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2022 Compound Semiconductor Week (CSW)最新文献

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Template-Assisted Selective Epitaxy of InAs on W 模板辅助下铟酸钠在W上的选择性外延
Pub Date : 2022-06-01 DOI: 10.1109/csw55288.2022.9930423
J. Svensson, P. Olausson, H. Menon, E. Lind, M. Borg
Results on integration of InAs on W films through template assisted selective epitaxy are presented. The InAs crystals are analysed using SEM, electron beam backscattering and in-situ electrical measurements. A high yield of single crystalline InAs can be obtained for certain template diameters and pitches which demonstrates that this is a viable route to integrate III-V semiconductors in the back-end-of-line of CMOS circuits for added functionality.
介绍了模板辅助选择性外延技术在W薄膜上集成InAs的研究结果。利用扫描电镜、电子束后向散射和原位电测量对InAs晶体进行了分析。对于特定直径和节距的模板,可以获得高产量的单晶InAs,这表明这是将III-V半导体集成到CMOS电路后端以增加功能的可行途径。
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引用次数: 0
GaAs(110) Surface Modifications Introduced by Hydrogen 氢对GaAs(110)表面改性的影响
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930372
D. Rosenzweig, M. Hansemann, P. Ebert, M. Schnedler, H. Eisele
For the nanoscopic analysis of III/V nanowire surfaces, hydrogen cleaning is a commonly used procedure. While this is reported to achieve clean, atomically flat surfaces, the process and dynamics during the cleaning procedure are rarely examined. Here, we investigate the modifications of GaAs(110) as model system introduced by hydrogen supply at room temperature and under commonly used cleaning conditions at the atomic level by scanning tunneling microscopy and -spectroscopy. Understanding this dynamics is crucial for the interpretation of measurements concerning electronic surface properties as well as conductivity measurements, since the surface-to-volume ratio of nanowires is quite high. Clean, cleaved surfaces of n- and p-doped GaAs differ in their appearance as well as in their electronic behavior. These severe changes are analyzed and interpreted with the help of tunneling current simulations.
对于III/V纳米线表面的纳米级分析,氢清洗是一种常用的方法。虽然有报道称这可以实现清洁的原子平面,但很少研究清洁过程中的过程和动力学。本文利用扫描隧道显微镜和光谱技术研究了在室温和常用清洗条件下氢气对模型体系GaAs(110)的修饰。由于纳米线的表面体积比非常高,因此理解这种动力学对于解释有关电子表面特性和电导率测量的测量结果至关重要。n掺杂和p掺杂的砷化镓的清洁、劈裂表面在外观和电子行为上都有所不同。利用隧道电流模拟对这些剧烈变化进行了分析和解释。
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引用次数: 0
Growth of high Indium Percentage InGaSb on InP substrates using the interfacial misfit dislocation array growth mode 利用界面错配位错阵列生长模式在InP衬底上生长高铟含量InGaSb
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930345
F. F. Ince, A. T. Newell, K. Reilly, S. Seth, T. Rotter, A. Mansoori, S. Addamane, D. Shima, L. Miroshnik, B. Rummel, A. Li, T. Sinno, S.M. Han, G. Balakrishnan
We present the growth of In0.53Ga0.47Sb on InP using the interfacial misfit dislocation growth mode. The growth is performed by using an intermediate InGaAs layer and achieving an As for Sb anion exchange. Characterization results show the formation of an interfacial misfit dislocation array, however the epilayer shows significant phase segregation.
我们采用界面错配位错生长模式,在InP上生长In0.53Ga0.47Sb。生长是通过使用中间InGaAs层和实现As对Sb阴离子交换来实现的。表征结果表明形成了一个界面错配位错阵列,但后处理层表现出明显的相偏析。
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引用次数: 0
Impact of In flux on self-assembled InGaN/GaN superlattice grown on GaN template by plasma-assisted molecular beam epitaxy In通量对等离子体辅助分子束外延在GaN模板上生长的InGaN/GaN自组装超晶格的影响
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930394
K. Khan, K. Sun, C. Wurm, E. Ahmadi
We have previously reported spontanous formation of InGaN/GaN superlattice structure on nominal InGaN films grown by plasma-assisted molecular beam epitaxy (PAMBE). In this work, we report on the impact of In flux on the formation and periodicity of self-assembled InxGa1-xN/InyGa1-yN superlattice structure (SASL). We show that the thickness and In composition in the InGaN layer varies by changing the In flux. These films were stucturally characterized by X-ray diffraction and simulated by globalfit software to get the thickness and In composition. The superlattice structures were confimred by scanning transmission electron microscopy and the thickness of InGaN layer and In composition were determined by energy dispersive X-ray spectroscopy. This work can provide a method for using the SASL with better control for their optoelectronics application.
