也占据了p基层的大部分,造成了一种穿孔现象。然后,随着基极电流注入的增加,在发射极层的下方周围产生了大的空穴电流。此外,随着发射极与基材间能量带隙偏移量的增加,上述巨大空穴电流也随之增强。
{"title":"Simulation analyses of carrier dynamics in npn-type GaN-HBTs with different-hole-concentration p-base layers","authors":"A. Mase, Yutaka Nikai, Yusuke Iida, Masaya Takimoto, T. Egawa, M. Miyoshi","doi":"10.1109/CSW55288.2022.9930408","DOIUrl":"https://doi.org/10.1109/CSW55288.2022.9930408","url":null,"abstract":"The device operations of npn-type GaN-based heterojunction bipolar transistors (HBTs) with different-hole-concentration p-base layers were analyzed via the device simulation. The HBTs with a low-hole-concentration (3.0 × 1017 cm−3) p-base layer exhibited anomalous current behavior. The carrier dynamics analyses indicated that enormous hole currents generated via the following steps. First, even at a low base current injection, the depletion layer occupied most of the p-base layer and caused a kind of the punch-through phenomenon. Then, with the increase in the base current injection, large hole currents generated just around the underneath of the emitter layer. Furthermore, the above enormous hole currents were found to be enhanced with the increase in the energy bandgap offset between the emitter and the base layers.","PeriodicalId":382443,"journal":{"name":"2022 Compound Semiconductor Week (CSW)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2022-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124492087","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2022 Compound Semiconductor Week (CSW)
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