我们以前报道过在等离子体辅助分子束外延(PAMBE)生长的InGaN薄膜上自发形成InGaN/GaN超晶格结构。在这项工作中,我们报道了In通量对自组装InxGa1-xN/InyGa1-yN超晶格结构(SASL)的形成和周期性的影响。我们发现,InGaN层的厚度和In成分随In通量的变化而变化。用x射线衍射对膜进行了结构表征,并用globalfit软件进行了模拟,得到了膜的厚度和组成。用扫描透射电镜对其超晶格结构进行了确证,并用能量色散x射线谱法测定了InGaN层的厚度和In的组成。这项工作可以为SASL的光电应用提供一种更好的控制方法。
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引用次数: 0
UVC optoelectronics based on AlGaN on AlN single crystal substrates 基于AlN单晶衬底AlGaN的UVC光电子学
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930414
P. Reddy, J. Loveless, Cristyan Quiñones-García, D. Khachariya, R. Kirste, S. Pavlidis, W. Mecouch, S. Mita, B. Moody, J. Tweedie, E. Kohn, R. Collazo, Z. Sitar
In this work, we report on recent advances in UVC emitters and detectors based on AlGaN on single crystal AlN substrates. We perform point defect management via chemical potential control and extended defect management via growth on low threading dislocation density single crystal AlN substrates and demonstrate reliable UVC LEDs at high power densities (>40 Wcm−2) on transparent AlN substrates and high gain (>300000) solar blind avalanche photodiodes with high quantum efficiency (>70%) and near ideal breakdown fields. We also report a comparison with devices on foreign substrates (sapphire) with those on native AlN substrates revealing a general improvement in performance by orders of magnitude.
在这项工作中,我们报告了在单晶AlN衬底上基于AlGaN的UVC发射器和探测器的最新进展。我们通过化学势控制进行点缺陷管理,并通过在低穿线位错密度的单晶AlN衬底上生长进行扩展缺陷管理,并在透明AlN衬底上展示了高功率密度(>40 Wcm−2)的可靠UVC led和高增益(>300000)太阳盲雪崩光电二极管,具有高量子效率(>70%)和接近理想击穿场。我们还报告了在外国衬底(蓝宝石)上的器件与在本地AlN衬底上的器件的比较,揭示了性能的普遍改善。
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引用次数: 0
Optical Transitions Involving Excited States in III-nitride LEDs iii -氮化物led中涉及激发态的光学跃迁
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930350
M. Hajdel, M. Chlipała, H. Turski, M. Siekacz, P. Wolny, K. Nowakowski-Szkudlarek, A. Feduniewicz-Żmuda, C. Skierbiszewski, G. Muzioł
The radiative transitions in InGaN-based LEDs grown by plasma assisted molecular beam epitaxy were studied. Electroluminescence spectra were collected for the LEDs with 2.6, 6.5, 7.8, 12 and 15nm thick QW in a broad current regime. The evolution of the emission spectra indicates changes in the nature of carrier recombination. Initially, carriers recombine through ground states, then through mixed transition and lastly only through exited states. Additionally, we modeled operation of the LEDs with self-consistent Schrodinger–Poisson simulations and showed that carrier density and differences in the magnitude of screening of the built-in field inside QWs are causing the change in the light emission.
研究了等离子体辅助分子束外延生长的ingan基led的辐射跃迁。在宽电流下,分别收集了2.6、6.5、7.8、12和15nm QW厚度led的电致发光光谱。发射光谱的演变表明载流子复合性质的变化。最初,载流子通过基态重组,然后通过混合跃迁重组,最后只通过激发态重组。此外,我们用自一致的薛定谔-泊松模拟模拟了led的运行,并表明载流子密度和量子阱内部内置场屏蔽幅度的差异导致了发光的变化。
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引用次数: 0
Design and Analysis of kV-Class Ultrawide Bandgap β-Ga2O3/p-GaN Heterojunction Barrier Schottky Diodes kv级超宽带隙β-Ga2O3/p-GaN异质结势垒肖特基二极管的设计与分析
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930452
D. Mudiyanselage, Dawei Wang, H. Fu
Ultrawide Bandgap kV-class β-Ga2O3/GaN heterojunction based junction barrier Schottky (JBS) diodes are investigated using SILVACO TCAD simulation. The effects of p-GaN region thickness (h), width (w), and spacing (s) on the JBS diodes are comprehensively studied, where conventional β-Ga2O3 Schottky barrier diodes (SBD) are used as a reference. The optimized JBS diodes exhibited higher breakdown voltages and lower leakage than the reference SBDs. Furthermore, different geometries of p-GaN regions were also investigated to optimize electric field distribution and improve breakdown voltages of the JBS diodes. The device with p-GaN regions with corner rounding achieved the highest breakdown voltage of 1275 V compared with devices with rectangular and triangular p-GaN regions. This work can serve as an important reference for the design and demonstration of β-Ga2O3 heterojunction based JBS diodes.
利用SILVACO TCAD仿真研究了基于β-Ga2O3/GaN异质结的超宽带隙肖特基(JBS)二极管。以传统β-Ga2O3肖特基势垒二极管(SBD)为参照,全面研究了p-GaN区厚度(h)、宽度(w)和间距(s)对JBS二极管的影响。优化后的JBS二极管击穿电压比参考sbd高,漏极比参考sbd低。此外,还研究了不同几何形状的p-GaN区域,以优化电场分布和提高JBS二极管的击穿电压。与矩形和三角形p-GaN区器件相比,带有圆角的p-GaN区器件的击穿电压最高,为1275 V。该工作可为β-Ga2O3异质结JBS二极管的设计和论证提供重要参考。
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引用次数: 0
Studies on the Mechanical, Structural, Optical, Electrical and Surface Properties of Sn Doped Ga2O3 (010) Single Crystals Grown by OFZ Technique OFZ法生长Sn掺杂Ga2O3(010)单晶的力学、结构、光学、电学和表面性能研究
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930410
Vijayan Ananthu, K. Akshita, Dhandapani Dhanabalan, S. M. Babu, S. Bhattacharya, E. Varadarajan
This research work focuses on the growth of single crystals of undoped and Sn doped β-Ga2O3 varying doping concentration of 0.05, 0.1, 0.2 wt% by Optical Floating Zone technique. Single crystals of (010) orientation were obtained. The obtained crystals were fully transparent in NIR region and the transparency continued in the visible region as well as in the near UV region. On doping Sn with β-Ga2O3, the n type conductivity increases. This will be useful for optoelectronic applications. The mechanical, structural, optical, electrical and surface properties were measured. Characterizations such as Powder XRD, UV-Vis spectroscopy, micro Vickers hardness, HR-XRD, AFM, hall measurement were done on undoped and Sn doped Ga2O3 single crystals and the results are reported.
本文主要研究了不同掺杂浓度0.05、0.1、0.2 wt%下未掺杂和锡掺杂β-Ga2O3单晶的生长。得到了(010)取向的单晶。所得晶体在近红外区完全透明,在可见光区和近紫外区继续保持透明。Sn掺杂β-Ga2O3后,n型电导率提高。这将对光电应用非常有用。测量了材料的机械、结构、光学、电学和表面性能。对未掺杂和掺锡Ga2O3单晶进行了粉末XRD、紫外可见光谱、显微维氏硬度、HR-XRD、AFM、霍尔测量等表征,并报道了结果。
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引用次数: 0
GaAs on (001) Si templates for near infrared InP QD lasers 近红外InP QD激光器的(001)Si模板上的GaAs
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930375
Jie Huang, Qi Lin, W. Luo, Liying Lin, K. Lau
In this report, we investigate the effects of thermal cycle annealing at high temperature on the defect density and the morphology of GaAs epilayers grown on (001) Si substrates. The defect density of a 2.7 μm-thick GaAs/Si template is 1.4 ×107 cm−2 based on the observation of plan-view transmission electron microscopy, and the surface roughness of the GaAs/Si template is 1.3 nm after the insertion of dislocation filter layers. Optically pumped InP quantum dot microdisk lasers (MDLs) grown on these GaAs/Si templates are fabricated to evaluate the quality of the GaAs/Si templates. Room temperature continuous-wave lasing of the 1.5 μm-diameter MDLs are observed, with very low lasing thresholds ranging from 0.5 to 2 μW.
在本报告中,我们研究了高温热循环退火对生长在(001)Si衬底上的GaAs薄膜的缺陷密度和形貌的影响。平面透射电镜观察发现,2.7 μm厚的GaAs/Si模板的缺陷密度为1.4 ×107 cm−2,插入位错滤光片后,GaAs/Si模板的表面粗糙度为1.3 nm。制备了在这些GaAs/Si模板上生长的光泵浦InP量子点微盘激光器(MDLs),以评估GaAs/Si模板的质量。在室温下观察到直径为1.5 μm的mdl连续激光,激光阈值很低,为0.5 ~ 2 μW。
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引用次数: 0
Quantum-Dot Lasers Grown on CMOS-compatible 300 mm Si Photonic Wafers 在cmos兼容的300毫米硅光子晶圆上生长的量子点激光器
Pub Date : 2022-06-01 DOI: 10.1109/CSW55288.2022.9930373
Kaiyin Feng, C. Shang, E. Hughes, R. Koscica, A. Clark, G. Leake, D. Harame, J. Bowers
We demonstrate the first electrically injected quantum dot lasers directly grown on recessed and patterned 300 mm Si photonic wafers, with CW lasing maximum output power higher than 69 mW at 20 °C. This result shows potential for direct heteroepitaxial integration of III–V gain elements onto CMOS-compatible silicon photonic circuits.
我们展示了第一个电注入量子点激光器,直接生长在300毫米的嵌入式和图像化硅光子晶片上,在20°C下连续波激光的最大输出功率高于69 mW。这一结果显示了III-V增益元件在cmos兼容硅光子电路上直接异质外延集成的潜力。
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引用次数: 0
期刊
2022 Compound Semiconductor Week (CSW)
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